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    • 24. 发明授权
    • Method and device for manufacturing semiconductor devices, semiconductor device and transfer member
    • 用于制造半导体器件,半导体器件和转移元件的方法和器件
    • US09076916B2
    • 2015-07-07
    • US13578967
    • 2011-02-14
    • Hikaru Kobayashi
    • Hikaru Kobayashi
    • H01L21/461H01L21/46H01L27/14H01L31/0747H01L31/0236H01L31/18
    • H01L31/0747H01L31/02363H01L31/182Y02E10/546Y02P70/521Y10T29/41Y10T442/10
    • Disclosed is a method for manufacturing semiconductor devices. Said method includes: a supply step in which a process liquid (19) that oxidizes and dissolves a target substrate (20) to be treated is supplied to the surface of said substrate (20) to be treated; a positioning step in which a mesh-like transferring member (10b) provided with a catalyst material is positioned near or in contact with the surface of the substrate (20) to be treated; and a concave or convex forming step in which a concave or convex is formed on the surface of the substrate (20) to be treated via the aforementioned supply and positioning steps. As opposed to existing manufacturing methods, which manufacture semiconductor devices provided with semiconductor substrates with highly arbitrary (i.e. not very reproducible) concaves or convexes, by forming an appropriate concave or convex or mesh at the transferring member step, the disclosed method can stably manufacture semiconductor devices provided with semiconductor substrates that have concaves or convexes of a fixed level.
    • 公开了半导体器件的制造方法。 所述方法包括:供给步骤,其中将待处理的目标基板(20)氧化和溶解的处理液体(19)供给到待处理的所述基板(20)的表面; 定位步骤,其中设置有催化剂材料的网状转印构件(10b)位于待处理的基板(20)的表面附近或与之接触; 以及通过上述供给和定位步骤在待处理的基板(20)的表面上形成凹或凸的凹凸形成步骤。 与现有制造方法相反,所述制造方法通过在转印构件步骤形成适当的凹或凸或网状物来制造具有高度任意(即不是非常可再现的)凹凸的半导体衬底的半导体器件,所公开的方法可以稳定地制造半导体 设置有具有固定水平的凹陷或凸起的半导体衬底的器件。
    • 25. 发明申请
    • SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • 半导体器件和半导体器件制造方法
    • US20110006310A1
    • 2011-01-13
    • US12742398
    • 2008-11-11
    • Hiroyuki NagasawaNaoki HattaTakamitsu KawaharaHikaru Kobayashi
    • Hiroyuki NagasawaNaoki HattaTakamitsu KawaharaHikaru Kobayashi
    • H01L29/24H01L21/20
    • H01L29/872H01L21/02378H01L21/02433H01L21/02529H01L29/045H01L29/1608H01L29/6606H01L29/66068H01L29/94
    • A semiconductor device comprises a semiconductor substrate made of silicon carbide, a gate insulating film formed on the semiconductor substrate, and a gate electrode formed on the gate insulating film. The junction surface of the semiconductor surface joined with the gate insulating film is macroscopically parallel to a nonpolar face and microscopically comprised of the nonpolar face and a polar face. In the polar face, either a Si face or a C face is dominant. A semiconductor device comprises a semiconductor substrate comprised of silicon carbide and a gate electrode formed on the semiconductor substrate. The junction surface of the semiconductor surface joined with the electrode is macroscopically parallel to a nonpolar face and microscopically comprised of the nonpolar face and a polar face. In the polar face, either a Si face or a C face is dominant. The present invention is a semiconductor device having a silicon carbide substrate, and the electrical characteristics and the stability of the interface between the electrode and the silicon carbide or between the oxide film (insulating film) and the silicon carbide in the nonpolar face of a silicon carbide epitaxial layer can be improved.
    • 半导体器件包括由碳化硅制成的半导体衬底,形成在半导体衬底上的栅极绝缘膜和形成在栅极绝缘膜上的栅电极。 与栅极绝缘膜接合的半导体表面的接合表面在宏观上平行于非极性面并且显微地由非极性面和极面组成。 在极面中,Si面或C面是主要的。 半导体器件包括由碳化硅构成的半导体衬底和形成在半导体衬底上的栅电极。 与电极接合的半导体表面的结表面在宏观上平行于非极性面并且显微地由非极性面和极面组成。 在极面中,Si面或C面是主要的。 本发明是一种具有碳化硅衬底的半导体器件,以及电极和碳化硅之间或氧化膜(绝缘膜)和硅的非极性表面中的碳化硅之间的界面的电特性和稳定性 可以改善碳化物外延层。