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1. 发明申请

US20120152020A1 INERTIAL SENSOR 失效
标题翻译：惯性传感器
公开(公告)号：US20120152020A1
公开(公告)日：2012-06-21
申请号：US13165436
申请日：2011-06-21
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
IPC分类号： G01P15/125 , G01P15/09 , G01P15/12 , G01P15/00
CPC分类号： G01P15/125 , G01P15/09 , G01P15/123 , G01P2015/0842
摘要： Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.
摘要翻译：这里公开了惯性传感器。设置有惯性传感器100，包括：板状基板层110，质量体130，柱140，从柱140在质量体130的中心方向延伸的支撑部150，以及检测单元 170检测位移部113的位移。惯性传感器采用限制质量体130的向下位移的支撑部150，以防止质量体130的支撑部被损坏。

2. 发明授权

US08739628B2 Inertial sensor 失效
标题翻译：惯性传感器
公开(公告)号：US08739628B2
公开(公告)日：2014-06-03
申请号：US13165436
申请日：2011-06-21
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
IPC分类号： G01P15/08
CPC分类号： G01P15/125 , G01P15/09 , G01P15/123 , G01P2015/0842
摘要： An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.
摘要翻译：惯性传感器包括板状基材层，质量体，支撑框架，从支撑框架沿质量体的中心方向延伸的限位挡块，以及检测位移部的位移的检测单元。惯性传感器采用极限挡块限制质量体的向下位移，防止质量体的支撑部分损坏。

3. 发明授权

US08789418B2 Inertial sensor and angular velocity detection method using the same 有权
标题翻译：惯性传感器和角速度检测方法使用相同
公开(公告)号：US08789418B2
公开(公告)日：2014-07-29
申请号：US13591335
申请日：2012-08-22
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.
摘要翻译：这里公开了惯性传感器。惯性传感器包括：多个驱动质量块; 支撑体连接连接桥，以支撑驱动块; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部，其包括驱动电极，同时驱动驱动质量，感测电极检测每个驱动质量块的轴向科里奥利力。

4. 发明申请

US20130081465A1 INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME 有权
标题翻译：惯性传感器和使用其的角速度检测方法
公开(公告)号：US20130081465A1
公开(公告)日：2013-04-04
申请号：US13591335
申请日：2012-08-22
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies supporting the driving masses so as to freely move in a state in which the driving masses float; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.
摘要翻译：这里公开了惯性传感器。惯性传感器包括：多个驱动质量块; 支撑驱动质量的支撑体，以便在驱动质量浮动的状态下自由移动; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部，其包括驱动电极，同时驱动驱动质量，感测电极检测每个驱动质量块的轴向科里奥利力。

5. 发明授权

US08256290B2 Tri-axis angular rate sensor 失效
标题翻译：三轴角速度传感器
公开(公告)号：US08256290B2
公开(公告)日：2012-09-04
申请号：US12405974
申请日：2009-03-17
申请人： Minyao Mao
发明人： Minyao Mao
IPC分类号： G01C19/00 , G01P3/44 , G01P9/00 , G01P15/08
CPC分类号： G01C19/5719
摘要： Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.
摘要翻译：角速率传感器，用于检测围绕第一，第二和第三相互垂直的输入轴的旋转，所述输入轴具有耦合在一起的多个大体上平面的质量块，用于沿着由第一和第二输入轴形成的平面中的多方向驱动轴的线性驱动模式振荡。质量安装在大致平面的感测框架上，用于在驱动模式下相对于感测框架的线性运动，并且与感测框架在感测模式下一起旋转。响应于通过质量围绕第一，第二和第三输入轴的旋转而产生的科里奥利力，感测框架被安装成与感测模式围绕第一，第二和第三输入轴彼此独立的感测模块旋转。并且采用响应质量的旋转运动的电容传感器和感测模式中的感测框架来监测旋转速率。

6. 发明授权

US07105358B2 Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks 有权
公开(公告)号：US07105358B2
公开(公告)日：2006-09-12
申请号：US10076838
申请日：2002-02-13
申请人： Arunaya Majumdar , Thomas Michael Perazzo , Minyao Mao , Ohmyoung Kwon , Yang Zhao , Guanghua Wu
发明人： Arunaya Majumdar , Thomas Michael Perazzo , Minyao Mao , Ohmyoung Kwon , Yang Zhao , Guanghua Wu
IPC分类号： G01N33/543
CPC分类号： G01L5/0047 , B82Y30/00 , G01L1/24 , Y10S436/805 , Y10S436/806
摘要： An apparatus to measure micro-forces includes a cantilever palette with a set of cantilever array blocks. Each cantilever array block includes a set of cantilevers, with each cantilever including a set of cantilever fingers surrounded by a frame with frame fingers. The cantilever fingers and the frame fingers form a diffraction grating. Each cantilever array block is configured to be responsive to a predetermined micro-force, such that cantilevers of the cantilever array block deflect in the presence of the predetermined micro-force, which causes the diffraction grating to diffract light and thereby provide a visual indication of the presence of the predetermined micro-force.

