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1. 发明申请

US20200273665A1 SCANNING ELECTRON MICROSCOPE 审中-公开
公开(公告)号：US20200273665A1
公开(公告)日：2020-08-27
申请号：US16646501
申请日：2017-09-29
申请人： Hitachi High-Technologies Corporation
发明人： Hideo MORISHITA , Toshihide AGEMURA
IPC分类号： H01J37/28 , H01J37/244 , H01J37/05 , H01J37/14 , H01J37/147 , H01J37/32
摘要： Provided is a scanning electron microscope provided with an energy selection and detection function for a SE1 generated on a sample while suppressing the detection amount of a SE3 excited due to a BSE in the scanning electron microscope that does not apply a deceleration method. Provided are: an electron optical system that includes an electron source 21 generating an irradiation electron beam and an objective lens 12 focusing the irradiation electron beam on a sample; a detector 13 that is arranged outside an optical axis of the electron optical system and detects a signal electron generated when the sample is irradiated with the irradiation electron beam; a deflection electrode that forms a deflection field 26 to guide the signal electron to the detector; a disk-shaped electrode 23 that is arranged to be closer to the electron source than the deflection field and has an opening through which the irradiation electron beam passes; and a control electrode arranged along the optical axis to be closer to the sample than the deflection field. The sample and the objective lens are set to a reference potential. A potential lower than the reference potential is applied to the disk-shaped electrode, and a potential higher than the reference potential is applied to the control electrode.

2. 发明申请

US20200090903A1 Charged Particle Beam Device 审中-公开
公开(公告)号：US20200090903A1
公开(公告)日：2020-03-19
申请号：US16494595
申请日：2017-03-29
申请人： Hitachi High-Technologies Corporation
发明人： Ryo HIRANO , Hideo MORISHITA , Toshihide AGEMURA , Junichi KATANE , Tsunenori NOMAGUCHI
IPC分类号： H01J37/28 , H01J37/12 , H01J37/145 , H01J37/153
摘要： A charged particle beam device includes: a charged particle source that emits a charged particle beam; a boosting electrode disposed between the charged particle source and a sample to form a path of the charged particle beam and to accelerate and decelerate the charged particle beam; a first pole piece that covers the boosting electrode; a second pole piece that covers the first pole piece; a first lens coil disposed outside the first pole piece and inside the second pole piece to form a first lens; a second lens coil disposed outside the second pole piece to form a second lens; and a control electrode formed between a distal end portion of the first pole piece and a distal end portion of the second pole piece to control an electric field formed between the sample and the distal end portion of the second pole piece.

3. 发明申请

US20160104597A1 ELECTRON GUN, CHARGED PARTICLE GUN, AND CHARGED PARTICLE BEAM APPARATUS USING ELECTRON GUN AND CHARGED PARTICLE GUN 有权
标题翻译：电子枪，充电颗粒枪和充电颗粒光束装置使用电子枪和充电颗粒枪
公开(公告)号：US20160104597A1
公开(公告)日：2016-04-14
申请号：US14787263
申请日：2014-04-14
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yuta IMAI , Takashi OHSHIMA , Hideo MORISHITA
IPC分类号： H01J37/073 , H01J37/145 , H01J37/28 , H01J37/20 , H01J29/48 , H01J27/02
CPC分类号： H01J37/073 , H01J27/02 , H01J27/26 , H01J29/481 , H01J37/06 , H01J37/063 , H01J37/08 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/062 , H01J2237/06341 , H01J2237/06375 , H01J2237/0802 , H01J2237/1508 , H01J2237/2007 , H01J2237/2801
摘要： The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small and having less aberration, and to provide a field emission-type charged particle gun having high luminance even with a high current. This charged particle gun has: a charged particle source; an acceleration electrode that accelerates charged particles emitted from the charged particle source; a control electrode, which is disposed further toward the charged particle source side than the acceleration electrode, and which has a larger aperture diameter than the aperture diameter of the acceleration electrode; and a control unit that controls, on the basis of a potential applied to the acceleration electrode, a potential to be applied to the control electrode.
摘要翻译：本发明的目的是提供一种仅使用静电透镜的带电粒子枪，所述带电粒子枪相对较小并且具有较小的像差，并且提供即使具有高电流也具有高亮度的场致发射型带电粒子枪。该带电粒子枪具有：带电粒子源; 加速电极，其加速从带电粒子源发射的带电粒子; 控制电极，其设置成比加速电极更加朝向带电粒子源侧，并且具有比加速电极的开口直径大的孔径; 以及控制单元，其基于对加速电极施加的电位控制施加到控制电极的电位。

4. 发明申请

US20180025885A1 COMPOSITE CHARGED PARTICLE BEAM DEVICE 有权
公开(公告)号：US20180025885A1
公开(公告)日：2018-01-25
申请号：US15548321
申请日：2016-02-04
申请人： Hitachi High-Technologies Corporation
发明人： Yuta IMAI , Hideo MORISHITA , Toshihide AGEMURA
IPC分类号： H01J37/12 , H01J37/20 , H01J37/08 , H01J37/28 , H01J37/06
CPC分类号： H01J37/12 , H01J37/06 , H01J37/08 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/08 , H01J2237/121 , H01J2237/244 , H01J2237/2801
摘要： This composite charged particle beam device comprises a first charged particle beam column (6), a second charged particle beam column (1) which is equipped with a deceleration system, and is equipped with a detector (3) inside the column, a test piece stage (10) on which a test piece (9) is placed, and an electric field correction electrode (13) which is provided around the tip of the first charged particle beam column, wherein the electric field correction electrode is an electrode that corrects the electric field distribution formed in the vicinity of the test piece, and the electric field correction electrode is positioned between the test piece and the first charged particle beam column, and on the opposite side from the second charged particle beam column with respect to the optical axis of the first charged particle beam column.

