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21. 发明申请

US20180347759A1 DIGITAL REGULATED GAS DISPENSING APPARATUS WITH A MEMS MASS FLOW METER 审中-公开
公开(公告)号：US20180347759A1
公开(公告)日：2018-12-06
申请号：US15609518
申请日：2017-05-31
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： F17C13/02 , F17C13/04 , G01F1/684 , G01F1/696 , A61M16/10 , A61M16/16
CPC分类号： F17C13/02 , A61M16/1005 , A61M16/16 , A61M2016/0033 , A61M2202/0208 , A61M2205/0244 , A61M2205/3334 , A61M2205/3584 , A61M2205/50 , F17C13/04 , F17C2201/0109 , F17C2201/032 , F17C2205/0329 , F17C2205/0338 , F17C2221/011 , F17C2250/032 , F17C2250/034 , F17C2250/0426 , F17C2250/0443 , F17C2250/0491 , F17C2250/0495 , F17C2265/06 , F17C2270/025 , F17C2270/05 , G01F1/6845 , G01F1/696
摘要： The design and structure of a regulated digital dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.

22. 发明申请

US20180172532A1 MICROMACHINED PRESSURE SENSOR AND METHOD OF MAKING THE SAME 审中-公开
公开(公告)号：US20180172532A1
公开(公告)日：2018-06-21
申请号：US15380035
申请日：2016-12-15
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L9/00
CPC分类号： G01L9/0051
摘要： The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

23. 发明申请

US20160238257A1 Smart Device for Gas Range 有权
标题翻译：燃气范围智能装置
公开(公告)号：US20160238257A1
公开(公告)日：2016-08-18
申请号：US14621043
申请日：2015-02-12
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： F24C3/12 , F23N1/00
CPC分类号： F24C3/126 , F23N5/242 , F23N2025/06 , F23N2031/00 , F23N2041/08 , F23N2900/01001
摘要： The design and assembly of a smart device constituent of a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and an electrically controllable valve for applications in safety enhancement and intermit connectivity for residential or commercial gas range is disclosed in the present invention. The said smart device detects the gas flow at the unattended situations and sends information to the destined mobile devices of the use via the network such that it enables the users to remotely execute actions of either shutting off the gas supply or call for relevant party's immediate attention. The said smart device shall also automatically shut off the gas supply should the transmitted signal to users failed to send feedback signal such that it can prevent the safety incidents due to leakage or overheating or even fires. The capability of the MEMS mass flow sensor shall also provide the thermal value measurement of the supplied gases and enable the user to program the gas range for making complete tasks of cooking substances in the unattended situation.
摘要翻译：本发明公开了微加工（也称为MEMS，微机电系统）质量流量传感器和用于住宅或商业气体范围的安全增强和间歇连接应用的电控阀的智能装置构件的设计和组装发明。所述智能设备在无人值守的情况下检测气体流量，并通过网络向目的地的移动设备发送信息，使得用户能够远程执行关闭气体供应或呼叫相关方立即关注的动作。所述智能设备还应自动关闭供气，如果发送信号给用户未能发送反馈信号，以防止由于泄漏或过热甚至火灾引起的安全事故。 MEMS质量流量传感器的能力还应提供所供应气体的热值测量，使用户能够在无人值守情况下对烹饪物质的完整任务进行气体范围的编程。

24. 发明申请

US20140283595A1 MICROMACHINED MASS FLOW SENSOR WITH CONDENSATION PREVENTION AND METHOD OF MAKING THE SAME 有权
标题翻译：具有凝结预防的微型流量传感器及其制造方法
公开(公告)号：US20140283595A1
公开(公告)日：2014-09-25
申请号：US13847045
申请日：2013-03-19
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/699 , G01F1/684
CPC分类号： G01F1/699 , G01F1/6845 , G01F1/692
摘要： The design and manufacture method of a silicon mass flow sensor made with silicon Micromachining MEMS, Micro Electro Mechanical Systems) process for applications of gas flow measurement with highly humidified or liquid vapors is disclosed in the present invention. The said silicon mass flow sensor operates with an embedded heater and an adjacent control temperature sensor beneath the integrated calorimetric and thermal dissipative sensing thermistors. When the condensation takes place at the surface of the said silicon mass flow sensor, the embedded heater shall be turned on to elevate the temperature of the supporting membrane or substrate for the sensing thermistors. The elevated temperature shall be adjusted to above the vaporization temperature with the feedback data of the adjacent temperature sensor such that the surface condensation due to the presence of the liquid vapors in a gas flow can be effectively eliminated.
摘要翻译：在本发明中公开了用硅微米加工MEMS制造的硅质量流量传感器的设计和制造方法，微机电系统）用于具有高度加湿或液体蒸气的气流测量的应用过程。所述硅质量流量传感器使用嵌入式加热器和在集成的量热和热耗散感测热敏电阻之下的相邻控制温度传感器来操作。当冷凝发生在所述硅质量流量传感器的表面时，嵌入式加热器应被打开以升高感测热敏电阻的支撑膜或基底的温度。应使用相邻温度传感器的反馈数据将升高的温度调节到高于蒸发温度，以便能够有效地消除气流中存在液体蒸汽的表面冷凝。

