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21. 发明授权

US07281304B2 Method for fabricating a film bulk acoustic resonator 有权
标题翻译：制造薄膜体声波谐振器的方法
公开(公告)号：US07281304B2
公开(公告)日：2007-10-16
申请号：US10827532
申请日：2004-04-20
申请人： Sang-chae Kim , In-sang Song , Young-tack Hong
发明人： Sang-chae Kim , In-sang Song , Young-tack Hong
IPC分类号： H04R17/00 , H01L41/00
CPC分类号： H03H3/02 , H03H9/172 , H03H2003/022 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155 , Y10T29/49156
摘要： A method for fabricating a film bulk acoustic resonator (FBAR) includes depositing a dielectric layer on a substrate, providing a sacrificial layer on part of the dielectric layer; providing a bottom electrode on part of the sacrificial layer on part of the dielectric layer; providing a piezoelectric layer on the bottom electrode; patterning a top electrode on the piezoelectric layer; and removing the sacrificial layer. The substrate may have a cavity receiving the sacrificial layer. As a result, a cantilevered resonator having an air gap between the bottom electrode and the dielectric layer may be simply fabricated.
摘要翻译：一种制造薄膜体声波谐振器（FBAR）的方法包括在基片上沉积介电层，在介电层的一部分上提供牺牲层; 在所述电介质层的一部分上的所述牺牲层的一部分上提供底部电极; 在底部电极上提供压电层; 图案化压电层上的顶部电极; 并去除牺牲层。衬底可以具有容纳牺牲层的空腔。结果，可以简单地制造在底部电极和电介质层之间具有气隙的悬臂谐振器。

22. 发明申请

US20070140614A1 Pneumatic MEMS switch and method of fabricating the same 有权
标题翻译：气动MEMS开关及其制造方法
公开(公告)号：US20070140614A1
公开(公告)日：2007-06-21
申请号：US11513036
申请日：2006-08-31
申请人： Che-heung Kim , Hyung Choi , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Dong-Kyun Kim , Young-tack Hong , Jong-seok Kim
发明人： Che-heung Kim , Hyung Choi , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Dong-Kyun Kim , Young-tack Hong , Jong-seok Kim
IPC分类号： G02B6/26
CPC分类号： H01H59/0009 , H01H35/346 , H01H2221/02
摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.
摘要翻译：气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

23. 发明授权

US07939356B2 Method of manufacturing film bulk acoustic resonator using internal stress of metallic film and resonator manufactured thereby 有权
标题翻译：使用金属膜的内部应力和由此制造的谐振器制造膜体声波谐振器的方法
公开(公告)号：US07939356B2
公开(公告)日：2011-05-10
申请号：US12684454
申请日：2010-01-08
申请人： Jong-seok Kim , Sung-hoon Choa , In-sang Song , Young-tack Hong
发明人： Jong-seok Kim , Sung-hoon Choa , In-sang Song , Young-tack Hong
IPC分类号： H01L21/00
CPC分类号： H03H9/02133 , H03H3/02 , H03H9/172 , Y10T29/42
摘要： A method of manufacturing a film bulk acoustic resonator and the resonator manufactured thereby. The method includes the laminating a sacrificial layer on a semiconductor substrate, removing a predetermined area from the sacrificial layer to realize electric contact between a signal line of the semiconductor substrate and a lower electrode, forming the lower electrode by depositing metal film for lower electrode on the sacrificial layer, by patterning based on a shape of the sacrificial layer, forming a piezoelectric layer by depositing a piezoelectric material on the lower electrode and by patterning based on a shape of the lower electrode, and forming an upper electrode by depositing metal film on the piezoelectric layer and by patterning based on a shape of the piezoelectric layer, wherein at least one of a deposition pressure and a deposition power is controlled to generate upward stress when depositing the metal film for the lower electrode.
摘要翻译：一种制造薄膜体声波谐振器的方法和由此制造的谐振器。该方法包括在半导体衬底上层叠牺牲层，从牺牲层去除预定区域以实现半导体衬底的信号线与下电极之间的电接触，通过在下电极上沉积金属膜形成下电极牺牲层，通过基于牺牲层的形状进行图案化，通过在下电极上沉积压电材料并基于下电极的形状进行图案化形成压电层，并且通过将金属膜沉积在上而形成上电极压电层和基于压电层的形状的图案化，其中当沉积用于下电极的金属膜时，沉积压力和沉积功率中的至少一个被控制以产生向上的应力。

