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    • 15. 发明授权
    • Semiconductor laser diode array and method of fabricating the same
    • 半导体激光二极管阵列及其制造方法
    • US06546035B2
    • 2003-04-08
    • US09794085
    • 2001-02-28
    • Osamu ImafujiMasaaki Yuri
    • Osamu ImafujiMasaaki Yuri
    • H01S500
    • H01S5/4031H01S5/4087
    • A semiconductor laser diode array of this invention contains a first laser diode including a first cladding layer of a first conductivity type formed on a substrate, a first active layer formed on the first cladding layer and a second cladding layer of a second conductivity type formed on the active layer; and a second laser diode including a third cladding layer of the first conductivity type formed on the substrate with a space from the first laser diode, a second active layer formed on the third cladding layer and having a larger energy gap than the first active layer and a fourth cladding layer of the second conductivity type formed on the second active layer. The second laser diode further includes a height adjusting buffer layer of the first conductivity type formed between the substrate and the third cladding layer and having a thickness set for placing the second active layer at substantially the same height from the substrate surface as the height from the substrate surface of the first active layer.
    • 本发明的半导体激光二极管阵列包括:第一激光二极管,包括形成在基板上的第一导电类型的第一包层,形成在第一包层上的第一有源层和形成在第一包层上的第二导电类型的第二包层 活性层; 以及第二激光二极管,其包括形成在所述基板上的第一导电类型的第三包层,其具有来自所述第一激光二极管的空间;第二有源层,形成在所述第三包层上并且具有比所述第一有源层更大的能隙; 形成在第二有源层上的第二导电类型的第四覆层。 第二激光二极管还包括第一导电类型的高度调节缓冲层,其形成在基板和第三包覆层之间,并且具有设置用于将第二有源层与基板表面基本相同的高度设置的厚度, 第一有源层的衬底表面。
    • 18. 发明授权
    • Semiconductor laser device including transparent electrode
    • 半导体激光器件包括透明电极
    • US07826512B2
    • 2010-11-02
    • US11850603
    • 2007-09-05
    • Tetsuzo UedaMasaaki Yuri
    • Tetsuzo UedaMasaaki Yuri
    • H01S5/00H01S3/097
    • H01S5/34333B82Y20/00H01S5/0208H01S5/0425H01S5/2009H01S5/2214H01S5/2231H01S5/3214H01S2304/12Y10S438/973Y10S438/977
    • It is an object of the present invention to provide a semiconductor laser device with high-yielding in which a clack generated in an epitaxial growth layer is restrained and to the manufacturing method thereof, the semiconductor laser device includes a GaN substrate 1, an n-type GaN layer 2, an n-type AlGaN cladding layer 3, a n-type GaN guide layer 4, an InGaN multiple quantum well active layer 5, an undoped-GaN guide layer 6, a p-type AlGaN electron overflow suppression layer 7, a p-type GaN guide layer 8, a SiO2 blocking layer 9, an Ni/ITO cladding layer electrode 10 as a transparent electrode, a Ti/Au pad electrode 11, and a Ti/Al/Ni/Au electrode 12. The SiO2 blocking layer 9 is formed above the InGaN multiple quantum well active layer 5 so as to have an opening. The Ni/ITO cladding layer electrode 10 is formed inside the opening, and which is transparent for the light from the InGaN multiple quantum well active layer, and serves as a cladding layer.
    • 本发明的目的是提供一种具有高产量的半导体激光器件,其中在外延生长层中产生的夹克被抑制,并且其制造方法,半导体激光器件包括GaN衬底1, 型GaN层2,n型AlGaN包覆层3,n型GaN引导层4,InGaN多量子阱有源层5,未掺杂GaN引导层6,p型AlGaN电子溢出抑制层7 p型GaN引导层8,SiO 2阻挡层9,作为透明电极的Ni / ITO包层电极10,Ti / Au焊盘电极11和Ti / Al / Ni / Au电极12。 在InGaN多量子阱活性层5的上方形成SiO 2阻挡层9,以具有开口。 Ni / ITO包层电极10形成在开口内部,对于来自InGaN多量子阱有源层的光是透明的,并且用作覆层。