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    • 23. 发明授权
    • Semiconductor device test method and apparatus, and semiconductor device
    • 半导体器件测试方法和装置以及半导体器件
    • US08593167B2
    • 2013-11-26
    • US13042600
    • 2011-03-08
    • Atsushi Narazaki
    • Atsushi Narazaki
    • G01R31/02G01R31/26
    • G01R31/026G01R31/2853H01L2924/0002H01L2924/00
    • A method of testing a semiconductor device includes a conductive foreign matter test step of measuring the resistance value between the first and second conductive patterns to determine whether conductive foreign matter is present between the first and second conductive patterns, a first open circuit test step of measuring the resistance value between two points on the first conductive pattern to determine whether there is an open circuit in the first conductive pattern, and a second open circuit test step of measuring the resistance value between two points on the second conductive pattern to determine whether there is an open circuit in the second conductive pattern. The measurement of the resistance value in each of the test steps is accomplished by pressing probes vertically against the first conductive pattern or the second conductive pattern or both.
    • 一种测试半导体器件的方法包括:导电异物测试步骤,测量第一和第二导电图案之间的电阻值,以确定导电异物是否存在于第一和第二导电图案之间;第一开路测试步骤,测量 确定第一导电图案中的两点之间的电阻值,以确定第一导电图案中是否存在开路;以及第二开路测试步骤,测量第二导电图案上的两个点之间的电阻值,以确定是否存在 第二导电图案中的开路。 每个测试步骤中的电阻值的测量通过将探针垂直地压靠在第一导电图案或第二导电图案上或两者来实现。
    • 30. 发明授权
    • Power semiconductor device having an active region and an electric field reduction region
    • 功率半导体器件具有有源区和电场减少区
    • US08742474B2
    • 2014-06-03
    • US11937725
    • 2007-11-09
    • Yoshiaki HisamotoAtsushi NarazakiHitoshi Uemura
    • Yoshiaki HisamotoAtsushi NarazakiHitoshi Uemura
    • H01L29/66
    • H01L29/7395H01L29/0619H01L29/0638H01L29/0834H01L29/402
    • A power semiconductor device of the present invention has an active region and an electric field reduction region and includes: an emitter region of a first conductivity type; a base region of a second conductivity type in contact with the emitter region; an electrical strength providing region of the first conductivity type in contact with the base region; a collector region of the second conductivity type in contact with the electrical strength providing region; and a collector electrode in contact with the collector region; wherein the collector region is disposed on both a active region and a electric field reduction region each containing a dopant of the second conductivity type, and the collector region disposed on the electric field reduction region includes a region having a lower density of carriers of the second conductivity type than the collector region disposed on the active region.
    • 本发明的功率半导体器件具有有源区和电场还原区,包括:第一导电型的发射极区; 与发射极区域接触的第二导电类型的基极区域; 所述第一导电类型的电强度提供区域与所述基极区域接触; 与所述电强度提供区域接触的所述第二导电类型的集电极区域; 以及与集电极区域接触的集电极; 其特征在于,所述集电极区域配置在各自含有所述第二导电型掺杂剂的有源区域和电场还原区域上,并且设置在所述电场还原区域上的所述集电极区域包括具有较低密度的载流子的区域, 导电类型比设置在有源区上的集电极区域。