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11. 发明授权

US5671903A Heat treatment apparatus and valve device for use in the same 失效
标题翻译：热处理装置和阀装置用于其中
公开(公告)号：US5671903A
公开(公告)日：1997-09-30
申请号：US365460
申请日：1994-12-28
申请人： Kenji Homma , Hironobu Nishi
发明人： Kenji Homma , Hironobu Nishi
IPC分类号： F16K31/00 , F16K31/04 , F16K41/10 , F16K31/44
CPC分类号： F16K41/10 , F16K31/003 , F16K31/04
摘要： The present invention relates to a heat treatment apparatus, specifically a valve device for use in an exhaust system of a low pressure heat treatment furnace, which comprises urging device for urging a valve body in a valve closing direction, and a drive unit for opening/closing the valve body against an urging force of the urging device. An interconnection releasing mechanism is provided between the driving unit and the valve rod of the valve body, the interconnection releasing mechanism connecting both with each other, and releasing their connection in an emergency. Thus, an exhaust system of the low pressure heat treatment furnace is instantaneously shut off in an emergency to prevent reverse flow of exhaust gas into the furnace. An evacuation fine adjustment gap is defined between the periphery of the valve body and that of the valve casing for facilitating evacuation control.
摘要翻译：本发明涉及一种热处理装置，特别涉及一种用于低压热处理炉的排气系统中的阀装置，其包括用于沿阀关闭方向推压阀体的推压装置，以及用于打开/ 抵抗推动装置的推动力来关闭阀体。在阀体的驱动单元和阀杆之间设置有互连释放机构，互连释放机构彼此连接并且在紧急情况下释放它们的连接。因此，在紧急情况下立即关闭低压热处理炉的排气系统，以防止废气逆向流入炉中。在阀体的周边和阀壳的周边之间限定排气微调间隙，以便于排气控制。

12. 发明申请

US20110170293A1 ILLUMINATION DEVICE AND PRODUCING METHOD THEREOF 有权
标题翻译：照明装置及其制造方法
公开(公告)号：US20110170293A1
公开(公告)日：2011-07-14
申请号：US12981381
申请日：2010-12-29
申请人： Hideyuki Murai , Naoki Nishimori , Kosuke Sugiyama , Akira Matsui , Kenji Homma , Jun Ota , Sayuki Nakada , Rie Masuda
发明人： Hideyuki Murai , Naoki Nishimori , Kosuke Sugiyama , Akira Matsui , Kenji Homma , Jun Ota , Sayuki Nakada , Rie Masuda
IPC分类号： F21V5/00 , F21V7/00
CPC分类号： F21V5/007 , F21Y2105/00 , F21Y2115/10 , G01N21/8806 , G01N2021/8816 , G01N2201/0626
摘要： An illumination device has a board, a plurality of light emitting elements that are mounted on the board, the plurality of light emitting elements being disposed such that a light irradiation direction of each light emitting element becomes substantially perpendicular to the board, and a plurality of lenses. Each of the plurality of lens is paired with one of the plurality of light emitting elements. A relative positional relationship between the light emitting element and the lens in each pair varies according to a position on the board in which the corresponding light emitting element is disposed.
摘要翻译：照明装置具有板，安装在板上的多个发光元件，多个发光元件被设置为使得每个发光元件的光照射方向基本上垂直于板，并且多个镜头多个透镜中的每一个与多个发光元件中的一个配对。发光元件和透镜在每一对中的相对位置关系根据布置相应发光元件的板上的位置而变化。

