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11. 发明授权

US06952110B2 Testing apparatus for carrying out inspection of a semiconductor device 有权
标题翻译：用于对半导体器件进行检查的测试装置
公开(公告)号：US06952110B2
公开(公告)日：2005-10-04
申请号：US10934046
申请日：2004-09-03
申请人： Ryuji Kohno , Hideo Miura , Masatoshi Kanamaru , Hiroya Shimizu , Hideyuki Aoki
发明人： Ryuji Kohno , Hideo Miura , Masatoshi Kanamaru , Hiroya Shimizu , Hideyuki Aoki
IPC分类号： G01R1/06 , G01R1/073 , G01R31/28 , H01L21/66 , G01R31/02
CPC分类号： G01R1/07314
摘要： A method of manufacturing a semiconductor device has forming process for forming a semiconductor device on a major surface of a wafer, and testing process for testing defect of the semiconductor device. The testing process includes bringing a testing apparatus into contact with test electrodes of the semiconductor device. The testing apparatus has a contactor including probes that come into contact with the test electrodes of the semiconductor device, and secondary electrodes electrically connected to the probes and disposed on a surface opposite to the probes; and a substrate on which electrodes electrically communicated to the contactor by a conducting device. The conducting device is so formed that stress applied to the conducting device in the state where the probes are in contact with the test electrodes is larger than stress applied to the conducting device in the state where the probes are not in contact with the test electrodes.
摘要翻译：制造半导体器件的方法具有在晶片的主表面上形成半导体器件的形成工艺和用于测试半导体器件的缺陷的测试过程。测试过程包括使测试设备与半导体器件的测试电极接触。测试装置具有接触器，其包括与半导体器件的测试电极接触的探针，以及与探针电连接并设置在与探针相对的表面上的次级电极; 以及电极通过导电装置与接触器电连通的基板。导电装置形成为在探针与测试电极接触的状态下施加到导电装置的应力大于在探针不与测试电极接触的状态下施加到导电装置的应力。

12. 发明授权

US06531327B2 Method for manufacturing semiconductor device utilizing semiconductor testing equipment 失效
公开(公告)号：US06531327B2
公开(公告)日：2003-03-11
申请号：US10073343
申请日：2002-02-13
申请人： Masatoshi Kanamaru , Yoshishige Endo , Atsushi Hosogane , Tatsuya Nagata , Ryuji Kohno , Hideyuki Aoki , Akihiko Ariga
发明人： Masatoshi Kanamaru , Yoshishige Endo , Atsushi Hosogane , Tatsuya Nagata , Ryuji Kohno , Hideyuki Aoki , Akihiko Ariga
IPC分类号： H01L2166
CPC分类号： G01R1/06733 , G01R1/06727 , G01R1/06738 , G01R1/06761 , G01R1/06772 , G01R1/07342 , G01R3/00
摘要： A method for manufacturing a semiconductor device includes forming an integrated circuit on a surface of a wafer and testing electric characteristic of the integrated circuit. The testing includes positioning each of probes of a semiconductor testing equipment and each of electrodes of a tested semiconductor element with each other, and allowing each of the probes to come into contact with each of the electrodes. The semiconductor testing equipment includes a first substrate having a cantilever, the probes being formed on the cantilever of the first substrate, and wires for electrically connecting the probes to electrode pads which are formed on an opposite side of the first substrate to a side on which the probes are formed. Each of the wires has a region arranged on an insulating layer, which is formed on the cantilever, on the opposite side.

