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    • 23. 发明授权
    • Optical device with substrate and waveguide structure having thermal
matching interfaces
    • 具有基板和波导结构的光学器件具有热匹配接口
    • US5483613A
    • 1996-01-09
    • US291387
    • 1994-08-16
    • Allan J. BruceHerman M. Presby
    • Allan J. BruceHerman M. Presby
    • G02B6/122G02B6/10G02B6/12G02B6/126
    • G02B6/105G02B6/126G02B2006/12038
    • The present invention provides polarization-independent optical devices by reducing or eliminating strain-induced birefrigence associated with prior device structures. In a first embodiment, an optical device is produced comprising a doped silica substrate having a coefficient of thermal expansion between 8.times.10.sup.-7 .degree. C..sup.-1 and 15.times.10.sup.-7 .degree.C..sup.-1. On the doped silica substrate is formed a doped silica waveguiding structure having a coefficient of thermal expansion between 8.times.10.sup.-7 .degree. C..sup.-1 and 15.times.10.sup.-7 .degree. C..sup.-1. Alternatively, the coefficient of thermal expansion of the doped silica substrate is selected to be approximately 90% to 110% of the coefficient of thermal expansion of the doped silica waveguiding structure. In another aspect, the present invention provides an optical device comprising a doped silica substrate having a doping gradient from a lower surface to an upper surface. The doping level at the upper surface has a coefficient of thermal expansion approximating the coefficient of thermal expansion of a doped silica waveguiding structure formed thereon.
    • 本发明通过减少或消除与现有器件结构相关联的应变引发的双折射来提供偏振无关的光学器件。 在第一实施例中,制造的光学器件包括具有8×10 -7℃-1和15×10 -7℃-1之间的热膨胀系数的掺杂二氧化硅衬底。 在掺杂二氧化硅衬底上形成具有8×10 -7℃-1和15×10 -7℃-1之间的热膨胀系数的掺杂二氧化硅波导结构。 或者,掺杂二氧化硅衬底的热膨胀系数被选择为掺杂二氧化硅波导结构的热膨胀系数的大约90%至110%。 在另一方面,本发明提供一种光学器件,其包括掺杂二氧化硅衬底,其具有从下表面到上表面的掺杂梯度。 上表面的掺杂浓度具有近似于其上形成的掺杂二氧化硅波导结构的热膨胀系数的热膨胀系数。