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11. 发明授权

US09105673B2 Side opening unified pod 有权
标题翻译：侧开口统一吊舱
公开(公告)号：US09105673B2
公开(公告)日：2015-08-11
申请号：US12123391
申请日：2008-05-19
申请人： Daniel Babbs , William Fosnight , Robert C. May , William Weaver
发明人： Daniel Babbs , William Fosnight , Robert C. May , William Weaver
IPC分类号： H01L21/673 , H01L21/677 , H01L21/67
CPC分类号： H01L21/67766 , H01L21/67201 , H01L21/67207 , H01L21/67213 , H01L21/67225 , H01L21/67376 , H01L21/67379 , H01L21/67393 , H01L21/67742 , H01L21/67772 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要： A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
摘要翻译：一种基板处理系统，包括：处理部，其被配置为保持其中的处理气氛;载体，其具有形成内部容积的外壳，用于保持至少一个基板用于输送到所述处理部分，所述壳体被配置为允许内部体积被泵送下降到与衬底处理系统外部的外部空气不同的预定真空压力，以及负载端口，可通信地连接到处理部分，以将处理气氛与外部大气隔离，负载端口被配置为与载体耦合，泵送载体的内部体积并将载体可通信地连接到处理部分，以通过负载端口将基板装载到处理部分中。

12. 发明申请

US20120255747A1 Hand Tool for Edging or Trenching 审中-公开
标题翻译：用于边缘或沟槽的手动工具
公开(公告)号：US20120255747A1
公开(公告)日：2012-10-11
申请号：US13440302
申请日：2012-04-05
申请人： Michael Weaver , William Weaver
发明人： Michael Weaver , William Weaver
IPC分类号： A01B1/00 , A01G3/06
CPC分类号： A01B1/02 , A01G3/06
摘要： An hand tool for trenching or edging is in the form of an open loop, with a digging head at its lower end and a split handle portion with left and right shafts and a transverse grip. The head is formed of a transverse cross bar with a curvilinear blade flat blade that extends about eight to ten inches below the cross bar. This may be a semi-circular blade, such as one-half of a fluted coulter disk. The upper part of the cross bar, between left and right handle shaft portions, forms a step or foot plate where the worker can step to bear down over the center of the blade. The tool may be used in trenching for laying cables or conduit.
摘要翻译：用于开沟或边缘的手工工具是开环形式，在其下端具有挖掘头，并且具有分开的手柄部分，其具有左右轴和横向抓握。头部由横向横杆形成，其具有在横杆下方延伸大约八至十英寸的曲线叶片平面叶片。这可以是半圆形刀片，例如一半的有槽铣刀盘。十字杆的上部在左右手柄轴部之间形成台阶或脚踏板，在该踏板或脚踏板上，工作人员可以一步一步地抵住叶片的中心。该工具可用于下沟，用于铺设电缆或导管。

13. 发明申请

US20120043712A1 MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK 审中-公开
标题翻译：将工件对准阴影掩模的机制和方法
公开(公告)号：US20120043712A1
公开(公告)日：2012-02-23
申请号：US12858131
申请日：2010-08-17
申请人： William Weaver , Russell J. Low , Steven M. Anella , Robert J. Mitchell
发明人： William Weaver , Russell J. Low , Steven M. Anella , Robert J. Mitchell
IPC分类号： H01L21/68 , B23Q3/00
CPC分类号： H01J37/20 , H01J37/3171 , H01J37/32412 , H01J2237/20207 , H01J2237/31711 , Y10T29/49895
摘要： A workpiece support is disclosed in which the platen, and thus the workpiece, can be tilted about at least two axis, which allows gravity to align the workpiece with a shadow mask in two orthogonal directions. In some embodiments, the workpiece support utilizes an axis of rotation that is orthogonal to the surface of the workpiece, in conjunction with a second axis that is parallel to the surface of the workpiece. Additionally, a method of aligning the workpiece using this workpiece support is also disclosed. Further, the workpiece support can be utilized to remove the workpiece from the support after implantation is completed.
摘要翻译：公开了一种工件支撑件，其中压板以及因此工件可以围绕至少两个轴线倾斜，这允许重力在两个正交方向上将工件与荫罩对准。在一些实施例中，工件支撑件与平行于工件表面的第二轴线结合使用与工件表面正交的旋转轴线。此外，还公开了使用该工件支撑件对准工件的方法。此外，可以利用工件支撑件在植入完成之后将工件从支撑件移除。

