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21. 发明申请

US20090272647A1 PROCESS KIT FOR RF PHYSICAL VAPOR DEPOSITION 有权
标题翻译： RF物理蒸气沉积工艺套件
公开(公告)号：US20090272647A1
公开(公告)日：2009-11-05
申请号：US12433315
申请日：2009-04-30
申请人： Donny Young , Lara Hawrylchak
发明人： Donny Young , Lara Hawrylchak
IPC分类号： C23C14/34
CPC分类号： H01J37/32651 , C23C14/35 , H01J37/32082 , H01J37/32623 , H01J37/32642 , H01J37/3441
摘要： Embodiments of the invention generally relate to a process kit for a semiconductor processing chamber, and a semiconductor processing chamber having a kit. More specifically, embodiments described herein relate to a process kit including a cover ring, a shield, and an isolator for use in a physical deposition chamber. The components of the process kit work alone and in combination to significantly reduce particle generation and stray plasmas. In comparison with existing multiple part shields, which provide an extended RF return path contributing to RF harmonics causing stray plasma outside the process cavity, the components of the process kit reduce the RF return path thus providing improved plasma containment in the interior processing region.
摘要翻译：本发明的实施例一般涉及用于半导体处理室的处理套件和具有套件的半导体处理室。更具体地，本文所述的实施例涉及包括用于物理沉积室中的盖环，屏蔽和隔离器的处理套件。过程组件的组件单独工作并组合起来，以显着减少颗粒产生和杂散等离子体。与现有的多部分屏蔽相比，其提供了有助于RF谐波的扩展的RF返回路径，从而在处理空腔之外引起杂散等离子体，处理套件的部件降低了RF返回路径，从而在内部处理区域中提供了改进的等离子体容纳物。

22. 发明授权

US07561015B2 Magnet secured in a two part shell 有权
标题翻译：磁铁固定在两部分壳体
公开(公告)号：US07561015B2
公开(公告)日：2009-07-14
申请号：US10727132
申请日：2003-12-02
申请人： Anthony Vesci , Alan B. Liu , Donny Young , Joe F. Sommers , Kevin Hughes
发明人： Anthony Vesci , Alan B. Liu , Donny Young , Joe F. Sommers , Kevin Hughes
IPC分类号： H01F7/02
CPC分类号： H01F7/0221 , H01J37/3408 , H01J37/3455 , Y10S206/818
摘要： A magnet encapsulated within a canister formed from two cans into a laminated structure particularly useful in plasma processing reactors. Each can includes an end wall and a cylindrical sidewall. One can additionally includes an annular lip that slidably fits outside the sidewall of the other can with a small gap therebetween. The magnet is inserted into the two cans together with a flowable and curable adhesive such as epoxy. The cans are slid together and compressed to cause the adhesive to flow between the magnet and the two cans and between the lip of one can and the sidewall of the other. The adhesive is cured to bond the magnet to the cans and to bond the cans together and to also hermetically seal the structure. The cans may be deep drawn from non-magnetic stainless steel with wall thicknesses of less than 0.064 mm.
摘要翻译：包封在由两个罐形成的罐内的磁体成为特别可用于等离子体处理反应器的层压结构。每个可以包括端壁和圆柱形侧壁。另外还可以包括一个可滑动地配合在另一个罐的侧壁外侧的环形唇缘，其间具有小间隙。将磁体与可流动和可固化的粘合剂如环氧树脂一起插入两个罐中。罐一起滑动并压缩，使粘合剂在磁体和两个罐之间以及一个罐的唇缘和另一个罐的侧壁之间流动。固化粘合剂以将磁体粘合到罐上并将罐结合在一起并且还气密地密封结构。罐体可以从壁厚小于0.064mm的非磁性不锈钢制成。

23. 发明申请

US20050116392A1 Magnet secured in a two part shell 有权
标题翻译：磁铁固定在两部分壳体
公开(公告)号：US20050116392A1
公开(公告)日：2005-06-02
申请号：US10727132
申请日：2003-12-02
申请人： Anthony Vesci , Alan Liu , Donny Young , Joe Sommers , Kevin Hughes
发明人： Anthony Vesci , Alan Liu , Donny Young , Joe Sommers , Kevin Hughes
IPC分类号： B28B1/00 , C04B33/32 , H01F7/02 , H01J37/34
CPC分类号： H01F7/0221 , H01J37/3408 , H01J37/3455 , Y10S206/818
摘要： A magnet encapsulated within a canister formed from two cans into a laminated structure particularly useful in plasma processing reactors. Each can includes an end wall and a cylindrical sidewall. One can additionally includes an annular lip that slidably fits outside the sidewall of the other can with a small gap therebetween. The magnet is inserted into the two cans togther with a flowable and curable adhesive such as epoxy. The cans are slid together and compressed to cause the adhesive to flow between the magnet and the two cans and between the lip of one can and the sidewall of the other. The adhesive is cured to bond the magnet to the cans and to bond the cans together and to also hermetically seal the structure. The cans may be deep drawn from non-magnetic stainless steel with wall thicknesses of less than 0.064 mm.
摘要翻译：包封在由两个罐形成的罐内的磁体成为特别可用于等离子体处理反应器的层压结构。每个可以包括端壁和圆柱形侧壁。另外还可以包括一个可滑动地配合在另一个罐的侧壁外侧的环形唇缘，其间具有小间隙。用可流动和可固化的粘合剂如环氧树脂将磁体插入两个罐中。罐一起滑动并压缩，使粘合剂在磁体和两个罐之间以及一个罐的唇缘和另一个罐的侧壁之间流动。固化粘合剂以将磁体粘合到罐上并将罐结合在一起并且还气密地密封结构。罐体可以从壁厚小于0.064mm的非磁性不锈钢制成。

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