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1. 发明授权

US10079589B2 Thin film bulk acoustic resonator and method for manufacturing same 有权
公开(公告)号：US10079589B2
公开(公告)日：2018-09-18
申请号：US14353561
申请日：2012-06-07
申请人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
发明人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
IPC分类号： H03H9/17 , H03H3/02 , H01L41/297 , H01L41/312 , H01L41/332
CPC分类号： H03H9/173 , H01L41/297 , H01L41/312 , H01L41/332 , H03H3/02 , H03H9/175 , H03H2003/021
摘要： A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.

2. 发明授权

US08854157B2 Balun comprising two conversion circuits each constituted by first to third FBARs 有权
标题翻译：平衡/不平衡变换器包括由第一至第三FBAR构成的两个转换电路
公开(公告)号：US08854157B2
公开(公告)日：2014-10-07
申请号：US12834099
申请日：2010-07-12
申请人： Duck Hwan Kim , Dal Ahn , Chul Soo Kim , In Sang Song , Yun Kwon Park , Jea Shik Shin , Hyung Rak Kim
发明人： Duck Hwan Kim , Dal Ahn , Chul Soo Kim , In Sang Song , Yun Kwon Park , Jea Shik Shin , Hyung Rak Kim
IPC分类号： H03H9/00
CPC分类号： H03H9/0095
摘要： Disclosed is a balun including a film bulk acoustic resonator (FBAR). The balun may be implemented using the FBAR to fabricate a small sized balun. Also, the balun may be implemented using the FBAR, thereby reducing a difference in two outputs.
摘要翻译：公开了一种包括膜体声波谐振器（FBAR）的平衡 - 不平衡转换器。平衡不平衡变压器可以使用FBAR来实现，以制造小尺寸的平衡 - 不平衡转换器。此外，平衡 - 不平衡变换器可以使用FBAR实现，从而减少两个输出的差异。

3. 发明授权

US08824163B2 RF layered module using three dimensional vertical wiring and disposing method thereof 有权
标题翻译： RF分层模块采用三维垂直布线及其布置方法
公开(公告)号：US08824163B2
公开(公告)日：2014-09-02
申请号：US13217371
申请日：2011-08-25
申请人： Young Il Kim , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Yun Kwon Park , Jea Shik Shin , Hyung Rak Kim , Jae Chun Lee
发明人： Young Il Kim , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Yun Kwon Park , Jea Shik Shin , Hyung Rak Kim , Jae Chun Lee
IPC分类号： H05K1/18 , H01L25/065 , H01L25/16 , H01L23/66 , H01L23/13 , H01L23/538
CPC分类号： H01L23/66 , H01L23/13 , H01L23/5385 , H01L25/0652 , H01L25/0657 , H01L25/16 , H01L2223/6616 , H01L2224/16225 , H01L2224/48227 , H01L2225/0652 , H01L2225/06548 , H01L2225/06572 , H01L2924/01322 , H01L2924/15311 , H01L2924/3011 , Y10T29/49165 , H01L2924/00
摘要： Provided is a structure and disposing method of a radio frequency (RF) layered module using three dimensional (3D) vertical wiring. A first wafer in the RF layered module having the 3D vertical wiring may include a first RF device and at least one first via-hole. A second wafer may include a second RF device and at least one second via-hole disposed at a location corresponding to the at least one first via-hole. A vertical wiring may connect the at least one first via-hole and the at least one second via-hole. The vertical wiring may be configured to be connected to an external device through a bottom surface of the at least one first via-hole or a top surface of the at least one second via-hole.
摘要翻译：提供了一种使用三维（3D）垂直布线的射频（RF）分层模块的结构和布置方法。具有3D垂直布线的RF分层模块中的第一晶片可以包括第一RF器件和至少一个第一通孔。第二晶片可以包括第二RF器件和设置在对应于至少一个第一通孔的位置处的至少一个第二通孔。垂直布线可以连接至少一个第一通孔和至少一个第二通孔。垂直布线可以被配置为通过至少一个第一通孔的底表面或至少一个第二通孔的顶表面连接到外部装置。

