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    • 3. 发明授权
    • Method for synthesizing diamond
    • 金刚石合成方法
    • US4859490A
    • 1989-08-22
    • US75470
    • 1987-07-20
    • Akihiko IkegayaMasaaki Tobioka
    • Akihiko IkegayaMasaaki Tobioka
    • C30B25/02
    • C30B25/02C30B29/04
    • A method and apparatus for synthesizing diamond film or coating by applying low-pressurized vapor phase capable of precipitating diamond on the surface of a substrate by activating gas composed of carbon including solid carbon, hydrocarbon, and carbon tetrachloride respectively being mixed with hydrogen. More particularly, the invention relates to an apparatus and method of synthesizing diamond by disposing a grid between a thermoelectron-radiating material heated with activated material gas to a minimum of 1,600.degree. C., and the substrate to be coated, where the thermoelectron radiating material and grid are respectively used for the negative and positive electrodes, followed by provision of potentials by causing the positive and negative electrodes to respectively be connected to the grid and the substrate by arranging another power supply source. The method of synthesizing diamond according to the invention securely generates extremely fine crystalline diamond particles each having a maximum of 2 .mu.m of diameter and provides extremely consummate diamond film having a minimum of 10.sup.10 .OMEGA..multidot.cm of electric resistance, which is substantially the guide for determining the residal amount of carbon such as amorphous carbon and graphite.
    • 4. 发明授权
    • Process for the production of a surface-coated article
    • 用于生产表面涂层制品的方法
    • US4675206A
    • 1987-06-23
    • US849523
    • 1986-04-08
    • Akihiko IkegayaMasaaki Tobioka
    • Akihiko IkegayaMasaaki Tobioka
    • C23C16/30C23C16/517B05D3/06
    • C23C16/517C23C16/30
    • A surface-coated article or part, for example, hard material-coated steels or cemented carbides for cutting tools, wear resisting tools, sliding parts or decoration articles, having good properties comparable to those obtained by the PVD method, can be produced by a plasma CVD method characterized by using jointly a high frequency source and a direct current source as a plasma exciting source, holding a substrate or base metal at a negative potential by the direct current source and adjusting a high frequency power density applied to a plasma-forming space to 0.01 to 1 W/cm.sup.3, an absolute value of a direct current voltage to at most 1500 V and a gaseous atmosphere pressure to 0.05 to 5 Torr.
    • 表面涂层制品或部件,例如硬质材料涂覆的钢或用于切削工具的耐磨工具,滑动部件或装饰制品的硬质材料涂层钢或硬质合金,具有与通过PVD方法获得的性能相当的良好性能,可以通过 等离子体CVD方法的特征在于共同使用高频源和直流电源作为等离子体激发源,通过直流源将衬底或母体金属保持在负电位,并调整施加到等离子体形成的高频功率密度 空间为0.01〜1W / cm 3,直流电压的绝对值为1500V以下,气氛气压为0.05〜5Torr。
    • 6. 发明授权
    • Multilayer coated cemented carbides
    • 多层涂层硬质合金
    • US4746563A
    • 1988-05-24
    • US729973
    • 1985-05-02
    • Minoru NakanoMasaaki Tobioka
    • Minoru NakanoMasaaki Tobioka
    • C23C16/30B23P15/28C23C16/32C23C16/34C23C16/36C23C16/40C23C30/00B32B7/02B24D3/02B32B9/00C23C16/00
    • C23C30/005Y10S428/932Y10T428/12576Y10T428/24975Y10T428/24983
    • Multilayer coated cemented carbides excellent in wear resistance and toughness are provided comprising a substrate of cemented carbide, an inner layer contacted with the surface of the substrate, and an outer layer contacted with the inner layer, the inner layer being a single layer and/or laminated layers consisting of at least one member selected from the group consisting of carbides, nitrides, carbonitrides, carboxynitrides, oxynitrides, boronitrides and borocarbonitrides of Ti, and the outer layer being a multilayer with a total thickness of 5 to 20 .mu.m, consisting of a plurality of Al.sub.2 O.sub.3 layer each having a thickness of 0.01 to 2 .mu.m, each consisting of an Al.sub.2 O.sub.3 film in which titanium oxide is dissolved or at most 30 vol % of titanium oxide is coexistent and being respectively divided by interlayers each having a thickness of 0.01 to 2 .mu.m and each consisting of at least one member of the group consisting of TiC, TiN, TiCN, TiCNO, TiNO, Ti oxides Ti(B, N), Ti(B, N, C), SiC, AlN and AlON.
    • 提供耐磨性和韧性优异的多层涂层胶结碳化物,其包括硬质合金基材,与基材表面接触的内层和与内层接触的外层,内层为单层和/或 由选自碳化物,氮化物,碳氮化物,羧基氮化物,氧氮化物,硼氮化物和硼碳氮化物中的至少一种的Ti组成的层叠层,外层为总厚度为5至20μm的多层,由 多个Al 2 O 3层,各自具有0.01至2μm的厚度,每个Al 2 O 3层由其中溶解有氧化钛的Al 2 O 3膜或至多30vol%的氧化钛共存并分别由具有厚度为 0.01〜2μ​​m,分别由TiC,TiN,TiCN,TiCNO,TiNO,Ti氧化物Ti(B,N),Ti(B,N,C),SiC,AlN 和Alon。