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    • 22. 发明申请
    • THIN-FILM CAPACITOR
    • 薄膜电容器
    • US20110075319A1
    • 2011-03-31
    • US12876611
    • 2010-09-07
    • Yasunobu OIKAWAYoshihiko Yano
    • Yasunobu OIKAWAYoshihiko Yano
    • H01G4/008H01G4/005
    • H01G4/005H01G4/008H01G4/33
    • To provide a thin-film capacitor capable of preventing the degradation of electrical characteristics caused by direct contact between an adhesion layer of a terminal electrode and a dielectric layer, to increase the reliability. The thin-film capacitor comprises: a dielectric layer deposited on a base electrode; an upper electrode layer deposited on the dielectric layer; a terminal electrode including an adhesion layer, a seed layer, and a plating layer; a resin layer for wiring provided between the upper electrode layer and the terminal electrode for isolating the upper electrode layer from the terminal electrode; and a wiring layer provided so as to extend through the resin layer for wiring in contact with the adhesion layer for electrically connecting the upper electrode layer and the terminal electrode, wherein a composition of the wiring layer differs from that of the adhesion layer of the terminal electrode, and wherein a reducing power of the wiring layer to the dielectric layer is smaller than that of the adhesion layer.
    • 提供能够防止由端子电极和电介质层的粘附层之间的直接接触引起的电特性劣化的薄膜电容器,以提高可靠性。 薄膜电容器包括:沉积在基极上的电介质层; 沉积在电介质层上的上电极层; 包括粘合层,种子层和镀层的端子电极; 用于在上电极层和端子电极之间设置用于将上电极层与端子电极隔离的布线用树脂层; 以及布线层,其设置成延伸穿过用于电连接上电极层和端子电极的粘合层接触的布线用树脂层,其中布线层的组成与端子的粘合层的组成不同 电极,并且其中所述布线层到所述电介质层的还原能力小于所述粘合层的还原能力。