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    • 21. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US08763460B2
    • 2014-07-01
    • US13303932
    • 2011-11-23
    • Jong Woon KimMao MinyaoLin LiweiWon Kyu Jeung
    • Jong Woon KimMao MinyaoLin LiweiWon Kyu Jeung
    • G01C19/56
    • G01C19/5755
    • There is provided an angular velocity sensor, including: a flexible part connecting a fixing part to an oscillation unit; a driving unit formed on the flexible part or the oscillation unit to oscillate the oscillation unit; a sensing unit formed on the flexible part or the oscillation unit to sense a displacement of the oscillation unit according to an angular velocity input; a control piezoelectric element formed on the flexible part to control rigidity of a motion of the oscillation unit; and an impedance element electrically connected to the control piezoelectric element to apply impedance to the control piezoelectric element.
    • 提供了一种角速度传感器,包括:将固定部分连接到振荡单元的柔性部分; 驱动单元,形成在所述柔性部分或所述振荡单元上,以振荡所述振荡单元; 感测单元,形成在柔性部分或振荡单元上,以根据角速度输入感测振荡单元的位移; 控制压电元件,其形成在所述柔性部上,以控制所述振荡单元的运动的刚性; 以及与控制压电元件电连接以将阻抗施加到控​​制压电元件的阻抗元件。
    • 24. 发明申请
    • METHOD OF MANUFACTURING INERTIAL SENSOR
    • 制造传感器的方法
    • US20130122189A1
    • 2013-05-16
    • US13541279
    • 2012-07-03
    • Jong Woon KimJung Won Lee
    • Jong Woon KimJung Won Lee
    • B05D5/00
    • G01C19/5769G01P15/0802
    • Disclosed herein is a method of manufacturing an inertial sensor. The method includes: (A) preparing a base substrate; (B) forming a depressed first concave part in one surface of the base substrate; (C) forming a mass body in the first concave part by filling a metal or a combination of a metal and a polymer (or a polymer matrix composite) therein; and (D) forming a depressed second concave part in one surface of the base substrate at an outer side of the mass body and forming a flexible part on an upper portion of the second concave part in the base substrate. The mass body formed of the metal or the combination of the metal and the polymer (or the polymer matrix composite) has high density, thereby making it possible to improve sensitivity of the inertial sensor.
    • 本文公开了一种制造惯性传感器的方法。 该方法包括:(A)制备基底; (B)在基底基板的一个表面上形成凹陷的第一凹部; (C)通过在其中填充金属或金属和聚合物(或聚合物基质复合材料)的组合来在第一凹部中形成质量体; 和(D)在所述质量体的外侧形成在所述基底基板的一个表面中的凹陷的第二凹部,并且在所述基底基板的所述第二凹部的上部形成柔性部。 由金属形成的质量体或金属和聚合物(或聚合物基质复合体)的组合具有高密度,从而可以提高惯性传感器的灵敏度。
    • 25. 发明授权
    • Inertial sensor
    • 惯性传感器
    • US08508105B2
    • 2013-08-13
    • US13284752
    • 2011-10-28
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • H01L41/08
    • G01P15/09G01C19/56G01P15/097
    • Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.
    • 本文公开了本发明的惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110,设置在膜110的中心部分113下方的质量体120,设置在膜110的边缘115下方的周边 质量体120,形成在膜110上方并且在厚度方向上设置有空腔141的压电材料140,设置在空腔141中的感测电极150和设置在空腔141外部的驱动电极160,由此, 将设置有感测电极150的部分的压电材料140形成为较薄,使得可以提高惯性传感器100的灵敏度。
    • 26. 发明申请
    • Inertial Sensor
    • 惯性传感器
    • US20120043855A1
    • 2012-02-23
    • US13284752
    • 2011-10-28
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • G01P15/09
    • G01P15/09G01C19/56G01P15/097
    • Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.
    • 本文公开了本发明的惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110,设置在膜110的中心部分113下方的质量体120,设置在膜110的边缘115下方的周边 质量体120,形成在膜110上方并且在厚度方向上设置有空腔141的压电材料140,设置在空腔141中的感测电极150和设置在空腔141外部的驱动电极160,由此, 将设置有感测电极150的部分的压电材料140形成为较薄,使得可以提高惯性传感器100的灵敏度。
    • 27. 发明授权
    • Method of manufacturing inertial sensor
    • 制造惯性传感器的方法
    • US09212909B2
    • 2015-12-15
    • US13541279
    • 2012-07-03
    • Jong Woon KimJung Won Lee
    • Jong Woon KimJung Won Lee
    • G01C19/56G01P15/08G01C19/5769
    • G01C19/5769G01P15/0802
    • Disclosed herein is a method of manufacturing an inertial sensor. The method includes: (A) preparing a base substrate; (B) forming a depressed first concave part in one surface of the base substrate; (C) forming a mass body in the first concave part by filling a metal or a combination of a metal and a polymer (or a polymer matrix composite) therein; and (D) forming a depressed second concave part in one surface of the base substrate at an outer side of the mass body and forming a flexible part on an upper portion of the second concave part in the base substrate. The mass body formed of the metal or the combination of the metal and the polymer (or the polymer matrix composite) has high density, thereby making it possible to improve sensitivity of the inertial sensor.
    • 本文公开了一种制造惯性传感器的方法。 该方法包括:(A)制备基底; (B)在基底基板的一个表面上形成凹陷的第一凹部; (C)通过在其中填充金属或金属和聚合物(或聚合物基质复合材料)的组合来在第一凹部中形成质量体; 和(D)在所述质量体的外侧形成在所述基底基板的一个表面中的凹陷的第二凹部,并且在所述基底基板的所述第二凹部的上部形成柔性部。 由金属形成的质量体或金属和聚合物(或聚合物基质复合体)的组合具有高密度,从而可以提高惯性传感器的灵敏度。