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21. 发明授权

US07170216B2 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method 有权
标题翻译：双压电开关，双压电晶片开关制造方法，电子电路和电子电路制造方法
公开(公告)号：US07170216B2
公开(公告)日：2007-01-30
申请号：US11040502
申请日：2005-01-21
申请人： Hirokazu Sanpei , Jun Mizuno , Masazumi Yasuoka , Humikazu Takayanagi , Takehisa Takoshima , Masaru Miyazaki , Masayoshi Esashi
发明人： Hirokazu Sanpei , Jun Mizuno , Masazumi Yasuoka , Humikazu Takayanagi , Takehisa Takoshima , Masaru Miyazaki , Masayoshi Esashi
IPC分类号： H01L23/00 , H01H59/00
CPC分类号： H01H61/00 , H01H1/0036 , H01H2061/006
摘要： A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.
摘要翻译：电动连接行走触点和固定触点的双压电晶片开关。开关包括具有前表面，后表面和从前表面到后表面穿透的通孔的基板; 从所述通孔的孔的边缘部分朝向所述孔的内部延伸的固定接触; 以及将移动接触件保持在面对孔径的位置并驱动行驶接触件的双压电晶片部分。双晶片部分的一端可以形成在形成在基板的正面上的氧化硅层上。

22. 发明申请

US20060033389A1 Driving mechanism and micro-mirror device provided with the same 失效
标题翻译：驱动机构和微镜装置相同
公开(公告)号：US20060033389A1
公开(公告)日：2006-02-16
申请号：US11201316
申请日：2005-08-11
申请人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Mizuno , Masanori Maeda , Satoshi Karasawa
发明人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Mizuno , Masanori Maeda , Satoshi Karasawa
IPC分类号： H02K7/00 , G02B7/198
CPC分类号： H02N1/008 , G02B26/0841 , H02K2201/18
摘要： A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.
摘要翻译：相对于框架构件围绕预定转动轴线转动板状构件的驱动机构包括支撑板构件的一对支撑构件，设置在相对于转动轴线的两侧和相同表面上的一对致动器侧板。每个致动器包括固定到框架构件的固定电极单元和固定到板构件的可动电极单元。固定电极单元包括基板，设置在基板的两个表面侧上的一对固定梳电极。可动电极单元包括一对可动梳状电极，每一个可动梳状电极与对应的固定梳状电极接合，并在其间具有间隙。固定梳状电极和对应的可动梳状电极的两对被配置成可以独立地施加电压。

23. 发明授权

US06953938B2 Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus 有权
标题翻译：偏转器，偏转器制造方法和带电粒子束曝光装置
公开(公告)号：US06953938B2
公开(公告)日：2005-10-11
申请号：US10670328
申请日：2003-09-26
申请人： Yuichi Iwasaki , Masato Muraki , Kenji Tamamori , Kouji Asano , Masayoshi Esashi , Yoshinori Nakayama , Shinichi Hashimoto , Yoshiaki Moro
发明人： Yuichi Iwasaki , Masato Muraki , Kenji Tamamori , Kouji Asano , Masayoshi Esashi , Yoshinori Nakayama , Shinichi Hashimoto , Yoshiaki Moro
IPC分类号： H01J37/147 , H01J37/304
CPC分类号： H01J37/045 , B82Y10/00 , B82Y40/00 , H01J37/1477 , H01J37/3174 , H01J2237/0437 , H01J2237/31774
摘要： A deflector which deflects a charged particle beam includes a substrate having an opening through which the charged particle beam should pass, and a deflection electrode which is arranged in the opening to deflect the charged particle beam and has a first conductive member and second conductive member, which are formed by plating. The second conductive member is formed on the surface of the first conductive member and is made of a material that is more difficult to oxidize than the first conductive member. The first conductive member is made of a material having smaller residual stress than the second conductive member.
摘要翻译：使带电粒子束偏转的偏转器包括具有带电粒子束应通过的开口的基板和布置在开口中以偏转带电粒子束并具有第一导电构件和第二导电构件的偏转电极，它们通过电镀形成。第二导电构件形成在第一导电构件的表面上，并且由比第一导电构件更难氧化的材料制成。第一导电部件由残留应力小于第二导电部件的材料制成。

24. 发明授权

US06584843B2 Gyroscope and input unit using the same 失效
标题翻译：陀螺仪和输入单元使用相同
公开(公告)号：US06584843B2
公开(公告)日：2003-07-01
申请号：US09862554
申请日：2001-05-22
申请人： Munemitsu Abe , Masayoshi Esashi
发明人： Munemitsu Abe , Masayoshi Esashi
IPC分类号： G01P904
CPC分类号： G01C19/5607
摘要： A gyroscope includes a tuning fork, which includes a plurality of tines formed of a conductive material and a supporting portion; an upper glass substrate and a lower glass substrate which sandwich the tuning fork; drive electrodes which are provided on each of the upper and the lower glass substrates in such a manner that parts of the drive electrodes oppose the tines and the remaining parts protrude from the tines, the drive electrodes being capacitively coupled to the tines and driving the tines in a direction parallel to the substrates; and detection electrodes which are capacitively coupled to the tines, and which detect displacements of the tines in a direction perpendicular to the vibrating direction of the tines.
摘要翻译：陀螺仪包括音叉，音叉包括由导电材料形成的多个尖齿和支撑部分; 夹着音叉的上玻璃基板和下玻璃基板; 驱动电极，其设置在上部玻璃基板和下部玻璃基板中的每一个上，使得驱动电极的一部分与尖齿相对，其余部分从齿突出，驱动电极电容耦合到齿并驱动尖齿在平行于基板的方向上; 以及与电位耦合到尖齿的检测电极，并且检测尖齿在与尖齿的振动方向垂直的方向上的位移。

