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21. 发明申请

US20040160189A1 Ultra-high pressure discharge lamp 有权
标题翻译：超高压放电灯
公开(公告)号：US20040160189A1
公开(公告)日：2004-08-19
申请号：US10775218
申请日：2004-02-11
申请人： Ushiodenki Kabushiki Kaisha
发明人： Kensuke Fukushima
IPC分类号： H01J017/16 , H01J061/30
CPC分类号： H01J61/86 , C03C3/06 , C03C2201/21 , C03C2201/23 , C03C2201/32 , H01J61/302 , H01J61/822
摘要： An ultra-high pressure discharge lamp in which the disadvantage of the reduction of the illuminance maintenance factor due to formation of blackening and milky opacification in the discharge vessel and the disadvantage of formation of cracks in the discharge vessel is eliminated by the discharge vessel being made of a silica glass that contains 0.1 ppm by weight to 290 ppm by weight hydrogen. Further advantages are obtained by the silica glass having a content of OH radicals that is at most 1 ppm by weight and a content of aluminum in a range of 2 ppm by weight to 30 ppm by weight.
摘要翻译：通过放电容器被消除，由于在放电容器中形成黑化和乳白色混浊而导致的照度维持系数降低的缺点和放电容器中形成裂缝的缺点的超高压放电灯的含有0.1重量ppm至290重量ppm氢的二氧化硅玻璃。通过具有至多1重量ppm的OH基含量的二氧化硅玻璃和在2重量ppm至30重量ppm的范围内的铝的含量可获得其它优点。

22. 发明申请

US20040090183A1 Discharge lamp 有权
标题翻译：放电灯
公开(公告)号：US20040090183A1
公开(公告)日：2004-05-13
申请号：US10697090
申请日：2003-10-31
申请人： Ushiodenki Kabushiki Kaisha
发明人： Masataka Kawaguchi , Motoko Uramoto , Dan Masashi , Yoshihiro Horikawa
IPC分类号： H01J017/20 , H01J061/20
CPC分类号： H01J61/12 , H01J9/395
摘要： A discharge lamp which maintains a high lumen maintenance factor even when operated for a long time is obtained in a discharge lamp which has a silica glass discharge vessel and a pair of opposed electrodes in the discharge vessel and in which the discharge vessel is filled with at least 0.15 mg/mm3 mercury, a rare gas with argon as the main component, and 2null10null4 nullmole/mm3 to 7null10null3 nullmole/mm3 bromine by meeting the following conditions when feeding a direct current of 5 mA between the electrodes and a glow discharge produced: 1.0null10null4nullb/anull1.2null10null1 nullnullCondition (1) c/anull1.4null10null1 nullnullCondition (2) d/anull1.2null10null2 nullnullCondition (3) e/anull1.4null10null2 nullnullCondition (4) where a is the emission intensity of the argon with a wavelength of 668 nm, b is the emission intensity of OH with a wavelength of 309 nm, c is the emission intensity of hydrogen (H) with a wavelength of 656 mm, d is the emission intensity of C2 with a wavelength of 517 nm, and e is the emission intensity of CH with a wavelength of 431 nm
摘要翻译：在放电灯放电灯中，即使在放电容器中具有石英玻璃放电容器和一对相对电极的放电灯，也可以在放电容器中填充放电灯通过满足以下条件，以氩为主要成分的稀土气体为最少0.15mg / mm 3，2×10 -4 mol / mm 3至7×10 -3 mumole / mm 3溴当在电极之间馈送5mA的直流电和产生辉光放电时：1.0×10 -4 <= B / A <= 1.2×10 -1条件（1）c / a <= 1.4×10 <-1 >条件（2）d / a <= 1.2X10 <-2>条件（3）e / a <= 1.4X10 <-2>条件（4）其中a是波长为668nm的氩的发射强度，b是波长为309nm的OH的发射强度，c是波长为656mm的氢（H）的发射强度，d是波长为517nm的C2的发射强度，e是 CH与a的发射强度波长431 nm

