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21. 发明专利

JP2006298758A Generating cell and system for ozone and other reactive gas 审中-公开
标题翻译：用于臭氧和其他反应气体的生成细胞和系统
公开(公告)号：JP2006298758A
公开(公告)日：2006-11-02
申请号：JP2006128394
申请日：2006-05-02
申请人： Mks Instruments Inc , エムケイエスインスツルメンツ,インク.
发明人： BESEN MATTHEW M , DONALD K SMITH
IPC分类号： C01B13/11 , B01J7/00 , B01J19/08
CPC分类号： C01B13/11 , B01J19/088 , C01B2201/12 , C01B2201/22 , C01B2201/24 , C01B2201/32 , C01B2201/34 , C01B2201/70 , C01B2201/74
摘要： PROBLEM TO BE SOLVED: To provide an improvement-type generator for ozone and other reactive gases which is of a light weight, low cost, and small and compact type.
SOLUTION: The generator has a high voltage assembly, a low voltage assembly, and at least one barrier dielectric member arranged between the above electrodes in order to define a discharge field in which a reactive gas is enclosed, with the above discharge field having an aperture of less than 0.127 mm (0.005 inch).
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为臭氧和其他反应性气体提供改进型发生器，其重量轻，成本低，小型紧凑型。解决方案：发电机具有高压组件，低压组件和布置在上述电极之间的至少一个阻挡电介质构件，以便限定其中包含反应性气体的放电场，其中上述放电场具有小于0.127mm（0.005英寸）的孔径。版权所有（C）2007，JPO＆INPIT

22. 发明专利

JP2004538127A Capture device and method for condensable products of the deposition reaction 审中-公开
公开(公告)号：JP2004538127A
公开(公告)日：2004-12-24
申请号：JP2002575089
申请日：2002-03-08
申请人：エムケイエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人：グ，ヨウファン
IPC分类号： B01D5/00 , B01D8/00 , B01D45/08 , B01D53/00 , C23C16/44 , H01L21/31
CPC分类号： B01D45/08 , B01D8/00 , B01D53/002 , Y10S55/15
摘要：【課題】５酸化タンタルのような凝縮性の液体に関する捕捉装置１０。
【解決手段】この装置１０は第２捕捉チャンバ９０を取り囲む第１捕捉チャンバ５０、および排出溜１１内に捕捉された液体を第１および第２チャンバを通る気体流から効果的に分離するのに十分な小さい開口部を持つ。第１および第２チャンバの仕切りおよび開口部は凝縮を促進すると同時に凝縮液を流すことを可能にするため，第１および第２チャンバでの気体流の流れを阻害しない。
【選択図】図４

23. 发明专利

JP2004132698A Differential pressure/absolute pressure converter for load lock control 有权
标题翻译：差压/绝对压力转换器，用于负载锁定控制
公开(公告)号：JP2004132698A
公开(公告)日：2004-04-30
申请号：JP2002228745
申请日：2002-08-06
申请人： Mks Instruments Inc , エムケーエスインストゥルメンツインコーポレーテッド
发明人： GU YOUFAN , HOLCOMB GARRY , WENZEL OLE
IPC分类号： G01L13/06 , C23C14/56 , C23C16/44 , G01L11/00 , G01L21/12 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a differential pressure/absolute pressure converter for accurately and rapidly performing load lock control. SOLUTION: In the converter 10 and its conversion method, where an absolute pressure sensor for detecting an absolute pressure in a load lock chamber 60 and a differential pressure sensor for detecting the differential pressure between the surrounding atmospheric pressure and pressure in the load lock chamber 60 are combined, a control signal for opening an internal door 62 from the load lock chamber 60 to a vacuum treatment chamber 70, and a control signal for opening an external door 64 between the peripheral atmosphere and the load lock chamber 60 are provided. The converter 10 generates a signal for controlling the transition from a state for evacuating the pressure of the load lock chamber slowly by a pump to a state for evacuating the pressure of the load lock chamber rapidly by the pump at a pressure setting point that is determined in advance. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供用于精确和快速地执行加载锁定控制的差压/绝对压力转换器。解决方案：在转换器10及其转换方法中，用于检测负载锁定室60中的绝对压力的绝对压力传感器和用于检测周围大气压力和负载压力之间的压差的压差传感器组合了锁定室60，用于将内门62从负载锁定室60打开到真空处理室70的控制信号和用于打开周围大气和负载锁定室60之间的外部门64的控制信号。转换器10产生一个信号，用于控制从用于将负载锁定室的压力排出的状态缓慢地由泵转移到用于在确定的压力设定点处由泵快速抽出负载锁定室的压力的状态的转变的信号提前。版权所有（C）2004，JPO

