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11. 发明申请

US20040262531A1 Particle detector suitable for detecting ions and electrons 有权
标题翻译：适用于检测离子和电子的粒子检测器
公开(公告)号：US20040262531A1
公开(公告)日：2004-12-30
申请号：US10606930
申请日：2003-06-26
发明人： Robert L. Gerlach , Mark W. Utlaut , Trevor Dingle , Marek Uncovsky
IPC分类号： H01J037/244
CPC分类号： H01J37/244 , H01J37/3005 , H01J43/06 , H01J49/025
摘要： A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications. The ion-to-electron converter is preferably in the shape of a cylinder or includes multiple parallel plates
摘要翻译：可从离子检测器切换到电子检测器的粒子检测器包括离子 - 电子转换器和闪烁体检测器。在组件上具有一组电压，转换器对电子轨迹的影响最小，因此闪烁体检测器有效地检测电子。通过对组件进行不同的电压设置，检测器可以以正离子模式运行，以便大多数FIB应用能够以足够的效率收集正离子。离子 - 电子转换器优选为圆柱形或包括多个平行板

12. 发明申请

US20040119024A1 Electron beam sensor 失效
标题翻译：电子束传感器
公开(公告)号：US20040119024A1
公开(公告)日：2004-06-24
申请号：US10326923
申请日：2002-12-19
申请人： Advanced Electron Beams, Inc.
发明人： Tzvi Avnery
IPC分类号： H01J037/244
CPC分类号： H01J37/244
摘要： A sensing device for sensing an electron beam includes a vacuum chamber having an electron permeable window for allowing electrons from the electron beam to enter vacuum chamber. An electrode extends within the vacuum chamber for receiving at least a portion of the electrons entering the vacuum chamber. The intensity of the electron beam is capable of being determined from the amount of electrons received by the electrode.
摘要翻译：用于感测电子束的感测装置包括具有用于允许来自电子束的电子进入真空室的电子透过窗口的真空室。电极在真空室内延伸，用于接收至少一部分进入真空室的电子。电子束的强度能够由电极接收的电子的量确定。

13. 发明申请

US20040099802A1 Analytical instrument for measurement of isotopes at low concentration and methods for using the same 失效
标题翻译：用于测量低浓度同位素的分析仪器及其使用方法
公开(公告)号：US20040099802A1
公开(公告)日：2004-05-27
申请号：US10716963
申请日：2003-11-19
发明人： Philip Stephen Goodall , Barry Leonard Sharp
IPC分类号： H01J049/26 , B01D059/44 , H01J037/244
CPC分类号： H01J49/105
摘要： An inductively coupled plasma source mass spectrometer is equipped with a multidimensional detector system wherein ions transmitted by the mass spectrometer are detected.
摘要翻译：电感耦合等离子体质谱仪配备有多维检测器系统，其中检测由质谱仪传输的离子。

14. 发明申请

US20040026627A1 Electron beam monitoring sensor and electron beam monitoring method 有权
标题翻译：电子束监测传感器和电子束监测方法
公开(公告)号：US20040026627A1
公开(公告)日：2004-02-12
申请号：US10350188
申请日：2003-01-24
发明人： Yoshinori Nakayama , Yasunari Sohda , Hiroya Ohta , Norio Saitou , Masato Muraki , Masaki Takakuwa
IPC分类号： H01J037/244
CPC分类号： H01J37/244 , H01J2237/24405 , H01J2237/31774
摘要： The present invention provides a beam monitoring sensor which can offer both high beam monitoring precision and high speed monitoring in a multi-electron beam writing system and a monitoring method using the same. In a Faraday cup for electron beam monitoring, tantalum or a heavy metal material having an atomic number larger than that of tantalum is used to provide a Faraday cup construction having a high aspect ratio. The micro Faraday cup permits electron beam monitoring having less beam leak to a high acceleration electron beam.
摘要翻译：本发明提供了一种能够在多电子束写入系统中提供远光监视精度和高速监视的光束监视传感器以及使用该光束监视传感器的监视方法。在用于电子束监测的法拉第杯中，使用钽或具有大于钽的原子数的重金属材料来提供具有高纵横比的法拉第杯结构。微法拉第杯允许电子束监测具有较少的光束泄漏到高加速度电子束。