5. 发明申请

US20160148782A1 Scanning Electron Microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20160148782A1
公开(公告)日：2016-05-26
申请号：US14899795
申请日：2014-07-11
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Toshihide AGEMURA , Hideo MORISHITA
IPC分类号： H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/265 , H01J37/244 , H01J37/28 , H01J2237/0475 , H01J2237/103 , H01J2237/1534 , H01J2237/24475 , H01J2237/2448
摘要： This scanning electron microscope is provided with: a deceleration means that decelerates an electron beam (5) when the electron beam is passing through an objective lens; and a first detector (8) and a second detector (7) that are disposed between the electron beam and the objective lens and have a sensitive surface having an axially symmetric shape with respect to the optical axis of the electron beam. The first detector is provided at the sample side with respect to the second detector, and exclusively detects the signal electrons having a high energy that have passed through a retarding field energy filter (9A). When the distance between the tip (13) at the sample side of the objective lens and the sensitive surface of the first detector is L1 and the distance between the tip at the sample side of the objective lens and the sensitive surface of the second detector is L2, then L1/L2≦5/9. As a result, when performing low-acceleration observation using a deceleration method by means of a scanning electron microscope, it is possible to detect signal electrons without the effect of shading in a magnification range of a low magnification on the order of hundreds of times to a high magnification of at least 100,000×. Also, it is possible to highly efficiently detect backscattered electrons, of which the amount generated is less than that of secondary electrons.
摘要翻译：该扫描电子显微镜具备：当电子束通过物镜时减速电子束（5）的减速装置; 以及设置在电子束和物镜之间并且具有相对于电子束的光轴具有轴对称形状的敏感表面的第一检测器（8）和第二检测器（7）。第一检测器相对于第二检测器在样本侧设置，并且专门检测已经通过延迟场能量滤波器（9A）的具有高能量的信号电子。当物镜的样品侧的尖端（13）和第一检测器的敏感表面之间的距离为L1，物镜的样品侧的尖端与第二检测器的敏感表面之间的距离为 L2，然后L1 / L2＆nlE; 5/9。结果，当利用扫描电子显微镜使用减速方法进行低加速度观察时，可以在几百倍数倍的低倍数的倍率范围内检测信号电子而不影响阴影效果高倍数至少为100,000×。此外，可以高效地检测产生的量小于二次电子的反向散射电子。

6. 发明申请

US20170069458A1 SAMPLE HOLDER, OBSERVATION SYSTEM, AND IMAGE GENERATION METHOD 有权
标题翻译：样本持有人，观察系统和图像生成方法
公开(公告)号：US20170069458A1
公开(公告)日：2017-03-09
申请号：US15119950
申请日：2015-01-09
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Minami SHOUJI , Takashi OHSHIMA , Yuusuke OOMINAMI , Hideo MORISHITA , Kunio HARADA
IPC分类号： H01J37/244 , H01J37/20 , H01J37/26
CPC分类号： H01J37/244 , H01J37/20 , H01J37/26 , H01J2237/2445 , H01J2237/2808
摘要： The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.
摘要翻译：本发明的目的是简单地通过透射带电粒子进行图像观察。由带电粒子束照射的样品直接或通过预定部件设置在发光元件（23）上，其中穿过或散射在样品内的带电粒子进入，从而从中收集光，使用光传输装置（203）有效地检测以产生样本的透射带电粒子图像。

7. 发明申请

US20160025659A1 Charged Particle Beam Device, Sample Observation Method, Sample Platform, Observation System, and Light Emitting Member 审中-公开
标题翻译：带电粒子束装置，样品观察方法，样品平台，观察系统和发光元件
公开(公告)号：US20160025659A1
公开(公告)日：2016-01-28
申请号：US14774367
申请日：2014-01-22
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yusuke OMINAMI , Mitsugu SATO , Kenko UCHIDA , Sadamitsu ASO , Taku SAKAZUME , Hideo MORISHITA , Sukehiro ITO , Takashi OHSHIMA
IPC分类号： G01N23/225 , G01N23/22
CPC分类号： G01N23/2251 , G01N23/2204 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/2003 , H01J2237/2443 , H01J2237/2445 , H01J2237/24455 , H01J2237/2605
摘要： The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.
摘要翻译：本发明的目的是消除在使用透射带电粒子的观察中放置和提取样品的努力。带电粒子束装置（601）的特征在于，具有：带有原色带电粒子束照射样品（6）的带电粒子光学透镜管; 具有发光元件（500）的样品台，其上由于在样品（6）内部传播或散射的带电粒子或具有发光元件（500）的样品台（600）而发光的发光元件可拆卸地设置; 以及检测由发光部件发出的光的检测器（503）。

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