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    • 22. 发明授权
    • Method of and apparatus for manufacturing a semiconductor device using a polysilicon hard mask
    • 使用多晶硅硬掩模制造半导体器件的方法和装置
    • US06719808B1
    • 2004-04-13
    • US09695068
    • 2000-10-25
    • Ji-soo KimTae-hyuk AhnWon-seok LeeWan-jae Park
    • Ji-soo KimTae-hyuk AhnWon-seok LeeWan-jae Park
    • H01L21302
    • H01L21/32137H01L21/31144
    • A method and apparatus for use in manufacturing a semiconductor device strips a polysilicon hard mask without damaging the layer left exposed by openings formed by using the polysilicon hard mask as an etching mask. The method includes forming a polysilicon hard mask in a pattern on a first layer to expose a portion of the first layer, dry etching the exposed portion of the first layer using the polysilicon hard mask as an etching mask to form an opening in the first layer, and thereafter removing the polysilicon hard mask by supplying an etching gas onto the polysilicon hard mask in a direction parallel to the major surface of the semiconductor substrate. The processing apparatus includes a reaction chamber including a spin chuck which supports the semiconductor substrate for rotation, a gas supply unit for supplying a process gas to the reaction chamber, a gas injection unit for injecting the process gas supplied by the gas supply unit into the reaction chamber in a direction parallel to the major surface of the semiconductor substrate, and an exhaust unit for exhausting gases from the reaction chamber.
    • 用于制造半导体器件的方法和装置剥离多晶硅硬掩模,而不会损坏通过使用多晶硅硬掩模形成的开口暴露的层作为蚀刻掩模。 该方法包括在第一层上形成图案中的多晶硅硬掩模以暴露第一层的一部分,使用多晶硅硬掩模作为蚀刻掩模干蚀刻第一层的暴露部分,以在第一层中形成开口 然后通过在多晶硅硬掩模上沿着与半导体基板的主表面平行的方向提供蚀刻气体来除去多晶硅硬掩模。 处理装置包括:反应室,包括支撑旋转用半导体基板的旋转卡盘,向反应室供给处理气体的气体供给单元,将由气体供给单元供给的处理气体注入到 反应室在与半导体基板的主表面平行的方向上,以及用于从反应室排出气体的排气单元。
    • 25. 发明授权
    • Method of fabricating a bit line structure for a semiconductor device
    • 制造半导体器件的位线结构的方法
    • US06348375B1
    • 2002-02-19
    • US09282006
    • 1999-03-29
    • Won-seok LeeKyoung-sub ShinSang-sup Jeong
    • Won-seok LeeKyoung-sub ShinSang-sup Jeong
    • H01L218242
    • H01L27/10888H01L27/10855H01L27/10885
    • A bit line structure for semiconductor devices, and a fabrication method thereof are provided. In this method, a first conductive film pattern, which fills a first contact hole and is used as a bit line, is formed on a first dielectric film pattern having the first contact hole formed on a semiconductor substrate. A lower part protecting layer pattern, comprised of an anti-reflectance coating (ARC) layer used in a process for patterning the first dielectric layer pattern, is formed on the interface between the first conductive layer pattern and the first dielectric layer pattern. A spacer for covering the sidewall of the first conductive film pattern is formed. An upper part protecting layer pattern comprised of an upper ARC layer is formed to cover the upper part of the first conductive layer pattern. A second dielectric layer pattern having a second contact hole is formed to cover the first conductive layer pattern. A second conductive layer pattern filling the second contact hole is formed and used as a storage node of a capacitor.
