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11. 发明授权

US5692061A Method of utilizing a two-dimensional image for detecting the position, posture, and shape of a three-dimensional objective 失效
标题翻译：利用二维图像检测三维物镜的位置，姿势和形状的方法
公开(公告)号：US5692061A
公开(公告)日：1997-11-25
申请号：US391006
申请日：1995-02-21
申请人： Katsuhiro Sasada , Tomoharu Nakahara , Hidekazu Araki
发明人： Katsuhiro Sasada , Tomoharu Nakahara , Hidekazu Araki
IPC分类号： G06T1/00 , G06K9/00 , G06T7/00
CPC分类号： G06T7/0046 , G06K9/00201 , G06T7/0051
摘要： A method for recognizing a three-dimensional objective in which a two-dimensional image is obtained from the same viewing point as a distance image obtained by picking up the objective in a three-dimensional space and the two-dimensional image is utilized to previously limit an existence zone of the objective under detection for the distance image and to perform objective detecting operation over the partial distance image in the limited zone, thereby realizing a sufficiently high speed detection of, in particular, the three-dimensional objective.
摘要翻译：一种用于识别三维物镜的方法，其中从与通过拾取三维空间中的物镜获得的距离图像相同的视点获得二维图像，并且二维图像被用于预先限定对距离图像进行检测的目标的存在区域，并且在受限区域中对部分距离图像执行目标检测操作，从而实现特别是三维目标的足够高的速度检测。

12. 发明申请

US20070235646A1 Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US20070235646A1
公开(公告)日：2007-10-11
申请号：US11655275
申请日：2007-01-19
申请人： Kazuma Tanii , Yuji Kasai , Katsuhiro Sasada , Eiichi Seya
发明人： Kazuma Tanii , Yuji Kasai , Katsuhiro Sasada , Eiichi Seya
IPC分类号： G01N23/00
CPC分类号： G01N23/2251 , H01J37/28 , H01J2237/004 , H01J2237/216 , H01J2237/24564
摘要： Disclosed is a scanning electron microscope capable of performing speedy focusing by automatically measuring an electrostatic voltage of a surface of a wafer inside a specimen chamber in an accurate, and easy speedy manner, the wafer assuming different electrostatic voltages inside and outside the specimen chamber. The scanning electron microscope that controls optical systems measures an electrostatic voltage of the specimen according to an electrostatic capacitance between the both parts of the divided electrode plate, by dividing an electrode plate into two parts and switching potentials of electrodes obtained by the division with each other, an electrostatic voltage of the specimen based on an electrostatic capacitance between the both parts of the divided electrode plate. The electrode plate is used for applying a retarding voltage and arranged over a specimen.
摘要翻译：公开了一种扫描电子显微镜，其能够以准确且容易的方式自动测量样品室内的晶片表面的静电电压，从而在晶片内部和外部具有不同的静电电压来进行快速聚焦。控制光学系统的扫描电子显微镜通过将电极板分成两部分并通过彼此分割获得的电极的切换电位来测量根据分隔电极板的两个部分之间的静电电容的样品的静电电压基于分割电极板的两个部分之间的静电电容的试样的静电电压。电极板用于施加延迟电压并且布置在试样上。

13. 发明授权

US07247864B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US07247864B2
公开(公告)日：2007-07-24
申请号：US11305109
申请日：2005-12-19
申请人： Hiroaki Mito , Katsuhiro Sasada , Kazuo Kato , Tomohiro Kudo , Tomonori Saeki
发明人： Hiroaki Mito , Katsuhiro Sasada , Kazuo Kato , Tomohiro Kudo , Tomonori Saeki
IPC分类号： H01J37/18
CPC分类号： H01J37/185 , H01J37/20 , H01J2237/18 , H01J2237/2001 , H01J2237/204 , H01J2237/2817 , H01L21/67028 , H01L21/67213 , H01L21/67248
摘要： A sample measuring method and a charged particle beam apparatus are provided which remove contaminants, that have adhered to a sample in a sample chamber of an electron microscope, to eliminate adverse effects on the subsequent manufacturing processes. To achieve this objective, after the sample measurement or inspection is made by using a charged particle beam, contaminants on the sample are removed before the next semiconductor manufacturing process. This allows the contaminants adhering to the sample in the sample chamber to be removed and therefore failures or defects that may occur in a semiconductor fabrication process following the measurement and inspection can be minimized.
摘要翻译：提供了样品测量方法和带电粒子束装置，其去除了附着在电子显微镜的样品室中的样品的污染物，以消除对后续制造工艺的不利影响。为了达到这个目标，在通过使用带电粒子束进行样品测量或检查之后，在下一个半导体制造过程之前去除样品上的污染物。这允许去除样品室中附着在样品上的污染物，因此可以使在测量和检查之后的半导体制造过程中可能发生的故障或缺陷被最小化。