15. 发明申请

US20040021094A1 Measuring plasma uniformity in-situ at wafer level 有权
标题翻译：在晶圆级原位测量等离子体均匀性
公开(公告)号：US20040021094A1
公开(公告)日：2004-02-05
申请号：US10258606
申请日：2003-06-02
发明人： Wayne L Johnson , Maolin Long
IPC分类号： H01J037/30 , H01J037/244
CPC分类号： H01J37/32935
摘要： An apparatus and method for measuring plasma uniformity and RF uniformity within a plasma chamber. A measurement device is provided within the plasma chamber, where the measurement device includes an electrically conductive surrogate wafer (10) including a planar end wall (12) that is exposed to plasma within the plasma chamber and a printed circuit substrate (20) positioned within the surrogate wafer. The end wall has an aperture (18), and the printed circuit substrate has an ion current collector (26) aligned with the aperture in the end wall. The ion current collector preferably extends within the aperture in the end wall, and the ion current collector has an exposed planar surface that is coplanar with an outer surface of the planar end wall. The device measures ion current flux using the ion current collector, and tramsmits data from the ion current collector to a receiver located outside of the plasma chamber. The data from the ion current collectors is transmitted using an optical transmitter (50) mounted on the printed circuit substrate and connected to the ion current collector by an electronic circuit element (58).
摘要翻译：一种用于测量等离子体室内的等离子体均匀性和RF均匀性的装置和方法。测量装置设置在等离子体室内，其中测量装置包括导电代用晶片（10），该导电代用晶片（10）包括暴露于等离子体室内的等离子体的平面端壁（12）和位于等离子体室内的印刷电路基板（20）替代晶片。端壁具有孔（18），并且印刷电路基板具有与端壁中的孔对准的离子集电器（26）。离子集电体优选地在端壁中的孔内延伸，并且离子集电器具有与平面端壁的外表面共面的暴露平面。该装置使用离子集电器测量离子电流通量，并将数据从离子集电器传送到位于等离子体室外部的接收器。来自离子集电体的数据使用安装在印刷电路基板上的光发送器（50）传送，并通过电子电路元件（58）与离子集电体连接。

16. 发明申请

US20030085361A1 Phosphor coated waveguide for the efficient collection of electron-generated photons 有权
标题翻译：荧光涂层波导，用于有效收集电子生成的光子
公开(公告)号：US20030085361A1
公开(公告)日：2003-05-08
申请号：US10033307
申请日：2001-11-02
申请人： Applied Materials, Inc.
发明人： Samuel C. Howells
IPC分类号： H01J037/244
CPC分类号： H01J37/244 , H01J2237/2443
摘要： A waveguide made of optical glass used as an detector in electron microscopy, having a beveled hole through which an electron beam passes and a phosphor coated region to detect secondary and back-scattered electrons. The photons generated by secondary and back-scattered electrons striking the phosphor coated region are directed to a photomultiplier detector mated to the waveguide by internal reflections which are further enhanced by reflective surfaces. Further, photon transmission from the waveguide to the photomultiplier is enhanced by providing a flared section at the mating end to reduce internal reflections.
摘要翻译：用作电子显微镜检测器的光学玻璃制成的波导，具有电子束通过的斜角孔和荧光体涂覆区域，以检测次级和反向散射电子。通过次级和反向散射的电子产生的光子穿过磷光体涂覆区域被引导到通过反射表面进一步增强的内部反射配合到波导的光电倍增管检测器。此外，通过在配合端提供扩口部分以减少内部反射来增强从波导到光电倍增管的光子传输。