13. 发明授权

US07367350B2 Processing device and method of maintaining the device 失效
标题翻译：处理装置和维护装置的方法
公开(公告)号：US07367350B2
公开(公告)日：2008-05-06
申请号：US10503126
申请日：2003-02-07
申请人： Daisuke Toriya , Kenji Homma , Akihiko Tsukada , Kouji Shimomura
发明人： Daisuke Toriya , Kenji Homma , Akihiko Tsukada , Kouji Shimomura
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , C23C16/4402 , C23C16/4481 , Y10T137/0419 , Y10T137/4259 , Y10T137/7759
摘要： A film processing device using vaporized liquid source capable of confirming the flow control accuracy of flow control equipment such as a mass flow controller (15) controlling the flow of the liquid source without separating the flow control equipment from piping and disassembling the piping, comprising a bypass passage (41) for bypassing a part of a washing fluid feed passage (32) for feeding washing fluid to a liquid source feed passage (12) and a flowmeter such as an MFM (42), wherein the washing fluid is allowed to flow to the mass flow controller (15) through the MFM (42), and the flow of the washing fluid detected by the MFM (42) is compared with a target flow set in the mass flow controller (15) to check whether the mass flow controller (15) operates normally or not.
摘要翻译：一种使用气化液体源的膜处理装置，其能够确认流量控制设备的流量控制精度，例如质量流量控制器（15），其控制液体源的流动，而不将流量控制设备与管道分离并拆卸管道，包括旁路通道（41），用于旁路用于将洗涤流体供给到液体源供给通道（12）的一部分洗涤流体供给通道（32）和诸如MFM（42）的流量计，其中允许洗涤流体流动通过MFM（42）到质量流量控制器（15），并且将由MFM（42）检测到的洗涤流体的流量与在质量流量控制器（15）中设定的目标流量进行比较，以检查质量流量控制器（15）正常运行。

14. 发明申请

US20060124835A1 Transparent optical component for light emitting/receiving elements 失效
标题翻译：用于发光/接收元件的透明光学元件
公开(公告)号：US20060124835A1
公开(公告)日：2006-06-15
申请号：US11348974
申请日：2006-02-07
申请人： Hironobu Kiyomoto , Hayami Hosokawa , Naru Yasuda , Kenji Homma , Yukari Terakawa
发明人： Hironobu Kiyomoto , Hayami Hosokawa , Naru Yasuda , Kenji Homma , Yukari Terakawa
IPC分类号： H01J3/14
CPC分类号： B60Q1/302 , E01F9/559 , F21V5/04 , F21V7/0091 , F21W2111/00 , F21Y2115/10 , G02B19/0028 , G02B19/0061 , H01L33/54 , H01L33/58 , H01L33/60 , H01L2224/48091 , H01L2224/48247 , H01L2924/181 , H01L2924/1815 , H01L2924/00014 , H01L2924/00012
摘要： This invention improves the use efficiency of light emitted by a solid light emitter such as a light emitting diode, and realizes a desired directional pattern. On a front boundary surface of a mold resin 13 sealing a light emitter 12, there are formed a direct emission region 18 for emitting the light from the light emitter 12 and a total reflection region 19 for totally reflecting the light from the light emitter 12. The direct emission region 18 is convex lens-shaped. A light reflecting portion 20 having a concave mirror shape is disposed on a rear wall of the mold resin 13. A part of light emitted from the light emitter 12 is emitted forward by receiving an optical lens action when it passes through the direct emission region 18. Another part of the light emitted by from the light emitter 12 is totally reflected by the total reflection region 19, and is reflected by the light reflecting portion 20, and emitted forward from the total reflection region 19.
摘要翻译：本发明提高了由诸如发光二极管的固体发光体发射的光的使用效率，并且实现了所需的方向图。在密封发光体12的模制树脂13的前边界面上形成有用于发射来自发光体12的光的直接发射区域18和用于全反射来自发光体12的光的全反射区域19。直接发射区域18是凸透镜状的。具有凹面镜形状的光反射部分20设置在模制树脂13的后壁上。从光发射器12发射的光的一部分在通过直接发射区域18时通过接受光学透镜作用而向前发射。来自发光体12的光的另一部分被全反射区域19全反射，被光反射部20反射，从全反射区域19向前方射出。

15. 发明授权

US06537422B2 Single-substrate-heat-processing apparatus for semiconductor process 失效
标题翻译：用于半导体工艺的单衬底加热装置
公开(公告)号：US06537422B2
公开(公告)日：2003-03-25
申请号：US09839292
申请日：2001-04-23
申请人： Takeshi Sakuma , Kenji Homma , Takahiro Horiguchi
发明人： Takeshi Sakuma , Kenji Homma , Takahiro Horiguchi
IPC分类号： H01L21306
CPC分类号： H01L21/67115 , C23C16/46 , H01L21/67103
摘要： A higher-temperature heating zone and lower-temperature heating zone are set in a process chamber for a single-substrate-heat-processing apparatus in order to subject a wafer to two processes with different process temperatures. In the higher-temperature heating zone, the wafer is heated as it is placed on a worktable. In the lower-temperature heating zone, the wafer is heated with a smaller heat quantity as it floats above the worktable. In the lower-temperature heating zone, a heat ray reflector for compensating for heat dissipated from the peripheral portion of the wafer is disposed to surround the wafer.
摘要翻译：将较高温度的加热区域和较低温度的加热区域设置在用于单基板加热设备的处理室中，以便使晶片经历两个具有不同工艺温度的工艺。在较高温度的加热区中，晶片被放置在工作台上时被加热。在较低温度的加热区域中，晶片在浮动在工作台上方的较小热量下被加热。在较低温度的加热区域中，设置用于补偿从晶片的周边部分散失的热量的热射线反射器，以围绕晶片。

