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    • 1. 发明授权
    • Fabrication procedure using arsenate glasses
    • 使用砷酸盐玻璃的制作程序
    • US4407061A
    • 1983-10-04
    • US270504
    • 1981-06-04
    • William H. GrodkiewiczShobha SinghLeGrand G. Van Uitert
    • William H. GrodkiewiczShobha SinghLeGrand G. Van Uitert
    • C03C3/12B05D1/34C03C3/26
    • C03C3/122Y10S148/091Y10S148/094
    • A fabrication technique is described for making various devices in which a certain type of glass is used as a surface protection layer. The glass layers are formed by particle bombardment (generally sputtering or E-beam) of a glass target. Devices with such surface layers are also described. Such glass layers are highly advantageous as encapsulating layers, diffusion barrier layers, etc., particularly for optical type devices and certain semiconductor devices. Particularly important is the preparation procedure for the glass target used in the bombardment process. The glass layers are moisture stable, act as excellent barriers against diffusion, and are usable up to quite high temperatures (i.e., in diffusion doping procedures) without cracking or peeling. The glass layers also provide long-term protection against atmosphere components including water vapor, oxygen, atmosphere pollution contaminants, etc., and can be removed by standard etching techniques.
    • 描述制造技术,用于制造其中使用某种类型的玻璃作为表面保护层的各种装置。 玻璃层通过玻璃靶的粒子轰击(通常是溅射或电子束)形成。 还描述了具有这种表面层的装置。 这种玻璃层作为封装层,扩散阻挡层等是非常有利的,特别是对于光学类型器件和某些半导体器件。 特别重要的是用于轰击过程中的玻璃靶的制备方法。 玻璃层是湿气稳定的,作为阻止扩散的优良屏障,并且可以在不破裂或剥离的情况下可用于相当高的温度(即扩散掺杂方法)。 玻璃层还提供长期保护,防止大气成分,包括水蒸汽,氧气,大气污染污染物等,并可通过标准蚀刻技术去除。