23. 发明申请

US20040036415A1 Foil seal lamp 有权
标题翻译：箔封灯
公开(公告)号：US20040036415A1
公开(公告)日：2004-02-26
申请号：US10644860
申请日：2003-08-21
申请人： Ushiodenki Kabushiki Kaisha
发明人： Kenzo Kai , Kaoru Nakamura , Kazunori Morikawa
IPC分类号： H01J017/02
CPC分类号： H01J61/368 , H01K1/38
摘要： A foil seal lamp in which even when a high temperature of the seal area is reached oxidation of the molybdenum metal foils and the molybdenum outer leads which have been placed in the seal area can be reliably prevented, and in which a long service life can be obtained. is achieved by providing the surfaces of the metal foil and the outer lead which are placed in the seal areas with protective coatings of crystalline molybdate. An increase in the amount of protective coating that can be carried is produced by surface roughening the outer leads.
摘要翻译：一种铝箔密封灯，其中即使达到密封区域的高温，也可以可靠地防止已经放置在密封区域中的钼金属箔和钼外引线的氧化，并且其使用寿命长获得。通过提供金属箔和外部引线的表面来实现，其被放置在具有结晶钼酸盐的保护性涂层的密封区域中。可以通过使外引线表面粗糙化而产生保护涂层的量的增加。

24. 发明申请

US20030189407A1 Ultrahigh pressure mercury lamp 有权
标题翻译：超高压汞灯
公开(公告)号：US20030189407A1
公开(公告)日：2003-10-09
申请号：US10406389
申请日：2003-04-04
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Tetsuji Hirao
IPC分类号： H01J017/16 , H01J061/30
CPC分类号： H01J61/822 , H01J61/0732
摘要： An ultrahigh pressure mercury lamp which is small and has high light radiation intensity and moreover good color reproduction with high efficiency in which, even with a large amount of mercury added, a failure of the mercury to vaporize in the bulb part does not occur, and in which blackening of the bulb part due to wearing of the electrodes even under a large electrode load as a result of shortening of the distance between the electrodes is low is obtained by an ultrahigh pressure mercury lamp in which a bulb part of the discharge vessel made of translucent material has an essentially ovoid shape, is filled with at least 0.2 mg/mm3 of mercury and which is operated at an input wattage of at most 400 W using direct current, has the length D of the tip area of the anode and the length L of the bulb part in the direction of the tube axis of the lamp set in accordance with the relationship DnullL/2.
摘要翻译：一种超高压汞灯，其光照强度高，再次具有高效率的良好的色彩再现性，其中即使加入大量的汞也不会发生汞在灯泡部分蒸发的故障，其中由于电极之间的距离缩短导致电极甚至在大的电极负载下的磨损引起的灯泡部分的黑化是通过超高压汞灯得到的，其中放电容器的灯泡部分制成半透明材料具有基本上卵形的形状，填充有至少0.2mg / mm 3的汞，并且使用直流以至多400W的输入功率操作，具有尖端区域的长度D 阳极和根据关系D> = L / 2的灯组件的管轴方向的灯泡部分的长度L.

25. 发明申请

US20030096196A1 Process for curing of a resist which has been applied to a large substrate, and device for carrying out of the process 审中-公开
标题翻译：已经施加到大基材上的抗蚀剂的固化方法以及用于实施该方法的装置
公开(公告)号：US20030096196A1
公开(公告)日：2003-05-22
申请号：US10300796
申请日：2002-11-21
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Yoshiki Mimura , Kazumoto Tochihara
IPC分类号： G03C005/00
CPC分类号： H01L21/67115 , G03F7/40 , H01L21/67109
摘要： A process for curing of a resist in which the consumption of the device is not increased and a device for carrying out the process is achieved following manner. The workpiece stage is divided into several stages which are smaller than the size of the workpiece. The areas formed by division are each controlled to different constant temperatures. First, the part of the workpiece to which a resist has been applied and which has been developed is seated on a stage of the workpiece stage by a workpiece transport means. The resist-applied part of the workpiece is irradiated with UV radiation from a light irradiation part while it is being heated. Then, the workpiece is moved by the workpiece transport means such that the workpiece which was located on the above described stage is transported onto another stage and the other part of the workpiece is transported onto the stage named first. UV radiation is emitted from the light irradiation part. Likewise, the workpiece is irradiated with UV radiation while the workpiece is moved intermittently by the workpiece transport means. In this way the resist is cured.
摘要翻译：实现了不增加设备消耗的抗蚀剂的固化过程和用于实施该过程的设备。工件台分为几个小于工件尺寸的阶段。由分区形成的区域各自被控制到不同的恒定温度。首先，已经施加了抗蚀剂并已经被显影的工件的部分通过工件传送装置安置在工件台的台上。工件的抗蚀剂涂敷部分在加热时用来自光照射部分的紫外线照射。然后，工件由工件传送装置移动，使得位于上述台上的工件被输送到另一台上，而另一部分工件被运送到第一台上。从光照射部发射紫外线。同样地，当工件被工件传送装置间歇地移动时，用UV辐射照射工件。以这种方式，抗蚀剂被固化。