16. 发明授权

US5777300A Processing furnace for oxidizing objects 失效
标题翻译：用于氧化物体的加工炉
公开(公告)号：US5777300A
公开(公告)日：1998-07-07
申请号：US341052
申请日：1994-11-16
申请人： Kenji Homma , Koichi Yomiya
发明人： Kenji Homma , Koichi Yomiya
IPC分类号： C30B33/00 , H01L21/00 , H05B6/80 , H01L21/31
CPC分类号： H01L21/67115 , C30B33/005
摘要： The present invention comprises a processing furnace for oxidizing object to be processed at a high temperature, pressure reducing means for evacuating the interior of the processing furnace, a burning apparatus disposed outside the processing furnace for burning hydrogen gas and oxygen gas to generate water vapor, a water vapor supply pipe interconnecting the burning apparatus and to the processing furnace, and a throttle disposed on the water vapor supply pipe for generating a pressure difference in the water vapor supply pipe between a side of the burning apparatus and a side of the processing furnace. Stable burning is ensured in the burning apparatus, which makes set oxidation under low pressures possible. It is possible that in place of the throttle, atomization means for atomizing pure water, or a boiling water vapor generating unit, or a microwave water vapor generating unit.
摘要翻译：本发明包括一种用于在高温下氧化待处理物体的加工炉，用于抽空处理炉内部的减压装置，设置在处理炉外部用于燃烧氢气和氧气以产生水蒸气的燃烧装置，将燃烧装置和处理炉相互连接的水蒸气供给管，以及设置在水蒸气供给管上的节流阀，用于在燃烧装置的一侧和处理炉的一侧之间产生水蒸气供给管的压力差。在燃烧装置中确保稳定的燃烧，这使得在低压下凝固氧化成为可能。可以代替节气门，雾化纯水或沸水蒸汽发生单元或微波水蒸汽发生单元的雾化装置。

17. 发明授权

US08348463B2 Illumination device and producing method thereof 有权
标题翻译：照明装置及其制造方法
公开(公告)号：US08348463B2
公开(公告)日：2013-01-08
申请号：US12981381
申请日：2010-12-29
申请人： Hideyuki Murai , Naoki Nishimori , Kosuke Sugiyama , Akira Matsui , Kenji Homma , Jun Ota , Sayuki Nakada , Rie Masuda
发明人： Hideyuki Murai , Naoki Nishimori , Kosuke Sugiyama , Akira Matsui , Kenji Homma , Jun Ota , Sayuki Nakada , Rie Masuda
IPC分类号： F21S4/00 , H01J9/00
CPC分类号： F21V5/007 , F21Y2105/00 , F21Y2115/10 , G01N21/8806 , G01N2021/8816 , G01N2201/0626
摘要： An illumination device has a board, a plurality of light emitting elements that are mounted on the board, the plurality of light emitting elements being disposed such that a light irradiation direction of each light emitting element becomes substantially perpendicular to the board, and a plurality of lenses. Each of the plurality of lens is paired with one of the plurality of light emitting elements. A relative positional relationship between the light emitting element and the lens in each pair varies according to a position on the board in which the corresponding light emitting element is disposed.
摘要翻译：照明装置具有板，安装在板上的多个发光元件，多个发光元件被设置为使得每个发光元件的光照射方向基本上垂直于板，并且多个镜头多个透镜中的每一个与多个发光元件中的一个配对。发光元件和透镜在每一对中的相对位置关系根据布置相应发光元件的板上的位置而变化。

