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11. 发明授权

US07007372B1 Method for making high speed, high areal density inductive write structure 失效
标题翻译：制造高速，高密度感应写入结构的方法
公开(公告)号：US07007372B1
公开(公告)日：2006-03-07
申请号：US10656311
申请日：2003-09-05
申请人： Yingjian Chen , Hua-Ching Tong , Lei Wang , Xizeng Shi
发明人： Yingjian Chen , Hua-Ching Tong , Lei Wang , Xizeng Shi
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3146 , G11B5/3109 , G11B5/3113 , G11B5/3116 , G11B5/313 , G11B5/3153 , G11B5/3967 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49048 , Y10T29/49052 , Y10T29/49071 , Y10T29/49073
摘要： An inductive write element is disclosed for use in a magnetic data recording system. The write element provides increased data rate and data density capabilities through improved magnetic flux flow through the element. The write element includes a magnetic yoke constructed of first and second magnetic poles. The first pole includes a pedestal constructed of a high magnetic moment (high Bsat) material, which is preferably FeRhN nanocrystalline films with lamination layers of CoZrCr. The second pole includes a thin inner layer of high Bsat material (also preferably FeRhN nanocrystalline films with lamination layers of CoZrCr), the remainder being constructed of a magnetic material capable of being electroplated, such as a Ni—Fe alloy. An electrically conductive coil passes through the yoke between the first and second poles to induce a magnetic flux in the yoke when an electrical current is caused to flow through the coil. Magnetic flux in the yoke produces a fringing field at a write gap whereby a signal can be imparted onto a magnetic medium passing thereby.
摘要翻译：公开了用于磁数据记录系统的感应写入元件。写元件通过改善通过元件的磁通量提供增加的数据速率和数据密度能力。写元件包括由第一和第二磁极构成的磁轭。第一极包括由高磁矩（高B sat sat）材料构成的基座，其优选为具有CoZrCr层压层的FeRhN纳米晶体膜。第二极包括一高层高层材料的薄层（也优选具有CoZrCr叠层的FeRhN纳米晶膜），其余部分由能够电镀的磁性材料构成，例如Ni -Fe合金。导电线圈通过第一和第二极之间的磁轭，当电流流过线圈时，引起磁轭中的磁通量。轭中的磁通在写入间隙产生边缘场，由此可以将信号传递到通过的磁介质上。

12. 发明授权

US06873494B2 Write head with high moment film layer having tapered portion extending beyond write gap layer 失效
标题翻译：用具有锥形部分延伸超过写间隙层的高力矩膜层写头
公开(公告)号：US06873494B2
公开(公告)日：2005-03-29
申请号：US10134799
申请日：2002-04-29
申请人： Yingjian Chen , Xiaozhong Dang
发明人： Yingjian Chen , Xiaozhong Dang
IPC分类号： G11B5/31 , G11B5/39 , G11B5/40
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3106 , G11B5/313 , G11B5/3133 , G11B5/3153 , G11B5/3163 , G11B5/40 , G11B2005/3996
摘要： An inductive write head structure incorporating a high moment film in conjunction with at least one pole (e.g., the bottom pole) for use with magnetic storage media and a process for producing the same in which a lift-off photoresist mask is used prior to the deposition of the high moment sputtered film. Following the lift-off process, the high moment film remains on the bottom pole (“P1”) pedestal (in the case of a PDZT type write head) or on the P1 itself (in the case of a Stitched Pole write head). The edge of the lift-off sputtered film is then covered by cured photoresist insulation which is placed at a distance away from the air bearing surface (“ABS”). The coverage of insulation at the edge of the sputtered film is desirable in order to avoid forming a topographic step which may have undesired consequences in the subsequent top pole formation processes.
摘要翻译：结合至少一个极（例如，底极）与磁存储介质一起使用的高力矩膜的感应写头结构及其制造方法，其中在剥离光刻胶掩模之前使用剥离光致抗蚀剂掩模沉积高速溅射膜。在剥离过程之后，高力矩胶片保留在底极（“P1”）底座上（在PDZT型写入头的情况下）或P1本身（在缝合杆写入头的情况下）。然后，剥离溅射膜的边缘被固定的光致抗蚀剂绝缘体覆盖，该固化的光致抗蚀剂绝缘体被放置在远离空气支承表面（“ABS”）的一定距离处。在溅射膜的边缘处的绝缘层的覆盖是期望的，以避免形成在随后的顶极形成过程中可能具有不期望的后果的地形步骤。