14. 发明授权

US07205541B1 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US07205541B1
公开(公告)日：2007-04-17
申请号：US11305231
申请日：2005-12-19
申请人： Hiroaki Mito , Katsuhiro Sasada , Kazuo Kato , Tomohiro Kudo , Tomonori Saeki , Yasuo Yahagi , Masayuki Kobayashi
发明人： Hiroaki Mito , Katsuhiro Sasada , Kazuo Kato , Tomohiro Kudo , Tomonori Saeki , Yasuo Yahagi , Masayuki Kobayashi
IPC分类号： G01N13/00 , G21K5/10
CPC分类号： H01J37/20 , H01J2237/022 , H01J2237/2817
摘要： An object of this invention is to provide a charged particle beam apparatus that is capable of handling samples without adhering impurities onto the samples. In a scanning electron microscope in which a lubricant was coated on a sliding portion of a movable member that moves inside a vacuum chamber, a substance from which low molecular components were removed is used as the lubricant. It is thus possible to inhibit sample contamination and suppress the occurrence of defects in a process following measurement of the samples.
摘要翻译：本发明的目的是提供一种能够处理样品而不将杂质附着在样品上的带电粒子束装置。在其中在真空室内移动的可移动部件的滑动部分涂覆有润滑剂的扫描电子显微镜中，使用从其中除去低分子量成分的物质作为润滑剂。因此可以抑制样品污染并抑制样品测量后的处理中的缺陷的发生。

15. 发明申请

US20070064100A1 Scanning electron microscope and image signal processing method 有权
标题翻译：扫描电子显微镜和图像信号处理方法
公开(公告)号：US20070064100A1
公开(公告)日：2007-03-22
申请号：US11520802
申请日：2006-09-14
申请人： Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
发明人： Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
IPC分类号： H04N7/18
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/221 , H01J2237/2448 , H01J2237/24585
摘要： The SEM has a dynamic range reference value setting unit for setting dynamic range reference values, a dynamic range adjustment unit for receiving an observation image signal delivered out of a secondary electron detector, adjusting the dynamic range of the observation image signal on the basis of the dynamic range reference values and outputting the thus adjusted observation image signal as an observation image signal after adjustment, a display image generation unit for determining luminous intensity levels of individual pixels of an image to be displayed based on the observation image signal after adjustment to generate a display image, a histogram generation unit for generating a histogram of luminous intensity levels of the display image and extracting, as a luminous intensity peak value, at which the frequency of luminous intensity is maximized, and a display unit for displaying the generated histogram and the extracted luminous intensity peak value.
摘要翻译： SEM具有用于设定动态范围基准值的动态范围基准值设定单元，用于接收从二次电子检测器输出的观察图像信号的动态范围调整单元，基于该观测图像信号调整观测图像信号的动态范围动态范围基准值，并输出调整后的观察图像信号作为调整后的观察图像信号;显示图像生成单元，其根据调整后的观察图像信号，决定要显示的图像的各个像素的发光强度水平，生成显示图像，直方图生成单元，用于生成显示图像的发光强度级别的直方图，并且提取作为发光强度的频率最大化的发光强度峰值，以及用于显示所生成的直方图的显示单元和提取发光强度峰值。

16. 发明申请

US20060232445A1 Electron beam apparatus and method for production of its specimen chamber 有权
公开(公告)号：US20060232445A1
公开(公告)日：2006-10-19
申请号：US11450382
申请日：2006-06-12
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： H03M1/22
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.