24. 发明专利

JP5868979B2 トランジスタ入力を不整合にする電力増幅器有权
标题翻译：用于晶体管输入的不匹配功率放大器
公开(公告)号：JP5868979B2
公开(公告)日：2016-02-24
申请号：JP2013528242
申请日：2011-09-06
申请人：エムケーエスインスツルメンツ,インコーポレイテッド , MKS INSTRUMENTS,INC.
发明人：クリストファーミカエルオーウェン
IPC分类号： H03F3/30 , H03F3/21
CPC分类号： H03F3/211 , H03F1/086 , H03F1/565 , H03F3/2171 , H03F3/2178 , H03F3/265 , H03F2200/534 , H03F2200/537 , H03F2203/21103

25. 发明专利

JP5378678B2 Measurement system and monitoring method using a multi-point voltage current probe 有权
公开(公告)号：JP5378678B2
公开(公告)日：2013-12-25
申请号：JP2007317737
申请日：2007-12-07
申请人：エムケーエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人：チョーエイリ，レイ , ヘッケルマン，トッド , ジェイ．カウムー，デイビッド
IPC分类号： H05H1/00 , H05H1/46
CPC分类号： H01J37/32935 , H01J37/32082 , H01J37/32174 , H04B17/318
摘要： A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.

26. 发明专利

JP5302346B2 Pressure control de-gas system for hot cathode ionization gauge 有权
公开(公告)号：JP5302346B2
公开(公告)日：2013-10-02
申请号：JP2011039836
申请日：2011-02-25
申请人：エムケイエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人：ピーコック，ネル，ティー． , ウエイド，ステイシー，ダブルユー．
IPC分类号： G01L21/32
CPC分类号： G01L21/32
摘要： A method for operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power level is increased and decreased in steps, and the gauge pressure monitored following each increase and decrease. In another embodiment the rate of change in the gauge pressure is monitored while the degas power level is increased. If it is determined from the monitored rate of change that the gauge pressure may exceed the upper pressure limit, the degas power increases can be stopped or the degas power decreased. These operations are continued until predetermined final degas conditions are met. A display can be activated following the successful completion of the degas operation.

27. 发明专利

JP2013176040A Feedback control and coherency of multiple power supplies in radio frequency power delivery system for pulsed mode scheme in thin film processing 审中-公开
标题翻译：无线电频率输出系统中多个电源的反馈控制和相干性薄膜处理中的脉冲模式方案
公开(公告)号：JP2013176040A
公开(公告)日：2013-09-05
申请号：JP2013026401
申请日：2013-02-14
申请人： Mks Instruments Inc , エムケーエスインストルメンツインコーポレーテッドMks Instruments,Incorporated
发明人： COUMOU DAVID J , PHAM RICHARD
IPC分类号： H03G3/20 , H01L21/3065 , H05H1/46
CPC分类号： H03G1/00 , H03F1/0211 , H03F1/56 , H03F3/189 , H03F3/20 , H03H7/40
摘要： PROBLEM TO BE SOLVED: To provide a pulsed RF power supply system for delivering periodic RF power to a load which has a closed loop feedback system.SOLUTION: A power amplifier outputs an RF signal to the load. A sensor measures the RF signal provided to the load and outputs signals that vary in accordance with the RF signal. A first feedback loop enables control of the RF signal on the basis of power determined in accordance with the output from the sensor. A second feedback loop enables control of the RF signal on the basis of energy measured in accordance with the signals output from the sensor. Energy amplitude and duration provide control values for varying the RF signal. The control system and techniques are applicable to both pulsed RF power supplies and in various instances to continuous wave power supplies.
摘要翻译：要解决的问题：提供一种用于将周期性RF功率传递给具有闭环反馈系统的负载的脉冲RF电源系统。解决方案：功率放大器向负载输出RF信号。传感器测量提供给负载的RF信号，并输出根据RF信号变化的信号。第一反馈环路使得能够基于根据传感器的输出确定的功率来控制RF信号。第二反馈环路基于根据从传感器输出的信号测量的能量来控制RF信号。能量幅度和持续时间提供用于改变RF信号的控制值。控制系统和技术适用于脉冲式RF电源以及各种情况下的连续波浪电源。

