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    • 26. 发明授权
    • Pressure sensor
    • 压力传感器
    • US06591683B1
    • 2003-07-15
    • US10203453
    • 2002-08-09
    • Naoki YutaniHiroshi OhjiKazuhiko Tsutsumi
    • Naoki YutaniHiroshi OhjiKazuhiko Tsutsumi
    • G01L1904
    • G01L11/002
    • A pressure sensor includes a diaphragm having a first surface receiving pressure, and a first thermal detection section opposed to a central section of the diaphragm through a spacer and having a thermo-sensitive resistance section, and a second thermal detection section opposed to an end section of the diaphragm and having a thermo-sensitive resistance section, wherein the first thermo-sensitive resistance section and second thermo-sensitive resistance section are connected to independent, adjustable constant-current sources, respectively, and are connected to a differential amplifier which amplifies a difference between (i) a voltage of the first thermal detection section, which detects a displacement quantity of the diaphragm due to pressure change as a displacement quantity of a thermal equilibrium state by the thermal detection section, and (ii) a voltage of the second thermal detection section, which does not change according to pressure. The sensor can measure pressure with high accuracy.
    • 压力传感器包括具有第一表面接收压力的隔膜和通过间隔件与隔膜的中心部分相对并具有热敏电阻部分的第一热检测部分,以及与端部分相对的第二热检测部分 并且具有热敏电阻部分,其中第一热敏电阻部分和第二热敏电阻部分分别连接到独立的可调节恒定电流源,并且连接到差分放大器,该差分放大器放大 (i)第一热检测部分的电压之间的差异,所述第一热检测部分检测由于作为热检测部分的热平衡状态的位移量而由压力变化引起的隔膜的位移量,以及(ii) 热检测部分,根据压力不变。 传感器可以高精度地测量压力。