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    • 21. 发明申请
    • Method for Operating a Flash Memory Device
    • 操作闪存设备的方法
    • US20100172185A1
    • 2010-07-08
    • US12650787
    • 2009-12-31
    • Se Jun Kim
    • Se Jun Kim
    • G11C16/04G11C16/06
    • G11C16/3459G11C16/3454
    • A charge trap flash memory device is capable of preventing a data retention fail by ensuring a data retention margin. A method for operating the charge trap flash memory device is provided. A selected memory cell is programmed using a program voltage. The selected memory cell is verified using a first program verify voltage. Date retention states of selected memory cell having passed the program verify step are verified using a retention verify voltage. A read step of determining a program pass or fail by reading data of the selected memory cell having passed the retention verify step is performed using a read voltage.
    • 充电陷阱闪存设备能够通过确保数据保留余量来防止数据保留失败。 提供了一种用于操作电荷陷阱闪存器件的方法。 使用编程电压对选定的存储单元进行编程。 使用第一程序验证电压验证所选存储单元。 使用保留验证电压验证已经通过程序验证步骤的选定存储单元的保持状态。 使用读取电压来执行通过读取已经通过保留验证步骤的所选存储单元的数据来确定程序通过或失败的读取步骤。
    • 23. 发明授权
    • Method of manufacturing flash memory device
    • 制造闪存设备的方法
    • US07410881B2
    • 2008-08-12
    • US11618702
    • 2006-12-29
    • Sun Mi ParkYoo Nam JeonNam Kyeong KimSe Jun Kim
    • Sun Mi ParkYoo Nam JeonNam Kyeong KimSe Jun Kim
    • H01L21/76
    • H01L27/115H01L21/76849H01L21/76877H01L27/11521
    • A method of manufacturing a flash memory device includes etching an insulating layer provided over a substrate to form a contact hole to define a contact hole exposing a junction region formed on the substrate. The contact hole is filled with a first conductive material, the first conductive material contacting the junction region and extending above an upper surface of the contact hole. The first conductive material is etched to partly fill the contact hole, so that the first conductive material fills a lower portion of the contact hole, wherein an upper portion of the contact hole remains not filled due to the etching of the first conductive material, wherein the etched first conductive material defines a contact plug. A first dielectric layer and a second dielectric layer are formed over the contact plug, thereby filling the upper portion of the contact hole. Part of the first and second dielectric layers is etched to expose the contact plug and the upper portion of the contact hole. A second conductive material is formed on the contact plug and filling the upper portion of the contact hole to form a bit line.
    • 制造闪速存储器件的方法包括蚀刻设置在衬底上的绝缘层以形成接触孔,以限定暴露形成在衬底上的接合区域的接触孔。 接触孔填充有第一导电材料,第一导电材料接触接合区并在接触孔的上表面上方延伸。 第一导电材料被蚀刻以部分地填充接触孔,使得第一导电材料填充接触孔的下部,其中接触孔的上部部分由于蚀刻第一导电材料而保持不被填充,其中 蚀刻的第一导电材料限定接触插塞。 第一电介质层和第二电介质层形成在接触插塞上,从而填充接触孔的上部。 蚀刻第一和第二电介质层的一部分以暴露接触插塞和接触孔的上部。 第二导电材料形成在接触插塞上并填充接触孔的上部以形成位线。