13. 发明授权

US06724572B1 Inductive transducer with recessed leading pole layer 有权
标题翻译：具有凹陷前导极层的感应传感器
公开(公告)号：US06724572B1
公开(公告)日：2004-04-20
申请号：US10086756
申请日：2002-02-28
申请人： Kroum Stoev , Yugang Wang , Francis Liu , Yingjian Chen , Xiaozhong Dang
发明人： Kroum Stoev , Yugang Wang , Francis Liu , Yingjian Chen , Xiaozhong Dang
IPC分类号： G11B5147
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/187 , G11B5/23 , G11B5/3103 , G11B5/3116 , G11B5/313 , G11B5/3146 , G11B5/332 , G11B5/3909 , G11B5/3967 , G11B2005/3996
摘要： In one aspect, an inductive transducer is disclosed having a leading pole layer and a leading pole tip, with the pole layer being further removed than the pole tip from a media-facing surface. In another aspect, an inductive transducer is disclosed having a magnetic pedestal disposed between a leading pole layer and a leading pole tip, with at least one of the pedestal and pole layer being further removed than the pole tip from a media-facing surface. In another aspect, a leading pole layer or pedestal may have a surface that slopes away from the media-facing surface with increasing distance forward from the leading pole tip.
摘要翻译：在一个方面，公开了一种电感式换能器，其具有引导极层和引导极尖端，其中极层比面向介质的表面比极尖更进一步去除。另一方面，公开了一种电感换能器，其具有设置在引导极层和前导极尖端之间的磁性基座，其中基座和极层中的至少一个比来自面向介质的表面的极尖更进一步地去除。在另一方面，前导极层或基座可以具有远离所述面向介质的表面的表面，所述表面具有与所述引导极端部向前的距离增加的距离。

14. 发明授权

US08801943B2 Method for manufacturing wraparound shield write head using hard masks 有权
标题翻译：使用硬掩模制造环绕屏蔽写头的方法
公开(公告)号：US08801943B2
公开(公告)日：2014-08-12
申请号：US13193520
申请日：2011-07-28
申请人： Shiwen Huang , Fenglin Liu , Qiping Zhong , Kyusik Shin , Yingjian Chen
发明人： Shiwen Huang , Fenglin Liu , Qiping Zhong , Kyusik Shin , Yingjian Chen
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/3163
摘要： The present disclosure describes a method for manufacturing a full wraparound shield damascene write head through the implementation of a three layered (tri-layered) hard mask. According to an embodiment of the invention, the various layers of hard mask are used for different purposes during the formation of a write head. The wraparound shield head of the present invention exhibits improved physical characteristics that further result in improved performance characteristics. Use of the hard mask layers according to the present invention allows for use of manufacturing processes that can be more closely controlled than those processes used in other processes. For example, smaller dimension lithographic techniques can be used. Also, reliance on certain CMP processes is not necessary where the use of CMP processes is not as well-controlled as deposition or lithographic techniques as is possible using the present invention.
摘要翻译：本公开描述了通过实施三层（三层）硬掩模制造全封装屏蔽镶嵌写头的方法。根据本发明的实施例，在形成写入头期间，各种硬掩模层用于不同的目的。本发明的环绕式屏蔽头表现出改进的物理特性，进一步导致改善的性能特征。根据本发明的硬掩模层的使用允许使用可以比其它工艺中使用的那些方法更加严格地控制的制造工艺。例如，可以使用较小尺寸的光刻技术。此外，在使用CMP工艺不如使用本发明可能的沉积或光刻技术那样不受控制的情况下，对某些CMP工艺的依赖是不必要的。

15. 发明授权

US08508886B2 Use of magnetic material for RIE stop layer during damascene main pole formation 有权
标题翻译：在镶嵌主磁极形成期间使用磁性材料作为RIE停止层
公开(公告)号：US08508886B2
公开(公告)日：2013-08-13
申请号：US13247883
申请日：2011-09-28
申请人： Yingjian Chen , Shiwen Huang , Edward Hin Pong Lee , Mun Hyoun Park , Kyusik Shin , Yuming Zhou
发明人： Yingjian Chen , Shiwen Huang , Edward Hin Pong Lee , Mun Hyoun Park , Kyusik Shin , Yuming Zhou
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A write head for use in a magnetic disk drive and methods of manufacturing the same. When a non-magnetic reactive ion etching (RIE) stop layer is used in a damascene main pole fabrication process, the leading edge shield and the side shield have a magnetic separation. By replacing a non-magnetic RIE stop layer with a magnetic RIE stop layer, no removal of the RIE stop layer around the main pole is necessary. Additionally, the leading edge shield and the side shield will magnetically join together without extra processing as there will be no magnetic separation between the leading edge shield and the side shield.
摘要翻译：用于磁盘驱动器的写入头及其制造方法。当在非镶嵌主极制造工艺中使用非磁性反应离子蚀刻（RIE）停止层时，前缘屏蔽和侧面屏蔽层具有磁分离。通过用磁RIE停止层代替非磁性RIE停止层，不需要在主极周围去除RIE停止层。此外，前缘屏蔽和侧屏蔽将磁性地结合在一起而不需要额外的处理，因为前缘屏蔽和侧屏蔽之间将不会有磁性分离。