14. 发明申请

US20050160997A1 Fast absorption animal litter and method for making same 审中-公开
标题翻译：快速吸收动物垃圾及其制作方法
公开(公告)号：US20050160997A1
公开(公告)日：2005-07-28
申请号：US10935580
申请日：2004-09-07
申请人： William Weaver
发明人： William Weaver
IPC分类号： A01K1/015
CPC分类号： A01K1/0155 , A01K1/0152
摘要： A fast-absorption animal litter comprises an organic material and a surfactant, the two products being uniformly mixed and formed into a pellet. The organic material is preferably yellow pine wood fiber. The product quickly absorbs moisture in a litter pan allows the litter pan to remain drier and to be refilled less frequently. The pellets may be left intact to limit tracking of the material, or may be crumbled for a softer texture. In the process for forming the material, crumbled pellets are screened to separate fines and dust, which are returned for re-pelletizing.
摘要翻译：快速吸收动物垃圾由有机材料和表面活性剂组成，两种产品均匀混合并形成颗粒。有机材料优选为黄松木纤维。产品快速吸收垃圾桶中的水分，使垃圾盘保持干燥，并更少地重新填充。颗粒可以保持原样以限制材料的跟踪，或者可能破碎以达到较柔软的质地。在形成材料的过程中，筛分碎片以分离细粉和灰尘，将其返回以重新造粒。

15. 发明申请

US20050160996A1 Clumping animal litter and method for making same 有权
标题翻译：结合动物垃圾及其制作方法
公开(公告)号：US20050160996A1
公开(公告)日：2005-07-28
申请号：US10935579
申请日：2004-09-07
申请人： William Weaver
发明人： William Weaver
IPC分类号： A01K1/015
CPC分类号： A01K1/0155
摘要： A clumping animal litter comprises an organic material, a surfactant, and a clumping agent. The clumping agent may be a combination of carboxymethylcellulose (CMC) and guar gum. The material may comprise 1-2% CMC, 3-6% guar gum, 1-5% surfactant, and the remainder wood fiber. The material is formed into pellets with a uniform distribution of the various ingredients. The pellets are then crumbled to improve absorption characteristics. The mixture results in a fully-biodegradable, organic-based litter product with improved clumping abilities, natural odor control, and ease of litter pan maintenance.
摘要翻译：结块的动物垃圾包括有机材料，表面活性剂和结块剂。聚集剂可以是羧甲基纤维素（CMC）和瓜耳胶的组合。该材料可以包含1-2％的CMC，3-6％的瓜尔胶，1-5％的表面活性剂，其余的是木纤维。该材料形成为具有均匀分布的各种成分的颗粒。然后将颗粒粉碎以改善吸收特性。该混合物产生了一种完全可生物降解的，基于有机物的垃圾产品，具有改进的结块能力，天然气味控制和易于维护的垃圾桶。

16. 发明授权

US08202789B2 Implanting a solar cell substrate using a mask 失效
标题翻译：使用掩模植入太阳能电池基板
公开(公告)号：US08202789B2
公开(公告)日：2012-06-19
申请号：US12555005
申请日：2009-09-08
申请人： Steven M. Anella , William Weaver
发明人： Steven M. Anella , William Weaver
IPC分类号： H01L21/425
CPC分类号： H01J37/3171 , G03F1/20 , H01J2237/31711 , H01L21/266 , H01L31/022441 , H01L31/028 , H01L31/068 , Y02E10/547
摘要： Various masks for use with ion implantation equipment are disclosed. In one embodiment, the masks are formed by assembling a collection of segments and spacers to create a mask having the desired configuration. This collection of parts is held together with a carrier or frame. In another embodiment, a panel is formed by machining open-ended slots into a substrate, so as to form a comb-shaped device. Two such panels may be connected together to form a mask. In other embodiments, the panels may be used sequentially in an ion implantation process to create interdigitated back contacts. In another embodiment, multiple masks are overlaid so as to create implant patterns that cannot be created effectively using a single mask.
摘要翻译：公开了用于离子注入设备的各种掩模。在一个实施例中，通过组合段和间隔物的集合来形成掩模以产生具有所需构造的掩模。这些零件的集合与载体或框架保持在一起。在另一个实施例中，通过将开口槽加工成衬底形成面板，以便形成梳状装置。两个这样的面板可以连接在一起以形成掩模。在其他实施例中，可以在离子注入工艺中依次使用面板以产生交叉指向的后接触。在另一个实施例中，覆盖多个掩模以便产生不能使用单个掩模有效地产生的植入图案。