18. 发明授权

US07244924B2 Transparent optical component for light emitting/receiving elements 失效
标题翻译：用于发光/接收元件的透明光学元件
公开(公告)号：US07244924B2
公开(公告)日：2007-07-17
申请号：US11348974
申请日：2006-02-07
申请人： Hironobu Kiyomoto , Hayami Hosokawa , Naru Yasuda , Kenji Homma , Yukari Terakawa
发明人： Hironobu Kiyomoto , Hayami Hosokawa , Naru Yasuda , Kenji Homma , Yukari Terakawa
IPC分类号： H01J3/14 , F21V5/00
CPC分类号： B60Q1/302 , E01F9/559 , F21V5/04 , F21V7/0091 , F21W2111/00 , F21Y2115/10 , G02B19/0028 , G02B19/0061 , H01L33/54 , H01L33/58 , H01L33/60 , H01L2224/48091 , H01L2224/48247 , H01L2924/181 , H01L2924/1815 , H01L2924/00014 , H01L2924/00012
摘要： This invention improves the use efficiency of light emitted by a solid light emitter such as a light emitting diode, and realizes a desired directional pattern. On a front boundary surface of a mold resin 13 sealing a light emitter 12, there are formed a direct emission region 18 for emitting the light from the light emitter 12 and a total reflection region 19 for totally reflecting the light from the light emitter 12. The direct emission region 18 is convex lens-shaped. A light reflecting portion 20 having a concave mirror shape is disposed on a rear wall of the mold resin 13. A part of light emitted from the light emitter 12 is emitted forward by receiving an optical lens action when it passes through the direct emission region 18. Another part of the light emitted by from the light emitter 12 is totally reflected by the total reflection region 19, and is reflected by the light reflecting portion 20, and emitted forward from the total reflection region 19.
摘要翻译：本发明提高了由诸如发光二极管的固体发光体发射的光的使用效率，并且实现了所需的方向图。在密封发光体12的模制树脂13的前边界面上形成有用于发射来自发光体12的光的直接发射区域18和用于全反射来自发光体12的光的全反射区域19。直接发射区域18是凸透镜状的。具有凹面镜形状的光反射部分20设置在模制树脂13的后壁上。从光发射器12发射的光的一部分在通过直接发射区域18时通过接收光学透镜作用而向前发射。来自发光体12的光的另一部分被全反射区域19全反射，被光反射部20反射，从全反射区域19向前方射出。

19. 发明申请

US20060083023A1 Light emitting source and a light emitting source array 失效
标题翻译：发光源和发光源阵列
公开(公告)号：US20060083023A1
公开(公告)日：2006-04-20
申请号：US11252518
申请日：2005-10-18
申请人： Takahiro Ayabe , Akira Matsui , Kenji Homma , Hironobu Kiyomoto
发明人： Takahiro Ayabe , Akira Matsui , Kenji Homma , Hironobu Kiyomoto
IPC分类号： F21V7/04
CPC分类号： G02B6/0001 , G02B6/0031 , G02B17/086 , G02F1/133603 , H01L33/58 , H01L33/60 , H01L2224/48091 , H01L2224/48247 , H01L2924/1815 , H01L2924/3025 , H01L2924/00014 , H01L2924/00
摘要： On the rear surface of a transparent molded unit is provided a reflecting member. In a central part of the molded unit are encapsulated light emitting devices. In the vicinity of the central part of the reflecting member is formed a reflecting area that is angularly inclined to the rear surface as it moves to the outer circumferential direction. A toric channel is provided on a light irradiation surface of the molded unit, and a slope total reflection area is provided in its inner circumferential side. Light emanating from the light emitting devices is reflected at the slope total reflection area, and further reflected at the direct output area. Then, after being further reflected at the reflecting area of the reflecting member, the light is guided to the outer circumferential end of the reflecting member, and is outputted forward from the total reflection area by being reflected at the outer circumferential end of the reflecting member.
摘要翻译：在透明模制单元的后表面上设置反射构件。在模制单元的中心部分是封装的发光器件。在反射构件的中央部附近形成有反射区域，该反射区域随着向外周方向移动而与后表面成角度地倾斜。在模制单元的光照射表面上设置复曲面通道，并且在其内周侧设置倾斜全反射区域。从发光装置发出的光在斜率全反射区域反射，并进一步在直接输出区域反射。然后，在反射构件的反射区域进一步反射之后，光被引导到反射构件的外周端，并且通过在反射构件的外周端处被反射而从全反射区域向前输出。

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