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21. 发明申请

WO2004019147A2 METHOD FOR PROCESSING DATA BASED ON THE DATA CONTEXT 审中-公开
标题翻译：基于数据语境处理数据的方法
公开(公告)号：WO2004019147A2
公开(公告)日：2004-03-04
申请号：PCT/US2003/025479
申请日：2003-08-14
申请人： TOKYO ELECTRON LIMITED , FUNK, Merritt
发明人： FUNK, Merritt
IPC分类号： G05B19/418
CPC分类号： G05B15/02 , G05B19/41865 , G05B19/41875 , G05B23/0224 , G05B2219/32128 , G05B2219/33054 , G05B2219/33055 , G05B2219/35504 , G05B2219/36284 , G05B2219/42001 , Y02P90/14 , Y02P90/20 , Y02P90/22 , Y02P90/86

22. 发明申请

WO2003103024A3 METHOD AND APPARATUS FOR MONITORING TOOL PERFORMANCE 审中-公开
公开(公告)号：WO2003103024A3
公开(公告)日：2003-12-11
申请号：PCT/US2003/016882
申请日：2003-05-28
申请人： TOKYO ELECTRON LIMITED , FUNK, Merritt , TOZAWA, Masaki
发明人： FUNK, Merritt , TOZAWA, Masaki
IPC分类号： H01L21/00
摘要： A method and system for monitoring tool performance for processing tools in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules, a number of sensors, and an alarm management system. A tool health control strategy is executed in which tool health data for the processing tool is collected. A tool health analysis strategy is executed in which the tool health data is analyzed. An intervention manager can pause the processing tool when an alarm has occurred. The intervention manager refrains from pausing the proceesing tool when an alarm has not occurred.

23. 发明申请

WO2003050842A1 METHOD AND DEVICE FOR REMOVING HARMONICS IN SEMICONDUCTOR PLASMA PROCESSING SYSTEMS 审中-公开
标题翻译：用于在半导体等离子体处理系统中去除谐波的方法和装置
公开(公告)号：WO2003050842A1
公开(公告)日：2003-06-19
申请号：PCT/US2002/037326
申请日：2002-11-21
申请人： TOKYO ELECTRON LIMITED , PARSONS, Richard , JOHNSON, Wayne, L.
发明人： PARSONS, Richard , JOHNSON, Wayne, L.
IPC分类号： H01J37/32
CPC分类号： H01J37/32082 , H01J37/32183
摘要： A system and method for maintaining a plasma in a plasma region by supplying RF power at a fundamental frequency to the plasma region together with a gas in order to create an RF electromagnetic field which interacts with the gas to create a plasma that contains electromagnetic energy components at frequencies that are harmonics of the fundamental frequency. The components at frequencies that are harmonics of the fundamental frequency are reduced by placing RF energy absorbing resistive loads in energy receiving communication with the plasma, the resistive loads having a frequency dependent attenuation characteristic such that the resistive loads attenuate electrical energy at frequencies higher than the fundamental frequency more strongly than energy at the fundamental frequency.
摘要翻译：一种用于通过将基本频率的RF功率与气体一起提供到等离子体区域来维持等离子体的等离子体的系统和方法，以便产生与气体相互作用的RF电磁场，以产生包含电磁能量分量的等离子体在基频的谐波频率上。通过将RF能量吸收阻性负载放置在与等离子体的能量接收通信中，减少了基频谐波的分量，电阻负载具有频率相关的衰减特性，使得电阻性负载衰减高于基频比基频的能量强。

24. 发明申请

WO2003025971A3 PLASMA PROCESSING APPARATUS WITH COIL MAGNET SYSTEM 审中-公开
公开(公告)号：WO2003025971A3
公开(公告)日：2003-03-27
申请号：PCT/US2002/027978
申请日：2002-09-04
申请人： TOKYO ELECTRON LIMITED , MITROVIC, Andrej, S.
发明人： MITROVIC, Andrej, S.
IPC分类号： H01J37/32
摘要： A method for processing a workpiece is carried out with a plasma derived from a process gas in a plasma chamber of a plasma processing apparatus during a plasma processing operation. The apparatus includes an array of electromagnets mounted circumferentially around the plasma chamber. The method comprises generating a plasma from a process gas within the chamber and causing plasma particles to strike the workpiece, selecting distributions of current signals for the electromagnets, and applying each selected distribution to the electromagnets to impose more than one magnetic field topology on the plasma during the plasma processing operation.

