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21. 发明授权

US07944317B2 Cold atom micro primary standard 有权
标题翻译：冷原子微小标准
公开(公告)号：US07944317B2
公开(公告)日：2011-05-17
申请号：US12484899
申请日：2009-06-15
申请人： Jennifer S. Strabley , Daniel W. Youngner , Lisa M. Lust , Thomas Ohnstein , Bernard Fritz
发明人： Jennifer S. Strabley , Daniel W. Youngner , Lisa M. Lust , Thomas Ohnstein , Bernard Fritz
IPC分类号： H03L7/26
CPC分类号： G04F5/14
摘要： An atomic clock having a physics package that includes a vacuum chamber cavity that holds atoms of Rb-87 under high vacuum conditions, an optical bench having a single laser light source, a local oscillator, a plurality of magnetic field coils, an antenna, at least one photo-detector and integrated control electronics. The single laser light source has a fold-retro-reflected design to create three retro-reflected optical beams that cross at 90° angles relative to one another in the vacuum chamber cavity. This design allows the single laser light source to make the required six trapping beams needed to trap and cool the atoms of Rb-87. The foregoing design makes possible atomic clocks having reduced size and power consumption and capable of maintaining an ultra-high vacuum without active pumping.
摘要翻译：具有物理封装的原子钟包括在高真空条件下保存Rb-87原子的真空室腔，具有单个激光光源，本地振荡器，多个磁场线圈，天线的光学台至少一个光电检测器和集成控制电子元件。单个激光光源具有折射反射设计，以在真空室腔中产生相对于彼此以90度角交叉的三个反射光束。该设计允许单个激光光源产生所需的六个俘获光束，以捕获和冷却Rb-87的原子。上述设计使得可能的原子钟具有减小的尺寸和功率消耗，并且能够在没有主动泵送的情况下保持超高真空。

22. 发明授权

US07038824B2 Dynamic reflector array and method of making the same 失效
标题翻译：动态反射器阵列及其制作方法
公开(公告)号：US07038824B2
公开(公告)日：2006-05-02
申请号：US10716341
申请日：2003-11-18
申请人： Daniel W. Youngner , Eugen I. Cabuz , Thomas R. Ohnstein , Paul E. Bauhahn
发明人： Daniel W. Youngner , Eugen I. Cabuz , Thomas R. Ohnstein , Paul E. Bauhahn
IPC分类号： G02B26/08
CPC分类号： G02B5/124 , G02B26/0841 , Y10S359/90 , Y10S359/904
摘要： A dynamic micro-structured reflector includes a substrate having a generally planar major surface and a plurality of cavities on the planar major surface. Each cavity having at least a first and second sidewalls set at an angle offset from the planar major surface. The first sidewall being a stationary optical face and the second sidewall being a dynamic optical face. The dynamic optical face is deflectable between a first position and a second position. The dynamic optical face in the first position redirects more light back to a light source than the dynamic optical face in the second position. Methods of making a dynamic micro-structured reflector are also disclosed.
摘要翻译：动态微结构反射器包括在平面主表面上具有大致平坦的主表面和多个空腔的基底。每个空腔具有至少第一和第二侧壁设置成与平面主表面偏移的角度。第一侧壁是固定光学面，第二侧壁是动态光学面。动态光学面可在第一位置和第二位置之间偏转。第一位置中的动态光学面将第二位置的动态光学面更多的光重定向到光源。还公开了制造动态微结构反射器的方法。

