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    • 21. 发明申请
    • Exhaust control system for an internal combustion engine
    • 内燃机排气控制系统
    • US20080148714A1
    • 2008-06-26
    • US12002244
    • 2007-12-12
    • Nobuhiro KomatsuNorio Suzuki
    • Nobuhiro KomatsuNorio Suzuki
    • F01N9/00
    • F02D41/028F01N3/0814F01N13/009F02D41/0235F02D41/405F02D2041/0265F02D2200/0802
    • An exhaust control system for an internal combustion engine provided with an exhaust gas processing device and a NOx purifying catalyst which are arranged in series in an exhaust system, comprises: a first temperature detector for detecting a temperature of the exhaust gas processing device; a second temperature detector for detecting a temperature of the NOx purifying catalyst; a control means for controlling an exhaust temperature to conduct a regeneration process for removing sulfur contents trapped by the NOx purifying catalyst; and a control mode selection means for selecting one of a plurality of exhaust temperature control modes according to a relationship between an output from the first temperature detector and an output from the second temperature detector, wherein the control means conducts exhaust temperature control according to the control mode selected by the control mode selection means.
    • 一种内燃机的排气控制系统,具有排气系统中串联配置的排气处理装置和NOx净化催化剂,具备:检测废气处理装置的温度的第一温度检测器; 用于检测NOx净化催化剂的温度的第二温度检测器; 用于控制排气温度以进行用于除去由所述NOx净化催化剂捕获的硫含量的再生处理的控制装置; 以及控制模式选择装置,用于根据来自第一温度检测器的输出和来自第二温度检测器的输出之间的关系来选择多个排气温度控制模式中的一个,其中控制装置根据控制进行排气温度控制 模式由控制模式选择装置选择。
    • 30. 发明授权
    • Method of manufacturing semiconductor devices
    • 制造半导体器件的方法
    • US06204184B1
    • 2001-03-20
    • US09276969
    • 1999-03-26
    • Akio NishidaKikuo KusukawaToshiaki YamanakaNatsuki YokoyamaShinichiro KimuraNorio SuzukiOsamu TsuchiyaAtsushi Ogishima
    • Akio NishidaKikuo KusukawaToshiaki YamanakaNatsuki YokoyamaShinichiro KimuraNorio SuzukiOsamu TsuchiyaAtsushi Ogishima
    • H01L21302
    • H01L27/10894H01L21/31053H01L21/76229H01L21/823437H01L21/823481H01L27/10814
    • In a method of manufacturing a semiconductor device having a memory mat portion in which an active region and a field region are formed densely, after a polishing stopper film is deposited on a semiconductor substrate, there are formed grooves by etching a polishing stopper film of a field region and the semiconductor substrate. Then, after an insulating film is deposited so as to fill the grooves, the insulating film is partly removed from the memory mat portion by etching. Under this state, the insulating film is chemically mechanically polished until the polishing stopper film is exposed. The film thickness of the polishing stopper film on the active region can be reduced, and an electrical element isolation characteristic of the field region can be improved. At the same time, upon chemical mechanical polishing, a silicon substrate can be prevented from being exposed at the central portion of the memory mat portion and the insulating film can be prevented from being left on the silicon nitride film near the outer periphery, thereby making it possible to form elements having uniform electrical characteristics on all active regions of the memory mat portion.
    • 在制造半导体器件的方法中,其具有密集形成有源区和场区的存储垫部分,在半导体衬底上沉积抛光阻挡膜之后,通过蚀刻抛光阻挡膜形成凹槽 场区域和半导体衬底。 然后,在沉积绝缘膜以填充凹槽之后,通过蚀刻将绝缘膜部分地从存储垫部分除去。 在这种状态下,绝缘膜被化学机械抛光直到抛光阻挡膜露出。 能够减少有源区域上的研磨停止膜的膜厚,能够提高场区域的电气元件隔离特性。 同时,在化学机械抛光时,可以防止硅衬底暴露在存储垫部分的中心部分,并且可以防止绝缘膜留在靠近外周的氮化硅膜上,从而使 可以在存储垫部分的所有有效区域上形成具有均匀电特性的元件。