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21. 发明授权

US07251878B2 Method and apparatus for defining leading edge taper of a write pole tip 失效
标题翻译：用于定义写入磁极尖端的前缘锥度的方法和装置
公开(公告)号：US07251878B2
公开(公告)日：2007-08-07
申请号：US10884368
申请日：2004-06-30
申请人： Quang Le , Jui-Lung Li , Yvette Chung Nga Winton , Sue Siyang Zhang , Yi Zheng
发明人： Quang Le , Jui-Lung Li , Yvette Chung Nga Winton , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and apparatus for defining leading edge taper of a write pole tip is disclosed. The fabrication process uses reactive ion etching to fabricate LET with tight control of the placement of LET's edge and to achieve higher angle for providing a higher effective write field at the pole tip while minimizing ATI for high-density perpendicular recording. The placement of a resist's edge is used to define the LET's edge and a CMP process is used to provide a planar surface for the fabrication of the write pole.
摘要翻译：公开了一种用于限定写入磁极尖端的前缘锥形的方法和装置。制造工艺使用反应离子蚀刻来制造LET，可以严格控制LET的边缘放置，并实现更高的角度，以便在磁极尖端提供更高的有效写入场，同时最大限度地降低ATI用于高密度垂直记录。使用抗蚀剂边缘的放置来定义LET的边缘，并且使用CMP工艺来提供用于制造写入极的平面。

22. 发明申请

US20060256482A1 Method to fabricate side shields for a magnetic sensor 失效
公开(公告)号：US20060256482A1
公开(公告)日：2006-11-16
申请号：US11126508
申请日：2005-05-10
申请人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
发明人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
IPC分类号： G11B5/33
CPC分类号： G11B5/3909 , B82Y10/00 , G11B5/112 , G11B5/3169 , G11B5/3906 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046
摘要： A method for fabricating magnetic side shields for an MR sensor of a magnetic head. Following the deposition of MR sensor layers, a first DLC layer is deposited. Milling mask layers are then deposited, and outer portions of the milling mask layers are removed such that a remaining central portion of the milling mask layers is formed having straight sidewalls and no undercuts. Outer portions of the sensor layers are then removed such that a relatively thick remaining central portion of the milling mask resides above the remaining sensor layers. A thin electrical insulation layer is deposited, followed by the deposition of magnetic side shields. A second DLC layer is deposited and the remaining mask layers are then removed utilizing a chemical mechanical polishing (CMP) liftoff step. Thereafter, the first DLC layer and the second DLC layer are removed and a second magnetic shield layer is then fabricated thereabove.

23. 发明申请

US20060002024A1 Method and apparatus for defining leading edge taper of a write pole tip 失效
标题翻译：用于定义写入磁极尖端的前缘锥度的方法和装置
公开(公告)号：US20060002024A1
公开(公告)日：2006-01-05
申请号：US10884368
申请日：2004-06-30
申请人： Quang Le , Jui-Lung Li , Yvette Nga Winton , Sue Zhang , Yi Zheng
发明人： Quang Le , Jui-Lung Li , Yvette Nga Winton , Sue Zhang , Yi Zheng
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , G11B5/1278 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and apparatus for defining leading edge taper of a write pole tip is disclosed. The fabrication process uses reactive ion etching to fabricate LET with tight control of the placement of LET's edge and to achieve higher angle for providing a higher effective write field at the pole tip while minimizing ATI for high-density perpendicular recording. The placement of a resist's edge is used to define the LET's edge and a CMP process is used to provide a planar surface for the fabrication of the write pole.
摘要翻译：公开了一种用于限定写入磁极尖端的前缘锥形的方法和装置。制造工艺使用反应离子蚀刻来制造LET，可以严格控制LET的边缘放置，并实现更高的角度，以便在磁极尖端提供更高的有效写入场，同时最大限度地降低ATI用于高密度垂直记录。使用抗蚀剂边缘的放置来定义LET的边缘，并且使用CMP工艺来提供用于制造写入极的平面。