26. 发明申请

US20030053678A1 Device for exposure of a strip-shaped workpiece with a meander correction device 失效
标题翻译：带有曲折矫正装置的带状工件的曝光装置
公开(公告)号：US20030053678A1
公开(公告)日：2003-03-20
申请号：US10243710
申请日：2002-09-16
申请人： Ushiodenki Kabushiki Kaisha
发明人： Teruo Kikuchi
IPC分类号： G06K009/00
CPC分类号： G03F9/7088 , B65H23/0216 , B65H23/032 , G01B11/028 , G03F7/70791
摘要： A device for exposure of a strip-shaped workpiece with a meander correction device which is capable of carrying out meander correction with high precision even in the case of a thin workpiece or the formation of static electricity. The device includes two means for edge determination which are located at two locations in the transport direction of the strip-shaped workpiece and which photographs the edge of the strip-shaped workpiece, a pattern formed by the intersection of a linear part of a mask and the workpiece edge, a CCD camera for capturing the pattern formed, an image processing part for recording the pattern and searching for matching preset patterns, and a controller for computing the amount of meander of the strip-shaped workpiece, outputting a control signal if the amount of meander is outside of a preset range, and correcting the meander by rotating the workpiece and/or moving the workpiece in the transverse direction.
摘要翻译：用于通过曲折校正装置曝光带状工件的装置，即使在薄工件或形成静电的情况下也能够以高精度执行曲折校正。该装置包括用于边缘确定的两个装置，它们位于条形工件的输送方向上的两个位置处，并且对条状工件的边缘进行拍摄，由掩模的线性部分和工件边缘，用于捕获形成的图案的CCD照相机，用于记录图案并搜索匹配的预设图案的图像处理部分，以及用于计算条形工件的曲折量的控制器，如果曲折量超出预设范围，并且通过旋转工件和/或沿横向移动工件来校正曲折。

27. 发明申请

US20030042853A1 Mercury discharge lamp of the short arc type 失效
标题翻译：汞灯放电灯短弧型
公开(公告)号：US20030042853A1
公开(公告)日：2003-03-06
申请号：US10229003
申请日：2002-08-28
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Yukio Yasuda , Yoshinori Aiura
IPC分类号： H01J017/20 , H01J061/20
CPC分类号： H01J61/0732 , G03F7/70016 , H01J61/20 , H01J61/86
摘要： A short arc mercury discharge lamp including an arc tube filled with at least mercury and a rare gas, a cathode and an anode positioned opposite to each other within the arc tube, the cathode having an tapered area which tapers in a direction towards the anode and a projection which protrudes from the tapered area in a direction towards the anode. The amount of mercury to be added in the arc tube is in a range of 0.2nullnnull52, where n is the weight (mg/cm3) of the mercury per unit of volume, and a pressure of the rare gas to be added in the arc tube is in a range of 0.1nullpnull800, where p is the pressure (kPa) of the rare gas at an ambient temperature of 25null C.
摘要翻译：一种短弧汞灯放电灯，其包括在电弧管内至少填充有汞和稀有气体的电弧管，阴极和阳极，阴极具有朝向阳极的方向逐渐变细的锥形区域，从朝向阳极的方向从锥形区域突出的突起。在电弧管中添加的汞的量在0.2 <= n <52的范围内，其中n是每单位体积的汞的重量（mg / cm3），以及稀有气体对在电弧管中加入0.1 <= p <= 800的范围，其中p是在环境温度为25℃的稀有气体的压力（kPa）。

28. 发明申请

US20030038128A1 Heating device of the light irradiation type 失效
标题翻译：光照射型加热装置
公开(公告)号：US20030038128A1
公开(公告)日：2003-02-27
申请号：US10222853
申请日：2002-08-19
申请人： Ushiodenki Kabushiki Kaisha
发明人： Shinji Suzuki
IPC分类号： F27D011/00 , F27B005/14
CPC分类号： H01L21/67115 , C30B25/105 , C30B31/14
摘要： A heating device of the light irradiation type in which uniform illuminance can be obtained without placing a single end lamp in the middle of the light source part is achieved providing a light source part in which circular lamps are arranged concentrically to one another with a mirror in the center of the circular lamps. The mirror is convex toward the workpiece and reflects the light emitted from the innermost circular lamp located closest to the center area so that, without placing a single end lamp in the middle area, the reduction of illuminance in the middle area of the irradiated surface is reduced. Furthermore, the reflector can be made conical, and in this way, the light from the lamps can be emitted with high efficiency onto the workpiece surface.
摘要翻译：实现了在不将单端灯放置在光源部分中间的情况下可获得均匀照度的照射型加热装置，其中提供了一种光源部分，其中圆形灯彼此同心地布置有反射镜圆形灯的中心。反射镜朝向工件凸出，并且反射从位于最中心区域的最内圆形灯发射的光，使得在不将单端灯放置在中间区域中的情况下，照射表面的中间区域中的照度的减小是减少此外，反射器可以制成圆锥形，以这种方式，来自灯的光可以高效地发射到工件表面上。