4. 发明授权

US08648671B2 Bulk acoustic wave resonator structure, a manufacturing method thereof, and a duplexer using the same 有权
标题翻译：体声波谐振器结构，其制造方法以及使用其的双工器
公开(公告)号：US08648671B2
公开(公告)日：2014-02-11
申请号：US13088905
申请日：2011-04-18
申请人： Sang Uk Son , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim , Jea Shik Shin , Hyung Rak Kim , Jae Chun Lee
发明人： Sang Uk Son , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim , Jea Shik Shin , Hyung Rak Kim , Jae Chun Lee
IPC分类号： H03H9/70 , H03H9/13 , H03H9/54
CPC分类号： H03H9/02149 , H03H3/04 , H03H9/1014 , H03H9/131 , H03H9/564 , H03H9/706 , H03H2003/021
摘要： A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a predetermined area of a bottom surface of the first substrate. A first air cavity may be formed above the first substrate, and a first lamination resonating portion may be laminated above the first air cavity in sequence of a lower electrode, a piezoelectric layer, and an upper electrode. A second air cavity may be formed above the first substrate, and a second lamination resonating portion may be laminated above the second air cavity in sequence of the lower electrode, the piezoelectric layer, and the upper electrode. The first lamination resonating portion and the second lamination resonating portion may be connected via either the lower electrode or the upper electrode. A first electrode portion may include a third air cavity formed on a bottom surface of either the lower electrode or the upper electrode connecting between the first lamination resonating portion and the second lamination resonating portion.
摘要翻译：提供了一种体声波谐振器（BAWR），一种制造BAWR的方法，以及包括BAWR的双工器。 BAWR可以包括第一基板，其包括形成在第一基板的底表面的预定区域中的通孔。可以在第一基板上形成第一空气腔，并且第一层叠谐振部分可以按照下电极，压电层和上电极的顺序层叠在第一空气腔的上方。可以在第一基板的上方形成第二空气腔，并且第二层压谐振部分可以按照下电极，压电层和上电极的顺序层叠在第二空气腔的上方。第一层叠谐振部分和第二层叠谐振部分可以通过下电极或上电极连接。第一电极部分可以包括形成在第一层压谐振部分和第二层压谐振部分之间的下电极或上电极的底表面上的第三空腔。

5. 发明申请

US20140021443A1 NANO RESONATOR AND MANUFACTURING METHOD THEREOF 有权
标题翻译：纳米谐振器及其制造方法
公开(公告)号：US20140021443A1
公开(公告)日：2014-01-23
申请号：US13846685
申请日：2013-03-18
申请人： Jie Ai Yu , Duck Hwan Kim , In Sang Song , Jing Cui
发明人： Jie Ai Yu , Duck Hwan Kim , In Sang Song , Jing Cui
IPC分类号： B81C1/00 , B81B3/00
CPC分类号： B81C1/00134 , B81B3/0018 , H03H3/0072 , H03H9/2463
摘要： A nano resonator includes a substrate, a first insulating layer disposed on the substrate, a first source disposed on the first insulating layer at a first position, a first drain disposed on the first insulating layer at a second position spaced apart from the first position so that the first drain faces the first source, a first nano-wire channel having a first end connected to the first source and a second end connected to the first drain, and having a doping type and a doping concentration that are identical to a doping type and a doping concentration of the first source and the first drain, and a second nano-wire channel disposed at a predetermined distance from the first nano-wire channel in a direction perpendicular to the substrate or a direction parallel to the substrate.
摘要翻译：纳米谐振器包括衬底，设置在衬底上的第一绝缘层，在第一位置处设置在第一绝缘层上的第一源极，在与第一位置间隔开的第二位置处设置在第一绝缘层上的第一漏极，第一漏极面向第一源极，第一纳米线通道具有连接到第一源极的第一端和连接到第一漏极的第二端，并且具有与掺杂类型相同的掺杂类型和掺杂浓度以及第一源极和第一漏极的掺杂浓度以及与第一纳米线通道在垂直于衬底的方向或平行于衬底的方向设置在预定距离处的第二纳米线通道。