13. 发明授权

US06507204B1 Semiconductor testing equipment with probe formed on a cantilever of a substrate 失效
标题翻译：具有探针的半导体测试设备形成在基板的悬臂上
公开(公告)号：US06507204B1
公开(公告)日：2003-01-14
申请号：US09522477
申请日：2000-03-09
申请人： Masatoshi Kanamaru , Yoshishige Endo , Atsushi Hosogane , Tatsuya Nagata , Ryuji Kohno , Hideyuki Aoki , Akihiko Ariga
发明人： Masatoshi Kanamaru , Yoshishige Endo , Atsushi Hosogane , Tatsuya Nagata , Ryuji Kohno , Hideyuki Aoki , Akihiko Ariga
IPC分类号： G01R3102
CPC分类号： G01R1/06733 , G01R1/06727 , G01R1/06738 , G01R1/06761 , G01R1/06772 , G01R1/07342 , G01R3/00
摘要： The conventional semiconductor element testing equipment is arranged to position each probe accurately and need a burdensome operation for fixing, and includes only a limited number of electrode pads and chips to be tested at a batch. An equipment for testing a semiconductor element is arranged to keep each of electrode pads formed on a semiconductor element to be tested in direct contact with each of probes formed on a first substrate composed of silicon, one of electric connecting substrates disposed in the equipment. On the first substrate, each probe is formed on a cantilever and a wire is routed from a tip of each probe along a tip of the cantilever to the electrode pad formed on an opposite surface to the probe forming surface through an insulating layer.
摘要翻译：常规的半导体元件测试设备被布置成准确地定位每个探针，并且需要用于固定的繁重的操作，并且仅包括有限数量的待批测试的电极焊盘和芯片。布置了用于测试半导体元件的设备，以使每个形成在要测试的半导体元件上的电极焊盘与形成在由设置在设备中的电连接基板之一的硅构成的第一基板上形成的每个探针直接接触。在第一基板上，每个探针形成在悬臂上，并且从每个探针的尖端沿着悬臂的尖端布线到通过绝缘层与探针形成表面相对的表面上形成的电极焊盘。

14. 发明授权

US06864695B2 Semiconductor device testing apparatus and semiconductor device manufacturing method using it 失效
标题翻译：半导体器件测试装置及其使用的半导体器件制造方法
公开(公告)号：US06864695B2
公开(公告)日：2005-03-08
申请号：US09925375
申请日：2001-08-10
申请人： Ryuji Kohno , Hideo Miura , Masatoshi Kanamaru , Hiroya Shimizu , Naoto Ban
发明人： Ryuji Kohno , Hideo Miura , Masatoshi Kanamaru , Hiroya Shimizu , Naoto Ban
IPC分类号： G01R1/073 , G01R3/00 , G01R31/28 , H01L21/66 , G01R31/02
CPC分类号： G01R3/00 , G01R1/07357
摘要： Since each wiring line is formed on one surface of the associated beam at a prescribed width over the entire length of the beam, the beam has the same sectional shape taken in the width direction at any point along an arbitrary longitudinal direction of the beam. As a result, the second moment of area, which is determined by the shapes of the beam and the wiring line, is uniform. This prevents a problem of the curvature of a beam varying locally when the beam is bent by a prescribed amount due to contact of the probe with a pad of a subject body. This, in turn, prevents local concentration of stress in the beams and thereby prevents breakage of the beam. Therefore, the probe structure can be miniaturized while the strength of the beams is kept at a required level, whereby a semiconductor device testing apparatus capable of accommodating many probes can be realized.
摘要翻译：由于每个布线在波束的整个长度上以规定的宽度形成在相关联的光束的一个表面上，所以光束在沿着光束的任意纵向方向的任何点处具有在宽度方向上取下的截面形状。结果，由光束和布线的形状确定的面积的第二时刻是均匀的。这防止了当由于探针与被检体的垫接触而使光束弯曲预定量时局部变化的光束曲率的问题。这反过来又防止梁中的局部应力集中，从而防止梁的断裂。因此，能够将光束的强度保持在所要求的水平，能够使探头结构小型化，能够实现容纳多个探针的半导体装置的测试装置。

