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    • 26. 发明授权
    • Interferometric torque and power sensor
    • 干涉扭矩和功率传感器
    • US06587211B1
    • 2003-07-01
    • US09363698
    • 1999-07-28
    • Daniel Gelbart
    • Daniel Gelbart
    • G01B1102
    • G01B11/161
    • An interferometric optical torque sensor senses the torque transmitted by a rotating shaft without requiring physical contact with the shaft. A diffraction grating is provided on the shaft with its grating lines parallel to the longitudinal dimension of the shaft. A laser beam is split in two and reflected from two axially-separated points of the grating. As the shaft twists, the phase of the light in the diffracted orders of the light reflected from the grating changes. By superimposing the diffracted beams an interference pattern is created. The motion of the interference fringes in this pattern is proportional to the twist, therefore the torque, in the shaft. The power transmitted by the shaft may be computed from the torque and shaft speed.
    • 干涉光学扭矩传感器感测由旋转轴传递的扭矩,而不需要与轴的物理接触。 衍射光栅设置在轴上,其光栅线平行于轴的纵向尺寸。 激光束分为两部分,并从光栅的两个轴向分离的点反射。 当轴扭转时,从光栅反射的光的衍射级的光的相位发生变化。 通过叠加衍射光束,产生干涉图案。 干涉条纹在这种模式下的运动与轴中的扭转成正比。 由轴传递的动力可以根据转矩和转速来计算。
    • 28. 发明授权
    • Laser exposure utilizing secondary mask capable of concentrating exposure light onto primary mask
    • 使用二次掩模的激光曝光能够将曝光光集中在主掩模上
    • US06366339B1
    • 2002-04-02
    • US09665408
    • 2000-09-20
    • Daniel Gelbart
    • Daniel Gelbart
    • G03B2754
    • G03B27/54
    • Apparatus for high resolution imaging of integrated circuits and flat panel displays uses a pulsed laser source, a thermoresist coated image receiving surface and a pair of masks. A primary mask carries the principal image and a secondary mask containing an array of lenslets which concentrate light from the source onto a subset of the features of the primary mask. The secondary mask lenslets are dimensioned so as to illuminate a subset of the features with a known pitch and form an image corresponding to the subset on the thermoresist. After creating a subset image, the secondary mask is moved so as to expose another subset of the features and form another subset image. In this manner the entire principal image is reconstructed on the thermoresist from subset images. The secondary mask is moved on two axes by a plurality of piezo-electric actuators. Registration and position control of the secondary mask are accomplished by including positioning marks on the primary mask and a photo-detector to resolve the positioning marks and provide position feedback. To increase the power density imparted on the image receiving surface, the laser source may be focused into a concentrated scanning line, which is scanned across the secondary mask so as to further divide the imaging process, while providing additional power density.
    • 用于集成电路和平板显示器的高分辨率成像的装置使用脉冲激光源,热电阻涂覆的图像接收表面和一对掩模。 主要掩模携带主要图像和包含将来自源的光聚集到主掩模的特征的子集上的小透镜阵列的次级掩模。 二次掩模小透镜的尺寸设计成以已知间距照亮特征的子集,并形成对应于热敏电阻上的子集的图像。 在创建子集图像之后,辅助掩模被移动以便暴露特征的另一子集并形成另一子集图像。 以这种方式,在子集图像的热敏电阻上重建整个主图像。 二次掩模通过多个压电致动器在两个轴上移动。 辅助掩模的定位和位置控制通过在主掩模上包括定位标记和光电检测器来解决定位标记并提供位置反馈来实现。 为了增加施加在图像接收表面上的功率密度,激光源可以被聚焦成集中的扫描线,其被扫描穿过次级掩模,以进一步划分成像过程,同时提供额外的功率密度。
    • 30. 发明授权
    • Autofocus system
    • 自动对焦系统
    • US6137580A
    • 2000-10-24
    • US158800
    • 1998-09-22
    • Daniel Gelbart
    • Daniel Gelbart
    • G01B11/00G02B7/28G11B7/09G01J1/20G01N21/00G02B7/04
    • G11B7/0908G11B2007/0924
    • A method and apparatus for an improved autofocus in an optical system is presented. The improved autofocus system uses distinct optics from those of the primary optical system. Although optically distinct, physically, the autofocus optics are mechanically linked to the optical output stage of the primary optical system. The optical separation of the autofocus optics from those of the primary optical system overcomes the trade-offs associated with trying to combine the primary optical function and focus in the same beam. In particular, the autofocus beam is not blinded by a more powerful write beam. The physical integration of the autofocusing optics with the optical output stage of the primary optical system overcomes the difficulties associated with using external distance sensors. In particular, the autofocusing system is not susceptible to steady state error because the autofocus sensor is a true null detector.
    • 提出了一种用于光学系统中改进的自动对焦的方法和装置。 改进的自动对焦系统使用与主要光学系统不同的光学元件。 虽然在物理上光学上不同,但自动聚焦光学器件机械连接到主要光学系统的光学输出级。 自动对焦光学器件与主要光学系统的光学分离克服了与在相同光束中组合主要光学功能和聚焦相关联的折衷。 特别地,自动聚焦光束不被更强大的写入光束遮蔽。 自动对焦光学器件与主要光学系统的光学输出级的物理集成克服了与使用外部距离传感器相关的困难。 特别地,自动对焦系统不会受到稳态误差的影响,因为自动对焦传感器是真的零检测器。