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    • 21. 发明授权
    • Apparatus and method for vapor growth
    • 气相生长装置和方法
    • US5494521A
    • 1996-02-27
    • US218389
    • 1994-03-25
    • Nobuyuki OtsukaYasushi Matsui
    • Nobuyuki OtsukaYasushi Matsui
    • C23C16/44C23C16/455C30B25/14C23C16/52
    • C23C16/45502C23C16/455C23C16/45561C30B25/14
    • Herein disclosed is a vapor growth system, in which the number of dummy lines is reduced to decrease the number of lines led into a valve system, thereby enabling thin film growth having a good interfacial steepleness. The system comprising gas supplying lines A70, B71 and C72, which are made up of AsH.sub.3 process gas lines A62, B65, C68 and balance lines A61, B64 and C67, respectively. The balance lines A61, B64 and C67 contributes equalization of products of the viscosity and the flow rate in the gas supplying lines A70, B71 and C72, and the dummy line 60. Only when AsH.sub.3 (A), AsH.sub.3 (B) and AsH.sub.3 gases are not fed upon formation of the film growth, the dummy line 60 is connected to the main line. Whereby, the system is free from pressure fluctuation of the gas in the main line, with an arrangement of even a single dummy line.
    • 这里公开了一种蒸气生长系统,其中虚线的数量减少以减少引入阀系统的管线数量,从而实现具有良好界面陡峭性的薄膜生长。 该系统包括由AsH 3工艺气体管线A62,B65,C68和余量管线A61,B64和C67构成的气体供应管线A70,B71和C72。 平衡线A61,B64和C67有助于气体供给管线A70,B71和C72以及虚拟管线60中的粘度和流量的乘积的均衡。只有当AsH 3(A),AsH 3(B)和AsH 3气体 在膜生长形成时不进料,虚线60连接到主线。 因此,该系统在主线中没有气体的压力波动,甚至布置了单个虚拟线。
    • 25. 发明授权
    • Apparatus and method for vapor growth
    • 气相生长装置和方法
    • US5308433A
    • 1994-05-03
    • US865426
    • 1992-04-09
    • Nobuyuki OtsukaYasushi Matsui
    • Nobuyuki OtsukaYasushi Matsui
    • C23C16/44C23C16/455C30B25/14
    • C23C16/45502C23C16/455C23C16/45561C30B25/14
    • Herein disclosed is a vapor growth system, in which the number of dummy lines is reduced to decrease the number of lines led into a valve system, thereby enabling thin film growth having a good interfacial steepleness. The system comprising gas supplying lines A70, B71 and C72, which are made up of AsH.sub.3 process gas lines A62, B65, C68 and and balance lines A61, B64 and C67, respectively. The balance lines A61, B64 and C.sub.67 contributes equalization of products of the viscosity and the flow rate in the gas supplying lines A70, B71 and C72, and the dummy line 60. Only when AsH.sub.3 (A), AsH.sub.3 (B) and AsH.sub.3 gases are not fed upon formation of the film growth, the dummy line 60 is connected to the main line. Whereby, the system is free from pressure fluctuation of the gas in the main line, with an arrangement of even a single dummy line.
    • 这里公开了一种蒸气生长系统,其中虚线的数量减少以减少引入阀系统的管线数量,从而实现具有良好界面陡峭性的薄膜生长。 该系统包括由AsH3工艺气体管线A62,B65,C68和余量管线A61,B64和C67组成的气体供应管线A70,B71和C72。 平衡线A61,B64和C67有助于气体供给管线A70,B71和C72以及虚拟管线60中的粘度和流量的乘积的均衡。只有当AsH 3(A),AsH 3(B)和AsH 3气体 在膜生长形成时不进料,虚线60连接到主线。 因此,该系统在主线中没有气体的压力波动,甚至布置了单个虚拟线。