15. 发明申请

US20050073323A1 Measuring method and apparatus of thin film thickness 审中-公开
标题翻译：薄膜厚度的测量方法和装置
公开(公告)号：US20050073323A1
公开(公告)日：2005-04-07
申请号：US10902132
申请日：2004-07-30
申请人： Ryuji Kohno , Tatsuya Nagata , Naoki Watase , Michihiro Watanabe
发明人： Ryuji Kohno , Tatsuya Nagata , Naoki Watase , Michihiro Watanabe
IPC分类号： G01B7/06 , G01R27/26 , H01L21/66
CPC分类号： G01R27/2605
摘要： In an apparatus for measuring thickness of a thin film, which is formed through a conductor, preventing the measurement from an error due to the curve or bend on a substrate surface or a moving surface of a stage, but without necessity of a large-scaled facility, an electric filed is applied between a probe 10 and a stage 8, so as to obtain an electrostatic capacitance of the substrate 3, an electrostatic capacitance of an insulating film, which is formed between the substrate 3, and an electrostatic capacitance defined starting from the substrate 3 to the thin film 4. The electrostatic capacitance between the substrate 3 and the thin film 4 is measured at plural numbers of places covering over the entire surface of the thin film 4. The probe 10 is so supported that the contact load “P” comes to be constant, by the probe 10 onto the thin film 4. A contact area of the probe 10 between the thin film 4 is calculated out through a predetermined equation, assuming the load “P” is constant. From respective electrostatic capacitances and the contact area measured, a distribution of thickness of the thin film 4 over the entire area thereof.
摘要翻译：在用于测量通过导体形成的薄膜厚度的装置中，防止测量由于基板表面或台的移动表面上的曲线或弯曲引起的误差，而不需要大尺寸在探针10和载物台8之间施加电场，以获得基板3的静电电容，形成在基板3之间的绝缘膜的静电电容与开始定义的静电电容从基板3到薄膜4.在覆盖在薄膜4的整个表面上的多个位置处测量基板3和薄膜4之间的静电电容。探针10被支撑为接触负载假定负载“P”是恒定的，则通过探针10将薄膜4固定在薄膜4上的探针10的接触区域。从相应的静电电容和测量的接触面积，薄膜4的整个面积的厚度分布。

16. 发明申请

US20060003219A1 Fuel cell having mechanism for pressurizing membrane electrode assembly and electronic device equipped with the same 审中-公开
标题翻译：具有用于加压膜电极组件的机构的燃料电池和配备有该电极组件的电子装置
公开(公告)号：US20060003219A1
公开(公告)日：2006-01-05
申请号：US11169775
申请日：2005-06-30
申请人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano
发明人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano
IPC分类号： H01M2/08 , H01M8/10 , H01M8/02
CPC分类号： H01M8/04208 , H01M8/0247 , H01M8/04186 , H01M8/248
摘要： It is an object of the present invention to provide a fuel cell having a pressurizing mechanism which can optimize pressure applied to a membrane electrode assembly (MEA) working as a power-generating element to realize high-efficiency power generation and an electronic device equipped with the same. The fuel cell 10A comprises the membrane electrode assembly module 20 which consumes the liquid fuel 40 to generate power, and the fuel chamber 30 for supplying the liquid fuel 40 which it holds inside to the membrane electrode assembly module 20 from the aperture 31, wherein it is provided with the pressurizing member 60 on the membrane electrode assembly module 20, clamping member 53 for fixing the pressurizing member 60 and fuel chamber 30, and elastic member for applying a pressure on the membrane electrode assembly module 20 in its thickness direction, to solve the problems.
摘要翻译：本发明的目的是提供一种具有加压机构的燃料电池，该加压机构能够优化施加于作为发电元件的膜电极组件（MEA）的压力，以实现高效发电，以及配备有一样。燃料电池10A包括消耗液体燃料40以产生动力的膜电极组件模块20，以及用于从孔31向液体燃料40供给到膜电极组件模块20内的液体燃料40的燃料室30，其中在膜电极组件模块20上设置有加压构件60，用于固定加压构件60和燃料室30的夹紧构件53以及在膜电极组件模块20的厚度方向上施加压力的弹性构件，解决问题。