25. 发明授权

US06505409B2 Inclinometer 失效
公开(公告)号：US06505409B2
公开(公告)日：2003-01-14
申请号：US09449882
申请日：1999-11-30
申请人： Risaku Toda , Masayoshi Esashi
发明人： Risaku Toda , Masayoshi Esashi
IPC分类号： G01C1510
CPC分类号： G01C9/10 , G01C2009/068
摘要： An inclinometer comprising a spherical mass, a spherical shell having a reference axis and surrounding said spherical mass and a plurality of electrodes mounted on the spherical inner surface of said spherical shell, said inclinometer applied to detect the inclination angle of said reference axis by the output signal of said electrodes.

26. 发明授权

US06441451B1 Pressure transducer and manufacturing method thereof 有权
公开(公告)号：US06441451B1
公开(公告)日：2002-08-27
申请号：US09342065
申请日：1999-06-29
申请人： Masaharu Ikeda , Masayoshi Esashi
发明人： Masaharu Ikeda , Masayoshi Esashi
IPC分类号： H01L2982
CPC分类号： H04R31/00 , H04R19/00 , H04R19/005 , H04R19/04 , H04R31/003
摘要： A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing the same are provided. The transducer includes a fixed electrode formed in an upper surface of a substrate and a moving electrode provided in the diaphragm disposed above the fixed electrode through a cavity. The substrate has formed in the bottom thereof at least one hole which is used in a manufacturing process for removing a sacrificial layer formed between the diaphragm and the upper surface of the substrate in dry etching to form the cavity.

27. 发明授权

US06278224B1 Ultrasonic transducer and method for manufacturing the same 有权
标题翻译：超声波换能器及其制造方法
公开(公告)号：US06278224B1
公开(公告)日：2001-08-21
申请号：US09363633
申请日：1999-07-29
申请人： Yukihiko Sawada , Tomoki Funakubo , Katsuhiro Wakabayashi , Shinan Wang , Masayoshi Esashi
发明人： Yukihiko Sawada , Tomoki Funakubo , Katsuhiro Wakabayashi , Shinan Wang , Masayoshi Esashi
IPC分类号： H01L4108
CPC分类号： B06B1/0622
摘要： An ultrasonic transducer comprising, a piezoelectric block which is formed into a plurality of piezoelectric segments by way of one or more slots, spaced apart, on one main surface of the block, the segments being connected with each other at one and the other of the opposed main surfaces of the block, an organic filler filled at least partially in the slots, a first and a second electrodes formed respectively on the one and the other of the continuous main surfaces of the segments, an acoustic matching layer formed on the one main surface of the piezoelectric block, and a backing material formed on the other main surface of the piezoelectric block.
摘要翻译：一种超声波换能器，包括：压电块，其在所述块的一个主表面上通过间隔开的一个或多个槽形成为多个压电段，所述段彼此相互连接，所述块的相对的主表面，至少部分地填充在所述槽中的有机填料，分别形成在所述段的连续主表面中的一个和另一个上的第一和第二电极，形成在所述一个主体上的声匹配层压电块的表面和形成在压电块的另一个主表面上的背衬材料。

28. 发明授权

US5767666A Planar type mirror galvanometer incorpotating a displacement detection function 失效
标题翻译：平面式反射镜具有位移检测功能
公开(公告)号：US5767666A
公开(公告)日：1998-06-16
申请号：US530103
申请日：1995-09-26
申请人： Norihiro Asada , Masayoshi Esashi
发明人： Norihiro Asada , Masayoshi Esashi
IPC分类号： G02B26/08 , G02B26/10 , G01R13/38
CPC分类号： G02B26/0841 , G02B26/0816 , G02B26/105
摘要： The present invention relates to a slim-type small size mirror galvanometer wherein the mirror displacement angle can be detected, made using semiconductor manufacturing techniques. Using semiconductor manufacturing techniques, a movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 are formed integrally on a silicon substrate 2, with a planar coil 7 and a total reflecting mirror 8 formed on an upper face of the movable plate 5, and permanent magnets 10A, 10B and 11A, 11B fixedly located so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the swing angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force in the torsion bar 6. Moreover, detection coils 12A, 12B are provided beneath the movable plate 5, and a detection current is superimposed on the drive current in the planar coil 7. The mirror displacement angle is detected by a change in the mutual inductance due to the detection current, between the planar coil and the detection coils 12A, 12B.
摘要翻译： PCT No.PCT / JP95 / 00066 Sec。 371日期：1995年9月26日 102（e）1995年9月26日PCT PCT 1995年1月23日PCT公布。公开号WO95 / 20774 日期：1995年8月3日本发明涉及一种薄型小型反射镜电流计，其中可以使用半导体制造技术来检测反射镜位移角。使用半导体制造技术，可动板5和用于轴向支撑可动板5的扭力杆6一体地形成在硅基板2上，平面线圈7和形成在可动板的上表面上的全反射镜8 5以及固定在永久磁铁10A，10B，11A，11B上，以便在平面线圈7处产生磁场。控制平面线圈7中流动的电流的方向和数量，以可变地控制可动板5依赖于产生的磁力与扭力杆6的扭转力之间的平衡。此外，检测线圈12A，12B设置在可动板5的下方，检测电流叠加在平面线圈的驱动电流上通过由平面线圈和检测线圈12A，12B之间的检测电流引起的互感变化来检测反射镜位移角。

