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11. 发明申请

US20170069458A1 SAMPLE HOLDER, OBSERVATION SYSTEM, AND IMAGE GENERATION METHOD 有权
标题翻译：样本持有人，观察系统和图像生成方法
公开(公告)号：US20170069458A1
公开(公告)日：2017-03-09
申请号：US15119950
申请日：2015-01-09
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Minami SHOUJI , Takashi OHSHIMA , Yuusuke OOMINAMI , Hideo MORISHITA , Kunio HARADA
IPC分类号： H01J37/244 , H01J37/20 , H01J37/26
CPC分类号： H01J37/244 , H01J37/20 , H01J37/26 , H01J2237/2445 , H01J2237/2808
摘要： The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.
摘要翻译：本发明的目的是简单地通过透射带电粒子进行图像观察。由带电粒子束照射的样品直接或通过预定部件设置在发光元件（23）上，其中穿过或散射在样品内的带电粒子进入，从而从中收集光，使用光传输装置（203）有效地检测以产生样本的透射带电粒子图像。

12. 发明申请

US20150235802A1 HOLDER DEVICE FOR ELECTRON MICROSCOPE 审中-公开
标题翻译：电子显微镜支架装置
公开(公告)号：US20150235802A1
公开(公告)日：2015-08-20
申请号：US14420722
申请日：2013-08-08
申请人： SNU R&DB Foundation
发明人： Young Woon Kim , Sung Dae Kim
IPC分类号： H01J37/20 , H01J37/26 , H01J37/22
CPC分类号： H01J37/20 , H01J37/226 , H01J37/228 , H01J37/26 , H01J37/261 , H01J2237/2007 , H01J2237/2602 , H01J2237/2808
摘要： Disclosed is a holder device for an electron microscope, which efficiently collects light emitted when electrons collide with a sample inside the electron microscope and is selectively usable in various electron microscopes since it can be easily attached to and detached from the electron microscopes. The holder device includes a frame; a sample support block configured to be supported on the frame and comprising a sample mounting portion to support an edge of a sample; a mirror unit configured to comprise an upper mirror and a lower mirror respectively arranged above and below the sample and reflect light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens configured to condense light from the mirror unit on a predetermined target; and an optical fiber configured to collect light from the condensing lens.
摘要翻译：公开了一种用于电子显微镜的保持装置，其有效地收集当电子与电子显微镜内部的样品碰撞时发射的光，并且可以选择性地使用于各种电子显微镜，因为它可以容易地附着到电子显微镜上并从电子显微镜上分离。支架装置包括框架; 样品支撑块，被配置为支撑在所述框架上并且包括样品安装部分以支撑样品的边缘; 反射镜单元，被配置为包括分别布置在样本上方和下方的上反射镜和下反射镜，并将从样品发射的光沿预定方向反射，该样品安装到样品安装部分并且发射电子束; 聚光透镜，被配置为将来自所述反射镜单元的光在预定目标上进行冷凝; 以及配置为收集来自聚光透镜的光的光纤。

13. 发明授权

US08986645B2 Diamond 有权
标题翻译：钻石
公开(公告)号：US08986645B2
公开(公告)日：2015-03-24
申请号：US11480823
申请日：2006-07-06
申请人： Daniel James Twitchen , Geoffrey Alan Scarsbrook , Philip Maurice Martineau , Paul Martyn Spear , Stephen David Williams , Ian Friel
发明人： Daniel James Twitchen , Geoffrey Alan Scarsbrook , Philip Maurice Martineau , Paul Martyn Spear , Stephen David Williams , Ian Friel
IPC分类号： B01J3/06 , C30B7/00 , C30B23/00 , C30B25/00 , C30B28/12 , H05H1/24 , A44C17/00 , B44C1/00 , C30B25/02 , C30B29/04 , C30B33/00
CPC分类号： A44C17/00 , B44C1/005 , C30B25/00 , C30B25/02 , C30B29/04 , C30B33/00 , H01J2237/2808 , Y10T428/30
摘要： A method of producing a CVD single crystal diamond layer on a substrate includes adding into a DVD synthesis atmosphere a gaseous source comprising silicon. The method can be used to mark the diamond material, for instance to provide means by which its synthetic nature can more easily be determined. It can also be exploited to generate single crystal diamond material of high color.
摘要翻译：在衬底上制造CVD单晶金刚石层的方法包括在DVD合成气氛中加入包含硅的气态源。该方法可用于标记金刚石材料，例如提供可以更容易地确定其合成性质的方法。也可以开发出高颜色的单晶金刚石材料。

