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21. 发明申请

US20090040636A1 TAPERED REINFORCING STRUTS FOR MICROMACHINED STRUCTURES 有权
标题翻译：用于微结构结构的锥形加固件
公开(公告)号：US20090040636A1
公开(公告)日：2009-02-12
申请号：US11836540
申请日：2007-08-09
申请人： Fred P. Klemens , Flavio Pardo
发明人： Fred P. Klemens , Flavio Pardo
IPC分类号： G02B7/182
CPC分类号： B81B3/007 , B81B2201/042 , G02B26/0841
摘要： According to one embodiment, a reinforcing strut of the invention is a polyhedron attached to a plate and having at least two slanted facets, with each of the slanted facets oriented with respect to the plane of the plate at an angle different from about 90 degrees. Two slanted facets intersect to form an edge that causes the strut to have a tapered profile along the longitudinal axis of the strut.
摘要翻译：根据一个实施例，本发明的加强支柱是连接到板上并具有至少两个倾斜小平面的多面体，其中每个倾斜小面以不同于约90度的角度相对于板的平面定向。两个倾斜小平面相交以形成一个边缘，该边缘使支柱沿着支柱的纵向轴线具有锥形轮廓。

22. 发明授权

US06998758B2 Deformable MEMS mirror with membrane actuated by application of torque 有权
标题翻译：可变形的MEMS镜，通过施加扭矩由膜致动
公开(公告)号：US06998758B2
公开(公告)日：2006-02-14
申请号：US10455082
申请日：2003-06-05
申请人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
发明人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
IPC分类号： H02N1/00 , G02B26/10 , G02B26/08
CPC分类号： G02B26/06
摘要： A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
摘要翻译：具有可变形反射镜的MEMS器件。在代表性的实施例中，MEMS器件包括支撑形成可变形反射镜的多个光反射段的可变形膜。用于使膜变形的一个或多个致动器（其中至少一个构造成向膜的一侧施加扭矩）。膜变形导致片段改变取向，从而改变镜子的形状。本发明的代表性的MEMS器件使得能够在两个方向上的段位移，从而实现在约-2mm -1至约+2mm -1的范围内的有效镜曲率值 >。

23. 发明授权

US08798409B2 Optical transmitter with flip-chip mounted laser or integrated arrayed waveguide grating wavelenth division multiplexer 有权
标题翻译：具有倒装芯片激光器或集成阵列波导光栅波分复用器的光发射机
公开(公告)号：US08798409B2
公开(公告)日：2014-08-05
申请号：US12944917
申请日：2010-11-12
申请人： Flavio Pardo , Mark Earnshaw
发明人： Flavio Pardo , Mark Earnshaw
IPC分类号： G02B6/12 , G02B6/26 , G02B6/36 , G02B6/10 , G02B6/43 , G02B6/42
CPC分类号： G02B6/12019 , G02B6/12004 , G02B6/4249 , G02B6/43 , H01L2224/48091 , H01L2224/73257 , H01S5/005 , H01S5/02252 , H01S5/02272 , H01S5/4031 , H04B10/506 , H01L2924/00014
摘要： An optical communication system comprising first and second planar substrates and an alignment assembly. The first substrate of a semiconductor material, is located on a planar surface of a sub-mount and having a planar first edge. The second substrate of a different second material, is located on said planar surface of said sub-mount and having a planar second edge. The alignment assembly is located on said sub-mount, said alignment assembly including rigid standoff structures configured to fixedly vertically align said first and second edges above said sub-mount such that each optical output of one of said lasers is vertically aligned with the end of one of said light-guiding structures.
摘要翻译：一种包括第一和第二平面基板和对准组件的光通信系统。半导体材料的第一衬底位于子座的平坦表面上并且具有平面的第一边缘。不同第二材料的第二衬底位于所述子座的所述平坦表面上并具有平坦的第二边缘。对准组件位于所述子安装座上，所述对准组件包括刚性支架结构，其被配置为将所述第一和第二边缘固定地垂直对齐在所述子安装座上方，使得所述激光器之一的每个光学输出垂直对准所述导光结构之一。