23. 发明授权

US6126140A Monolithic bi-directional microvalve with enclosed drive electric field 失效
标题翻译：具封闭驱动电场的单片双向微型阀
公开(公告)号：US6126140A
公开(公告)日：2000-10-03
申请号：US999169
申请日：1997-12-29
申请人： Burgess R. Johnson , Daniel W. Youngner , S. Kimura
发明人： Burgess R. Johnson , Daniel W. Youngner , S. Kimura
IPC分类号： F15C5/00 , F16K99/00 , F16K31/02 , F16K7/14
CPC分类号： F16K99/0001 , F15C5/00 , F16K99/0015 , F16K99/0051 , F16K2099/0074 , F16K2099/0084 , F16K2099/0086
摘要： A monolithic, bi-directional micro device formed on a support base, for example a silicon wafer, including at least one input and output flow channels for flow of fluid. The actuator portion includes electrically conducting upper lower diaphragms (preferably formed from doped polycrystalline silicon) formed about a central electrode and mounted on the base. The diaphragms move under electrostatic force between first and second positions upon application of voltage. The upper and lower diaphragms form a sealed, enclosed cavity separated from the channels. The diaphragms are connected for mechanically transmitting electrostatically induced force from one diaphragm to the other, preferably by one or more posts passing through at least one hole formed in the central electrode. The lower diaphragm and the support base are maintained at the same electrical potential. The device is formed by depositing and patterning the electrodes and forming spaces between the electrodes by etching of sacrificial layers. One or more input flow channels and/or output flow channels are etched in the support base from either the frontside or the backside. Electrical contacts are formed by etching and metalizing pads to provide electrical paths for voltage to be selectively applied to the capacitor electrodes.
摘要翻译：形成在支撑基座（例如硅晶片）上的单片双向微型装置，其包括用于流体流动的至少一个输入和输出流动通道。致动器部分包括形成在中心电极周围并安装在基座上的导电上下隔膜（优选由掺杂多晶硅形成）。在施加电压时，隔膜在静电力之间在第一和第二位置之间移动。上隔膜和下隔膜形成与通道分离的密封的封闭空腔。连接的隔膜用于将静电感应力从一个隔膜机械地传递到另一个隔膜，优选地通过一个或多个通过中心电极中形成的至少一个孔的柱。下隔膜和支撑基座保持相同的电位。通过沉积和图案化电极并通过蚀刻牺牲层在电极之间形成空间来形成器件。一个或多个输入流动通道和/或输出流动通道在支撑底座中从前侧或后侧蚀刻。通过蚀刻和金属化焊盘形成电触点，以提供用于选择性地施加到电容器电极的电压的电路径。

24. 发明授权

US5567650A Method of forming tapered plug-filled via in electrical interconnection 失效
标题翻译：在电气互连中形成锥形插塞填充通孔的方法
公开(公告)号：US5567650A
公开(公告)日：1996-10-22
申请号：US356421
申请日：1994-12-15
申请人： John B. Straight , Daniel W. Youngner , James C. Anderson
发明人： John B. Straight , Daniel W. Youngner , James C. Anderson
IPC分类号： H01L21/768 , H01L21/28
CPC分类号： H01L21/76877 , Y10S438/978
摘要： A process for contouring a via formed in a dielectrics whereby a layer of a refractory metal is formed on the dielectric and in the via. The refractory metal layer is removed until a surface of the refractory metal within the via is below the upper surface of the dielectric. An etching process removes a portion of the dielectric and a tapered shape is formed at the intersection of the via and the upper surface of the dielectric. A second layer of metal is formed over the dielectric, with the second layer of metal extending into the vias and contacting the refractory metal with the tapered shape providing improved step coverage of the second layer of metal at the via.
摘要翻译：用于对形成在电介质中的通孔进行轮廓化的方法，由此在电介质和通孔中形成难熔金属层。去除耐火金属层，直到通孔内的难熔金属的表面低于电介质的上表面。蚀刻工艺去除电介质的一部分，并且在通孔和电介质的上表面的相交处形成锥形形状。第二层金属形成在电介质上，第二层金属延伸到通孔中，并使难熔金属与锥形形状接触，从而提供在通孔处的第二金属层的改进的台阶覆盖。

