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21. 发明申请

US20060215900A1 Image correction method 有权
公开(公告)号：US20060215900A1
公开(公告)日：2006-09-28
申请号：US11360584
申请日：2006-02-24
申请人： Junji Oaki , Shinji Sugihara , Yuichi Nakatani
发明人： Junji Oaki , Shinji Sugihara , Yuichi Nakatani
IPC分类号： G06K9/00
CPC分类号： G06K9/748 , G06K9/03
摘要： An image correction method having a small number of setting parameters achieved by integrating shift (alignment) in unit of a sub-pixel and image correction. A relationship between an inspection reference pattern image and a pattern image under test is identified, a mathematical expression model which fits a pixel error, expansion and contraction/distortion noise, and sensing noise of the image is constructed, and the model is simulated to generate an estimation model image.

22. 发明申请

US20050232477A1 Defect inspection apparatus and defect inspection method 失效
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US20050232477A1
公开(公告)日：2005-10-20
申请号：US11072317
申请日：2005-03-07
申请人： Shinji Sugihara , Ikunao Isomura , Junji Oaki , Toru Tojo
发明人： Shinji Sugihara , Ikunao Isomura , Junji Oaki , Toru Tojo
IPC分类号： G01B11/24 , G01N21/956 , G01R31/311 , G03F1/84 , G06K9/00 , G06T1/00 , G06T5/20 , G06T7/00 , H01L21/027 , H01L21/66
CPC分类号： G06T7/001 , G01R31/311 , G03F1/84 , G06T2207/30148
摘要： A defect inspection method comprises irradiating a sample including a pattern under inspection with light, acquiring measurement pattern data of the pattern based on intensity of light reflected by the sample, generating conversion data including pixel data corresponding to the measurement pattern data from design data of the sample, applying FIR filter process to the conversion data, reconstructing the conversion data by replacing pixel data having value not larger than first reference value with first pixel data, replacing pixel data having value larger than second reference value larger than first reference value with second pixel data having value larger than first pixel data, replacing pixel data having value larger than first reference value and less than second reference value with third pixel data having value between the value of first and second pixel data, the pixel data having larger value being replaced with third pixel data having higher value.
摘要翻译：缺陷检查方法包括用光照射包括检查中的图案的样品，基于由样品反射的光的强度获取图案的测量图案数据，生成包括与来自样品的设计数据相对应的测量图案数据的像素数据的转换数据将FIR滤波处理应用于转换数据，通过用第一像素数据替换具有不大于第一参考值的像素数据来重构转换数据，用第二像素替换具有大于第一参考值的值的大于第二参考值的像素数据具有大于第一像素数据的数据的数据，替换具有大于第一参考值且小于第二参考值的像素数据，其中第三像素数据具有在第一和第二像素数据的值之间的值，具有较大值的像素数据被替换为第三像素数据具有较高的值。

23. 发明授权

US5180956A Adaptability controller for robots 失效
标题翻译：机器人适应性控制器
公开(公告)号：US5180956A
公开(公告)日：1993-01-19
申请号：US647032
申请日：1991-01-25
申请人： Junji Oaki , Shuichi Adachi , Yutaka Iino , Takashi Shigemasa
发明人： Junji Oaki , Shuichi Adachi , Yutaka Iino , Takashi Shigemasa
IPC分类号： B25J13/00 , B25J9/16 , B25J9/18 , G05B13/02 , G05D3/12
CPC分类号： B25J9/163 , B25J9/1638 , G05B2219/41088 , G05B2219/42152
摘要： An adaptive controller for robots for driving an actuator of a robot arm under servo control where a servo constant is set such that the robot arm follows up a predetermined reference movement orbit. The controller has a switching section for switching between an adjustment mode where the servo constant is adjusted and a servo control mode where the servo constant is already set. Also included is a deviation supervising section for which obtains the deviation of an actual operation orbit of the robot arm from the reference movement orbit thereof, and operates the switching section to change the servo control mode into the servo adjustment mode when the obtained deviation exceeds a predetermined value. The controller also has a dynamic-characteristic-model identifying section for identifying the movement characteristic of the robot arm when the servo control mode is changed into the servo adjustment mode by the deviation supervising section and the switching section. A servo constant calculating section is used for calculating a new servo constant for reducing the deviation obtained by the deviation supervising section based on the identification result from the dynamic-characteristic-identifying section.
摘要翻译：一种用于在伺服控制下驱动机器人臂的致动器的机器人的自适应控制器，其中伺服常数被设置为使得机器人臂跟随预定的参考运动轨道。控制器具有用于在调整伺服常数的调节模式与已经设定伺服常数的伺服控制模式之间进行切换的切换部。还包括一个偏航监视部分，其获得机器人手臂的实际操作轨道与其参考运动轨道的偏差，并且当获得的偏差超过一个时，操作切换部分将伺服控制模式改变为伺服调整模式预定值。控制器还具有动态特征模型识别部分，用于通过偏差监控部分和切换部分将伺服控制模式改变为伺服调节模式时，识别机器人手臂的运动特性。根据来自动态特性识别部的识别结果，使用伺服常数计算部，计算用于减少由偏差监视部获得的偏差的新的伺服常数。