    • 提供半导体器件的位线结构及其制造方法。 在该方法中,在形成有半导体衬底的第一接触孔的第一电介质膜图案上形成填充第一接触孔并用作位线的第一导电膜图案。 在第一导电层图案和第一介电层图案之间的界面上形成由用于图案化第一介电层图案的工艺中使用的抗反射涂层(ARC)层构成的下部保护层图案。 形成用于覆盖第一导电膜图案的侧壁的间隔物。 形成由上部ARC层构成的上部保护层图案,以覆盖第一导电层图案的上部。 形成具有第二接触孔的第二电介质层图案以覆盖第一导电层图案。 形成填充第二接触孔的第二导电层图案并用作电容器的存储节点。
    • 27. 发明申请
    • DEVICE, SYSTEM AND METHOD FOR CALIBRATION OF CAMERA AND LASER SENSOR
    • 用于校准摄像机和激光传感器的装置,系统和方法
    • US20130305805A1
    • 2013-11-21
    • US13949622
    • 2013-07-24
    • Seong Yong AHNTok Son CHOEYong Woon PARKWon Seok LEE
    • Seong Yong AHNTok Son CHOEYong Woon PARKWon Seok LEE
    • G01C23/00
    • G01C23/00G01S7/497G01S17/08G01S17/87
    • Disclosed are a calibration device, a calibration system and a calibration method. The calibration device includes a camera configured to capture image information, a laser sensor configured to capture image information, a laser sensor configured to detect distance information, and a calibration module configured to perform a calibration of the camera and the laser sensor by obtaining a relation between the image information and the distance information, wherein the calibration module includes a plane member disposed to intersect a scanning surface of the laser sensor such that an intersection line is generated, and disposed within a capturing range by the camera so as to be captured by the camera, and a controller configured to perform coordinate conversions with respect to the image information and the distance information based on a ratio between one side of the plane member and the intersection line, and based on a plane member image included in the image information. Under these configurations, a calibration is performed through direct coordinate conversions with respect to image information and distance information.
    • 公开了一种校准装置,校准系统和校准方法。 该校准装置包括被配置为捕获图像信息的相机,被配置为捕获图像信息的激光传感器,被配置为检测距离信息的激光传感器,以及被配置为通过获得关系来执行相机和激光传感器的校准的校准模块 在所述图像信息和所述距离信息之间,其中所述校准模块包括布置成与所述激光传感器的扫描表面相交的平面构件,使得生成交叉线,并且通过所述相机设置在捕获范围内,以被所述摄像机捕获 相机和配置为基于平面构件的一侧与交叉线之间的比率,并且基于包括在图像信息中的平面构件图像来执行关于图像信息和距离信息的坐标转换的控制器。 在这些配置下,通过对图像信息和距离信息的直接坐标转换执行校准。
    • 29. 发明申请
    • System and method for determining position of mobile communication device
    • 用于确定移动通信设备位置的系统和方法
    • US20090017837A1
    • 2009-01-15
    • US10576817
    • 2005-09-09
    • Tae Kim, IISung Kang, IITae Kyoung KwonSung Hee KimWon Seok Lee
    • Tae Kim, IISung Kang, IITae Kyoung KwonSung Hee KimWon Seok Lee
    • H04Q7/20
    • H04W64/00G01S5/10
    • Provided is a method and system for determining a position of a mobile communication device in a mobile communication network, the method including the steps of: receiving a plurality of pieces of base station signal information, the base station signal information including base station identification information, the base stations transmitting the base station signal information to the mobile communication device; determining a base station corresponding to each of the plurality of pieces of base station signal information based on the base station identification information; generating vector information associated with the plurality of the base stations based on geographic information corresponding to the determined base station; and generating location information of the device according to the generated vector information, wherein the step of generating the vector information comprises the steps of: determining a predetermined vector proceeding order associated with the plurality of the base stations according to the base station signal information; and sequentially determining a vector with respect to the plurality of the base stations according to the determined vector proceeding order, with the base station in which the device is currently communicating with as a starting point.
    • 提供一种用于确定移动通信网络中的移动通信设备的位置的方法和系统,该方法包括以下步骤:接收多条基站信号信息,所述基站信号信息包括基站识别信息, 所述基站向所述移动通信装置发送所述基站信号信息; 基于所述基站识别信息确定与所述多个基站信号信息中的每一个对应的基站; 基于与所确定的基站对应的地理信息,生成与所述多个基站相关联的矢量信息; 以及根据所生成的矢量信息生成设备的位置信息,其中产生矢量信息的步骤包括以下步骤:根据所述基站信号信息确定与所述多个基站相关联的预定向量处理顺序; 并且根据所确定的向量进行顺序,与设备当前正在通信的基站作为起点,顺序地确定关于多个基站的向量。