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21. 发明授权

US07616425B2 Photo-sensitive MEMS structure 失效
标题翻译：光敏MEMS结构
公开(公告)号：US07616425B2
公开(公告)日：2009-11-10
申请号：US11982002
申请日：2007-10-31
申请人： Vladimir Anatolyevich Aksyuk , Maria Elina Simon , Richart Elliott Slusher
发明人： Vladimir Anatolyevich Aksyuk , Maria Elina Simon , Richart Elliott Slusher
IPC分类号： H01G5/00
CPC分类号： H02N10/00 , B81B2201/0292 , G01J5/40
摘要： A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.
摘要翻译：热敏设备包括具有顶表面的基底，一个或多个条可旋转地接合到该表面并具有双压电晶片部分，以及可旋转地接合到该表面并且基本上刚性地连接到一个或多个条的板。每个双压电晶片部分响应于加热而弯曲。一个或多个杆和板被配置成响应于加热的一个或多个双压电晶片部分而使板移动离开顶表面更远。

22. 发明授权

US07068409B2 Tip-tilt-piston actuator 有权
标题翻译：尖端倾斜活塞致动器
公开(公告)号：US07068409B2
公开(公告)日：2006-06-27
申请号：US10813951
申请日：2004-03-31
申请人： Vladimir Anatolyevich Aksyuk , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Maria Elina Simon
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G02B26/0833
摘要： A freely rotatable micromechanical plate is achieved by employing at least three rotatable plates that are each suspended from a substrate via respective springs, and are coupled via other respective springs to at least three moveable plate attachment points, so that rotation of the rotatable plates about an axis transfers motion to the moveable plate attachment points. Respective posts couple the movement of each respective moveable plate attachment point to a moveable plate. In operation, the rotatable plates may be individually rotated, and the resulting motion of each rotatable plate is passed to its respective moveable plate attachment point. The combined motion of the moveable plate attachment points is passed to the moveable plate via the posts. Using proper control, the plate may be made to tip, tilt and piston. Advantageously, the piston motion may achieve a high vertical movement frequency response.
摘要翻译：可自由旋转的微机械板通过采用至少三个可旋转的板来实现，每个可转动的板各自经由相应的弹簧从基板悬挂，并且经由其它相应的弹簧联接到至少三个可移动的板附接点，使得可旋转板围绕轴向移动板连接点传递运动。相应的柱将每个相应的可移动板连接点的运动耦合到可移动板。在操作中，可旋转板可以单独旋转，并且每个可旋转板的所得运动被传递到其相应的可移动板附接点。可移动板连接点的组合运动经由柱传递到可移动板。使用适当的控制，可将板制成尖端，倾斜和活塞。有利地，活塞运动可以实现高垂直运动频率响应。

23. 发明授权

US07564138B2 Method for attaching chips in a flip-chip arrangement 有权
标题翻译：用于以倒装芯片布置附接芯片的方法
公开(公告)号：US07564138B2
公开(公告)日：2009-07-21
申请号：US11020590
申请日：2004-12-23
申请人： Flavio Pardo , Maria Elina Simon
发明人： Flavio Pardo , Maria Elina Simon
IPC分类号： H01L23/58 , H05B3/10
CPC分类号： H01L24/83 , B81B2201/042 , B81C3/001 , B81C2203/0181 , B81C2203/032 , H01L23/345 , H01L24/29 , H01L24/90 , H01L25/50 , H01L2224/83191 , H01L2224/83234 , H01L2224/8385 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/07802 , H01L2924/14
摘要： Targeted heating is employed to essentially only heat a material that is used as a spacer and to bond a first chip of a flip-chip to a second chip thereof and not the rest of the chips. In order to heat only the spacer-bonding material, one or more wires are located within, or adjacent to, the spacer-bonding material, and an electrical current is passed through the one or more wires causing them to heat. At the time of final bonding the heat generated by the one or more wires causes the spacer-bonding material to heat to its final curing temperature.
摘要翻译：采用目标加热基本上仅加热用作间隔物的材料，并将倒装芯片的第一芯片连接到其第二芯片而不是芯片的其余部分。为了仅加热间隔物接合材料，一个或多个电线位于隔离物接合材料的内部或邻近隔离物接合材料，电流通过一根或多根导线使其发热。在最终接合时，由一根或多根线产生的热量使间隔物接合材料加热到其最终的固化温度。

24. 发明授权

US07142352B2 MEMS mirror with amplified motion 有权
标题翻译：具有放大运动的MEMS镜
公开(公告)号：US07142352B2
公开(公告)日：2006-11-28
申请号：US11093512
申请日：2005-03-30
申请人： Flavio Pardo , Maria Elina Simon
发明人： Flavio Pardo , Maria Elina Simon
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A MEMS device achieves a large angle of rotation of a plate about 2 independent axes by employing a handle portion of the plate which is isolated by respective springs coupling the handle portion to each of two actuators. A first actuator, which rotates the mirror about the same axis as done in U.S. Pat. No. 6,781,744 is essentially the same structure disclosed therein, but with the mirror plate thereof shrunken in size. This shrunken plate is coupled by a spring to the mirror plate of the instant invention. Movement of the shrunken plate causes corresponding movement of the handle portion, and hence the mirror. A second actuator, coupled by another spring to the mirror plate of the instant invention, rotates about a second axis that is perpendicular to the first axis and parallel to the substrate. The second actuator includes an actuator plate and an electrode thereunder.
摘要翻译： MEMS器件通过采用板的手柄部分来实现大约2个独立轴线的大的旋转角度，所述手柄部分由相应的弹簧隔开，弹簧将手柄部分连接到两个致动器中的每一个。第一致动器，其使反射镜围绕相同的轴旋转，如美国专利No. 号6,781,744基本上是在其中公开的结构，但其反射板的尺寸缩小。该收缩板通过弹簧联接到本发明的镜板上。收缩板的移动引起手柄部分因此反射镜的相应移动。通过另一个弹簧耦合到本发明的镜板的第二致动器围绕垂直于第一轴线并平行于衬底的第二轴线旋转。第二致动器包括致动器板和其下的电极。