24. 发明授权

US07919903B2 MEMS switch 失效
标题翻译： MEMS开关
公开(公告)号：US07919903B2
公开(公告)日：2011-04-05
申请号：US11540655
申请日：2006-10-02
申请人： Young-tack Hong , Dong-kyun Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Jong-seok Kim , Che-heung Kim
发明人： Young-tack Hong , Dong-kyun Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Jong-seok Kim , Che-heung Kim
IPC分类号： H01L41/00
CPC分类号： B41J2/04581 , B41J2/04541
摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.
摘要翻译：微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

25. 发明授权

US07545246B2 Piezoelectric MEMS switch and method of fabricating the same 有权
标题翻译：压电MEMS开关及其制造方法
公开(公告)号：US07545246B2
公开(公告)日：2009-06-09
申请号：US11515717
申请日：2006-09-06
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Hong , Che-heung Kim
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Hong , Che-heung Kim
IPC分类号： H01H51/22
CPC分类号： H01H57/00 , H01H2057/006 , Y10T403/7026
摘要： A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.
摘要翻译：一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。

26. 发明申请

US20070159510A1 MEMS switch 失效
标题翻译： MEMS开关
公开(公告)号：US20070159510A1
公开(公告)日：2007-07-12
申请号：US11540655
申请日：2006-10-02
申请人： Young-tack Hong , Dong-kyun Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Jong-seok Kim , Che-heung Kim
发明人： Young-tack Hong , Dong-kyun Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Jong-seok Kim , Che-heung Kim
IPC分类号： B41J2/04
CPC分类号： B41J2/04581 , B41J2/04541
摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.
摘要翻译：微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

27. 发明申请

US20070012654A1 MEMS switch and method for manufacturing the same 失效
标题翻译： MEMS开关及其制造方法
公开(公告)号：US20070012654A1
公开(公告)日：2007-01-18
申请号：US11472312
申请日：2006-06-22
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Duck-hwan Kim , Yun-kwon Park , Hee-moon Jeong , Young-tack Hong , Che-heung Kim , Seok-chul Yun , Kuang-woo Nam
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Duck-hwan Kim , Yun-kwon Park , Hee-moon Jeong , Young-tack Hong , Che-heung Kim , Seok-chul Yun , Kuang-woo Nam
IPC分类号： C23F1/00 , H01B13/00
CPC分类号： H01H61/02 , H01H61/063 , H01H2061/006
摘要： A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.
摘要翻译： MEMS开关包括在下基板的上表面上具有信号线的下基板; 在其上具有空腔的上基板，与下基板的上表面隔开一段距离，并且在上基板的下表面上具有膜层; 形成在膜层上的上基板的空腔中的双金属层; 形成在所述膜层的下表面上的加热层; 以及形成在所述加热层的下表面上的接触构件。接触构件可以与信号线接触或分离。制造MEMS开关的方法包括制备上基板和下基板并将其组合，使得具有信号线的表面面向具有接触构件的表面，并且上下基板分开一定距离。

28. 发明授权

US06989664B2 RF power sensor for measuring an RF signal power using capacitance 有权
公开(公告)号：US06989664B2
公开(公告)日：2006-01-24
申请号：US10408779
申请日：2003-04-08
申请人： Dong-ha Shim , In-sang Song , Young-il Kim , Sun-hee Park , Young-tack Hong , Dong-ki Min
发明人： Dong-ha Shim , In-sang Song , Young-il Kim , Sun-hee Park , Young-tack Hong , Dong-ki Min
IPC分类号： G01R31/00 , G01R29/24 , G01R27/26
CPC分类号： G01R21/00 , G01R1/06772
摘要： An RF power sensor for measuring power for an RF signal using capacitance includes a substrate preferably formed of a semiconductor, such as silicon or of a dielectric substance, a fixture part fixed to the substrate and forming a signal line and ground lines that transmit RF signals, and a bridge connected to the ground lines and floating over the signal line, wherein the bridge is driven by an external driving force, and the external driving force induces capacitance between the bridge and the signal line. Accordingly, power for an RF signal can be measured through the capacitance between the signal line and the bridge. The RF power sensor facilitates matchings, reduces insertion loss, and can be used in a wide bandwidth because it is based on transmission lines having characteristic impedance. Further, high power can be measured depending upon bridge designs.