24. 发明授权

US08018316B2 Electroless plating production of nickel and cobalt structures 有权
标题翻译：化学镀镍和钴结构的生产
公开(公告)号：US08018316B2
公开(公告)日：2011-09-13
申请号：US11747555
申请日：2007-05-11
申请人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
发明人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
IPC分类号： H01H71/18 , H01H61/00
CPC分类号： C23C18/32 , C23C18/1605 , C23C18/165 , C23C18/1651 , C23C18/1689 , C23C18/34 , C23C18/36
摘要： A method comprising forming a structural element 115 on a surface 620 of a layer 510 via an electroless plating of nickel or cobalt 130 onto the surface, the layer being rigidly fixed to an underlying substrate 110. The method also comprises etching away a portion of the layer such that a part of the structural element is able to move with respect to the substrate.
摘要翻译：一种方法包括在层510的表面620上经由镍或钴130的无电镀层在表面上形成结构元件115，所述层刚性地固定到下面的基底110上。该方法还包括蚀刻掉部分使得结构元件的一部分能够相对于基板移动。

25. 发明授权

US06249075B1 Surface micro-machined acoustic transducers 有权
标题翻译：表面微加工声学传感器
公开(公告)号：US06249075B1
公开(公告)日：2001-06-19
申请号：US09442984
申请日：1999-11-18
申请人： David John Bishop , Robert Albert Boie , Flavio Pardo
发明人： David John Bishop , Robert Albert Boie , Flavio Pardo
IPC分类号： G01L116
CPC分类号： H04R19/00 , Y10T29/42
摘要： A micro-machined transducer having a structure in which an acoustic enclosure is formed on a substrate above the plane of the substrate surface is disclosed. Forming the acoustic enclosure on the substrate above the plane of the substrate surface, rather than an acoustic cavity in a surface of the substrate, provides an acoustic cavity whose size is not limited by the thickness of the substrate.
摘要翻译：公开了一种微加工的换能器，其具有在基板表面的平面上方的基板上形成声学外壳的结构。在基板表面上方的基板上形成声罩，而不是基板表面的声腔，提供了一个声腔，其尺寸不受基板厚度的限制。

26. 发明申请

US20110215068A1 ELECTROLESS PLATING PRODUCTION OF NICKEL AND COBALT STRUCTURES 审中-公开
标题翻译：镍和镍钴结构的电镀生产
公开(公告)号：US20110215068A1
公开(公告)日：2011-09-08
申请号：US13105460
申请日：2011-05-11
申请人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
发明人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
IPC分类号： C23F1/02 , H05K13/00
CPC分类号： C23C18/32 , C23C18/1605 , C23C18/165 , C23C18/1651 , C23C18/1689 , C23C18/34 , C23C18/36
摘要： A method comprising forming a structural element 115 on a surface 620 of a layer 510 via an electroless plating of nickel or cobalt 130 onto the surface, the layer being rigidly fixed to an underlying substrate 110. The method also comprises etching away a portion of the layer such that a part of the structural element is able to move with respect to the substrate.
摘要翻译：一种方法包括在层510的表面620上经由镍或钴130的无电镀层在表面上形成结构元件115，所述层刚性地固定到下面的基底110上。该方法还包括蚀刻掉部分使得结构元件的一部分能够相对于基板移动。

27. 发明授权

US07932727B2 Test structure to monitor the release step in a micromachining process 有权
标题翻译：在微加工过程中监测释放步骤的测试结构
公开(公告)号：US07932727B2
公开(公告)日：2011-04-26
申请号：US12058859
申请日：2008-03-31
申请人： Christian Bolle , Flavio Pardo
发明人： Christian Bolle , Flavio Pardo
IPC分类号： G01R31/08 , G01R27/00 , H01L21/66
CPC分类号： H01L22/26 , H01L22/14 , H01L22/34
摘要： Electrical and visual test structures monitor the degree of removal of conductive sacrificial layers used in micromachining processes that fabricate micro-electromechanical systems (MEMS).
摘要翻译：电气和视觉测试结构监测在制造微机电系统（MEMS）的微机加工过程中使用的导电牺牲层的去除程度。

