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    • 15. 发明授权
    • Vacuum arc evaporation method, vacuum arc evaporation system, and rotary cutting tool
    • 真空电弧蒸发法,真空电弧蒸发系统和旋转切割工具
    • US06592726B1
    • 2003-07-15
    • US09701020
    • 2000-11-22
    • Yasuhisa HashimotoKazuo YamagataAkihiko Ikegaya
    • Yasuhisa HashimotoKazuo YamagataAkihiko Ikegaya
    • C23C1432
    • H01J37/32055C23C14/325
    • A vacuum arc coating process that can form a hard coating layer excellent in both bonding quality with the substrate and surface roughness, a coating machine for this process, and a revolving cutting tool produced by this process. Vacuum chamber 1 is provided with subchamber 3 that is less evacuatable than coating chamber 2. Arcing-type evaporation source 4 is placed in subchamber 3. A gas such as nitrogen gas is introduced into subchamber 3 from gas-introducing portion 6 when substrate 10 is cleaned before the deposition, so that the gas pressure is kept higher in subchamber 3 than in the vicinity of substrate 10. This condition suppresses the generation of molten particles when the cathode (the evaporating material) of arc evaporation source 4 is melted and ionized, without reducing the sputtering effect. A revolving cutting tool thus obtained has a small magnitude of surface roughness.
    • 可以形成与基板的粘合质量和表面粗糙度优异的硬涂层的真空电弧涂布工艺,该工艺的涂布机和通过该工艺生产的旋转切削工具。 真空室1设置有比涂布室2更少可排气的下室3。将电弧型蒸发源4放置在子室3中。当衬底10是基底10时,气体如氮气被引入到气体导入部分6的子室3中 在沉积之前清洁,使得气体压力在基板3中比在基板10附近保持较高。当电弧蒸发源4的阴极(蒸发材料)熔化并离子化时,该条件抑制熔融颗粒的产生, 而不会降低溅射效应。 由此获得的旋转切削工具具有小的表面粗糙度。
    • 16. 发明授权
    • Drilling stabilizer
    • 钻孔稳定器
    • US06202769B1
    • 2001-03-20
    • US09321224
    • 1999-05-27
    • Akihiko IkegayaKeiichi Tsuda
    • Akihiko IkegayaKeiichi Tsuda
    • E21B1036
    • E21B17/1078Y10T428/1209
    • A high-performance drilling stabilizer is provided that is high in both wear resistance and strength. Blades are bonded to a stabilizer body. The blade is split into at least two segments. The blade segments are bonded to the stabilizer body to form the blade. A laminate made of cemented carbide and having a laminate structure made up of at least two layers is bonded to the top of each of the blade segments. The laminate has a thickness of between 1 mm and 5 mm. The cobalt contents of the respective layers decrease stepwise from the innermost layer toward the outermost layer.
    • 提供了耐磨性和强度高的高性能钻井稳定器。 叶片结合到稳定器体上。 刀片分为至少两个部分。 叶片段结合到稳定器本体以形成叶片。 由硬质合金制成的具有由至少两层构成的层压结构的层压板粘合到每个叶片段的顶部。 层压体的厚度为1mm至5mm。 各层的钴含量从最内层向最外层逐步降低。
    • 17. 发明授权
    • Wafer and method of producing same
    • 晶圆及其制造方法
    • US5964942A
    • 1999-10-12
    • US494719
    • 1995-06-26
    • Keiichiro TanabeYuichiro SekiAkihiko IkegayaNaoji FujimoriTakashi Tsuno
    • Keiichiro TanabeYuichiro SekiAkihiko IkegayaNaoji FujimoriTakashi Tsuno
    • C30B25/02C30B29/04
    • C30B25/02C30B29/04
    • No wide bulk diamond wafer exists at present. A wide diamond-coated wafer is proposed instead of the bulk diamond wafer. Diamond is heteroepitaxially deposited on a convex-distorted non-diamond single crystal substrate by a vapor phase deposition method. In an early step, a negative bias is applied to the substrate. In the case of a Si substrate, an intermediate layer of .beta.-SiC is first deposited on the Si substrate by supplying a low carbon concentration material gas. Then the carbon concentration is raised for making a diamond film. The convex-distorted wafer is stuck to a holder having a shaft which is capable of inclining to the holder. The wafer is pushed to a turn-table of a polishing machine. The convex diamond wafer can fully be polished by inclining the holder to the shaft. A wide distorted mirror wafer of diamond is produced. Fine wire patterns can be made on the diamond mirror wafer by the photolithography.