25. 发明申请

WO2003025725A2 GLOBAL NETWORK COMPUTERS 审中-公开
标题翻译：全球网络计算机
公开(公告)号：WO2003025725A2
公开(公告)日：2003-03-27
申请号：PCT/US2002/029227
申请日：2002-09-16
申请人： ELLIS, Frampton, E., III
发明人： ELLIS, Frampton, E., III
IPC分类号： G06F1/16
CPC分类号： G06F1/16 , H04L67/10 , H04L69/329
摘要： Embodiments useful for a network of computers are presented. In an embodiment, an apparatus includes a microchip and a Faraday Cage. The microchip includes a personal computer with a general purpose microprocessor on the microchip. The Faraday Cage surrounds at least a portion of the microchip. In another embodiment, an apparatus includes a microchip. The microchip includes a general purpose microprocessor and one or more photovoltaic cells.
摘要翻译：呈现了对计算机网络有用的实施例。在一个实施例中，装置包括微芯片和法拉第笼。微芯片包括在微芯片上具有通用微处理器的个人计算机。法拉第笼包围至少一部分微芯片。在另一个实施例中，一种装置包括微芯片。微芯片包括通用微处理器和一个或多个光伏电池。

26. 发明申请

WO2003016967A1 SILICA GLASS OPTICAL COMPONENT AND METHOD OF MAKING THE SAME 审中-公开
标题翻译：硅胶玻璃光学元件及其制造方法
公开(公告)号：WO2003016967A1
公开(公告)日：2003-02-27
申请号：PCT/US2002/026433
申请日：2002-08-20
申请人： POLYMICRO TECHNOLOGIES, LLC
发明人： NELSON, Gary, W. , KHALILOV, Valery
IPC分类号： G02B6/00
CPC分类号： G02B6/102 , C03C13/045 , C03C25/106 , G02B6/04
摘要： An optical component and a method of making the same are provided. In one embodiment, the optical component is a low-OH optical fiber that includes a core and a cladding. The optical component is treated by immersion in a hydrogen gas atmosphere at a predetermined pressure, at a predetermined temperature and for a predetermined time period such that intrinsic and impurity defects of the optical component are destroyed. The method of making the optical component includes providing a preform having a content of OH-groups in the amount of about 0.1 to about 10.0 ppm and a content of chlorine in the amount of 0 to about 1000 ppm and drawing the preform to elongate it to form an optical component from the preform. The optical component is immersed in a hydrogen gas atmosphere at a predetermined pressure, at a predetermined temperature and for a predetermined time period that is sufficient to destroy intrinsic and impurity defects of the optical component.
摘要翻译：提供了一种光学部件及其制造方法。在一个实施例中，光学部件是包括芯和包层的低OH光纤。通过以预定的压力，预定的温度和预定的时间周期浸入氢气气氛中来处理光学部件，从而破坏光学部件的固有缺陷和杂质缺陷。制造光学部件的方法包括提供含量为约0.1至约10.0ppm的OH-基团和含量为0至约1000ppm的氯含量的预成型件，并拉伸预成型件以将其延长至由预成型件形成光学部件。光学元件在预定压力下，在预定温度下浸入氢气气氛中并保持预定时间段，该时间段足以破坏光学元件的固有缺陷和杂质缺陷。

27. 发明申请

WO2003012567A1 PLASMA CHAMBER WALL SEGMENT TEMPERATURE CONTROL 审中-公开
标题翻译：等离子室壁分段温度控制
公开(公告)号：WO2003012567A1
公开(公告)日：2003-02-13
申请号：PCT/US2002/023207
申请日：2002-07-19
申请人： TOKYO ELECTRON LIMITED , MITROVIC, Andrej , LONG, Maolin , MOROZ, Paul , FINK, Steven , JONES, William
发明人： MITROVIC, Andrej , LONG, Maolin , MOROZ, Paul , FINK, Steven , JONES, William
IPC分类号： G05D23/00
CPC分类号： H01L21/67248 , G05D23/1934 , H01J37/32522 , H01L21/67069 , H01L21/67109
摘要： A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.
摘要翻译：一种用于通过多个温度控制系统控制暴露于等离子体的壁内或其他表面内的等离子体室的温度的装置和方法。可以通过独立地控制壁或其它表面的段的温度来控制等离子体室内的等离子体处理。

