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1. 发明申请

US20030053678A1 Device for exposure of a strip-shaped workpiece with a meander correction device 失效
标题翻译：带有曲折矫正装置的带状工件的曝光装置
公开(公告)号：US20030053678A1
公开(公告)日：2003-03-20
申请号：US10243710
申请日：2002-09-16
申请人： Ushiodenki Kabushiki Kaisha
发明人： Teruo Kikuchi
IPC分类号： G06K009/00
CPC分类号： G03F9/7088 , B65H23/0216 , B65H23/032 , G01B11/028 , G03F7/70791
摘要： A device for exposure of a strip-shaped workpiece with a meander correction device which is capable of carrying out meander correction with high precision even in the case of a thin workpiece or the formation of static electricity. The device includes two means for edge determination which are located at two locations in the transport direction of the strip-shaped workpiece and which photographs the edge of the strip-shaped workpiece, a pattern formed by the intersection of a linear part of a mask and the workpiece edge, a CCD camera for capturing the pattern formed, an image processing part for recording the pattern and searching for matching preset patterns, and a controller for computing the amount of meander of the strip-shaped workpiece, outputting a control signal if the amount of meander is outside of a preset range, and correcting the meander by rotating the workpiece and/or moving the workpiece in the transverse direction.
摘要翻译：用于通过曲折校正装置曝光带状工件的装置，即使在薄工件或形成静电的情况下也能够以高精度执行曲折校正。该装置包括用于边缘确定的两个装置，它们位于条形工件的输送方向上的两个位置处，并且对条状工件的边缘进行拍摄，由掩模的线性部分和工件边缘，用于捕获形成的图案的CCD照相机，用于记录图案并搜索匹配的预设图案的图像处理部分，以及用于计算条形工件的曲折量的控制器，如果曲折量超出预设范围，并且通过旋转工件和/或沿横向移动工件来校正曲折。

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