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    • 23. 发明授权
    • Indium phosphide substrate and indium phosphide monocrystal and method of manufacturing thereof
    • 磷化铟基片和磷化铟单晶及其制造方法
    • US07442355B2
    • 2008-10-28
    • US10551923
    • 2004-05-06
    • Tomohiro Kawase
    • Tomohiro Kawase
    • C01B33/26C30B11/04C30B28/14
    • C30B11/00C30B29/40
    • An indium phosphide substrate for semiconductor devices is obtained as follows. In order to have the direction of growth of the crystal in the orientation, a seed crystal having a specified cross-sectional area ratio with the crystal body is placed at the lower end of a growth container. The growth container housing the seed crystal, indium phosphide raw material, dopant, and boron oxide is placed in a crystal growth chamber. The temperature is raised to at or above the melting point of indium phosphide. After melting the boron oxide, indium phosphide raw material, and dopant, the temperature of the growth container is lowered in order to obtain an indium phosphide monocrystal having a low dislocation density and a uniform dopant concentration on the wafer as well as in the depth direction.
    • 如下获得半导体器件用磷化铟基板。 为了具有<100>方向的晶体的生长方向,将具有与晶体的规定截面积比的晶种放置在生长容器的下端。 容纳晶种,磷化铟原料,掺杂剂和氧化硼的生长容器放置在晶体生长室中。 将温度升高至等于或高于磷化铟的熔点。 在熔化氧化硼,磷化铟原料和掺杂剂之后,降低生长容器的温度,以便获得在晶片上以及在深度方向上具有低位错密度和均匀掺杂剂浓度的磷化铟单晶 。
    • 25. 发明授权
    • Crucible for preparing compound semiconductor crystal
    • 用于制备化合物半导体晶体的坩埚
    • US5656077A
    • 1997-08-12
    • US503702
    • 1995-07-18
    • Tomohiro Kawase
    • Tomohiro Kawase
    • C30B11/00C30B35/00
    • C30B29/42C30B11/00C30B11/002Y10S117/90Y10T117/10
    • A method of preparing a compound semiconductor crystal in a crucible involves first forming a boron or boron compound containing layer on an inner surface of the crucible and heat treating the same to form a B.sub.2 O.sub.3 containing layer. The resulting preheated crucible is then employed for preparing the compound semiconductor crystal. By pretreating the crucible in this manner, it is possible to previously form a homogenous B.sub.2 O.sub.3 film on the crucible interior surface while preventing incomplete and heterogeneous coating of the B.sub.2 O.sub.3 film. Consequently, it is possible to prevent a raw material melt from wetting the crucible interior surface and thus to suppress polycrystallization, thereby preparing a compound semiconductor single crystal with an excellent yield.
    • 在坩埚中制备化合物半导体晶体的方法包括首先在坩埚的内表面上形成含硼化合物或含硼化合物层并对其进行热处理以形成含B2O3的层。 然后将所得的预热坩埚用于制备化合物半导体晶体。 通过以这种方式预处理坩埚,可以预先在坩埚内表面上形成均匀的B2O3膜,同时防止B2O3膜的不均匀涂层。 因此,可以防止原料熔体润湿坩埚内表面,从而抑制多晶化,从而以优异的成品率制备化合物半导体单晶。