28. 发明专利

JP2013038084A Multiple heater control system with expandable modular functionality 有权
标题翻译：具有可扩展模块化功能的多重加热器控制系统
公开(公告)号：JP2013038084A
公开(公告)日：2013-02-21
申请号：JP2012229233
申请日：2012-10-16
申请人： Mks Instruments Inc , エムケイエスインストゥルメンツ, インコーポレイテッド , Watlow Electric Manufacturing Co , ワトロウエレクトリックマニュファクチュアリングカンパニー
发明人： GU YOUFAN , JEFFREY D KIERNAN , RORHEAD CHARLES C , WORRINGER WILLIAM C , ERIC E ELLIS , FOSTER CURTIS A , JAMES P HENGHES , HOVEN MARK LOUIS GUILMER , JAMES H KREISEL , SEAN REININGER , MORRAN ROBERT O , PETERSON KURT W , JASON R POWEL , DALE T WOLFE
IPC分类号： H05B3/00 , F16L53/00
CPC分类号： H05B1/0244 , G05D23/1928 , G05D23/1935 , G05D23/22 , Y10T307/469 , Y10T307/484
摘要： PROBLEM TO BE SOLVED: To provide a heater control apparatus of a more flexible heater control system that can be configured easily, neatly, and effectively to meet a wider variety of operator requirements.SOLUTION: A heater control apparatus comprises first and second temperature sensors and a heater controller. The heater controller has: an AC power circuit supplying an AC power to a heating element via an AC power circuit extending between an inlet connector connected to an AC power source and an outlet connector connected to the heating element; an upper-limit power switch opening and closing the AC power circuit; an upper-limit control circuit making the upper-limit power switch open and close the AC power circuit depending on a detection temperature of the first temperature sensor; a process power switch opening and closing the AC power circuit to control the AC power supplied at an outlet; and a process control circuit making the process power switch open and close the AC power circuit according to comparison between a detection temperature of the second temperature sensor and a desired setting point temperature.
摘要翻译：要解决的问题：提供一种更灵活的加热器控制系统的加热器控制装置，其可以容易地，整齐地和有效地配置以满足更多种类的操作者要求。解决方案：加热器控制装置包括第一和第二温度传感器和加热器控制器。所述加热器控制器具有：交流电源电路，其经由在连接到AC电源的入口连接器和连接到所述加热元件的出口连接器之间延伸的AC电力电路向加热元件提供AC电力; 一个上限电源开关，用于打开和关闭交流电源电路; 使上限电源开关根据第一温度传感器的检测温度而开闭AC电路的上限控制电路; 处理电源开关，用于打开和关闭所述交流电源电路，以控制在出口处提供的AC电力; 以及过程控制电路，使得处理电源开关根据第二温度传感器的检测温度和期望的设定点温度之间的比较来打开和关闭交流电源电路。版权所有（C）2013，JPO＆INPIT

29. 发明专利

JP4838125B2 Process quality display gui and program for the 有权
公开(公告)号：JP4838125B2
公开(公告)日：2011-12-14
申请号：JP2006520244
申请日：2004-07-09
申请人：エムケーエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人：マークアトウッド , ギュンターシフナッチ , アミウズィレヴ
IPC分类号： G05B23/02 , G05B19/418 , G06F19/00 , H01L20060101
CPC分类号： G05B19/41875 , G05B2219/35502 , G05B2219/45031 , Y02P90/22

30. 发明专利

JP4828024B2 Methods and teos trap for the polymerization teos deposition suppression in the vacuum pump line 有权
公开(公告)号：JP4828024B2
公开(公告)日：2011-11-30
申请号：JP2000599920
申请日：2000-02-18
申请人：エムケイエスインスツルメンツ,インコーポレイテッドMks Instruments,Inc.
发明人：グ，ヨウハン , ドゾレツ，ポール
IPC分类号： H01L21/31 , B01D5/00 , C23C16/44
CPC分类号： H01J37/32844 , B01D5/0036 , C23C16/4412 , Y02C20/30 , Y10S438/905

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