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    • 22. 发明申请
    • Method for producing nitride semiconductor laser light source and apparatus for producing nitride semiconductor laser light source
    • 氮化物半导体激光光源的制造方法及氮化物半导体激光光源的制造装置
    • US20060068516A1
    • 2006-03-30
    • US11237946
    • 2005-09-29
    • Daisuke HanaokaMasaya IshidaAtsushi OgawaYoshihiko TaniTakuro Ishikura
    • Daisuke HanaokaMasaya IshidaAtsushi OgawaYoshihiko TaniTakuro Ishikura
    • H01L21/00B29C65/00
    • H01S5/02212H01S5/0222H01S5/32341Y10T29/5176
    • A method for producing a nitride semiconductor laser light source is provided. The nitride semiconductor laser light source has a nitride semiconductor laser chip, a stem for mounting the laser chip thereon, and a cap for covering the laser chip. The laser chip is encapsulated in a sealed container composed of the stem and the cap. The method for producing this nitride semiconductor laser light source has a cleaning step of cleaning the surface of the laser chip, the stem, or the cap. In the cleaning step, the laser chip, the stem, or the cap is exposed with ozone or an excited oxygen atom, or baked by heat. The method also has, after the cleaning step, a capping step of encapsulating the laser chip in the sealed container composed of the stem and the cap. During the capping step, the cleaned surface of the laser chip, the stem, or the, cap is kept clean. This method provides a long-life nitride semiconductor laser light source the light emission intensity of which is not easily reduced after a long period of use.
    • 提供一种生产氮化物半导体激光光源的方法。 氮化物半导体激光光源具有氮化物半导体激光器芯片,用于在其上安装激光器芯片的杆和用于覆盖激光器芯片的盖。 激光芯片被封装在由杆和盖组成的密封容器中。 用于制造该氮化物半导体激光光源的方法具有清洁激光芯片,杆或盖的表面的清洁步骤。 在清洁步骤中,激光芯片,阀杆或盖子暴露于臭氧或激发氧原子,或通过加热进行烘烤。 该方法在清洁步骤之后还具有将激光芯片封装在由杆和盖组成的密封容器中的封盖步骤。 在封盖步骤中,激光芯片,杆或盖的清洁表面保持清洁。 该方法提供了长期使用后其发光强度不容易降低的长寿命氮化物半导体激光光源。