7. 发明申请

US20130213134A1 ANGULAR RATE SENSOR WITH SUPPRESSED LINEAR ACCELERATION RESPONSE 有权
标题翻译：具有抑制线性加速响应的角速率传感器
公开(公告)号：US20130213134A1
公开(公告)日：2013-08-22
申请号：US13850309
申请日：2013-03-26
申请人： Minyao Mao
发明人： Minyao Mao
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/574
摘要： An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted and constrained for anti-phase linear movement along the drive axis in drive-mode. Detectors responsive to the anti-phase movement of the masses in directions parallel to the sense axis in response to Coriolis forces produced by rotation of the masses about the input axis for monitoring rate of rotation about the input axis.
摘要翻译：一种角速率传感器，具有沿质量平面中的驱动轴设置的两个大致平面的质量块，垂直于驱动轴的感测轴和垂直于质量平面的输入轴。质量悬挂在一对驱动框架中，驱动框架被安装并限制在驱动模式下沿着驱动轴的反相线性运动。响应于质量围绕输入轴旋转产生的科里奥利力，响应于物体在与感测轴平行的方向上的反相运动的检测器，用于监测围绕输入轴的旋转速率。

8. 发明申请

US20100236327A1 Tri-axis Angular Rate Sensor 失效
标题翻译：三轴角速率传感器
公开(公告)号：US20100236327A1
公开(公告)日：2010-09-23
申请号：US12405974
申请日：2009-03-17
申请人： Minyao Mao
发明人： Minyao Mao
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.
摘要翻译：角速率传感器，用于检测围绕第一，第二和第三相互垂直的输入轴的旋转，所述输入轴具有耦合在一起的多个大体上平面的质量块，用于沿着由第一和第二输入轴形成的平面中的多方向驱动轴的线性驱动模式振荡。质量安装在大致平面的感测框架上，用于在驱动模式下相对于感测框架的线性运动，并且与感测框架在感测模式下一起旋转。响应于通过质量围绕第一，第二和第三输入轴的旋转而产生的科里奥利力，感测框架被安装成与感测模式围绕第一，第二和第三输入轴彼此独立的感测模块旋转。并且采用响应质量的旋转运动的电容传感器和感测模式中的感测框架来监测旋转速率。

9. 发明授权

US07222533B2 Torsional rate sensor with momentum balance and mode decoupling 有权
标题翻译：扭矩传感器具有动量平衡和模式去耦
公开(公告)号：US07222533B2
公开(公告)日：2007-05-29
申请号：US11146401
申请日：2005-06-06
申请人： Minyao Mao , Cenk Acar , Lynn Edward Costlow
发明人： Minyao Mao , Cenk Acar , Lynn Edward Costlow
IPC分类号： G01P9/04 , G01P15/08
CPC分类号： G01C19/5719
摘要： Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.
摘要翻译：速率传感器具有多个大致平坦的质量，质量平面中的驱动轴，垂直于驱动轴的输入轴，以及垂直于驱动轴和输入轴的感测轴。质量被驱动绕驱动轴摆动，并被安装成响应于通过围绕输入轴的质量的旋转而产生的科里奥利力而围绕传感轴的扭转运动，传感器响应于围绕感测轴的扭转运动以用于监测速率的旋转。

10. 发明授权

US06771001B2 Bi-stable electrostatic comb drive with automatic braking 有权
标题翻译：双稳态静电梳驱动带自动制动
公开(公告)号：US06771001B2
公开(公告)日：2004-08-03
申请号：US09810825
申请日：2001-03-16
申请人： Minyao Mao , Donald M. Friedrich , Markus Duelli , Bryant Hichwa
发明人： Minyao Mao , Donald M. Friedrich , Markus Duelli , Bryant Hichwa
IPC分类号： H02N100
CPC分类号： H02N1/008
摘要： An electrostatic comb drive suitable for micro-electro-mechanical systems (“MEMS”) application uses shaped fingers to achieve bi-directional actuation from a unipolar actuation pulse. The finger shape also provides auto-braking of the movable member of the drive using a simple actuating pulse. In a further embodiment, an end stop inhibits overshoot and a back spring pushes the movable portion of the device back toward an operating position. In yet a further embodiment, a Vernier scale is provided on the movable portion of the drive relative to the fixed portion of the drive to indicate relative shift of these portions after the device is fabricated.
摘要翻译：适用于微电子机械系统（“MEMS”）应用的静电梳驱动使用成形指状物从单极致动脉冲实现双向致动。手指形状还使用简单的致动脉冲来提供驱动器的可移动部件的自动制动。在另一个实施例中，端部止挡件阻止过冲，并且后弹簧将装置的可移动部分推回到操作位置。在又一个实施例中，在驱动器的可移动部分上相对于驱动器的固定部分设置游标，以指示在制造装置之后这些部分的相对移动。

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