17. 发明申请

US20060003196A1 Fuel cell and electronic device equipped with the same 审中-公开
标题翻译：燃料电池和电子设备配备相同
公开(公告)号：US20060003196A1
公开(公告)日：2006-01-05
申请号：US11171218
申请日：2005-07-01
申请人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano
发明人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano
IPC分类号： H01M8/00
CPC分类号： H01M8/04201 , H01M8/04186 , H01M8/04208 , H01M8/1011 , Y02E60/523
摘要： It is an object of the present invention to provide a fuel cell which can supply a liquid fuel, without changing its composition, to every corner of the membrane electrode assemblies arranged two- dimensionally over a wide area, to generate power at a high efficiency. The fuel cell 10A comprises the membrane electrode assembly modules 20 which consume the liquid fuel 40 to generate power, and the fuel chamber 30 which holds the liquid fuel 40 inside and has the principal plane on which the membrane electrode assembly modules 20 are arranged, wherein the fuel chamber 30 is provided with the fuel injection hole 33 inside, through which the liquid fuel 40 is supplied under pressure from the outside, and the fuel supply gear 42 inside, which is located to come close to the membrane electrode assembly modules 20, the fuel supply gear 42 being provided, on the surface, with the fine pores 43 through which the liquid fuel 40 can pass.
摘要翻译：本发明的一个目的是提供一种燃料电池，其可以在不改变其组成的情况下将液体燃料供应到在广泛区域上二维布置的膜电极组件的每个角部，以高效率发电。燃料电池10A包括消耗液体燃料40以产生动力的膜电极组件模块20和将液体燃料40保持在内部并且具有其上布置有膜电极组件模块20的主平面的燃料室30，其中燃料室30内设有燃料喷射孔33，液体燃料40通过该燃料喷射孔33从外部受到压力供给，燃料供给齿轮42位于靠近膜电极组件模块20的位置燃料供给齿轮42在表面上设置有液体燃料40可以通过的细孔43。

18. 发明授权

US07862952B2 Membrane electrode composite module, fuel cell and electronic equipment, and method of manufacturing the membrane electrode composite module 失效
标题翻译：膜电极复合模块，燃料电池和电子设备以及膜电极复合模块的制造方法
公开(公告)号：US07862952B2
公开(公告)日：2011-01-04
申请号：US11176358
申请日：2005-07-08
申请人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano , Masahiro Seido , Kazuhiko Nakagawa
发明人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano , Masahiro Seido , Kazuhiko Nakagawa
IPC分类号： H01M8/10 , H01M4/64
CPC分类号： H01M8/242 , H01M8/0206 , H01M8/0247 , H01M8/0271 , H01M8/04208 , H01M8/1011 , H01M8/1097 , H01M8/241 , H01M8/2418 , H01M2250/30 , Y02B90/18 , Y02E60/523 , Y02P70/56
摘要： According to the present invention, there is provided a membrane electrode composite module including a membrane electrode composite formed by sandwiching both surfaces of an electrolyte membrane between gas diffusion electrodes, an anode current collecting plate having fuel flow holes through which fuel flows, and a cathode current collecting plate having oxygen flow holes through which oxygen flows, wherein both surfaces of the membrane electrode composite are sandwiched between the anode current collecting plate and the cathode current collecting plate, the membrane electrode composite module further including films made of a synthetic resin (a first film and a second film) which are a base of the anode current collecting plate and a base of the cathode current collecting plate.
摘要翻译：根据本发明，提供了一种膜电极复合模块，其包括通过将电解质膜的两个表面夹在气体扩散电极之间而形成的膜电极复合体，具有燃料流动的燃料流通孔的阳极集电板和阴极集电板，其具有通过氧气流动的氧气流通孔，其中膜电极复合体的两个表面夹在阳极集电板和阴极集电板之间，该膜电极复合模块还包括由合成树脂制成的膜第一膜和第二膜），其是阳极集电板的基底和阴极集电板的基底。