6. 发明申请

US20130302843A1 METHOD OF MEASURING BIOLOGICAL SAMPLE PROPERTIES AND BIOLOGICAL SAMPLE PROPERTY MEASURING APPARATUS 审中-公开
标题翻译：测量生物样品性质和生物样品物性测量装置的方法
公开(公告)号：US20130302843A1
公开(公告)日：2013-11-14
申请号：US13760114
申请日：2013-02-06
申请人： Sang Uk SON , Duck Hwan KIM , In Sang SONG , Seong Chan JUN , Ho Soo PARK , Jea Shik SHIN , Moon Chul LEE
发明人： Sang Uk SON , Duck Hwan KIM , In Sang SONG , Seong Chan JUN , Ho Soo PARK , Jea Shik SHIN , Moon Chul LEE
IPC分类号： G01N27/02 , A61B5/053 , A61B5/145
CPC分类号： G01N27/08 , A61B5/05 , A61B5/053 , A61B5/14532 , A61B5/14546 , G01N27/02 , G01N27/07 , G01N27/226
摘要： A method of measuring biological sample properties and a biological sample property measuring apparatus is provided. A method of measuring biological sample properties includes disposing a biomaterial to contact a sensing unit, detecting a radio frequency (RF) signal flowing through the sensing unit, and obtaining an RF property indicator of the biomaterial based on the detected RF signal.
摘要翻译：提供了测量生物样品性质的方法和生物样品性质测量装置。测量生物样品性质的方法包括设置接触感测单元的生物材料，检测流过感测单元的射频（RF）信号，以及基于检测到的RF信号获得生物材料的RF性质指标。

7. 发明申请

US20130248368A1 SENSING APPARATUS USING RADIO FREQUENCY AND MANUFACTURING METHOD THEREOF 有权
标题翻译：使用无线电频率的感应装置及其制造方法
公开(公告)号：US20130248368A1
公开(公告)日：2013-09-26
申请号：US13787940
申请日：2013-03-07
申请人： Duck Hwan KIM , Seong Chan JUN , Chul Soo KIM , In Sang SONG , Jae Shik SHIN
发明人： Duck Hwan KIM , Seong Chan JUN , Chul Soo KIM , In Sang SONG , Jae Shik SHIN
IPC分类号： G01N27/447
CPC分类号： G01N27/44791 , B03C5/005 , B03C5/026 , B03C2201/26 , Y10T156/10
摘要： A sensing apparatus using a radio frequency and a manufacturing method thereof is provided. A sensing apparatus using a radio frequency includes a protecting layer configured to protect a substrate from migration of electrons occurring as the radio frequency is applied to a first electrode and a second electrode, a channel forming layer configured to form a channel based on a field between the first electrode and the second electrode, the channel forming layer using a polarized carbon-based nano material to form the channel, and a sensing layer configured to sense glucose using a medium material that is attached on the carbon-based nano material.
摘要翻译：提供一种使用射频的感测装置及其制造方法。使用无线电频率的感测装置包括保护层，该保护层被配置为保护基板免受随着射频施加到第一电极和第二电极而发生的电子的迁移，通道形成层被配置为基于第二电极第一电极和第二电极，使用极化碳基纳米材料形成沟道的沟道形成层以及被配置为使用附着在碳基纳米材料上的介质材料感测葡萄糖的感测层。