14. 发明申请

US20140197310A1 METHOD OF ANALYZING A SAMPLE AND CHARGED PARTICLE BEAM DEVICE FOR ANALYZING A SAMPLE 有权
标题翻译：分析样品和充电粒子束的方法分析样品
公开(公告)号：US20140197310A1
公开(公告)日：2014-07-17
申请号：US14150012
申请日：2014-01-08
申请人： CARL ZEISS MICROSCOPY LTD.
发明人： Edward Hill , Stewart Bean
IPC分类号： G01N23/22 , H01J37/26
CPC分类号： H01J37/26 , G01N23/2254 , H01J2237/2804 , H01J2237/2806 , H01J2237/2808 , H01J2237/2809
摘要： The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.
摘要翻译：本发明涉及一种用于使用与物体相互作用的带电粒子束来分析物体的方法和带电粒子束装置。该物体包括嵌入树脂中的样品。检测呈阴极发光的形式的相互作用的放射线用于识别布置树脂的区域，其中布置样品。通过使用EDX分析，检测相互作用颗粒以鉴定树脂和样品中的颗粒进行进一步分析。

15. 发明申请

US20110168889A1 SCANNING ELECTRON MICROSCOPE, AN INTERFACE AND A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT 有权
标题翻译：扫描电子显微镜，接口和在非真空环境中观察对象的方法
公开(公告)号：US20110168889A1
公开(公告)日：2011-07-14
申请号：US13002448
申请日：2009-07-02
申请人： Dov Shachal , Rafi De Picciotto
发明人： Dov Shachal , Rafi De Picciotto
IPC分类号： G01N23/04 , G01N23/00
CPC分类号： G01N23/22 , G01N2223/079 , G01N2223/08 , H01J37/228 , H01J37/256 , H01J37/28 , H01J2237/164 , H01J2237/208 , H01J2237/244 , H01J2237/2608 , H01J2237/2808
摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.
摘要翻译：接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

16. 发明申请

US20060269483A1 SEM cathodoluminescent imaging using up-converting nanophosphors 审中-公开
标题翻译：使用上转换纳米荧光粉的SEM阴极发光成像
公开(公告)号：US20060269483A1
公开(公告)日：2006-11-30
申请号：US11494157
申请日：2006-07-27
申请人： Robert Austin , Shuang Lim , Robert Riehm
发明人： Robert Austin , Shuang Lim , Robert Riehm
IPC分类号： A61K49/00
CPC分类号： A61K49/0067 , H01J2237/2808
摘要： Methods for high resolution tissue imaging in which a tissue to be imaged is labeled with UCP's coupled to probes that bind specifically to biological markers on the tissue; the UCP's are then excited with electrons so that the UCP's emit cathodoluminescent photons; after which the photon emission is converted to a visible image. Methods for measuring water content, blood content or blood oxygenation in tumor tissue are also disclosed.
摘要翻译：用于高分辨率组织成像的方法，其中待成像组织的UCP与特异性结合组织上的生物学标记的探针偶联; 然后UCP被电子激发，使得UCP发射阴极发光光子; 之后将光子发射转换成可见光。还公开了测量肿瘤组织中含水量，血液含量或血氧饱和度的方法。

