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21. 发明授权

US08158493B2 Laser-based material processing methods and systems 有权
标题翻译：基于激光的材料加工方法和系统
公开(公告)号：US08158493B2
公开(公告)日：2012-04-17
申请号：US12641256
申请日：2009-12-17
申请人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
发明人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
IPC分类号： H01L21/00
CPC分类号： H01L21/268 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2101/40 , B23K2103/50
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. Embodiments of an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may also include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond, picosecond, and/or nanosecond pulses.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料有效地从该区域移除并且在该区域内靠近该区域的一些不想要的材料，或者两者相对于以较低的重复率可获得的量减少。超短脉冲激光系统的实施例可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。工件材料还可以包括金属，无机或有机电介质，或任何要用飞秒，皮秒和/或纳秒脉冲微加工的材料。

22. 发明申请

US20110064096A1 Mid-IR laser employing Tm fiber laser and optical parametric oscillator 审中-公开
标题翻译：采用Tm光纤激光器和光参量振荡器的中红外激光器
公开(公告)号：US20110064096A1
公开(公告)日：2011-03-17
申请号：US12586011
申请日：2009-09-16
申请人： Lawrence Shah , Martin C. Richardson
发明人： Lawrence Shah , Martin C. Richardson
IPC分类号： H01S3/30
CPC分类号： G02F1/39 , H01S3/08004 , H01S3/0809 , H01S3/09415 , H01S3/117 , H01S3/1616
摘要： A laser system that generates light in the mid-infrared (mid-IR) wavelength range is disclosed. The laser system includes an optical fiber laser having a thulium-doped optical fiber gain medium and that is configured to generate pump light having an optical power of greater than 50 W. The laser system also includes an optical parametric oscillator (OPO) arranged to receive the pump light and configured to generate therefrom, via spontaneous parametric downconversion, mid-IR-wavelength output light. A phase-matching tuning curve is used to select the pump wavelength that provides desired signal and idler wavelengths for the outputted signal and idler light. The laser system is capable of generating high-mode-quality 100 ns optical pulses with about 400 μJ energy at an average power greater than 5 W, in some cases up to several tens of Watts, and in some cases greater than 50 W at the pump wavelength.
摘要翻译：公开了一种在中红外（中红外）波长范围内产生光的激光系统。该激光系统包括具有ium掺杂光纤增益介质的光纤激光器，其被配置为产生光功率大于50W的泵浦光。激光系统还包括光学参量振荡器（OPO），其被配置为接收泵浦光并经配置以通过自发参数下变频产生中红外波长输出光。使用相位匹配调谐曲线来选择为输出信号和空闲光提供期望信号和惰性波长的泵浦波长。激光系统能够产生大约400μJ能量的高模式质量的100 ns光脉冲，平均功率大于5 W，在某些情况下可达几十瓦，在某些情况下，大于50 W 泵浦波长。

23. 发明申请

US20060285561A1 Pulsed laser source with adjustable grating compressor 审中-公开
标题翻译：脉冲激光源与可调光栅压缩机
公开(公告)号：US20060285561A1
公开(公告)日：2006-12-21
申请号：US11433072
申请日：2006-05-12
申请人： Lawrence Shah , Shane Eaton , Peter Herman
发明人： Lawrence Shah , Shane Eaton , Peter Herman
IPC分类号： H01S3/10
CPC分类号： H01S3/0057 , B23K26/0624 , G02B6/02138 , G02B6/02142 , G02B6/02147 , G02B6/13
摘要： Various embodiments described herein relate to a laser source for producing a pulsed laser beam comprising a plurality of ultrashort optical pulses having a variable repetition rate. In one embodiment, the laser source comprises a fiber oscillator, which outputs optical pulses and a pulse stretcher disposed to receive the optical pulses. The optical pulses have an optical pulse width. The pulse stretcher has dispersion that increases the optical pulse width yielding stretched optical pulses. The laser source further comprises a fiber amplifier disposed to receive the stretched optical pulses. The fiber optical amplifier has gain so as to amplify the stretched optical pulses. The laser source includes an automatically adjustable grating compressor having dispersion that reduces the optical pulse width. The grating compressor automatically adjusts this dispersion for different repetition rates.
摘要翻译：本文描述的各种实施例涉及用于产生脉冲激光束的激光源，其包括具有可变重复率的多个超短光脉冲。在一个实施例中，激光源包括输出光脉冲的光纤振荡器和布置成接收光脉冲的脉冲展宽器。光脉冲具有光脉冲宽度。脉冲展宽器具有增加产生拉伸光脉冲的光脉冲宽度的色散。激光源还包括光纤放大器，用于接收延伸的光脉冲。光纤放大器具有增益以便放大拉伸的光脉冲。激光源包括具有降低光脉冲宽度的色散的自动调节光栅压缩器。光栅压缩机自动调整不同重复率的色散。