25. 发明授权

US4445966A Method of plasma etching of films containing chromium 失效
标题翻译：含铬的等离子体蚀刻方法
公开(公告)号：US4445966A
公开(公告)日：1984-05-01
申请号：US505624
申请日：1983-06-20
申请人： Robert J. Carlson , Daniel W. Youngner
发明人： Robert J. Carlson , Daniel W. Youngner
IPC分类号： H01L21/3213 , C23F1/02 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： H01L21/32136 , H01L21/32137
摘要： A method of etching a thin film containing chromium using fluorine or a fluorine containing compound without leaving an electrically conductive residue is described.
摘要翻译：描述了使用氟或含氟化合物蚀刻含铬的薄膜而不留下导电残留物的方法。

26. 发明授权

US07989989B2 Circuit having a micro crush capacitor 有权
标题翻译：电路具有微压电容器
公开(公告)号：US07989989B2
公开(公告)日：2011-08-02
申请号：US12033942
申请日：2008-02-20
申请人： Lisa M. Lust , Daniel W. Youngner
发明人： Lisa M. Lust , Daniel W. Youngner
IPC分类号： H01H35/00 , H03K17/975
CPC分类号： H01G5/40 , Y10T307/786
摘要： A start-up circuit having a micro crush capacitor that is operatable with a small pressure. The crush capacitor may be connected to a silicon controlled rectifier or similar device. Applying the pressure to the crush capacitor may turn on the SCR which may in turn activate a sensor. The circuit may be fabricated on a flexible substrate which together may be regarded as a flexible circuit. The flexible circuit may be held down on a back plate with a form plate clamping the circuit at its perimeter edge. The flexible circuit may be held firm with the plates for component insertion and/or circuit testing.
摘要翻译：具有可以在较小压力下操作的微压电容器的启动电路。粉碎电容器可以连接到可控硅整流器或类似器件。将压力施加到粉碎电容器可能导致SCR，这可能会激活传感器。电路可以制造在柔性基板上，这些可以被认为是柔性电路。柔性电路可以在具有在其周边边缘处夹持电路的成形板的背板上保持下来。柔性电路可以用板固定，用于部件插入和/或电路测试。

27. 发明申请

US20090289198A1 SYSTEMS AND METHODS FOR ACOUSTIC SENSING 失效
标题翻译：声学感应系统及方法
公开(公告)号：US20090289198A1
公开(公告)日：2009-11-26
申请号：US12123628
申请日：2008-05-20
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： G01H9/00 , G01J1/58
CPC分类号： G01H9/00 , G01L9/0017
摘要： An optical-based acoustic sensor system detects sound. An exemplary embodiment has a substrate with a surface and an internal region; a shell disposed above the substrate surface, the shell operable to receive incident light emitted by a light source; a beam disposed blow the shell; a photodiode on the substrate surface below the beam, and in response to receiving a first portion of light, the photodiode is operable to generate a charge that attracts the beam such that a motion is induced in the beam to cause the beam to resonate; and a microphone device coupled to the shell, the microphone device operable to detect acoustic waves, and operable to modulate the vibratory motion of the beam, wherein a second portion of light is modulated by the vibratory motion of the beam to generate sound-modulated light that is emitted from the sensor.
摘要翻译：基于光学的声学传感器系统检测声音。示例性实施例具有具有表面和内部区域的基板; 壳体，其设置在所述衬底表面上方，所述壳体可操作以接收由光源发射的入射光; 一束设置吹的外壳; 在光束下方的衬底表面上的光电二极管，并且响应于接收到第一部分光，光电二极管可操作以产生吸引光束的电荷，使得在光束中感应出运动以使光束共振; 麦克风装置，其耦合到壳体，麦克风装置可操作以检测声波，并且可操作以调制光束的振动运动，其中第二部分光被光束的振动运动调制以产生声调制光这是从传感器发射的。