28. 发明申请

US20060227409A1 MEMS MIRROR WITH AMPLIFIED MOTION 有权
标题翻译：具有放大运动的MEMS镜
公开(公告)号：US20060227409A1
公开(公告)日：2006-10-12
申请号：US11093512
申请日：2005-03-30
申请人： Flavio Pardo , Maria Simon
发明人： Flavio Pardo , Maria Simon
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A MEMS device achieves a large angle of rotation of a plate about 2 independent axes by employing a handle portion of the plate which is isolated by respective springs coupling the handle portion to each of two actuators. A first actuator, which rotates the mirror about the same axis as done in U.S. Pat. No. 6,781,744 is essentially the same structure disclosed therein, but with the mirror plate thereof shrunken in size. This shrunken plate is coupled by a spring to the mirror plate of the instant invention. Movement of the shrunken plate causes corresponding movement of the handle portion, and hence the mirror. A second actuator, coupled by another spring to the mirror plate of the instant invention, rotates about a second axis that is perpendicular to the first axis and parallel to the substrate. The second actuator includes an actuator plate and an electrode thereunder.
摘要翻译： MEMS器件通过采用板的手柄部分来实现大约2个独立轴线的大的旋转角度，所述手柄部分由相应的弹簧隔开，弹簧将手柄部分连接到两个致动器中的每一个。第一致动器，其使反射镜围绕相同的轴旋转，如美国专利No. 号6,781,744基本上是在其中公开的结构，但其反射板的尺寸缩小。该收缩板通过弹簧联接到本发明的镜板上。收缩板的移动引起手柄部分因此反射镜的相应移动。通过另一个弹簧耦合到本发明的镜板的第二致动器围绕垂直于第一轴线并平行于衬底的第二轴线旋转。第二致动器包括致动器板和其下的电极。

29. 发明授权

US06781744B1 Amplification of MEMS motion 有权
标题翻译： MEMS运动的放大
公开(公告)号：US06781744B1
公开(公告)日：2004-08-24
申请号：US10459108
申请日：2003-06-11
申请人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
发明人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
IPC分类号： G02B2600
CPC分类号： G02B6/357 , B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B26/0841
摘要： A MEMS device having a movable mirror and a movable actuator plate mechanically coupled together such that a relatively small displacement of the plate results in mirror rotation by a relatively large angle. In a representative embodiment, the mirror and actuator plate are supported on a substrate. The actuator plate moves in response to a voltage difference applied between the plate and an electrode located on the substrate beneath that plate. One or more springs attached to the plate provide a counteracting restoring force when they are stretched from their rest positions by the plate motion. A spring attached between the actuator plate and the mirror transfers the motion of the actuator plate to the mirror such that, when the actuator plate moves toward the substrate, the mirror moves away from the substrate. A representative MEMS device of the invention configured with a mirror that is about 100 &mgr;m in length is capable of producing the mirror rotation angle of about 15 degrees using an actuator voltage of only about 50 V.
摘要翻译： MEMS器件具有可移动反射镜和机械耦合在一起的可移动致动器板，使得板的相对小的位移导致反射镜旋转相对较大的角度。在代表性的实施例中，反射镜和致动器板被支撑在基板上。致动器板响应于施加在板和位于该板下方的衬底上的电极之间的电压差而移动。连接到板上的一个或多个弹簧当它们通过板运动从其静止位置拉伸时提供抵消恢复力。附接在致动器板和反射镜之间的弹簧将致动器板的运动传递到反射镜，使得当致动器板向基板移动时，反射镜远离基板移动。配置有长度大约为100微米的反射镜的本发明的代表性MEMS器件能够使用仅约50V的致动器电压产生约15度的反射镜旋转角度。

30. 发明授权

US06522801B1 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor 有权
标题翻译：其中包含植入掺杂剂的微电子机械装置及其制造方法
公开(公告)号：US06522801B1
公开(公告)日：2003-02-18
申请号：US09685883
申请日：2000-10-10
申请人： Vladimir A. Aksyuk , Sungho Jin , Jungsang Kim , Hareesh Mavoori , Flavio Pardo , Ainissa Ramirez
发明人： Vladimir A. Aksyuk , Sungho Jin , Jungsang Kim , Hareesh Mavoori , Flavio Pardo , Ainissa Ramirez
IPC分类号： G02B642
CPC分类号： G02B26/0841 , B81B2201/042 , B81B2203/0127 , B81C1/00666 , B81C2201/0164 , G02B6/122 , G02B6/266 , G02B2006/12104
摘要： The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
摘要翻译：本发明提供一种微电子机械系统（MEMS）光学装置。微电子机械系统（MEMS）光学器件包括具有其上具有注入光反射光学层的衬底的反射镜，以及安装衬底，反射镜可移动地安装在该安装衬底上。掺杂剂在光反射光学层中的包含增加了器件的拉伸应力，并且倾向于将反射镜结构的凹曲线朝向期望的平坦构型进行校正。

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