29. 发明申请

US20050001274A1 Method of manufacturing film bulk acoustic resonator using internal stress of metallic film and resonator manufactured thereby 有权
标题翻译：使用金属膜的内部应力和由此制造的谐振器制造膜体声波谐振器的方法
公开(公告)号：US20050001274A1
公开(公告)日：2005-01-06
申请号：US10838326
申请日：2004-05-05
申请人： Jong-seok Kim , Sung-hoon Choa , In-sang Song , Young-tack Hong
发明人： Jong-seok Kim , Sung-hoon Choa , In-sang Song , Young-tack Hong
IPC分类号： H03H9/15 , H03H3/02 , H03H9/17 , H01L21/00 , H01L27/14 , H01L29/82
CPC分类号： H03H9/02133 , H03H3/02 , H03H9/172 , Y10T29/42
摘要： A method of manufacturing a film bulk acoustic resonator and the resonator manufactured thereby. The method includes the laminating a sacrificial layer on a semiconductor substrate, removing a predetermined area from the sacrificial layer to realize electric contact between a signal line of the semiconductor substrate and a lower electrode, forming the lower electrode by depositing metal film for lower electrode on the sacrificial layer, by patterning based on a shape of the sacrificial layer, forming a piezoelectric layer by depositing a piezoelectric material on the lower electrode and by patterning based on a shape of the lower electrode, and forming an upper electrode by depositing metal film on the piezoelectric layer and by patterning based on a shape of the piezoelectric layer, wherein at least one of a deposition pressure and a deposition power is controlled to generate upward stress when depositing the metal film for the lower electrode.
摘要翻译：一种制造薄膜体声波谐振器的方法和由此制造的谐振器。该方法包括在半导体衬底上层叠牺牲层，从牺牲层去除预定区域以实现半导体衬底的信号线与下电极之间的电接触，通过在下电极上沉积金属膜形成下电极牺牲层，通过基于牺牲层的形状进行图案化，通过在下电极上沉积压电材料并基于下电极的形状进行图案化形成压电层，并且通过将金属膜沉积在上而形成上电极压电层和基于压电层的形状的图案化，其中当沉积用于下电极的金属膜时，沉积压力和沉积功率中的至少一个被控制以产生向上的应力。

30. 发明申请

US20100132174A1 METHOD OF MANUFACTURING FILM BULK ACOUSTIC RESONATOR USING INTERNAL STRESS OF METALLIC FILM AND RESONATOR MANUFACTURED THEREBY 有权
标题翻译：使用金属膜内部应力和制造的谐振器制造薄膜泡沫谐振器的方法
公开(公告)号：US20100132174A1
公开(公告)日：2010-06-03
申请号：US12684454
申请日：2010-01-08
申请人： Jong-seok KIM , Sung-hoon Choa , In-sang Song , Young-tack Hong
发明人： Jong-seok KIM , Sung-hoon Choa , In-sang Song , Young-tack Hong
IPC分类号： H01L41/22
CPC分类号： H03H9/02133 , H03H3/02 , H03H9/172 , Y10T29/42
摘要： A method of manufacturing a film bulk acoustic resonator and the resonator manufactured thereby. The method includes the laminating a sacrificial layer on a semiconductor substrate, removing a predetermined area from the sacrificial layer to realize electric contact between a signal line of the semiconductor substrate and a lower electrode, forming the lower electrode by depositing metal film for lower electrode on the sacrificial layer, by patterning based on a shape of the sacrificial layer, forming a piezoelectric layer by depositing a piezoelectric material on the lower electrode and by patterning based on a shape of the lower electrode, and forming an upper electrode by depositing metal film on the piezoelectric layer and by patterning based on a shape of the piezoelectric layer, wherein at least one of a deposition pressure and a deposition power is controlled to generate upward stress when depositing the metal film for the lower electrode.
摘要翻译：一种制造薄膜体声波谐振器的方法和由此制造的谐振器。该方法包括在半导体衬底上层叠牺牲层，从牺牲层去除预定区域以实现半导体衬底的信号线与下电极之间的电接触，通过在下电极上沉积金属膜形成下电极牺牲层，通过基于牺牲层的形状进行图案化，通过在下电极上沉积压电材料并基于下电极的形状进行图案化形成压电层，并且通过将金属膜沉积在上而形成上电极压电层和基于压电层的形状的图案化，其中当沉积用于下电极的金属膜时，沉积压力和沉积功率中的至少一个被控制以产生向上的应力。

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