25. 发明申请

US20140190252A1 MEMS MASS FLOW SENSOR ASSEMBLY AND METHOD OF MAKING THE SAME 有权
标题翻译： MEMS质量流量传感器组件及其制造方法
公开(公告)号：US20140190252A1
公开(公告)日：2014-07-10
申请号：US13736941
申请日：2013-01-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/69
CPC分类号： G01F1/69 , G01F1/684 , G01F1/6845 , G01F1/692
摘要： A silicon mass flow sensor manufacture process that enables the backside contacts and eliminates the conventional front side wire binding process, and the assembly of such a mass flow sensor is disclosed in the present invention. The achieved assembly enhances the reliability by eliminating the binding wire exposure to the flow medium that may lead to detrimental failure due to the wire shortage or breakage while the miniature footprint could be maintained. The assembly further reduces flow instability from the flow sensor package including the bump of wire sealing. The invented mass flow sensor assembly can be a flow sensor module if the supporting sensor carrier is pre-designed with the control electronics. Without the control electronics, the said mass flow sensor assembly is easy to install into desired flow channels and connect to the external control electronics.
摘要翻译：硅质量流量传感器制造方法，其能够实现背面接触并消除常规的前侧线束粘合过程，并且在本发明中公开了这种质量流量传感器的组装。实现的组件通过消除可能导致由于电线短缺或断裂而导致有害故障的流动介质的接合线而增强了可靠性，同时可以保持微小的占地面积。该组件进一步减少了流量传感器封装的流动不稳定性，包括电线密封凸块。如果支撑传感器载体与控制电子装置预先设计，则本发明的质量流量传感器组件可以是流量传感器模块。没有控制电子器件，所述质量流量传感器组件易于安装到期望的流动通道中并连接到外部控制电子装置。

26. 发明申请

US20140190251A1 Micromachined Flow Sensor Integrated with Flow Inception Detection and Make of the Same 有权
标题翻译：微加工流量传感器与流量初始检测集成在一起
公开(公告)号：US20140190251A1
公开(公告)日：2014-07-10
申请号：US13737784
申请日：2013-01-09
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/688
CPC分类号： G01F1/6888 , G01F1/6845 , G01F1/692 , G01F1/696
摘要： This invention is related to a microfabricated microelectromechanical systems (a.k.a. MEMS) silicon thermal mass flow sensor integrated with a micromachined thermopile temperature sensor as a flow inception detection sensor. The micromachined thermopile sensor is used to detect the inception of mass flow and therefore to trigger the operation of mass flow sensor from its hibernating mode. By this method, the battery-operated flow speed measuring apparatus can save great deal of electricity and significantly extend the life span of battery. A new design of micromachined thermopile sensor with serpentine shape is used to reduce the complexity of microfabrication process and to increase the flexibility and options for material selection. In order to enhance the sensitivity of the thermopile temperature sensor, a method to maximize the quantity of the junctions is provided as well.
摘要翻译：本发明涉及与微加热热电堆温度传感器集成的微加工微机电系统（即MEMS）硅热质量流量传感器，作为流入口检测传感器。微加工热电堆传感器用于检测质量流量的开始，从而触发质量流量传感器从其休眠模式的操作。通过这种方法，电池操作的流速测量装置可以节省大量的电力并显着延长电池的使用寿命。使用具有蛇形形状的微加工热电堆传感器的新设计来降低微细加工过程的复杂性，并增加材料选择的灵活性和选择。为了提高热电堆温度传感器的灵敏度，还提供了使接点数量最大化的方法。