24. 发明授权

US08553371B2 TMR reader without DLC capping structure 有权
标题翻译： TMR读卡器无DLC封盖结构
公开(公告)号：US08553371B2
公开(公告)日：2013-10-08
申请号：US12954508
申请日：2010-11-24
申请人： Honglin Zhu , Liubo Hong , Hicham M. Sougrati , Quang Le , Jui-Lung Li , Chando Park
发明人： Honglin Zhu , Liubo Hong , Hicham M. Sougrati , Quang Le , Jui-Lung Li , Chando Park
IPC分类号： G11B5/39
CPC分类号： G11B5/3163 , G01R33/098 , G11B5/3909 , G11B5/3929 , G11B5/3932
摘要： Embodiments herein generally relate to TMR readers and methods for their manufacture. The embodiments discussed herein disclose TMR readers that utilize a structure that avoids use of the DLC layer over the sensor structure and over the hard bias layer. The capping structure over the sensor structure functions as both a protective layer for the sensor structure and a CMP stop layer. The hard bias capping structure functions as both a protective structure for the hard bias layer and as a CMP stop layer. The capping structures that are free of DLC reduce the formation of notches in the second shield layer so that second shield layer is substantially flat.
摘要翻译：本文的实施方案通常涉及TMR读取器及其制造方法。本文讨论的实施例公开了TMR读取器，其利用了避免在传感器结构上以及硬偏置层上使用DLC层的结构。传感器结构上的封盖结构用作传感器结构的保护层和CMP停止层。硬偏置封盖结构既用作硬偏置层的保护结构又用作CMP停止层。没有DLC的封盖结构减少了第二屏蔽层中的凹口的形成，使得第二屏蔽层基本上是平的。

25. 发明申请

US20130001187A1 METHOD FOR MANUFACTURING A MAGNETORESISTIVE SENSOR USING SIMULTANEOUSLY FORMED HARD BIAS AND ELECTRICAL LAPPING GUIDE 有权
标题翻译：使用同时形成的硬度和电气导线制造磁传感器的方法
公开(公告)号：US20130001187A1
公开(公告)日：2013-01-03
申请号：US13172739
申请日：2011-06-29
申请人： Quang Le , Shin Funada , Jui-Lung Li
发明人： Quang Le , Shin Funada , Jui-Lung Li
IPC分类号： G11B5/127 , C23F1/00 , B05D5/12
CPC分类号： G03F7/20 , B82Y10/00 , G11B5/3169 , G11B5/3909 , G11B2005/3996
摘要： A method for manufacturing a magnetic sensor using an electrical lapping guide deposited and patterned simultaneously with a hard bias structure of the sensor material. The method includes depositing a sensor material, and patterning and ion milling the sensor material to define a track width of the sensor. A magnetic, hard bias material is then deposited and a second patterning and ion milling process is performed to simultaneously define the back edge of an electrical lapping guide and a back edge of the sensor.
摘要翻译：一种用传感器材料的硬偏置结构沉积和图案化的电研磨导向器制造磁传感器的方法。该方法包括沉积传感器材料，以及图案化和离子铣削传感器材料以限定传感器的轨道宽度。然后沉积磁性，硬偏置材料，并且执行第二图案化和离子铣削工艺以同时限定电研磨引导件的后边缘和传感器的后边缘。

26. 发明授权

US08252516B2 Manufacturing a narrow track read head 有权
标题翻译：制造窄轨读头
公开(公告)号：US08252516B2
公开(公告)日：2012-08-28
申请号：US12261241
申请日：2008-10-30
申请人： Quang Le , Jui-Lung Li
发明人： Quang Le , Jui-Lung Li
IPC分类号： G11B5/127
CPC分类号： G01R33/093 , B82Y25/00 , G11B5/3116 , G11B5/398 , Y10T29/49032 , Y10T29/49043
摘要： Embodiments of the invention operate to narrow the track width of a read head used in a disk drive. In one embodiment, a magnetic read head has a track width of about 40 nm or less. The read head is fabricated by a method that includes fabricating a film stack from a substrate, a sensor material, a stop material, a first release material, a mask material, and a photo resist material. The mask material may include a masking substrate material and a second release material. The film stack is processed by forming a read head image in the photo resist material, removing portions of the film stack that lie outside the read head image of the photo resist material, stripping the film stack to remove the photo resist, mask and first release materials, and milling the sensor material according to the read head image.
摘要翻译：本发明的实施例用于缩小磁盘驱动器中使用的读取头的磁道宽度。在一个实施例中，磁读头具有约40nm或更小的轨道宽度。读取头通过包括从基底，传感器材料，止挡材料，第一释放材料，掩模材料和光致抗蚀剂材料制造薄膜叠层的方法制造。掩模材料可以包括掩蔽衬底材料和第二释放材料。通过在光致抗蚀剂材料中形成读头图像来处理胶片堆叠，去除位于光致抗蚀剂材料的读取头图像之外的膜堆叠的部分，剥离胶片堆叠以除去光致抗蚀剂，掩模和第一释放材料，并根据读头图像铣削传感器材料。