24. 发明授权

US08489238B2 Robot control apparatus 有权
标题翻译：机器人控制装置
公开(公告)号：US08489238B2
公开(公告)日：2013-07-16
申请号：US13677761
申请日：2012-11-15
申请人： Junichiro Ooga , Junji Oaki , Hideki Ogawa
发明人： Junichiro Ooga , Junji Oaki , Hideki Ogawa
IPC分类号： G05B19/04 , G05B19/18
CPC分类号： B25J9/02 , B25J9/1633 , G05B19/423
摘要： A robot control apparatus according to an embodiment includes: a joint angle difference calculator calculating a joint angle difference; a torque command value calculator calculating a torque command value for a joint, based on the joint angle difference; an external torque calculator calculating an external torque that is a difference between the estimated drive torque and the torque command value, and determining an external force receiving joint shaft on which an external force from the external torque acts; a compliance model storage unit storing a compliance model at the external force receiving joint shaft; a compliance correction amount calculator calculating a compliance correction amount for a task coordinate system position at the external force receiving joint shaft in accordance with the external force; and a joint angle difference correction amount calculator calculating a joint angle difference correction amount from the compliance correction amount and the partial Jacobian matrix.
摘要翻译：根据实施例的机器人控制装置包括：关节角度差计算器，计算关节角度差; 转矩指令值计算器，基于所述关节角度差来计算接头的转矩指令值; 计算作为所述推定驱动转矩与所述转矩指令值之间的差的外部转矩的外部转矩计算器，以及确定外部转矩作用的外力的外部受力接头轴; 在所述外力接收接头轴处存储顺应性模型的顺应性模型存储单元; 顺应性校正量计算器，根据外力计算外力受力接头轴上的任务坐标系位置的柔量修正量; 以及关节角度差校正量计算器，从柔度修正量和部分雅可比矩阵计算关节角度差校正量。

25. 发明授权

US08428779B2 Robot controlling device 有权
标题翻译：机器人控制装置
公开(公告)号：US08428779B2
公开(公告)日：2013-04-23
申请号：US13397741
申请日：2012-02-16
申请人： Junichiro Ohga , Junji Oaki , Hideki Ogawa
发明人： Junichiro Ohga , Junji Oaki , Hideki Ogawa
IPC分类号： G05B19/18
CPC分类号： B25J9/1633 , G05B2219/39325
摘要： A robot controlling device includes: a position error calculator calculating a position error between an endpoint position of a robot and a position commanded value for the endpoint position; an external force calculator calculating an external force applied to the endpoint position; a force commanded value generator generating a force commanded value for the endpoint position; a force error calculator calculating a force error between the external force and the force commanded value; a storage storing the compliance model for the endpoint position; a first correction amount calculator calculating a first correction amount for the position commanded value, according to the force error, using the compliance model; and a second correction amount calculator calculating a second correction amount for the position commanded value, on the basis of the first order lag compensation for the first correction amount. The position error calculator calculates the position error, using the second correction amount.
摘要翻译：机器人控制装置包括：位置误差计算器，计算机器人的端点位置与端点位置的位置指令值之间的位置误差; 计算施加到端点位置的外力的外力计算器; 力指令值发生器产生用于所述端点位置的力命令值; 计算外力与力指令值之间的力误差的力误差计算器; 存储用于端点位置的合规性模型的存储器; 第一校正量计算器，使用所述合规模型，根据所述力误差计算所述位置指令值的第一校正量; 以及第二校正量计算器，基于第一校正量的一阶滞后补偿来计算位置指令值的第二校正量。位置误差计算器使用第二校正量来计算位置误差。