29. 发明授权

US5442303A Electromagnetically coupled fail-safe logic circuit 失效
标题翻译：电磁耦合故障安全逻辑电路
公开(公告)号：US5442303A
公开(公告)日：1995-08-15
申请号：US204405
申请日：1994-03-16
申请人： Norihiro Asada , Masakazu Kato , Koichi Futsuhara , Masayoshi Esashi
发明人： Norihiro Asada , Masakazu Kato , Koichi Futsuhara , Masayoshi Esashi
IPC分类号： H03K19/007 , H03K19/003
CPC分类号： H03K19/007
摘要： A fail-safe logic circuit employs a transformer (T) and a level tester (1). The transformer receives input signals each representing a binary logic variable and provides the sum of magnetic flux based on the input signals. The level tester tests the level of the sum of the magnetic flux and provides a binary output (y) representing a logic value of 1 or 0. This circuit is simple and capable of lowering an output level.
摘要翻译： PCT No.PCT / JP92 / 00911 Sec。 371日期1994年3月16日 102（e）1994年3月16日PCT提交1992年7月16日PCT公布。出版物WO94 / 00292 日期：1994年2月3日。故障安全逻辑电路采用变压器（T）和电平测试仪（1）。变压器接收各自表示二进制逻辑变量的输入信号，并根据输入信号提供磁通量之和。电平测试仪测试磁通总和的电平，并提供表示逻辑值为1或0的二进制输出（y）。该电路简单，能够降低输出电平。

30. 发明授权

US09478503B2 Integrated device 有权
标题翻译：集成设备
公开(公告)号：US09478503B2
公开(公告)日：2016-10-25
申请号：US14389103
申请日：2013-02-28
申请人： Mitsutoshi Makihata , Masayoshi Esashi , Shuji Tanaka , Masanori Muroyama , Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Hitoshi Yamada , Takahiro Nakayama , Ui Yamaguchi
发明人： Mitsutoshi Makihata , Masayoshi Esashi , Shuji Tanaka , Masanori Muroyama , Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Hitoshi Yamada , Takahiro Nakayama , Ui Yamaguchi
IPC分类号： H01L23/552 , H01L23/538 , B81B7/00 , H01L21/78 , H01L21/683 , H01L21/306 , H01L25/18 , H01L27/06 , H01L25/07 , H01L25/16 , B81C1/00 , H01L25/00 , H01L29/06
CPC分类号： H01L23/552 , B81B7/008 , B81C1/00238 , B81C2203/0792 , H01L21/3043 , H01L21/30625 , H01L21/6835 , H01L21/6836 , H01L21/76898 , H01L21/78 , H01L23/5386 , H01L25/072 , H01L25/16 , H01L25/18 , H01L25/50 , H01L27/0611 , H01L29/0657 , H01L2221/68327 , H01L2224/94 , H01L2924/0002 , H01L2924/00 , H01L2224/03
摘要： An integrated device with high insulation tolerance is provided. A groove having an inclined side surface is provided between adjacent devices. When a side where an electronic circuit or MEMS device is mounted is a front surface, the groove becomes narrower from the front surface to a back surface because of the inclined surface. A mold material (insulating material) is disposed inside the groove, so that the plurality of devices are mechanically joined together, being electrically insulated from one another. A line member that establishes an electrical conduction between the adjacent devices is formed to lie along the side surface and the bottom surface of the groove. To lead the line out to the backside, the bottom surface of the groove has a hole, so that the line member is exposed to the backside from the hole.
摘要翻译：提供了具有高绝缘公差的集成器件。在相邻的装置之间设有具有倾斜侧面的凹槽。当安装电子电路或MEMS装置的一侧是前表面时，由于倾斜表面，凹槽从前表面变窄到后表面。模具材料（绝缘材料）设置在凹槽内，使得多个装置机械地接合在一起，彼此电绝缘。形成相邻器件之间形成电导通的线构件沿着沟槽的侧表面和底表面。为了将线导出到背面，凹槽的底表面具有孔，使得线构件从孔的背面露出。

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