    • 目前没有宽的大块金刚石晶圆。 提出了宽金刚石涂层的晶片代替块状金刚石晶片。 通过气相沉积方法将金刚石异质外延沉积在凸变形的非金刚石单晶衬底上。 在早期的步骤中,向衬底施加负偏压。 在Si衬底的情况下,通过提供低碳浓度的材料气体,首先在Si衬底上沉积β-SiC的中间层。 然后提高碳浓度以制备金刚石膜。 凸起变形的晶片粘附到具有能够倾斜到保持器的轴的保持器上。 将晶片推到抛光机的转台上。 通过将支架倾斜到轴上,可以完全抛光凸面金刚石晶片。 产生了一个宽扭曲的金刚石镜面晶圆。 可以通过光刻在金刚石镜晶片上形成细线图案。
    • 19. 发明授权
    • Process and apparatus for the production of diamond
    • 用于生产钻石的工艺和设备
    • US5314570A
    • 1994-05-24
    • US838726
    • 1992-03-13
    • Akihiko IkegayaNaoji Fujimori
    • Akihiko IkegayaNaoji Fujimori
    • C30B29/04C23C16/27C23C16/44C23C16/52C30B25/10C30B25/00
    • C30B25/10C23C16/27C23C16/44C23C16/52C30B25/105
    • The present invention aims at improving a hot filament CVD method and apparatus capable of enlarging the diamond-forming area in relatively easy manner and utilizing effectively the capacity of a thermoelectron radiation material and provides a process and apparatus for producing diamond with excellent productivity as well as a compact size of apparatus, which can be applied to production on a commercial scale. The feature of the present invention consists in subjecting to decomposition, excitation and activation by a thermoelectron radiation material heated at a high temperature a raw material gas comprising at least one carbon source selected from the group consisting of hydrocarbons, hydrocarbons containing oxygens and/or nitrogens in the bonded groups, carbon oxides, halogenated hydrocarbons and solid carbon, hydrogen and optionally any one of inert gases of Group VIII elements, H.sub.2 O, O.sub.2 and F.sub.2 and depositing diamond on the surface of a substrate provided near the thermoelectron radiation material, characterized by surrounding the circumference of the thermoelectron radiation material by a cooling plate, providing a substrate to be deposited with diamond between the cooling plate and the thermoelectron radiation material with small gaps and controlling the surface temperature of the substrate facing the thermoelectron radiation material by the cooling plate and optionally a buffer material inserted between the cooling plate and the substrate, thereby depositing diamond.
    • PCT No.PCT / JP91 / 00955 Sec。 371日期:1992年3月13日 102(e)1992年3月13日PCT PCT 1991年7月17日PCT公布。 出版物WO92 / 01828 日本1992年6月2日。本发明旨在改进能够以相对容易的方式扩大金刚石成形区域并有效利用热电子辐射材料的能力的热丝CVD方法和装置,并提供用于生产 钻石具有优异的生产率以及尺寸紧凑的装置,其可以以商业规模应用于生产。 本发明的特征在于通过在高温下加热的热电子辐射材料进行分解,激发和活化,所述原料气体包括至少一种选自烃,含氧和/或氮的烃的碳源 在结合基团中,碳氧化物,卤代烃和固体碳,氢和任选的VIII族元素,H 2 O,O 2和F 2的惰性气体中的任何一种,并在设置在热电子辐射材料附近的衬底的表面上沉积金刚石,其特征在于 通过冷却板围绕热电子辐射材料的周边,提供在冷却板和具有小间隙的热电子辐射材料之间沉积金刚石的基底,并且通过冷却板控制面向热电子辐射材料的基板的表面温度 和任选的缓冲材料 插入冷却板和基板之间,由此沉积金刚石。