19. 发明申请

US20060024555A1 Membrane electrode composite module, fuel cell and electronic equipment, and method of manufacturing the membrane electrode composite module 失效
标题翻译：膜电极复合模块，燃料电池和电子设备以及膜电极复合模块的制造方法
公开(公告)号：US20060024555A1
公开(公告)日：2006-02-02
申请号：US11176358
申请日：2005-07-08
申请人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano , Masahiro Seido , Kazuhiko Nakagawa
发明人： Ryuji Kohno , Tatsuya Nagata , Makoto Kitano , Masahiro Seido , Kazuhiko Nakagawa
IPC分类号： H01M2/08 , H01M8/10 , H01M4/86
CPC分类号： H01M8/242 , H01M8/0206 , H01M8/0247 , H01M8/0271 , H01M8/04208 , H01M8/1011 , H01M8/1097 , H01M8/241 , H01M8/2418 , H01M2250/30 , Y02B90/18 , Y02E60/523 , Y02P70/56
摘要： According to the present invention, there is provided a membrane electrode composite module including a membrane electrode composite formed by sandwiching both surfaces of an electrolyte membrane between gas diffusion electrodes, an anode current collecting plate having fuel flow holes through which fuel flows, and a cathode current collecting plate having oxygen flow holes through which oxygen flows, wherein both surfaces of the membrane electrode composite are sandwiched between the anode current collecting plate and the cathode current collecting plate, the membrane electrode composite module further including films made of a synthetic resin (a first film and a second film) which are a base of the anode current collecting plate and a base of the cathode current collecting plate.
摘要翻译：根据本发明，提供了一种膜电极复合模块，其包括通过将电解质膜的两个表面夹在气体扩散电极之间而形成的膜电极复合体，具有燃料流动的燃料流通孔的阳极集电板和阴极集电板，其具有通过氧气流动的氧气流通孔，其中膜电极复合体的两个表面夹在阳极集电板和阴极集电板之间，该膜电极复合模块还包括由合成树脂制成的膜第一膜和第二膜），其是阳极集电板的基底和阴极集电板的基底。

20. 发明授权

US06714030B2 Semiconductor inspection apparatus 失效
标题翻译：半导体检测仪器
公开(公告)号：US06714030B2
公开(公告)日：2004-03-30
申请号：US10390412
申请日：2003-03-18
申请人： Ryuji Kohno , Hideo Miura , Yoshishige Endo , Masatoshi Kanamaru , Atsushi Hosogane , Hideyuki Aoki , Naoto Ban
发明人： Ryuji Kohno , Hideo Miura , Yoshishige Endo , Masatoshi Kanamaru , Atsushi Hosogane , Hideyuki Aoki , Naoto Ban
IPC分类号： G01R3102
CPC分类号： H01L22/32 , G01R1/06711 , G01R1/06738 , G01R1/07314 , G01R3/00 , H01L23/13 , H01L2924/0002 , H01L2924/13091 , H01L2924/00
摘要： A semiconductor inspection apparatus which is possible to inspect a plurality of semiconductor devices collectively at one time, which has conventionally been difficult because of precision or the like of probes. A method of manufacturing the semiconductor inspection apparatus comprises the steps of forming a cover film on a surface of the silicon substrate and forming a plurality of probes of a polygonal cone shape or a circular cone shape through etching after patterning by photolithography, after the cover film is removed, again forming a cover film on the surface of the silicon substrate and forming a beam or a diaphragm for each probe through etching after patterning by photolithography, after the cover film is removed, again forming a cover film on the surface of the silicon substrate and forming a through hole corresponding to the probe through etching after patterning by photolithography, and after the cover film is removed, forming an insulating film on the surface of the silicon substrate, forming a metal film on a surface of the insulating film, and forming a wiring lead through etching after patterning by photolithography.
摘要翻译：可以一次共同地检查多个半导体器件的半导体检查装置，由于探针的精度等，以前难以进行。一种制造半导体检查装置的方法包括以下步骤：在硅衬底的表面上形成覆盖膜，并通过光刻图案化之后通过蚀刻形成多个锥形或圆锥形的多个探针，被去除，再次在硅衬底的表面上形成覆盖膜，并且通过光刻在图案化之后通过蚀刻形成用于每个探针的光束或隔膜，在除去覆盖膜之后，再次在硅表面上形成覆盖膜在通过光刻图案化之后通过蚀刻形成与探针对应的通孔，并且在除去覆盖膜之后，在硅衬底的表面上形成绝缘膜，在绝缘膜的表面上形成金属膜，以及通过光刻在图案化之后通过蚀刻形成布线引线。

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