28. 发明授权

US06714007B2 Optically powered resonant integrated microstructure magnetic field gradient sensor 失效
标题翻译：光电谐振集成微结构磁场梯度传感器
公开(公告)号：US06714007B2
公开(公告)日：2004-03-30
申请号：US10051489
申请日：2002-01-18
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： G01R33032
CPC分类号： G01R33/022
摘要： A device 10 for sensing a magnetic field gradient using an optically powered resonant integrated microstructure (O-RIMS). The O-RIMS comprises a microbeam 11 having a resonant frequency, a shell 16 supporting the microbeam 11, sensor electronics, a light transporter 36, such as an optical fiber or optical waveguide, in proximity to the shell 16, and a ferromagnetic or magnetically permeable element 26 attached to the shell 16. The ferromagnetic or magnetically permeable element 26 experiences a torque about the fulcrum 24 when a magnetic field gradient is present, and causes a strain on the shell 16. The strain is in turn transmitted to the microbeam 11, thereby affecting its resonant frequency. The change in resonant frequency of the microbeam 11 is conveyed to the sensor electronics via the light transporter 36.
摘要翻译：用于使用光电谐振集成微结构（O-RIMS）感测磁场梯度的装置10。 O-RIMS包括具有共振频率的微束11，支撑微束11的壳体16，传感器电子器件，靠近壳体16的光传输器36，例如光纤或光波导，以及铁磁或磁性可渗透元件26附接到外壳16.当存在磁场梯度时，铁磁或导磁元件26经受围绕支点24的扭矩，并且在外壳16上引起应变。该应变又传递到微束11 ，从而影响其谐振频率。微波束11的谐振频率的变化通过光传输器36传送到传感器电子设备。

29. 发明授权

US06710355B2 Optically powered resonant integrated microstructure pressure sensor 有权
标题翻译：光电谐振集成微结构压力传感器
公开(公告)号：US06710355B2
公开(公告)日：2004-03-23
申请号：US10071484
申请日：2002-02-07
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： G02B600
CPC分类号： G01L9/0079
摘要： A pressure sensor using an optically powered resonant integrated microstructure (O-RIMS). The pressure sensor comprises a planar substrate having a photodiode, a polysilicon shell, a microbeam having a resonant frequency and fastened to the shell, and one or more optical fibers. A fluorescent material, such as erbium, is placed on the surface of the substrate in proximity to the microbeam. A Fabry-Perot cavity is formed comprising the substrate, the microbeam, and the shell. Changes in the vibratory frequency of the microbeam caused by pressure on the shell causes light delivered by a optical fiber to be modulated as the microbeam vibrates. The modulated light is conveyed to a sensor electronics arrangement via the optical fiber. The sensor electronics arrangement determines the pressure surrounding the O-RIMS from the modulated light.
摘要翻译：一种使用光学谐振集成微结构（O-RIMS）的压力传感器。压力传感器包括具有光电二极管，多晶硅外壳，具有共振频率并紧固到外壳的微束和一根或多根光纤的平面基板。诸如铒的荧光材料被放置在靠近微束的衬底的表面上。形成法布里 - 珀罗腔，其包括基底，微束和壳。由壳体上的压力引起的微束振动频率的变化导致光纤传递的光随微波振动而被调制。经调制的光经由光纤传送到传感器电子装置。传感器电子装置从调制光确定O-RIMS周围的压力。

30. 发明授权

US06534887B1 Microwheel 失效
标题翻译：微风
公开(公告)号：US06534887B1
公开(公告)日：2003-03-18
申请号：US09684224
申请日：2000-10-06
申请人： Andrzej Peczalski , Daniel W. Youngner
发明人： Andrzej Peczalski , Daniel W. Youngner
IPC分类号： H02K709
CPC分类号： F16C32/0444 , B64G1/285 , B64G1/426 , F16C2326/47 , F16C2361/55 , H01M14/00 , H02K7/025 , H02K99/00 , H02N15/00 , Y02E60/16
摘要： A microwheel having stators constructed on a wafer material forming an evacuated. cavity in which a rotor is levitating to lessen friction losses. A plurality of microwheels can be integrated to serve as energy storage and/or momentum control devices.
摘要翻译：具有构造在形成抽真空的晶片材料上的定子的微轮。其中转子悬浮在其中以减少摩擦损失。多个微轮可以被集成以用作能量存储和/或动量控制装置。

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