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    • 26. 发明授权
    • Multiple coil antenna for inductively-coupled plasma generation systems
    • 用于电感耦合等离子体发生系统的多线圈天线
    • US06463875B1
    • 2002-10-15
    • US09711935
    • 2000-11-15
    • Jian J. ChenRobert G. VeltropThomas E. Wicker
    • Jian J. ChenRobert G. VeltropThomas E. Wicker
    • H05H146
    • H01J37/321
    • A radio frequency plasma multiple-coil antenna allows for controllable, uniform inductive coupling within a plasma reactor. According to exemplary embodiments, multiple coils are positioned on a dielectric window of a plasma chamber, and are powered by a single radio frequency generator and tuned by a single matching network. Each coil is either planar or a combination of a planar coil and a vertically stacked helical coil. The input end of each coil is connected to an input tuning capacitor and the output end is terminated to the ground through an output tuning capacitor. The location of the maximum inductive coupling of the radio frequency to the plasma is mainly determined by the output capacitor, while the input capacitor is mainly used to adjust current magnitude into each coil. By adjusting the current magnitude and the location of the maximum inductive coupling within each coil, the plasma density in different radial and azimuthal regions can be varied and controlled, and therefore, radially and azimuthally uniform plasma can be achieved.
    • 射频等离子体多线圈天线允许等离子体反应器内的可控的,均匀的电感耦合。 根据示例性实施例,多个线圈位于等离子体室的电介质窗口上,并且由单个射频发生器供电并由单个匹配网络调谐。 每个线圈是平面的或平面线圈和垂直堆叠的螺旋线圈的组合。 每个线圈的输入端连接到输入调谐电容器,输出端通过输出调谐电容端接到地。 射频对等离子体的最大感应耦合的位置主要由输出电容决定,而输入电容主要用于调整每个线圈的电流幅值。 通过调整每个线圈内的最大电感耦合的电流大小和位置,可以改变和控制不同径向和方位区域中的等离子体密度,因此可以实现径向和方位均匀的等离子体。
    • 30. 发明授权
    • System and method for current-based plasma excursion detection
    • 基于电流等离子体偏移检测的系统和方法
    • US08587321B2
    • 2013-11-19
    • US12890089
    • 2010-09-24
    • Jian J. ChenMohamad A. Ayoub
    • Jian J. ChenMohamad A. Ayoub
    • G01R31/14
    • H01J37/32935H01J37/32183
    • A system and method for the detection of plasma excursions, such as arcs, micro-arcs, or other plasma instability, during plasma processing by directly monitoring RF current just prior to reaching an RF power electrode of a plasma processing chamber is provided. The monitored RF current may be converted to an RF voltage and then passed through a succession of analog filters and amplifiers to provide a plasma excursion signal. The plasma excursion signal is compared to a preset value, and at points where the plasma excursion signal exceeds the preset value, an alarm signal is generated. The alarm signal is then fed back into a system controller so that an operator can be alerted and/or the processing system can be shut down. In one embodiment, the RF current amplified and converted to a digital signal for digital filtering and processing. In certain embodiments, multiple processing regions can be monitored by a single detection control unit.
    • 提供了一种用于在等离子体处理期间通过在到达等离子体处理室的RF功率电极之前直接监视RF电流来检测诸如电弧,微弧或其他等离子体不稳定性的等离子体偏移的系统和方法。 监控的RF电流可以转换成RF电压,然后通过一系列模拟滤波器和放大器,以提供等离子体偏移信号。 将等离子体偏移信号与预设值进行比较,并且在等离子体偏移信号超过预设值的点处,产生报警信号。 然后将报警信号反馈回系统控制器,以便可以警告操作员和/或处理系统被关闭。 在一个实施例中,RF电流被放大并转换成用于数字滤波和处理的数字信号。 在某些实施例中,多个处理区域可以由单个检测控制单元监视。