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11. 发明授权

US06198533B1 High temperature thin film property measurement system and method 有权
标题翻译：高温薄膜性能测量系统及方法
公开(公告)号：US06198533B1
公开(公告)日：2001-03-06
申请号：US09376711
申请日：1999-08-17
申请人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
发明人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
IPC分类号： G01B2117
CPC分类号： G01B11/065 , G01B11/303
摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness and debris on thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat in a high temperature environment. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The polarization switch can be accomplished using a temperature compensated quartz half plate. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above.
摘要翻译：用于测量薄膜磁盘上的润滑剂厚度和降解，碳磨损和碳厚度的表面粗糙度和碎屑的系统和方法，其在高温环境中基本上不是薄膜（碳）保护涂层的布鲁斯特角。其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。偏光开关可以使用温度补偿的石英半板完成。角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。它还允许测量碳厚度和绝对碳厚度的变化。表面粗糙度也可以在上述任何角度测量。

12. 发明授权

US06229610B1 System and method for measuring thin film properties and analyzing two-dimensional histograms using substraction operation 有权
标题翻译：使用减法运算测量薄膜性质和分析二维直方图的系统和方法
公开(公告)号：US06229610B1
公开(公告)日：2001-05-08
申请号：US09376705
申请日：1999-08-17
申请人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
发明人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
IPC分类号： G01B2117
CPC分类号： G01B11/065 , G01B11/303
摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention utilizes a first and second histogram representing disk properties (1) at two different time periods, (2) at two different locations on the disk, or (3) on two different disks.
摘要翻译：用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。它还允许测量碳厚度和绝对碳厚度的变化。表面粗糙度也可以在上述任何角度测量。本发明利用在两个不同时间段（2）在盘上的两个不同位置或（3）在两个不同盘上的表示盘属性（1）的第一和第二直方图。

13. 发明授权

US06268919B1 System and method for measuring thin film properties and analyzing two-dimensional histograms using and/not operations 失效
标题翻译：用于测量薄膜性质的系统和方法，并使用和/或操作分析二维直方图
公开(公告)号：US06268919B1
公开(公告)日：2001-07-31
申请号：US09376151
申请日：1999-08-17
申请人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
发明人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
IPC分类号： G01B2117
CPC分类号： G01B11/065 , G01B11/303
摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention utilizes a first and second histogram representing disk properties (1) at two different time periods, (2) at two different locations on the disk, or (3) on two different disks.
摘要翻译：用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。它还允许测量碳厚度和绝对碳厚度的变化。表面粗糙度也可以在上述任何角度测量。本发明利用在两个不同时间段（2）在盘上的两个不同位置或（3）在两个不同盘上的表示盘属性（1）的第一和第二直方图。

14. 发明授权

US6130749A System and method for measuring thin film properties and analyzing two-dimensional histograms using a symmetry operation 有权
标题翻译：用于测量薄膜性质的系统和方法，并使用对称操作分析二维直方图
公开(公告)号：US6130749A
公开(公告)日：2000-10-10
申请号：US376152
申请日：1999-08-17
申请人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
发明人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
IPC分类号： G01B11/06 , G01B11/30 , G01Q60/00
CPC分类号： G01B11/065 , G01B11/303
摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above. The present invention generates a histogram from the specular and scattered components of the reflected light, generates a centroid of the histogram and performs a symmetry operation to identify the characteristics of the thin film.
摘要翻译：用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。它还允许测量碳厚度和绝对碳厚度的变化。表面粗糙度也可以在上述任何角度测量。本发明根据反射光的镜面和散射分量产生直方图，产生直方图的质心，并执行对称操作以识别薄膜的特性。

15. 发明授权

US6031615A System and method for simultaneously measuring lubricant thickness and degradation, thin film thickness and wear, and surface roughness 有权
标题翻译：同时测量润滑剂厚度和降解，薄膜厚度和磨损以及表面粗糙度的系统和方法
公开(公告)号：US6031615A
公开(公告)日：2000-02-29
申请号：US136897
申请日：1998-08-19
申请人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
发明人： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman
IPC分类号： G01B11/06 , G01B11/30 , G01Q60/00 , G01B21/17
CPC分类号： G01B11/065 , G01B11/303
摘要： A system and method for measuring lubricant thickness and degradation, carbon wear and carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat. A focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. The range of angles can be from zero degrees from normal to near Brewster's angle and from an angle greater than Brewster's angle to 90 degrees. This range of angles allows the easy measurement of the change in lubricant thickness due to the interaction of the thin film head, the absolute lubricant thickness and degradation of the lubricant. It also allows the measurement of changes in carbon thickness and the absolute carbon thickness. The surface roughness can also be measured at any of the angles specified above.
摘要翻译：用于测量薄膜（碳）保护外涂层基本上布鲁斯特角角度的薄膜磁盘的润滑剂厚度和降解，碳磨损和碳厚度以及表面粗糙度的系统和方法。其偏振可以在P或S偏振之间切换的聚焦光学光以与薄膜磁盘的表面成一定角度入射。角度范围可以从普通到布鲁斯特角附近的零度以及从布鲁斯特角度大到90度的角度。这种角度范围可以容易地测量润滑剂厚度的变化，这是由于薄膜头的相互作用，绝对润滑剂厚度和润滑剂的劣化。它还允许测量碳厚度和绝对碳厚度的变化。表面粗糙度也可以在上述任何角度测量。