17. 发明申请

US20120064661A1 CONTINUOUSLY OPTIMIZED SOLAR CELL METALLIZATION DESIGN THROUGH FEED-FORWARD PROCESS 审中-公开
标题翻译：通过进给前进过程连续优化的太阳能电池金属化设计
公开(公告)号：US20120064661A1
公开(公告)日：2012-03-15
申请号：US13300075
申请日：2011-11-18
申请人： Benjamin Riordon , Russel Low , Atul Gupta , William Weaver
发明人： Benjamin Riordon , Russel Low , Atul Gupta , William Weaver
IPC分类号： H01L31/18
CPC分类号： H01L31/022425 , H01L21/266 , H01L31/022433 , H01L31/068 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： An improved, lower cost method of processing substrates, such as to create solar cells, is disclosed. The doped regions are created on the substrate, using a mask or without the use of lithography or masks. After the implantation is complete, visual recognition is used to determine the exact region that was implanted. This information can then be used by subsequent process steps to crate a suitable metallization layer and provide alignment information. These techniques can also be used in other ion implanter applications. In another aspect, a dot pattern selective emitter is created, and imaging is used to determine the appropriate metallization layer.
摘要翻译：公开了一种改进的，低成本的处理衬底的方法，例如制造太阳能电池。使用掩模或不使用光刻或掩模在衬底上产生掺杂区域。植入完成后，使用视觉识别来确定植入的确切区域。然后可以通过随后的工艺步骤来使用该信息来对合适的金属化层进行包装并提供对准信息。这些技术也可用于其他离子注入机应用。在另一方面，创建点图案选择性发射器，并且使用成像来确定合适的金属化层。

18. 发明申请

US20100197125A1 TECHNIQUE FOR PROCESSING A SUBSTRATE 失效
标题翻译：处理基板的技术
公开(公告)号：US20100197125A1
公开(公告)日：2010-08-05
申请号：US12695729
申请日：2010-01-28
申请人： Russell J. Low , William Weaver , Nicholas P.T. Bateman , Atul Gupta
发明人： Russell J. Low , William Weaver , Nicholas P.T. Bateman , Atul Gupta
IPC分类号： H01L21/266 , H01J37/317 , B05C11/00
CPC分类号： H01L21/266 , H01J37/09 , H01J37/3171 , H01J2237/0458 , H01J2237/31711 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： An improved technique for processing a substrate is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for processing a substrate. The method may comprise ion implanting a substrate disposed downstream of the ion source with ions generated in an ion source; and disposing a first portion of a mask in front of the substrate to expose the first portion of the mask to the ions, the mask being supported by the first and second mask holders, the mask further comprising a second portion wound in the first mask holder.
摘要翻译：公开了一种用于处理衬底的改进技术。在一个特定的示例性实施例中，该技术可以被实现为用于处理衬底的方法。该方法可以包括离子注入在离子源的下游设置的离子，其离子在离子源中产生; 以及将掩模的第一部分设置在所述基板的前面以将所述掩模的所述第一部分暴露于所述离子，所述掩模由所述第一和第二掩模保持器支撑，所述掩模还包括缠绕在所述第一掩模保持器中的第二部分。

19. 发明申请

US20060278165A1 CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE 有权
公开(公告)号：US20060278165A1
公开(公告)日：2006-12-14
申请号：US11458664
申请日：2006-07-19
申请人： Tetsuya Ishikawa , Rick Roberts , Helen Armer , Leon Volfovski , Jay Pinson , Michael Rice , David Quach , Mohsen Salek , Robert Lowrance , John Backer , William Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lue
发明人： Tetsuya Ishikawa , Rick Roberts , Helen Armer , Leon Volfovski , Jay Pinson , Michael Rice , David Quach , Mohsen Salek , Robert Lowrance , John Backer , William Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lue
IPC分类号： C23C16/00
CPC分类号： H01L21/67225 , G03B27/32 , G03D13/006 , G03F7/40 , G05B19/41825 , G05B2219/40476 , G05B2219/45031 , G05B2219/49137 , H01L21/67109 , H01L21/6715 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/6831 , H01L21/6838 , H01L21/68707 , H01L22/26 , Y02P90/087 , Y10S414/135 , Y10S414/136 , Y10T29/53187 , Y10T29/5323
摘要： Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.

20. 发明申请

US20060182536A1 Cartesian robot cluster tool architecture 有权
标题翻译：笛卡尔机器人集群工具架构
公开(公告)号：US20060182536A1
公开(公告)日：2006-08-17
申请号：US11315984
申请日：2005-12-22
申请人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Dave Silvetti , Michael Kuchar , Kirk Katwyk , Van Hoskins , Vinay Shah
发明人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Dave Silvetti , Michael Kuchar , Kirk Katwyk , Van Hoskins , Vinay Shah
IPC分类号： H01L21/677
CPC分类号： H01L21/68707 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/67742 , H01L21/67745 , Y10S414/135
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译：一种使用多室处理系统或集群工具处理衬底的方法和装置，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的脚印。群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。

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