17. 发明授权

US5614713A Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US5614713A
公开(公告)日：1997-03-25
申请号：US617030
申请日：1996-03-18
申请人： Atsushi Kobaru , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
发明人： Atsushi Kobaru , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
IPC分类号： H01J37/20 , H01J37/21 , H01J37/22 , H01J37/244 , H01J37/26
CPC分类号： H01J37/22 , H01J2237/216 , H01J2237/2482
摘要： An electron beam is focused on a specimen by a focusing lens. A light beam is incident on the position of irradiation of the specimen with the electron beam and the reflected light beam is detected by a linear light detector. The output of the detector is used to measure the height of the specimen at the position of irradiation of the electron beam. The specimen is moved in a plane perpendicular to an optical axis of the focusing lens. A specimen height measuring device carries out the height measurement of the specimen at a position to be observed on the specimen and at positions thereon which are in the vicinity of the position to be observed, when those positions are located at the position of irradiation of the electron beam. The specimen height measuring device averages the measured values so as to produce a focusing correction signal on the basis thereof and controls the focusing lens on the basis of the focusing correction signal.
摘要翻译：电子束通过聚焦透镜聚焦在样本上。光束入射到具有电子束的样本的照射位置，并且通过线性光检测器检测反射光束。检测器的输出用于测量样品在电子束照射位置的高度。样本在垂直于聚焦透镜的光轴的平面内移动。样本高度测量装置在样本上观察的位置和在待观察位置附近的位置上执行样本的高度测量，当这些位置位于待观察位置的位置时电子束。样本高度测量装置对测量值进行平均，以便基于此产生聚焦校正信号，并且基于聚焦校正信号控制聚焦透镜。

18. 发明申请

US20110032176A1 IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：图像形成方法和充电颗粒光束装置
公开(公告)号：US20110032176A1
公开(公告)日：2011-02-10
申请号：US12907912
申请日：2010-10-19
申请人： Atsushi KOBARU , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi KOBARU , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
IPC分类号： G09G1/06
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
摘要翻译：一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。扫描位于第一扫描线和第二扫描线之间的第三扫描线。在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。

19. 发明申请

US20100237241A1 Electrostatic Charge Measurement Method, Focus Adjustment Method, and Scanning Electron Microscope 有权
标题翻译：静电电荷测量方法，焦点调整方法和扫描电子显微镜
公开(公告)号：US20100237241A1
公开(公告)日：2010-09-23
申请号：US12792808
申请日：2010-06-03
申请人： Tatsuaki ISHIJIMA , Katsuhiro Sasada , Ritsuo Fukaya
发明人： Tatsuaki ISHIJIMA , Katsuhiro Sasada , Ritsuo Fukaya
IPC分类号： G01N23/22 , H01J37/28
CPC分类号： G01N23/225 , H01J2237/004 , H01J2237/216 , H01J2237/24564 , H01J2237/28
摘要： A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample.
摘要翻译：公开了一种方法和装置，用于当通过扫描电子束测量样品的静电电荷量或通过扫描电子束时，基于电子束扫描，基于静电电荷存储来抑制静电电荷量或散焦的误差。静电电荷测量方法，焦点调节方法或用于测量静电电荷量或控制对样品的施加电压的扫描电子显微镜，在将电子束的扫描位置移动到样品上的同时，将能量过滤器的施加电压改变。

20. 发明申请

US20080048118A1 Electron Beam Apparatus and Method for Production of Its Specimen Chamber 有权
标题翻译：电子束装置及其试样室的制造方法
公开(公告)号：US20080048118A1
公开(公告)日：2008-02-28
申请号：US11907375
申请日：2007-10-11
申请人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
发明人： Tsuyoshi Inanobe , Sho Takami , Yoichi Ose , Katsuhiro Sasada
IPC分类号： G01N23/00
CPC分类号： H01J37/09 , H01J37/16 , H01J2237/1405 , H01J2237/16 , H01J2237/2614 , H01J2237/2617 , H01J2237/28
摘要： A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
摘要翻译：提供了具有屏蔽性能以防止环境磁场的电子束装置的结构。电子束装置包括用于容纳用于将电子束会聚在试样上的磁性透镜的反射镜筒和用于容纳样本的试样室，其中具有导电性的非磁性材料用作至少一个反射镜的材料桶和样品室的主体。用于镜筒的材料或试样室的主体是铝合金，镜筒的侧壁或试样室的主体的厚度为10mm以上。厚度小于镜筒侧壁或试样室主体的磁性板设置在镜筒的内侧壁或试样室的主体上。

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