17. 发明授权

US4410272A Optical spectroscope for scanning electron microscope 失效
标题翻译：扫描电子显微镜光学分光镜
公开(公告)号：US4410272A
公开(公告)日：1983-10-18
申请号：US272781
申请日：1981-06-11
申请人： Jacky Beauvineau , Jack Semo
发明人： Jacky Beauvineau , Jack Semo
IPC分类号： G01N23/225 , G01J3/04 , G01J3/06 , G01J3/12 , G01J3/18 , G01Q30/02 , G01Q30/16 , G01Q30/18 , H01J37/22 , H01J37/26 , G01N21/62
CPC分类号： H01J37/228 , G01J3/18 , H01J2237/2808
摘要： Optical spectroscope for scanning electron microscopes, the latter comprising a vacuum chamber containing a sample holder bombarded by an electron beam.The microscope chamber contains a concave mirror having an opening, a plane deviating mirror and an exit window for the chamber. Outside the microscope chamber is provided a drum carrying a plurality of flat diffractive gratings, the drum being equipped with a bracket which rotates about an axis controlled by a stepping motor. In addition there are a spherical concave mirror, a slit blocking means and a photodetector.
摘要翻译：用于扫描电子显微镜的光学分光镜，后者包括含有由电子束轰击的样品架的真空室。显微镜室包含具有开口的凹面镜，平面偏转镜和用于腔室的出射窗。在显微镜室外设置有承载多个平面衍射光栅的鼓，该滚筒装有一个围绕由步进马达控制的轴线旋转的托架。另外还有球面凹面镜，狭缝阻挡装置和光电检测器。

18. 发明公开

EP2741310A1 Système de détection de cathodoluminescence optimisant la collection du signal, la résolution spectrale et la conservation de la brillance, et microscope mettant en oeuvre un tel système 有权转让
标题翻译：使用该系统具有改进的信号接收，光谱分辨率和亮度保持和显微镜阴极发光检测系统
公开(公告)号：EP2741310A1
公开(公告)日：2014-06-11
申请号：EP14156672.9
申请日：2011-04-29
申请人： Centre National de la Recherche Scientifique , Université Paris-Sud 11 (Paris XI)
发明人： Kociak, Mathieu , Zagonel, Luiz Fernando , Tence, Marcel , Mazzucco, Stefano
IPC分类号： H01J37/02 , H01J37/244 , H01J37/256
CPC分类号： G01N23/2254 , G01N2201/08 , H01J37/228 , H01J37/244 , H01J37/261 , H01J37/28 , H01J2237/024 , H01J2237/063 , H01J2237/24475 , H01J2237/2448 , H01J2237/24485 , H01J2237/2602 , H01J2237/2802 , H01J2237/2808
摘要： L'invention concerne un système de détection de cathodoluminescence comprenant une source de particules chargées éclairant un échantillon avec un faisceau de particules chargées, et un chemin optique comprenant au moins deux éléments optiques pour collecter et transporter un rayonnement lumineux provenant dudit échantillon éclairé vers des moyens d'analyse, caractérisé en ce que chaque élément optique est choisi de sorte que :
- l'angle maximal de sortie dudit élément optique est inférieur ou égal à 120% de l'angle maximal d'acceptance de l'élément optique suivant ; et
- le diamètre du rayonnement provenant dudit élément optique dans le plan d'entrée de l'élément optique suivant est inférieur ou égal à 120% du diamètre utile d'entrée de l'élément optique suivant.
摘要翻译：所述可调节系统包括用于收集从通过带电粒子的束照射的样品所获得的光辐射并反射的光辐射引导到分析单元，用于定位所述收集光学器件沿维度外部圆筒形管的单元的收集光学器件（112）也被置于相对于在由收集光学器件的反射光辐射的传播轴和刚性地固定到所述收集光学器件，而在接收的光辐射适配单元外缸（306）放置内部圆筒形管。所述可调节系统包括用于收集从通过带电粒子的束照射的样品所获得的光辐射并反射的光辐射引导到分析单元，用于定位所述收集光学器件沿维度外部圆筒形管的单元的收集光学器件（112）也被置于相对于在由收集光学器件，用于接收所述光辐射适配单元注入的光反射，并刚性地固定到收集光学器件到外缸（306）放置内部圆筒形管的光辐射的传播轴在辐射在光纤（116），用于在光辐射，用于分析由收集光学器件收集的光辐射的单元，和一个密封单元的传播方向相反发射光束传播的光的来源。所述定位单元包括用于沿的空间，对于在旋转轴周围旋转的收集光学器件的单元，并且可动转盘方向的收集光学器件的水平方向的移动的元素。收集光学器件包括抛物面反射镜，并用一个聚光透镜相关联的平面镜或椭圆形的并放置在平面镜的下游，并且被集成到可动转盘。内筒是自由地相对于外筒旋转。适配单元被配置为适应角度和大小的光辐射收集gemäß的尺寸，并在检测器或光纤的开口的，并且在收集光学器件的下游。光束被引导朝向由收集光学器件的样品。所述分析单元包括分光计，电荷耦合器件照相机或光电倍增管。收集光学器件在压力这是小于在大气压下的室（302）放置。所述适配单元在将压力比在腔室中的压力大一个环境放置。密封单元在所述室和所述适配单元，以保持在所述腔室中的压力之间放置。一个独立的claimsoft包括用于显微镜。