25. 发明授权

US08154378B2 Thermal actuator for a MEMS-based relay switch 有权
标题翻译：用于基于MEMS的继电器开关的热致动器
公开(公告)号：US08154378B2
公开(公告)日：2012-04-10
申请号：US11836860
申请日：2007-08-10
申请人： Validmir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
发明人： Validmir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
IPC分类号： H01H61/00 , H01H71/16 , H01H71/18 , H01H61/02 , F01B29/10 , F02G1/04
CPC分类号： H01H61/02 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H2061/008
摘要： A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an “active” arm that is movably mounted on a substrate. The “active” arm has (i) a thermal expansion layer and (ii) a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the “active” arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the “active” arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.
摘要翻译：本发明的代表性实施例提供了一种用于基于MEMS的继电器开关的热致动器。热致动器具有可移动地安装在基板上的“主动”臂。 “主动”臂具有（i）热膨胀层和（ii）与热膨胀层电隔离的电阻加热器。热膨胀层适应于由流过电阻加热器的控制电流引起的温度变化而膨胀，从而弯曲“主动”臂并相对于基板移动该臂。由于“主动”臂的机械和电气特性分别主要由热膨胀层和电阻加热器控制，可以独立地优化这些特性以获得本发明的基于MEMS的继电器开关更好的工作特性与现有技术中获得的相比。

26. 发明授权

US08427727B2 Oscillating mirror for image projection 有权
标题翻译：用于图像投影的振荡镜
公开(公告)号：US08427727B2
公开(公告)日：2013-04-23
申请号：US12357734
申请日：2009-01-22
申请人： Gang Chen , Roland Ryf , Maria Elina Simon
发明人： Gang Chen , Roland Ryf , Maria Elina Simon
IPC分类号： G02B26/08
CPC分类号： H04N9/3161 , G02B5/02 , G02B26/101 , G02B26/105 , G03B21/005 , H04N9/3129 , H04N9/315
摘要： An apparatus includes a substrate and a mirror. The mirror is attached to the substrate via a spring. An electro-mechanical driver is operable to cause the mirror to rotationally oscillate about first and second non-collinear axes at different first and second frequencies.
摘要翻译：一种装置包括基板和反射镜。镜子通过弹簧连接到基底上。机电驱动器可操作以使得反射镜以不同的第一和第二频率围绕第一和第二非共轴线旋转振荡。

27. 发明申请

US20090185251A1 OSCILLATING MIRROR FOR IMAGE PROJECTION 有权
标题翻译：用于图像投影的振荡镜
公开(公告)号：US20090185251A1
公开(公告)日：2009-07-23
申请号：US12357734
申请日：2009-01-22
申请人： Gang Chen , Roland Ryf , Maria Elina Simon
发明人： Gang Chen , Roland Ryf , Maria Elina Simon
IPC分类号： G02B26/08
CPC分类号： H04N9/3161 , G02B5/02 , G02B26/101 , G02B26/105 , G03B21/005 , H04N9/3129 , H04N9/315
摘要： An apparatus includes a substrate and a mirror. The mirror is attached to the substrate via a spring. An electro-mechanical driver is operable to cause the mirror to rotationally oscillate about first and second non-collinear axes at different first and second frequencies.
摘要翻译：一种装置包括基板和反射镜。镜子通过弹簧连接到基底上。机电驱动器可操作以使得反射镜以不同的第一和第二频率围绕第一和第二非共轴线旋转振荡。

28. 发明授权

US07760065B2 MEMS device with bi-directional element 有权
标题翻译：具有双向元件的MEMS器件
公开(公告)号：US07760065B2
公开(公告)日：2010-07-20
申请号：US11772039
申请日：2007-06-29
申请人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
发明人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
IPC分类号： H01H71/18 , H01H61/00
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译：本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。冷梁锚附接到基板。第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。第二束对被配置成在被加热时延长到更高的温度。

29. 发明申请

US20100182120A1 MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT 有权
标题翻译：具有双向元件的MEMS器件
公开(公告)号：US20100182120A1
公开(公告)日：2010-07-22
申请号：US12732752
申请日：2010-03-26
申请人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
发明人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
IPC分类号： H01H61/01
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译：本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。冷梁锚附接到基板。第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。第二束对被配置成在被加热时延长到更高的温度。

30. 发明申请

US20090002118A1 MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT 有权
标题翻译：具有双向元件的MEMS器件
公开(公告)号：US20090002118A1
公开(公告)日：2009-01-01
申请号：US11772039
申请日：2007-06-29
申请人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
发明人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
IPC分类号： H01H71/18 , H01H61/00
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译：本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。冷梁锚附接到基板。第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。第二束对被配置成在被加热时延长到更高的温度。

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