16. 发明申请

US20060215289A1 Servo pattern characterization on magnetic disks 失效
标题翻译：磁盘上的伺服模式表征
公开(公告)号：US20060215289A1
公开(公告)日：2006-09-28
申请号：US11432609
申请日：2006-05-11
申请人： Zhen Hou , Ronny Soetarman , Vamsi Velidandla , Steven Meeks
发明人： Zhen Hou , Ronny Soetarman , Vamsi Velidandla , Steven Meeks
IPC分类号： G11B5/02 , G11B5/596
CPC分类号： G11B5/59627
摘要： In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target radiation onto a surface, a reflected radiation collecting assembly that collects radiation reflected from the surface, and a signal processing module. The signal processing module generates an image of magnetic characteristics of the magnetic disk, wherein the image comprises a plurality of servo sector arcs, locates a sample of points on a plurality of the servo sector arcs, fits a circle to the sample of points on each of the plurality of servo sector arcs, and determines at least one pivot-to-gap measurement from the radius of the circles.
摘要翻译：在一个实施例中，表面分析器系统包括将辐射瞄准到表面上的辐射瞄准组件，收集从表面反射的辐射的反射辐射收集组件和信号处理模块。信号处理模块生成磁盘的磁特性的图像，其中图像包括多个伺服扇区弧，定位多个伺服扇区弧上的点样本，将圆适合于每个点上的点样本并且从圆的半径确定至少一个枢轴对间隙测量。

17. 发明授权

US07397621B2 Servo pattern characterization on magnetic disks 失效
标题翻译：磁盘上的伺服模式表征
公开(公告)号：US07397621B2
公开(公告)日：2008-07-08
申请号：US11432609
申请日：2006-05-11
申请人： Zhen Hou , Ronny Soetarman , Vamsi Velidandla , Steven W. Meeks
发明人： Zhen Hou , Ronny Soetarman , Vamsi Velidandla , Steven W. Meeks
IPC分类号： G11B5/02
CPC分类号： G11B5/59627
摘要： In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target radiation onto a surface, a reflected radiation collecting assembly that collects radiation reflected from the surface, and a signal processing module. The signal processing module generates an image of magnetic characteristics of the magnetic disk, wherein the image comprises a plurality of servo sector arcs, locates a sample of points on a plurality of the servo sector arcs, fits a circle to the sample of points on each of the plurality of servo sector arcs, and determines at least one pivot-to-gap measurement from the radius of the circles.
摘要翻译：在一个实施例中，表面分析器系统包括将辐射瞄准到表面上的辐射瞄准组件，收集从表面反射的辐射的反射辐射收集组件和信号处理模块。信号处理模块生成磁盘的磁特性的图像，其中图像包括多个伺服扇区弧，定位多个伺服扇区弧上的点样本，将圆适合于每个点上的点样本并且从圆的半径确定至少一个枢轴对间隙测量。

18. 发明申请

US20060250611A1 Wafer edge inspection 有权
标题翻译：晶圆边缘检查
公开(公告)号：US20060250611A1
公开(公告)日：2006-11-09
申请号：US11365221
申请日：2006-03-01
申请人： Vamsi Velidandla , Anoop Somanchi , Ronny Soetarman , Steven Meeks
发明人： Vamsi Velidandla , Anoop Somanchi , Ronny Soetarman , Steven Meeks
IPC分类号： G01N21/88
CPC分类号： G01N21/94 , G01B11/303 , G01B11/306 , G01N21/21 , G01N21/211 , G01N21/55 , G01N21/9501 , G01N21/9503 , G01N2021/556 , H01L22/12
摘要： In one embodiment, a system to inspect an edge region of a wafer, comprises a surface analyzer assembly comprising a radiation targeting assembly that targets a radiation beam onto a surface of the wafer; a reflected radiation collection assembly to collect radiation reflected from a surface of the wafer; means for rotating the surface analyzer assembly about an edge surface of the wafer; and means for detecting one or more defects in the edge region of the wafer.
摘要翻译：在一个实施例中，检查晶片的边缘区域的系统包括表面分析器组件，其包括将辐射束对准到晶片表面上的辐射瞄准组件; 用于收集从晶片表面反射的辐射的反射辐射收集组件; 用于使表面分析器组件围绕晶片的边缘表面旋转的装置; 以及用于检测晶片边缘区域中的一个或多个缺陷的装置。

19. 发明授权

US07630086B2 Surface finish roughness measurement 失效
标题翻译：表面粗糙度测量
公开(公告)号：US07630086B2
公开(公告)日：2009-12-08
申请号：US11623415
申请日：2007-01-16
申请人： Dave S. Oak , Tri Do , Ronny Soetarman , Steven W. Meeks , Vamsi Velidandla
发明人： Dave S. Oak , Tri Do , Ronny Soetarman , Steven W. Meeks , Vamsi Velidandla
IPC分类号： G01B11/24
CPC分类号： G01B11/303 , G01B11/306 , G01N21/9501
摘要： A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surface roughness data.
摘要翻译：一种方法包括从第一方向生成包括第一表面粗糙度数据和来自第二取向的第二表面粗糙度数据的数据集，以及根据第一表面粗糙度数据和第二表面粗糙度数据确定粗糙度偏差参数。

20. 发明申请

US20070115483A1 SURFACE FINISH ROUGHNESS MEASUREMENT 失效
标题翻译：表面粗糙度测量
公开(公告)号：US20070115483A1
公开(公告)日：2007-05-24
申请号：US11623415
申请日：2007-01-16
申请人： Dave Oak , Tri Do , Ronny Soetarman , Steven Meeks , Vamsi Velidandla
发明人： Dave Oak , Tri Do , Ronny Soetarman , Steven Meeks , Vamsi Velidandla
IPC分类号： G01B11/30
CPC分类号： G01B11/303 , G01B11/306 , G01N21/9501
摘要： A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surface roughness data.
摘要翻译：一种方法包括从第一方向生成包括第一表面粗糙度数据和来自第二取向的第二表面粗糙度数据的数据集，以及根据第一表面粗糙度数据和第二表面粗糙度数据确定粗糙度偏差参数。

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