27. 发明授权

US07969684B2 Write head design and method for reducing adjacent track interference at very narrow track widths 有权
标题翻译：用于在非常窄的轨道宽度上减少相邻轨道干扰的写头设计和方法
公开(公告)号：US07969684B2
公开(公告)日：2011-06-28
申请号：US11391942
申请日：2006-03-28
申请人： Quang Le , Jui-Lung Li
发明人： Quang Le , Jui-Lung Li
IPC分类号： G11B5/127 , G11B5/11
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. The trailing shield is notched, having an un-notched portion directly behind (trailing) the write pole and first and second notched portions that extend laterally to either side. The un-notched portion of the trailing shield is located adjacent to the trailing edge of the write pole and is separated from the trailing edge of the write pole by a trailing shield notch. The notched portions are separated from the trailing edge of the write gap by a notch depth, measured along the trailing direction, the notch depth as measured in the trailing direction being larger than the trailing shield distance. The notch depth as measured in the trailing direction is preferably 25-50 nm larger than the trailing shield gap distance.
摘要翻译：垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。后屏蔽被切口，具有直写在后面（后面）写入极的未切口部分，以及横向延伸到任一侧的第一和第二切口部分。后屏蔽的未切口部分位于与写极的后缘相邻并且通过后屏蔽切口与写极的后缘分离。切口部分从写入间隙的后缘与沿着拖尾方向测量的切口深度分开，在后沿方向上测量的切口深度大于尾部屏蔽距离。在拖尾方向上测量的凹口深度优选比后屏蔽间隙距离大25-50nm。

28. 发明申请

US20110146061A1 METHOD FOR MANUFACTURING A MAGNETORESISTIVE SENSOR HAVING A FLAT SHIELD 有权
标题翻译：用于制造具有平板屏蔽的磁传感器的方法
公开(公告)号：US20110146061A1
公开(公告)日：2011-06-23
申请号：US12645323
申请日：2009-12-22
申请人： Shin Funada , Quang Le , Thomas L. Leong , Jui-Lung Li , Chang-Man Park , Ning Shi , Hicham M. Sougrati
发明人： Shin Funada , Quang Le , Thomas L. Leong , Jui-Lung Li , Chang-Man Park , Ning Shi , Hicham M. Sougrati
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/3912 , G11B5/398 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49067
摘要： A method for manufacturing a magnetoresistive sensor that results in the sensor having a very flat top magnetic shield. The process involves depositing a plurality of sensor layers and then depositing a thin high density carbon CMP stop layer over the sensor layers and forming a mask over the CMP stop layer. An ion milling is performed to define the sensor. Then a thin insulating layer and magnetic hard bias layer are deposited. A chemical mechanical polishing is performed to remove the mask and a reactive ion etching is performed to remove the remaining carbon CMP stop layer. Because the CMP stop layer is very dense and hard, it can be made very thin. This means that when it is removed by reactive ion etching, there is very little notching over the sensor, thereby allowing the upper shield (deposited there-over) to be very thin.
摘要翻译：一种用于制造磁阻传感器的方法，其导致传感器具有非常平坦的顶部磁屏蔽。该过程包括沉积多个传感器层，然后在传感器层上沉积薄的高密度碳CMP停止层，并在CMP停止层上形成掩模。执行离子铣削来定义传感器。然后沉积薄的绝缘层和磁性硬偏置层。进行化学机械抛光以除去掩模，并执行反应离子蚀刻以除去剩余的碳CMP停止层。因为CMP停止层非常致密且硬，所以可以使其非常薄。这意味着当通过反应离子蚀刻去除时，在传感器上几乎没有凹口，从而允许上部屏蔽（沉积在其上）非常薄。

