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    • 22. 发明专利
    • INSPECTION DEVICE AND METHOD, AND SYSTEM THEREWITH
    • JPH06317534A
    • 1994-11-15
    • JP9954193
    • 1993-04-26
    • CANON KK
    • TSUJI TOSHIHIKOTAKEUCHI SEIJIMIYAZAKI KYOICHIYOSHII MINORUNOSE TETSUSHIMORI TETSUZO
    • G01B11/24G01B11/30G01N21/88G01N21/94G01N21/956
    • PURPOSE:To detect micro foreign mater or defects at a high S/N ratio by radiating two light fluxes, which are different from each other in polarization status and wavelength, on the inspection position and generating a heterodyne interference between one light flux in which the polarization status of scattered light changed and the other light flux. CONSTITUTION:A laser beam 12a is led through an optical scanning system consisting of a scanning mirror 13 and an ftheta lens system 14 and then it is divided into a P polarization laser beam 15a and an S polarization laser beam 15b through a polarization beam splitter 15. The beam 15a is set by a filter system 16 in a manner to have an intensity most suitable to the foreign matter inspection and it is converged on an inspection surface 21 by a mirror 18 to form a spot 20. On the other hand, the beam 15b is also converged on the spot 20 on the surface of a face to be inspected 21 by a mirror 19 after passing through a filter system 17. Then, a P-polarized zero-th order diffracted light 23 out of the scattered light, which are directed in a photoelectric detector 29 direction from the spot 20, and a P-polarized element of backscattered light 24 caused by foreign matter or defects generate heterodyne interference because of the alignment of polarization plane, so that only the scattered light caused by the foreign matters or defects can be detected as a beat signal.
    • 25. 发明专利
    • POWER SOURCE EQUIPMENT FOR ALIGNER
    • JPH0297239A
    • 1990-04-09
    • JP24626188
    • 1988-09-30
    • CANON KK
    • MORI TETSUZOUZAWA SHUNICHIUDA KOJIKAWAKAMI EIGO
    • H01L21/30H01L21/027H02J9/06
    • PURPOSE:To eliminate accident such as dropping out of water, in a power source equipment for an aligner by switching power supply from a first power source section to a second power source section upon occurrence of abnormality such as power interruption while simultaneously minimizing the number of object to be fed with power in the aligner. CONSTITUTION:When power is fed normally from an external AC power source, a power source 1 feeds power variously to the entire aligner through a distributing section 5. At this time, a power source 2 is charging an internal battery and not feeding power to the distributing section 5. Upon occurrence of abnormality in the external AC power source, a source monitoring section 3 detects the abnormality quickly and provides a power interruption detecting signal 22. Consequently, the power source 2 feeds power to the distributing section 5 from the internal battery. The distributing section 5 feeds power only to a distribution line 7. By such arrangement, accident due to abnormal power source or damage of wafer can be eliminated.
    • 26. 发明专利
    • SOR EXPOSURE SYSTEM
    • JPH0268919A
    • 1990-03-08
    • JP22048888
    • 1988-09-05
    • CANON KK
    • UDA KOJITANAKA YUTAKAMORI TETSUZOSHIMODA ISAMUUZAWA SHUNICHI
    • H05H13/04G03F7/20H01L21/027H01L21/30
    • PURPOSE:To prevent differential pressure from applying to a beryllium window even though the vacuum break of a port takes place; besides, make this approach keep other exposure devices from being damaged by exchanging abnormal signals regarding an exposure system through communication means which connect mutual control measures. CONSTITUTION:A SOR exposure system is equipped with: a SOR ring as well as a SOR ring control means for controlling the SOR ring; one or more of exposure devices 15 which performs exposure according to a SOR light generated by the SOR ring. In a SOR exposure system where intervals between at least two or more of control means such as the SOR ring as well as exposure device control means are connected by communication means 5, abnormal signals regarding the exposure system are exchanged by the communication means 5. For example, signals which detect the leakage of the vacuum line of the exposure system and output signals generated by the seismometers are used as the abnormal signals. Further, a beryllium window 20 is mounted at a SOR light incident port of the above exposure devices 15 and an emergency cutout valve 21 is disposed at the SOR light incident side in the vicinity of the berylluim window.
    • 29. 发明专利
    • COLOR IMAGE PROCESSING SYSTEM
    • JPS62154971A
    • 1987-07-09
    • JP29331485
    • 1985-12-27
    • CANON KK
    • SUGIURA SUSUMUSUGINO TAKASHITAKAOKA MAKOTOMORI TETSUZO
    • H04N1/60G06F3/12G06K15/10G06T11/00H04N1/40
    • PURPOSE:To realize a black generation part and a base color removal part with simple constitution by generating four-color print data which includes new black based on three-color data which is dot-expanded based on three-color density data and position information on print dots. CONSTITUTION:When black is generated by superposing three colors one over another while the density of monochromatic black is low, almost the half is residual monochromatic black and the remaining half is replaced with the three- color black to make settings which meet requirements of density and moisture absorption. For the purpose, position information on 4X4 dots consisting one picture element is read by an XCNT 306 and YCNT 307 to determine whether black is generated or not according to the position, thereby performing control as to which part of the 4X4 matrix is made into three-color black. Even when the hue of monochromatic black and the hue of three-color black are different, M, for example, other than K is added during conversion from Y1M1C1 YMCK based on the position information, so that reddish black can be generated.