26. 发明申请

US20130073084A1 ROBOT CONTROL APPARATUS 有权
标题翻译：机器人控制装置
公开(公告)号：US20130073084A1
公开(公告)日：2013-03-21
申请号：US13677761
申请日：2012-11-15
申请人： Junichiro Ooga , Junji Oaki , Hideki Ogawa
发明人： Junichiro Ooga , Junji Oaki , Hideki Ogawa
IPC分类号： B25J9/02
CPC分类号： B25J9/02 , B25J9/1633 , G05B19/423
摘要： A robot control apparatus according to an embodiment includes: a joint angle difference calculator calculating a joint angle difference; a torque command value calculator calculating a torque command value for a joint, based on the joint angle difference; an external torque calculator calculating an external torque that is a difference between the estimated drive torque and the torque command value, and determining an external force receiving joint shaft on which an external force from the external torque acts; a compliance model storage unit storing a compliance model at the external force receiving joint shaft; a compliance correction amount calculator calculating a compliance correction amount for a task coordinate system position at the external force receiving joint shaft in accordance with the external force; and a joint angle difference correction amount calculator calculating a joint angle difference correction amount from the compliance correction amount and the partial Jacobian matrix.
摘要翻译：根据实施例的机器人控制装置包括：关节角度差计算器，计算关节角度差; 转矩指令值计算器，基于所述关节角度差来计算接头的转矩指令值; 计算作为所述推定驱动转矩与所述转矩指令值之间的差的外部转矩的外部转矩计算器，以及确定外部转矩作用的外力的外部受力接头轴; 在所述外力接收接头轴处存储顺应性模型的顺应性模型存储单元; 顺应性校正量计算器，根据外力计算外力受力接头轴上的任务坐标系位置的柔量修正量; 以及关节角度差校正量计算器，从柔度修正量和部分雅可比矩阵计算关节角度差校正量。

27. 发明授权

US07706623B2 Image correcting method 有权
标题翻译：图像校正方法
公开(公告)号：US07706623B2
公开(公告)日：2010-04-27
申请号：US11360581
申请日：2006-02-24
申请人： Junji Oaki
发明人： Junji Oaki
IPC分类号： G06K9/40
CPC分类号： G06T7/001 , G06T5/002 , G06T2207/30148
摘要： In a reticle inspecting apparatus or the like, there is provided an image correcting method which is effective when a rank of a matrix lacks due to continuous equal grayscale values when an image is handled as a matrix. In the image correcting method, a random noise image having fine grayscale is superposed on a pattern image to make a matrix full-rank.
摘要翻译：在掩模版检查装置等中，提供了一种图像校正方法，当图像被处理为矩阵时，当矩阵的秩由于连续相等灰度值而缺失时，该方法是有效的。在图像校正方法中，将具有精细灰度的随机噪声图像叠加在图案图像上以使矩阵满秩。