28. 发明申请

WO2003010562A2 CONNECTOR FERRULE AND METHOD OF SEALING 审中-公开
标题翻译：连接器螺丝和密封方法
公开(公告)号：WO2003010562A2
公开(公告)日：2003-02-06
申请号：PCT/US2002/023481
申请日：2002-07-24
申请人： POLYMICRO TECHNOLOGIES, INC.
发明人： CLARKIN, James, P. , SHANNON, John, H. , SWENGLER, Michael
IPC分类号： G02B
CPC分类号： G02B6/02209 , C03B23/047 , C03B37/025 , G02B6/3801 , G02B6/3803 , G02B6/3812 , G02B6/3813 , G02B6/3837 , G02B6/3845 , G02B6/3854 , G02B6/3861
摘要： The invention includes a ferrule having a layer of material on an inner surface of a hole therein which is selected to be preferentially softenable relative to the bulk material of the ferrule. The ferrule according to the present invention can be fused to optical fibers, capillaries and the like while reducing deformation of the fused component and the ferrule. A fiber Bragg grating device and a flow cell device are also provided.
摘要翻译：本发明包括在其中的孔的内表面上具有材料层的套圈，其被选择为相对于套圈的主体材料优先软化。根据本发明的套圈可以融合到光纤，毛细管等，同时减少熔化部件和套圈的变形。还提供了光纤布拉格光栅装置和流动池装置。

29. 发明申请

WO2002103745A1 ION MOMENTUM TRANSFER PLASMA PUMP 审中-公开
标题翻译：离子转移等离子泵
公开(公告)号：WO2002103745A1
公开(公告)日：2002-12-27
申请号：PCT/US2002/015943
申请日：2002-05-21
申请人： TOKYO ELECTRON LIMITED , QUON, Bill, H.
发明人： QUON, Bill, H.
IPC分类号： H01J37/32
CPC分类号： H01J37/32834 , H01J37/3266 , H05H1/54
摘要： A plasma pump to pump particles from a first region containing a plasma to a second region containing a lower density plasma is provided. The pump includes a conduit having an inlet end, a radially directed outlet, and a longitudinal axis extending from the inlet end towards a distal end. A magnet array generates a magnetic field having field lines generally parallel to the longitudinal axis. A high voltage, radio frequency electrode is disposed at the distal end of the conduit. The electrode produces a high voltage, radio frequency electric field within the conduit such that charged particles within the conduit are accelerated radially through ion cyclotron resonance so as to pass through the conduit outlet. A method is also provided. The method includes providing the magnetic field, having field lines generally parallel to the longitudinal axis and providing the high voltage, radio frequency electric field within the conduit radially inward of the conduit outlet.
摘要翻译：提供了一种将粒子从含有等离子体的第一区域泵送到含有较低密度等离子体的第二区域的等离子体泵。泵包括具有入口端，径向指示的出口和从入口端朝向远端延伸的纵向轴线的导管。磁体阵列产生具有大致平行于纵向轴线的场线的磁场。高压射频电极设置在导管的远端。电极在导管内产生高电压射频电场，使得导管内的带电粒子通过离子回旋共振径向加速，从而通过导管出口。还提供了一种方法。该方法包括提供磁场，其具有大致平行于纵向轴线的场线，并且在导管的径向向内的导管出口内提供高压的射频电场。

30. 发明申请

WO2020159573A1 SYSTEM AND METHOD FOR SPATIAL ENCODING AND FEATURE GENERATORS FOR ENHANCING INFORMATION EXTRACTION 审中-公开
公开(公告)号：WO2020159573A1
公开(公告)日：2020-08-06
申请号：PCT/US2019/043778
申请日：2019-07-26
申请人： INTUIT INC.
发明人： RIMCHALA, Tharathorn
IPC分类号： G06K9/00
摘要： A system and method for extracting data from a piece of content using spatial information about the piece of content. The system and method may use a conditional random fields process or a bidirectional long short term memory and conditional random fields process to extract structured data using the spatial information.

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