16. 发明授权

US08470186B2 Perpendicular write head with wrap around shield and conformal side gap 有权
标题翻译：垂直写头与环绕屏蔽和保形侧隙
公开(公告)号：US08470186B2
公开(公告)日：2013-06-25
申请号：US12954458
申请日：2010-11-24
申请人： Yingjian Chen , Shiwen Huang , Fenglin Liu , Kyusik Shin
发明人： Yingjian Chen , Shiwen Huang , Fenglin Liu , Kyusik Shin
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/315 , G11B5/3163
摘要： A perpendicular write head having a wrap around shield and a conformal side gap. In fabricating the write head, the leading edge shield may be chemical mechanical polished down to a level that is substantially even with a chemical mechanical polishing stop layer. Because the leading edge shield and the chemical mechanical polishing stop layer are used as RIE stop for trench RIE, a fully conformal side shield may be formed with a LTE/LES.
摘要翻译：垂直写头，其具有围绕屏蔽的保护层和保形侧间隙。在制造写入头时，前缘屏蔽可以被化学机械抛光到基本上均匀的化学机械抛光停止层的水平。由于前缘屏蔽和化学机械抛光停止层用作沟槽RIE的RIE停止，所以可以用LTE / LES形成完全共形的侧屏蔽。

17. 发明授权

US08400733B2 Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET) 有权
标题翻译：使具有前缘屏蔽（LES）和前缘锥度（LET）的PMR写入器的过程
公开(公告)号：US08400733B2
公开(公告)日：2013-03-19
申请号：US12954422
申请日：2010-11-24
申请人： Kyusik Shin , Qiping Zhong , Honglin Zhu , Yingjian Chen , Liubo Hong , Fenglin Liu
发明人： Kyusik Shin , Qiping Zhong , Honglin Zhu , Yingjian Chen , Liubo Hong , Fenglin Liu
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.
摘要翻译：提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。对于具有锥形前缘的锥形磁极，磁性材料沉积在平坦化表面上，形成图案化的抗蚀剂材料，并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。

18. 发明授权

US08233235B2 PMR writer having a tapered write pole and bump layer and method of fabrication 有权
标题翻译： PMR写入器具有锥形写极点和凸起层及其制造方法
公开(公告)号：US08233235B2
公开(公告)日：2012-07-31
申请号：US12634514
申请日：2009-12-09
申请人： Yingjian Chen , Liubo Hong , Yimin Hsu
发明人： Yingjian Chen , Liubo Hong , Yimin Hsu
IPC分类号： G11B5/147 , G11B5/23
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3163 , Y10T29/49048
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译：用非磁性前凸块层制造锥形磁极的方法。磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

19. 发明授权

US08149536B1 Perpendicular magnetic recording head having a pole tip formed with a CMP uniformity structure 有权
标题翻译：具有形成有CMP均匀结构的极尖的垂直磁记录头
公开(公告)号：US08149536B1
公开(公告)日：2012-04-03
申请号：US11871672
申请日：2007-10-12
申请人： Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
发明人： Danning Yang , Yingjian Chen , Brant Nease , Kyusik Sin
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3169 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.
摘要翻译：公开了用于制造垂直磁记录头的方法和系统。该方法和系统包括提供其中具有孔的化学机械平面化（CMP）均匀性结构，并在孔内形成垂直的磁记录极。 CMP均匀性结构可以包括CMP阻挡层。所述方法和系统还包括在形成垂直磁记录极之后制造绝缘体，并执行CMP以去除绝缘体的一部分，暴露垂直磁记录极的一部分并平面化垂直磁记录头的暴露表面。

20. 发明授权

US08079135B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08079135B1
公开(公告)日：2011-12-20
申请号：US11955667
申请日：2007-12-13
申请人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
发明人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a perpendicular magnetic recording (PMR) transducer is described. The PMR transducer provided includes a PMR pole and yoke structure coupled with the PMR pole. The method includes providing a hard mask and an intermediate layer. A first portion of the hard mask resides on the PMR pole. A second portion of the hard mask resides on another structure. The intermediate layer surrounds at least the PMR pole. The method also includes performing a planarization on at least the intermediate layer, removing the first portion of the hard mask on the PMR pole without completely removing the second portion of the hard mask on the other structure. The method further includes removing a remaining portion of the hard mask on the other structure, providing a write gap on the PMR pole, and providing a shield on the write gap.
摘要翻译：描述了一种用于提供垂直磁记录（PMR）换能器的方法。提供的PMR传感器包括与PMR极耦合的PMR极和轭结构。该方法包括提供硬掩模和中间层。硬掩模的第一部分位于PMR杆上。硬掩模的第二部分位于另一结构上。中间层至少包围PMR极。该方法还包括在至少中间层上执行平面化，在PMR极上去除硬掩模的第一部分，而不必在另一个结构上完全去除硬掩模的第二部分。该方法还包括移除另一结构上的硬掩模的剩余部分，在PMR极上提供写入间隙，并在写入间隙上提供屏蔽。

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