24. 发明申请

US20120196454A1 LASER-BASED MATERIAL PROCESSING METHODS AND SYSTEMS 失效
标题翻译：基于激光的材料加工方法与系统
公开(公告)号：US20120196454A1
公开(公告)日：2012-08-02
申请号：US13421372
申请日：2012-03-15
申请人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
发明人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
IPC分类号： H01L21/26 , B23K26/38 , H01L21/461
CPC分类号： H01L21/268 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2101/40 , B23K2103/50
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. Embodiments of an ultrashort pulse laser system may include a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond, picosecond, and/or nanosecond pulses.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料有效地从该区域移除并且在该区域内靠近该区域的一些不想要的材料，或者两者相对于以较低的重复率可获得的量减少。超短脉冲激光系统的实施例可以包括光纤放大器或光纤激光器。各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。工件材料可以包括金属，无机或有机电介质，或任何要用飞秒，皮秒和/或纳秒脉冲微加工的材料。

25. 发明授权

US07684450B2 Pulsed laser source with adjustable grating compressor 有权
标题翻译：脉冲激光源与可调光栅压缩机
公开(公告)号：US07684450B2
公开(公告)日：2010-03-23
申请号：US11314197
申请日：2005-12-20
申请人： Lawrence Shah
发明人： Lawrence Shah
IPC分类号： H01S3/10
CPC分类号： H01S3/0057 , B23K26/0624 , G02B6/02138 , G02B6/02142 , G02B6/02147 , G02B6/13
摘要： Various embodiments described herein relate to a laser source for producing a pulsed laser beam comprising a plurality of ultrashort optical pulses having a variable repetition rate. In one embodiment, the laser source comprises a fiber oscillator, which outputs optical pulses and a pulse stretcher disposed to receive the optical pulses. The optical pulses have an optical pulse width. The pulse stretcher has dispersion that increases the optical pulse width yielding stretched optical pulses. The laser source further comprises a fiber amplifier disposed to receive the stretched optical pulses. The fiber optical amplifier has gain so as to amplify the stretched optical pulses. The laser source includes an automatically adjustable grating compressor having dispersion that reduces the optical pulse width. The grating compressor automatically adjusts this dispersion for different repetition rates.
摘要翻译：本文描述的各种实施例涉及用于产生脉冲激光束的激光源，其包括具有可变重复率的多个超短光脉冲。在一个实施例中，激光源包括输出光脉冲的光纤振荡器和布置成接收光脉冲的脉冲展宽器。光脉冲具有光脉冲宽度。脉冲展宽器具有增加产生拉伸光脉冲的光脉冲宽度的色散。激光源还包括光纤放大器，用于接收延伸的光脉冲。光纤放大器具有增益以便放大拉伸的光脉冲。激光源包括具有降低光脉冲宽度的色散的自动调节光栅压缩器。光栅压缩机自动调整不同重复率的色散。

26. 发明申请

US20060207976A1 Laser material micromachining with green femtosecond pulses 审中-公开
标题翻译：激光材料微加工与绿色飞秒脉冲
公开(公告)号：US20060207976A1
公开(公告)日：2006-09-21
申请号：US11336383
申请日：2006-01-20
申请人： James Bovatsek , Alan Arai , Lawrence Shah , Fumiyo Yoshino
发明人： James Bovatsek , Alan Arai , Lawrence Shah , Fumiyo Yoshino
IPC分类号： B23K26/38 , B23K26/06
CPC分类号： B23K26/0624 , B23K26/0006 , B23K26/364 , B23K26/40 , B23K2103/172 , B23K2103/30 , B23K2103/42 , B23K2103/50 , C03B33/0222 , H01S3/0057
摘要： Various embodiments of a system described herein relate to micromachining materials using ultrashort visible laser pulses. The ultrashort laser pulses may be green and have a wavelength between about 500 to 550 nanometers in some embodiments. Additionally, the pulses may have a pulse duration of less than one picosecond in certain embodiments.
摘要翻译：本文描述的系统的各种实施例涉及使用超短可见激光脉冲的微加工材料。在一些实施例中，超短激光脉冲可以是绿色的并且具有在约500至550纳米之间的波长。另外，在某些实施例中，脉冲可以具有小于1皮秒的脉冲持续时间。

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