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    • 22. 发明授权
    • Method for fabricating image display device
    • 图像显示装置的制造方法
    • US07666769B2
    • 2010-02-23
    • US11702576
    • 2007-02-06
    • Mutsuko HatanoShinya YamaguchiTakeo ShibaMitsuharu TaiHajime Akimoto
    • Mutsuko HatanoShinya YamaguchiTakeo ShibaMitsuharu TaiHajime Akimoto
    • H01L21/20
    • H01L21/02683G02F1/13454H01L21/02532H01L21/02609H01L21/2026H01L27/12H01L27/1285H01L29/04
    • There is provided a method for fabricating an image display device having an active matrix substrate including high-performance transistor circuits operating with high mobility as drive circuits for driving pixel portions which are arranged as a matrix. The portion of a polysilicon film formed in a drive circuit region DAR1 provided on the periphery of the pixel region PAR of the active matrix substrate SUB1 composing the image display device is irradiated and scanned with a pulse modulated laser beam or a pseudo CW laser beam to be reformed into a quasi-strip-like-crystal silicon film having a crystal boundary continuous in the scanning direction so that discrete reformed regions each composed of the quasi-strip-like-crystal silicon film are formed. In virtual tiles TL composed of the discrete reformed regions, drive circuits having active elements such as thin-film transistors or the like are formed such that the channel directions thereof coincide with the direction of crystal growth in the quasi-strip-like-crystal silicon film.
    • 提供一种制造具有有源矩阵基板的图像显示装置的方法,所述有源矩阵基板包括以高迁移率运行的高性能晶体管电路作为用于驱动作为矩阵布置的像素部分的驱动电路。 形成在设置在构成图像显示装置的有源矩阵基板SUB1的像素区域PAR的周围的驱动电路区域DAR1中的多晶硅膜的部分被照射并用脉冲调制激光束或伪CW激光束扫描 重新形成具有在扫描方向上连续的晶体边界的准带状晶体硅膜,从而形成各自由准带状晶体硅膜构成的离散重整区域。 在由分立重构区域构成的虚拟瓦片TL中,形成具有诸如薄膜晶体管等有源元件的驱动电路,使得其沟道方向与准带状晶体硅中的晶体生长方向一致 电影。
    • 24. 发明申请
    • Method of manufacturing display device
    • 显示装置的制造方法
    • US20080292786A1
    • 2008-11-27
    • US12153568
    • 2008-05-21
    • Mutsuko HatanoTakashi Hattori
    • Mutsuko HatanoTakashi Hattori
    • B05D5/06
    • H01L27/1266G02F1/133305G02F1/1368H01L27/1214
    • Provided is a method of manufacturing a display device having a step of forming a resin material layer by curing a resin coated on the main surface of a glass substrate; a step of forming a display circuit configured by a plurality of lamination material layers on the main surface side of said resin material layer; and a step of generating exfoliation at the interface between said resin material layer and said glass substrate, by irradiating a ultraviolet ray from the surface on the opposite side to the surface provided with said display circuit of said glass substrate, and said resin material layer, from which said glass substrate is removed, is used as a substrate provided with said display circuit.
    • 提供一种制造显示装置的方法,该显示装置具有通过固化涂覆在玻璃基板的主表面上的树脂来形成树脂材料层的步骤; 在所述树脂材料层的主表面上形成由多层叠材料层构成的显示电路的步骤; 以及通过从设置有所述玻璃基板的所述显示电路的表面的相反侧的表面照射紫外线和所述树脂材料层,在所述树脂材料层和所述玻璃基板之间的界面处产生剥离的步骤, 将所述玻璃基板从所述玻璃基板除去,用作设置有所述显示电路的基板。
    • 27. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20070155070A1
    • 2007-07-05
    • US11620154
    • 2007-01-05
    • Kiyoshi OUCHIMutsuko HatanoTakeshi SatoMitsuharu Tai
    • Kiyoshi OUCHIMutsuko HatanoTakeshi SatoMitsuharu Tai
    • H01L21/84
    • H01L21/02683H01L21/02532H01L21/02691H01L21/2026H01L27/1285
    • An image display device capable of high-resolution and smooth moving image display, equipped with TFTs in an n-type (or p-type) semiconductor layer with a high on-off ratio and a low resistance. In polysilicon crystallization by laser annealing, an n-type (or p-type) semiconductor layer with a low resistance is produced by performing the following processes in order: implanting nitrogen (N) ions into an amorphous silicon precursor semiconductor film; laser crystallization; implanting n-type (or p-type) dopant ions; and annealing for dopant activation. When fabricating TFTs, this low-resistance semiconductor layer is used to form a source and a drain. Since C, N, and O impurities decrease the mobility of the TFTs, polysilicon is used in which the contaminants concentrations meet the following conditions: carbon concentration ≦3×1019 cm−3, nitrogen concentration ≦5×1017 cm−3, and oxygen concentration ≦3×1019 cm−3.
    • 一种具有高分辨率和平滑运动图像显示的图像显示装置,在具有高开关比和低电阻的n型(或p型)半导体层中配备有TFT。 在通过激光退火的多晶硅结晶中,通过以下步骤进行以下工序来制造具有低电阻的n型(或p型)半导体层:将氮(N)离子注入到非晶硅前驱体半导体膜中; 激光结晶; 注入n型(或p型)掺杂剂离子; 并进行掺杂剂激活退火。 当制造TFT时,该低电阻半导体层用于形成源极和漏极。 由于C,N和O杂质降低了TFT的迁移率,所以使用多晶硅,其中污染物浓度满足以下条件:碳浓度<= 3×10 9 / >,氮浓度<= 5×10 17 cm -3,氧浓度<= 3×10 9 cm -3 -3 / 。
    • 28. 发明授权
    • Apparatus for manufacturing flat panel display devices
    • 用于制造平板显示装置的装置
    • US07193693B2
    • 2007-03-20
    • US10991482
    • 2004-11-19
    • Akio YazakiMikio HongoMutsuko HatanoTakeshi Noda
    • Akio YazakiMikio HongoMutsuko HatanoTakeshi Noda
    • G01N21/00G01J1/00B23K26/06
    • B23K26/073B23K26/702H01L27/14625
    • A mechanism for always measuring the spatial intensity distribution of a laser beam and displacement of the optical axis of the laser beam is provided so that a measured signal is processed when the laser beam incident on a laser beam shaping optical element is out of a predetermined condition. The shape, diameter and incidence position of the laser beam incident on the laser beam shaping optical element are always kept in the predetermined condition by a spatial filter disposed at the position of a focal point of lenses forming a beam expander disposed in the optical axis, on the basis of a result of the signal processing.In this manner, silicon thin films uniform in crystallinity can be formed stably with a high yield on an insulating substrate which forms display panels of flat panel display devices.
    • 提供用于总是测量激光束的空间强度分布和激光束的光轴位移的机构,使得当入射到激光束整形光学元件上的激光束处于预定条件时,处理测量信号 。 入射到激光束整形光学元件上的激光束的形状,直径和入射位置总是通过设置在设置在光轴上的形成光束扩展器的透镜的焦点的位置处的空间滤光器保持在预定条件, 基于信号处理的结果。 以这种方式,可以在形成平板显示装置的显示面板的绝缘基板上以高产率稳定地形成结晶度均匀的硅薄膜。