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    • 23. 发明授权
    • Method for fabricating a ferroelectric memory configuration
    • 铁电存储器配置的制造方法
    • US06500677B2
    • 2002-12-31
    • US10027106
    • 2001-12-26
    • Renate BergmannChristine DehmThomas RoehrGeorg BraunHeinz HoenigschmidGünther Schindler
    • Renate BergmannChristine DehmThomas RoehrGeorg BraunHeinz HoenigschmidGünther Schindler
    • H01L2100
    • H01L27/11502H01L27/11507
    • The invention provides a method. In a first step of a method for fabricating a ferroelectric memory configuration, there is provided a substrate having a multiplicity of memory cells. Each of the memory cells has at least one select transistor, at least one short-circuit transistor, and at least one ferroelectric capacitor. The transistors are connected in an electrically conductive manner to a first of the electrodes of the ferroelectric capacitor. In the next step, at least one electrically insulating layer is applied. In the next step, at least one contact hole for connecting a second electrode of the ferroelectric capacitors is produced. Next, contact holes for connecting the short-circuit transistors are produced. Next, the contact holes are filled with electrically conductive material. Next, an electrically conductive layer is applied and patterned, so that the second electrodes of the ferroelectric capacitors are each conductively connected to the short-circuit transistors.
    • 本发明提供了一种方法。 在制造铁电存储器结构的方法的第一步骤中,提供了具有多个存储单元的衬底。 每个存储单元具有至少一个选择晶体管,至少一个短路晶体管和至少一个铁电电容器。 晶体管以导电方式连接到铁电电容器的第一电极。 在下一步骤中,施加至少一个电绝缘层。 在下一步骤中,产生用于连接铁电电容器的第二电极的至少一个接触孔。 接下来,制造用于连接短路晶体管的接触孔。 接下来,接触孔填充有导电材料。 接下来,施加导电层并图案化,使得强电介质电容器的第二电极分别与短路晶体管导通。
    • 28. 发明授权
    • Ferroelectric memory configuration
    • 铁电存储器配置
    • US6137712A
    • 2000-10-24
    • US440818
    • 1999-11-15
    • Thomas RohrHeinz HonigschmidGeorg Braun
    • Thomas RohrHeinz HonigschmidGeorg Braun
    • G11C14/00G11C11/22
    • G11C11/22
    • The invention relates to a memory configuration comprising a multiplicity of memory cells. Each of the memory cells has at least one ferroelectric storage capacitor and a selection transistor. The memory cells are addressed via word lines and bit line pairs. It is possible for a reference signal obtained from a reference cell pair via a bit line pair to be compared with a read signal from a memory cell in a sense amplifier. The sense amplifier is thereby assigned two bit line pairs connected in such a way that the reference signal is applied via the first bit line pair and, at the same time, the read signal is applied via the second bit line pair to the sense amplifier.
    • 本发明涉及包括多个存储单元的存储器配置。 每个存储单元具有至少一个铁电存储电容器和选择晶体管。 存储单元通过字线和位线对寻址。 可以将从参考单元对经由位线对获得的参考信号与来自读出放大器中的存储单元的读取信号进行比较。 因此,读出放大器被分配两个位线对,其连接方式是经由第一位线对施加参考信号,并且同时经由第二位线对将读取信号施加到读出放大器。