8. 发明申请

US20130214876A1 NANO SCALE RESONATOR, NANO SCALE SENSOR, AND FABRICATION METHOD THEREOF 有权
标题翻译：纳米尺度谐振器，纳米尺度传感器及其制造方法
公开(公告)号：US20130214876A1
公开(公告)日：2013-08-22
申请号：US13668760
申请日：2012-11-05
申请人： Moon Chul Lee , Duck Hwan Kim , In Sang Song , Jea Shik Shin
发明人： Moon Chul Lee , Duck Hwan Kim , In Sang Song , Jea Shik Shin
IPC分类号： H03H9/00
CPC分类号： G01N27/04 , B81B2201/02 , H03H3/0072 , H03H3/0077 , H03H9/2463 , H03H2009/02346 , H03H2009/0244
摘要： A nano scale resonator, a nano scale sensor, and a fabrication method thereof are provided. The nano scale resonator includes a resonance unit of nano scale configured to resonate based on an applied signal, and an anchor on a substrate, the anchor being configured to support the resonance unit, the anchor having an air gap within boundaries of the anchor, the resonance unit, and the substrate, the air gap being configured to reflect a vertical wave occurring in the resonance unit.
摘要翻译：提供了纳米级谐振器，纳米级传感器及其制造方法。所述纳米级谐振器包括纳米级的谐振单元，其被配置为基于所施加的信号而谐振，并且所述锚固件被构造成支撑所述谐振单元，所述锚固件在所述锚的边界内具有气隙，谐振单元和基板，气隙被配置为反映在谐振单元中发生的垂直波。

9. 发明申请

US20130181579A1 BULK ACOUSTIC WAVE RESONATOR 有权
标题翻译：大容量声波谐振器
公开(公告)号：US20130181579A1
公开(公告)日：2013-07-18
申请号：US13686005
申请日：2012-11-27
申请人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
IPC分类号： H01L41/107
CPC分类号： H01L41/107 , H03H9/02102 , H03H9/0211 , H03H9/173 , H03H9/174 , H03H9/175
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
摘要翻译：提供了一种体声波谐振器（BAWR）。 BAWR可以包括设置在基板上的空气腔，包括压电层的体声波谐振单元和反射层，以反射从压电层产生的谐振频率的波。

10. 发明申请

US20130099122A1 APPARATUS AND METHOD FOR SENSING TEMPERATURE 有权
标题翻译：用于感测温度的装置和方法
公开(公告)号：US20130099122A1
公开(公告)日：2013-04-25
申请号：US13616445
申请日：2012-09-14
申请人： Ho Soo PARK , In Sang SONG , Duck Hwan KIM , Chul Soo KIM , Sang Uk SON , Jea Shik SHIN , Cui Jing
发明人： Ho Soo PARK , In Sang SONG , Duck Hwan KIM , Chul Soo KIM , Sang Uk SON , Jea Shik SHIN , Cui Jing
IPC分类号： G01K11/26 , G01J5/10
CPC分类号： G01J5/44
摘要： A temperature sensing apparatus and method are described to detect a change in a frequency due to a change in a temperature. An infrared light sensing apparatus and method are also provided. The temperature sensing apparatus may include an electrode to generate an electrical signal, a piezoelectric layer to convert the electrical signal into an acoustic wave, and a temperature sensitive layer formed by doping impurities in one or more structures formed on a substrate. Additionally, the infrared light sensing apparatus may convert into heat infrared light incident to an infrared light absorption layer, using an infrared light reflection layer and the infrared light absorption layer. A temperature sensitive layer may detect a change in a resonant frequency based on a change in a temperature of the heat, and may detect a change in infrared light based on the change in the resonant frequency.
摘要翻译：描述了一种温度检测装置和方法，以检测由于温度变化引起的频率变化。还提供了一种红外光感测装置和方法。温度检测装置可以包括用于产生电信号的电极，将电信号转换成声波的压电层，以及通过在衬底上形成的一个或多个结构中掺杂杂质形成的温度敏感层。此外，红外光检测装置可以使用红外光反射层和红外光吸收层转换入入红外光吸收层的热红外光。温度敏感层可以基于热的温度的变化来检测谐振频率的变化，并且可以基于谐振频率的变化来检测红外光的变化。

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