27. 发明申请

US20120001273A1 Micro-package for Micromachining Liquid Flow Sensor Chip 审中-公开
标题翻译：微加工液体流量传感器芯片微包装
公开(公告)号：US20120001273A1
公开(公告)日：2012-01-05
申请号：US12830237
申请日：2010-07-02
申请人： Chih-Chang Chen , Liji Huang
发明人： Chih-Chang Chen , Liji Huang
IPC分类号： H01L29/66
CPC分类号： G01F1/6842 , G01F1/6845
摘要： The current invention disclosed a micro-package design for packaging of micromachining liquid flow sensor. The package in present invention is fabricated with micromachining or micro-molding approach, which can greatly reduce the manufacturing cost due to the batch production. The micro-package design provides packaging solution for general micromachining liquid flow sensors that can enable various microfluidic applications while reaching the cost threshold for a disposable unit.
摘要翻译：本发明公开了一种用于微加工液体流量传感器的包装的微封装设计。本发明的封装采用微加工或微型成型方法制造，这可以大大降低由于批量生产而产生的制造成本。微封装设计提供了一般微加工液体流量传感器的封装解决方案，可以实现各种微流体应用，同时达到一次性单元的成本阈值。

28. 发明申请

US20090158859A1 Micromachined Thermal Mass Flow Sensor With Self-Cleaning Capability And Methods Of Making the Same 有权
标题翻译：具有自清洁能力的微加工热质量流量传感器及其制作方法
公开(公告)号：US20090158859A1
公开(公告)日：2009-06-25
申请号：US11960261
申请日：2007-12-19
申请人： Liji Huang , Chih-Chang Chen , Yahong Yao , Gaofeng Wang
发明人： Liji Huang , Chih-Chang Chen , Yahong Yao , Gaofeng Wang
IPC分类号： G01F1/78 , B05D1/00
CPC分类号： G01F1/6845 , G01F1/6888 , G01F15/006
摘要： The current invention generally relates to Micro Electro Mechanical Systems (MEMS) thermal mass flow sensors for measuring the flow rate of a flowing fluid (gas/liquid) and the methods of manufacturing on single crystal silicon wafers. The said mass flow sensors have self-cleaning capability that is achieved via the modulation of the cavity of which the sensing elements locate on the top of the cavity that is made of a silicon nitride film; alternatively the sensing elements are fabricated on top of a binary silicon nitride/conductive polycrystalline silicon film under which is a porous silicon layer selective formed in a silicon substrate. Using polycrystalline silicon or the sensing elements as electrodes, an acoustic wave can be generated across the porous silicon layer which is also used for the thermal isolation of the sensing elements. The vibration or acoustic energy is effective to remove foreign materials deposited on top surface of the sensing elements that ensure the accuracy and enhance repeatability of the thermal mass flow sensing.
摘要翻译：本发明通常涉及用于测量流动流体（气体/液体）的流量的微机电系统（MEMS）热质量流量传感器以及在单晶硅晶片上的制造方法。所述质量流量传感器具有自清洁能力，其通过其感测元件位于由氮化硅膜制成的空腔顶部上的空腔的调制而实现; 或者，感测元件制造在二元氮化硅/导电多晶硅膜的顶部，在二元氮化硅/导电多晶硅膜的下方是选择性地形成在硅衬底中的多孔硅层。使用多晶硅或感测元件作为电极，可以跨多孔硅层产生声波，其也用于感测元件的热隔离。振动或声能有效地去除沉积在感测元件的顶表面上的异物，以确保精确度并增强热质量流量感测的重复性。

29. 发明申请

US20080271525A1 Micromachined mass flow sensor and methods of making the same 有权
标题翻译：微加工质量流量传感器及其制造方法
公开(公告)号：US20080271525A1
公开(公告)日：2008-11-06
申请号：US11985879
申请日：2008-04-03
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F1/69
CPC分类号： G03H1/0891 , G03H1/0244 , G03H1/08 , G03H2001/0858 , G03H2210/30 , G03H2210/454 , G03H2223/12 , G03H2240/13 , G03H2240/23
摘要： A mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or lightly doped P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane.
摘要翻译：通过在取向<100>的N或轻掺杂P型硅衬底上进行微加工工艺的方法制造质量流量传感器。该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成直到底部介电薄膜层暴露。在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。

30. 发明申请

US20070011867A1 Micromachined mass flow sensor and methods of making the same 有权
标题翻译：微加工质量流量传感器及其制造方法
公开(公告)号：US20070011867A1
公开(公告)日：2007-01-18
申请号：US11523436
申请日：2006-09-19
申请人： Yahong Yao , Chih-Chang Chen , Gafeng Wang , Liji Huang
发明人： Yahong Yao , Chih-Chang Chen , Gafeng Wang , Liji Huang
IPC分类号： H01B13/00
CPC分类号： G01F1/6845 , Y10T29/49082 , Y10T29/49083 , Y10T29/49117 , Y10T29/49124 , Y10T29/49155
摘要： A mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or lightly doped P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane.
摘要翻译：通过在取向<100>的N或轻掺杂P型硅衬底上进行微加工工艺的方法制造质量流量传感器。该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成直到底部介电薄膜层暴露。在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。

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