28. 发明申请

US20090024250A1 Mobile Robot and method for controlling mobile robot 有权
标题翻译：移动机器人和移动机器人控制方法
公开(公告)号：US20090024250A1
公开(公告)日：2009-01-22
申请号：US12219319
申请日：2008-07-18
申请人： Junji Oaki , Fumio Ozaki , Nobuto Matsuhira
发明人： Junji Oaki , Fumio Ozaki , Nobuto Matsuhira
IPC分类号： G06F19/00
CPC分类号： G05D1/0227
摘要： A mobile robot includes: a main body; a drive unit that moves the main body; a contact force detecting unit that detects a contact force acting against an obstacle; and a controller that controls the drive unit to move the main body toward a target object under a condition that the contact force detected by the contact force detecting unit is in a predetermined range.
摘要翻译：移动机器人包括：主体; 驱动单元，其移动主体; 接触力检测单元，其检测作用在障碍物上的接触力; 以及控制器，其在由所述接触力检测单元检测到的接触力处于预定范围内的状态下，控制所述驱动单元将所述主体朝向目标物体移动。

29. 发明申请

US20080050007A1 PATTERN INSPECTION APPARATUS AND METHOD WITH ENHANCED TEST IMAGE CORRECTABILITY USING FREQUENCY DIVISION SCHEME 有权
标题翻译：模式检验装置和方法使用频率分割方案提高测试图像的可视性
公开(公告)号：US20080050007A1
公开(公告)日：2008-02-28
申请号：US11567520
申请日：2006-12-06
申请人： Junji Oaki
发明人： Junji Oaki
IPC分类号： G06K9/00 , G06K9/62
CPC分类号： G06T7/001 , G06K9/6212 , G06T2207/30148
摘要： A pattern image inspection apparatus with enhanced image correctability due to consolidation of alignment and image correction by using an image as divided by frequency regions while reducing image degradation and setup parameters is disclosed. The apparatus includes an image divider for creating for the test image and the reference image a plurality of frequency division images divided into frequency regions, a model parameter identifier for using 2D linear prediction models of the test image and the reference image to identify model parameters for each frequency division image, a model image generator for creating a model image based on the model parameters, and a comparison processor for performing inspection by comparing the model image to either the test image or the reference image with respect to each frequency division image. An image inspection method is also disclosed.
摘要翻译：公开了一种图像图像检查装置，其通过使用通过频率区域划分的图像进行对准和图像校正的整合而具有增强的图像校正性，同时降低图像劣化和设置参数。该装置包括用于为测试图像和参考图像创建划分为频率区域的多个分频图像的图像分割器，用于使用测试图像的2D线性预测模型和参考图像的模型参数标识符，以识别用于每个分频图像，用于基于模型参数创建模型图像的模型图像生成器，以及用于通过将模型图像与每个分频图像相对于测试图像或参考图像进行比较来执行检查的比较处理器。还公开了一种图像检查方法。

30. 发明申请

US20070064994A1 Pattern inspection method and apparatus with high-accuracy pattern image correction capability 有权
标题翻译：具有高精度图案图像校正能力的图案检测方法和装置
公开(公告)号：US20070064994A1
公开(公告)日：2007-03-22
申请号：US11360657
申请日：2006-02-24
申请人： Junji Oaki , Nobuyuki Harabe
发明人： Junji Oaki , Nobuyuki Harabe
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30164
摘要： A high-accuracy image correction device adaptable for use in pattern inspection apparatus is disclosed. The device includes a correction region designation unit which designates a correction region including a pattern and its nearby portion within each of an inspection reference pattern image and a pattern image under test. The device also includes an equation generator which generates by linear predictive modeling a set of simultaneous equations for a reference pattern image within the correction region and an under-test pattern image within the correction region, a parameter generator for solving the equations to obtain more than one model parameter, and a corrected pattern image generator for using the model parameter to apply the linear predictive modeling to the reference pattern image to thereby generate a corrected pattern image. A pattern inspection method using the image correction technique is also disclosed.
摘要翻译：公开了适用于图案检查装置的高精度图像校正装置。该装置包括校正区域指定单元，其指定在检查参考图案图像和被测图案图像的每一个内包括图案及其附近部分的校正区域。该装置还包括方程发生器，其通过线性预测建模生成校正区域内的参考图案图像的一组联立方程和校正区域内的测试下图案图像，用于求解方程以获得超过一个模型参数和校正的图案图像生成器，用于使用模型参数将线性预测建模应用于参考图案图像，从而生成校正的图案图像。还公开了使用图像校正技术的图案检查方法。

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