19. 发明公开

EP2317536A2 Detection device and particle beam device having a detection device 有权转让
标题翻译： Detektor und Teilchenstrahlvorrichtung mit einem solchen Detektor
公开(公告)号：EP2317536A2
公开(公告)日：2011-05-04
申请号：EP10189439.2
申请日：2010-10-29
申请人： Carl Zeiss NTS GmbH
发明人： Thomas, Christian , Stefan, Lucian
IPC分类号： H01J37/244 , H01J37/20
CPC分类号： H01J37/244 , G01N23/2254 , G01N2223/612 , H01J37/20 , H01J37/226 , H01J37/228 , H01J2237/2445 , H01J2237/2808
摘要： The invention relates to a detection device (22) and a particle beam device (1) having a detection device (22). The detection device (22) and the particle beam device (1) ensure a good efficiency in detecting interaction particles and electro-magnetic radiation. The detection device (22) has a detector (14) for detecting electromagnetic radiation and/or interaction particles and a filter element (13) through which the electromagnetic radiation is transmitted and which is designed for preventing the interaction particles from striking the detector (14) wherein the filter element (13) is situated to move between a first position (A) and a second position (B), the filter element (13) in the first position (A) being situated in relation to the detector (14) in such a way that the filter element (13) prevents the interaction particles from striking the detector (14), and wherein the filter element (13) in the second position (B) is situated in relation to the detector (14) in such a way that the filter element (13) allows the interaction particles to strike the detector (14). As an alternative, the filter element (13) may be designed as an object holder.
摘要翻译：本发明涉及具有检测装置（22）的检测装置（22）和粒子束装置（1）。检测装置（22）和粒子束装置（1）确保了检测相互作用颗粒和电磁辐射的良好效率。检测装置（22）具有用于检测电磁辐射和/或相互作用颗粒的检测器（14）和电磁辐射透过的滤光元件（13），其被设计用于防止相互作用的颗粒撞击检测器（14）），其中所述过滤元件（13）位于在第一位置（A）和第二位置（B）之间移动，所述第一位置（A）中的所述过滤元件（13）相对于所述检测器（14）定位，以使得过滤元件（13）防止相互作用颗粒撞击检测器（14），并且其中处于第二位置（B）的过滤元件（13）相对于检测器（14）位于这样的位置过滤元件（13）允许相互作用颗粒撞击检测器（14）的方式。作为替代，过滤元件（13）可以被设计为物体保持器。

20. 发明公开

EP0995086A1 ELECTRON MICROSCOPE AND SPECTROSCOPY SYSTEM 无效
标题翻译：电子和光谱系统
公开(公告)号：EP0995086A1
公开(公告)日：2000-04-26
申请号：EP99920970.3
申请日：1999-05-05
申请人： Renishaw plc
发明人： DAY, John C. C.UnivofBristol Interface Analy. Cen , BENNETT, Robert
IPC分类号： G01J3/44 , H01J37/26
CPC分类号： H01J37/228 , G01J3/0202 , G01J3/0208 , G01J3/0216 , G01J3/0243 , G01J3/44 , H01J2237/2808
摘要： An electron microscope (10) is adapted to enable spectroscopic analysis of a sample (16). A parabolic mirror (18) has a central aperture (20) through which the electron beam can pass. The mirror (18) focuses laser illumination from a transverse optical path (24) onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system (30). The mirror (18) is retractable (within the vacuum of the electron microscope) by a sliding arm assembly (22).

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