29. 发明申请

US20020190654A1 Super-high pressure discharge lamp of the short arc type 有权
标题翻译：短弧型超高压放电灯
公开(公告)号：US20020190654A1
公开(公告)日：2002-12-19
申请号：US10167572
申请日：2002-06-13
申请人： Ushiodenki Kabushiki Kaisha
发明人： Yoshitaka Kanzaki , Toyohiko Kumada , Masanobu Komiya
IPC分类号： H01J017/18
CPC分类号： H01J61/86 , H01J61/0732
摘要： An arrangement with relatively high pressure tightness in a super-high pressure mercury lamp which is operated with an extremely high mercury vapor pressure is achieved the following: an emission part contains a pair of opposed electrodes, each of which has a side section and an end face, and which is filled with at least 0.15 mg/mm3 mercury; side tube parts made of quartz glass extend from opposite sides of the emission part and the side section and end face of a respective electrode is partially hermetically enclosed is each side part; the electrodes are arranged in side tube parts with a small intermediate space formed between the side sections and the end faces of the electrodes and the quartz glass of which the side tube parts is made; and the side parts of the electrodes have at least partially concave-convex areas in the side tube parts. Alternatively or in addition, each side section is joined to a metal foil which extends axially beyond the end face of the respective electrode and the end face of each metal foil adjoins the end face of the respective electrode at an acute angle.
摘要翻译：实现了以极高的汞蒸汽压力操作的超高压汞灯具有相对较高的压力紧密度的布置如下：发射部分包含一对相对的电极，每个电极具有侧部和端部面，填充至少0.15mg / mm3的汞; 由石英玻璃制成的侧管部分从发射部分的相对侧延伸，并且各个电极的侧部和端面部分地气密地包围为每个侧部; 电极布置在侧管部分中，在侧部和电极的端面之间形成有小的中间空间以及制造侧管部分的石英玻璃; 并且电极的侧部在侧管部分中具有至少部分的凹凸区域。或者或另外，每个侧部分连接到轴向延伸超过相应电极的端面的金属箔，并且每个金属箔的端面以锐角与相应电极的端面相邻。

30. 发明申请

US20020130626A1 Light source device 有权
标题翻译：光源装置
公开(公告)号：US20020130626A1
公开(公告)日：2002-09-19
申请号：US10095434
申请日：2002-03-13
申请人： Ushiodenki Kabushiki Kaisha
发明人： Masashi Okamoto , Mineo Nakayama , Izumi Takaya
IPC分类号： H05B037/02
CPC分类号： H01J61/547 , H05B41/042 , H05B41/2881 , H05B41/384 , Y02B20/204 , Y02B20/206
摘要： Light source device which includes a discharge lamp which contains at least 0.15 mg mercury per cubic millimeter of the volume of the discharge space, a pair of electrodes opposite one another to create the main discharge and spaced a distance from one another of less than or equal to 2.5 mm, and an auxiliary electrode arranged such that it does not come into contact with the discharge space for the main discharge. The light source device further including a feed circuit to feed the discharge current to the electrodes for the main discharge, and a starter which produces a high voltage between one of the electrodes of the two electrodes for the main discharge and the auxiliary discharge, such that the starter produces a voltage two to five times as high as the voltage necessary for starting the main discharge in the lamp at the room temperature state.
摘要翻译：光源装置，其包括放电灯，该放电灯包含至少0.15毫克汞柱/立方毫米的放电空间的体积，一对彼此相对的电极，以形成主放电并彼此间距离小于或等于以及辅助电极，其布置成使其不与用于主放电的放电空间接触。光源装置还包括用于将放电电流馈送到用于主放电的电极的馈电电路，以及用于主放电和辅助放电的两个电极中的一个电极之间产生高电压的起动器，使得启动器产生在室温状态下开始灯的主放电所需的电压的两到五倍的电压。

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