17. 发明申请

US20020011565A1 Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system 有权
标题翻译：用于粒子束装置的检测器系统和具有这种检测器系统的粒子束装置
公开(公告)号：US20020011565A1
公开(公告)日：2002-01-31
申请号：US09808714
申请日：2001-03-14
发明人： Volker Drexel , Johannes Bihr , Gerd Benner , Stephan Kujawa
IPC分类号： H01J037/28 , H01J037/244
CPC分类号： H01J37/244
摘要： A detector system for a particle beam apparatus, in particular for a scanning electron microscope, has a target structure, which in a central region near the optical axis includes an electron-converting material. The target structure also includes either a non-converting material in a region remote from the optical axis or the region remote from the optical axis is offset in the direction of the optical axis with respect to the region near the optical axis that includes the electron-converting material. The detector system makes possible separate detection of only back-scattered electrons or only secondary electrons.
摘要翻译：用于粒子束装置的检测器系统，特别是扫描电子显微镜，具有目标结构，其在光轴附近的中心区域包括电子转换材料。目标结构还包括远离光轴的区域中的非转换材料或远离光轴的区域相对于包括电子发射器件的光轴附近的光轴在光轴的方向上偏移，转换材料。检测器系统可以单独检测只有反向散射的电子或只有二次电子。

18. 发明申请

US20040227080A1 Particle detectors 有权
公开(公告)号：US20040227080A1
公开(公告)日：2004-11-18
申请号：US10867341
申请日：2004-06-14
发明人： Armin Heinz Hayn
IPC分类号： H01J037/244
CPC分类号： H01J37/244
摘要： A charged particle detector is provided for use in an electron microscope. The detector has a chamber for receiving charged particles generated by the interaction between a particle beam generated by the microscope and the sample. The chamber is maintained at at least a partial vacuum and contains an impact responsive sensor for detecting particles incident thereon. An accelerating electrode field is set up in the chamber by one or more electrodes, and the chamber is sealed by an electronically conductive barrier so as to prevent gas leaking into the chamber, whilst being sufficiently thin to enable charged particles to travel across the barrier and thereby be detected by the detector. The electrically conductive barrier enables a very large accelerating voltage to be used without causing discharge through any gaseous medium in the microscope sample chamber.

19. 发明申请

US20040206910A1 Method and apparatus for aerodynamic ion focusing 失效
标题翻译：用于气动离子聚焦的方法和装置
公开(公告)号：US20040206910A1
公开(公告)日：2004-10-21
申请号：US10739949
申请日：2003-12-18
发明人： Edgar D. Lee , Milton L. Lee , Alan L. Rockwood , Li Zhou
IPC分类号： H01J003/14 , H01J037/244
CPC分类号： H01J49/04 , H01J49/10
摘要： A method and apparatus for focusing ions for delivery to an ion detection device using an aerodynamic ion focusing system that uses a high-velocity converging gas flow at an entrance aperture to focus an ion plume by reducing spreading and increasing desolvation of ions, and wherein a voltage is applied to at least a portion of the aerodynamic ion focusing system to assist in the focusing and delivery of ions to the ion detection device.
摘要翻译：一种用于将离子聚焦到离子检测装置的方法和装置，所述方法和装置使用空气动力离子聚焦系统，所述空气动力学离子聚焦系统在入口孔处使用高速会聚气体流动，通过减少散射并增加离子的去溶剂化来聚焦离子羽流，并且其中a 电压被施加到空气动力学离子聚焦系统的至少一部分，以帮助将离子聚焦和输送到离子检测装置。

20. 发明申请

US20040149926A1 Emittance measuring device for ion beams 审中-公开
标题翻译：离子束发射测量装置
公开(公告)号：US20040149926A1
公开(公告)日：2004-08-05
申请号：US10733779
申请日：2003-12-11
发明人： Kenneth H. Purser , Carl J. Russo , Norman L. Turner
IPC分类号： H01J037/244
CPC分类号： H01J37/3171 , H01J37/304 , H01J2237/24507 , H01J2237/24514 , H01J2237/24528 , H01J2237/24578 , H01J2237/30433 , H01J2237/31703
摘要： Methods and apparatus are disclosed for rapidly providing for a large number of closely spaced points within an area at right angle to the central trajectory of an ion beam data concerning intensity variations, emittance variations and angular variations of elementary beamlets with respect to the central beam trajectory. The technology is particular applicable to the application and control of ribbon beams used for semiconductor implantation.
摘要翻译：公开了方法和装置，用于在与离子束数据的中心轨迹成直角的区域内快速提供关于基本子束相对于中心束轨迹的强度变化，发射率变化和角度变化的数量的紧密间隔的点。该技术特别适用于用于半导体植入的带状光束的应用和控制。

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