29. 发明申请

US20100149688A1 PERPENDICULAR-MAGNETIC-RECORDING HEAD WITH LEADING-EDGE TAPER OF A PLANARIZED STEPPED-POLE LAYER HAVING GREATER RECESS DISTANCE THAN A FLARE-POINT OF A MAIN-POLE LAYER 审中-公开
标题翻译：具有平面化阶梯平面层的平面磁记录头的平面磁记录头具有比主层的点的更大的记录距离
公开(公告)号：US20100149688A1
公开(公告)日：2010-06-17
申请号：US12333094
申请日：2008-12-11
申请人： Quang Le , Jui-Lung Li
发明人： Quang Le , Jui-Lung Li
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/1871 , G11B5/3116 , G11B5/3163
摘要： Perpendicular-magnetic-recording head with leading-edge taper of a planarized stepped-pole layer having greater recess distance than a flare point of a main-pole layer. The perpendicular-magnetic-recording head includes a write element including the main-pole layer having the flare point recessed a first distance from a pole tip of the main-pole layer at an air-bearing surface below the air-bearing surface. The write element includes the stepped-pole layer magnetically coupled with the main-pole layer across an interface between the main-pole layer and the stepped-pole layer. The stepped-pole layer has the leading-edge taper recessed a second distance from the pole tip of the main-pole layer at an air-bearing surface below the air-bearing surface. The second distance of the leading-edge taper is greater than the first distance of the flare point. A surface of the stepped-pole layer is planarized with the interface between the main-pole layer and the stepped-pole layer substantially flat over the leading-edge taper.
摘要翻译：垂直磁记录头，其具有比主极层的扩张点更大的凹陷距离的平坦化阶梯极层的前缘锥形。垂直磁记录头包括写入元件，该写入元件包括具有在空气轴承表面下方的空气轴承表面处与主极层的极尖之间第一距离的扩口的主极层。写元件包括跨越主极层和阶梯极层之间的界面与主极层磁耦合的阶梯极层。阶梯极层具有在空气轴承表面下方的空气轴承表面处从主极层的极端部延伸第二距离的前缘锥形。前缘锥形的第二距离大于喇叭口的第一距离。阶梯极层的表面被平坦化，主极层和台阶极层之间的界面在前缘锥形上基本平坦。

30. 发明申请

US20070230046A1 Write head design and method for reducing adjacent track interference in at very narrow track widths 有权
标题翻译：用于在非常窄的轨道宽度上减少相邻轨道干扰的写头设计和方法
公开(公告)号：US20070230046A1
公开(公告)日：2007-10-04
申请号：US11391942
申请日：2006-03-28
申请人： Quang Le , Jui-Lung Li
发明人： Quang Le , Jui-Lung Li
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. The trailing shield is notched, having an un-notched portion directly behind (trailing) the write pole and first and second notched portions that extend laterally to either side. The un-notched portion of the trailing shield is located adjacent to the trailing edge of the write pole and is separated from the trailing edge of the write pole by a trailing shield notch. The notched portions are separated from the trailing edge of the write gap by a notch depth, measured along the trailing direction, the notch depth as measured in the trailing direction being larger than the trailing shield distance. The notch depth as measured in the trailing direction is preferably 25-50 nm larger than the trailing shield gap distance.
摘要翻译：垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。后屏蔽被切口，具有直写在后面（后面）写入极的未切口部分，以及横向延伸到任一侧的第一和第二切口部分。后屏蔽的未切口部分位于与写极的后缘相邻并且通过后屏蔽切口与写极的后缘分离。切口部分从写入间隙的后缘与沿着拖尾方向测量的切口深度分开，在后沿方向上测量的切口深度大于尾部屏蔽距离。在拖尾方向上测量的凹口深度优选比后屏蔽间隙距离大25-50nm。

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