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    • 1. 发明授权
    • Method and apparatus for correcting an image signal
    • 用于校正图像信号的方法和装置
    • US5130822A
    • 1992-07-14
    • US481626
    • 1990-02-20
    • Tatsuya NagataMichihiro WatanabeTakehiko YamadaEiichi Hara
    • Tatsuya NagataMichihiro WatanabeTakehiko YamadaEiichi Hara
    • H04N1/403
    • H04N1/403
    • A digital signal is provided by correcting image signal distortions contained in an image signal outputted from an elongated direct contact type image sensor in an image reader such as a facsimile device, which image sensor reads patterns on a document in contact with the document. The image signal distortions of the sensor output are so-called shading distortions due to sensitivity distribution of sensor elements or distribution of light from light sources onto the document. Signal distortions are corrected from both a white signal outputted from the sensor when a white document is read and a black signal outputted when a black document is read. The white signal and the black signal are stored and reproduced to generate a reference signal which is obtained by dividing the voltage range across both the signals at a predetermined ratio. The digital signal is obtained by comparing the sensor output with the reference signal. If necessary, a pseudo-black signal may be produced by dividing the voltage of the white signal.
    • 通过校正图像传感器中的图像读取器(例如传真装置)中从细长直接接触型图像传感器输出的图像信号中包含的图像信号失真来提供数字信号,该图像传感器读取与文档接触的文档上的图案。 传感器输出的图像信号失真是由于传感器元件的灵敏度分布或来自光源的光分布到文档上而引起的所谓阴影失真。 当读取白色文档时读出从传感器输出的白色信号和读取黑色文档时输出黑色信号的信号失真。 白色信号和黑色信号被存储和再现以产生参考信号,该参考信号是通过以预定的比例将两个信号的电压范围分开而获得的。 通过将传感器输出与参考信号进行比较来获得数字信号。 如果需要,可以通过划分白色信号的电压来产生伪黑色信号。
    • 2. 发明申请
    • Measuring method and apparatus of thin film thickness
    • 薄膜厚度的测量方法和装置
    • US20050073323A1
    • 2005-04-07
    • US10902132
    • 2004-07-30
    • Ryuji KohnoTatsuya NagataNaoki WataseMichihiro Watanabe
    • Ryuji KohnoTatsuya NagataNaoki WataseMichihiro Watanabe
    • G01B7/06G01R27/26H01L21/66
    • G01R27/2605
    • In an apparatus for measuring thickness of a thin film, which is formed through a conductor, preventing the measurement from an error due to the curve or bend on a substrate surface or a moving surface of a stage, but without necessity of a large-scaled facility, an electric filed is applied between a probe 10 and a stage 8, so as to obtain an electrostatic capacitance of the substrate 3, an electrostatic capacitance of an insulating film, which is formed between the substrate 3, and an electrostatic capacitance defined starting from the substrate 3 to the thin film 4. The electrostatic capacitance between the substrate 3 and the thin film 4 is measured at plural numbers of places covering over the entire surface of the thin film 4. The probe 10 is so supported that the contact load “P” comes to be constant, by the probe 10 onto the thin film 4. A contact area of the probe 10 between the thin film 4 is calculated out through a predetermined equation, assuming the load “P” is constant. From respective electrostatic capacitances and the contact area measured, a distribution of thickness of the thin film 4 over the entire area thereof.
    • 在用于测量通过导体形成的薄膜厚度的装置中,防止测量由于基板表面或台的移动表面上的曲线或弯曲引起的误差,而不需要大尺寸 在探针10和载物台8之间施加电场,以获得基板3的静电电容,形成在基板3之间的绝缘膜的静电电容与开始定义的静电电容 从基板3到薄膜4.在覆盖在薄膜4的整个表面上的多个位置处测量基板3和薄膜4之间的静电电容。探针10被支撑为接触负载 假定负载“P”是恒定的,则通过探针10将薄膜4固定在薄膜4上的探针10的接触区域。 从相应的静电电容和测量的接触面积,薄膜4的整个面积的厚度分布。