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11. 发明授权

US06686107B2 Method for producing a semiconductor device 失效
标题翻译：半导体器件的制造方法
公开(公告)号：US06686107B2
公开(公告)日：2004-02-03
申请号：US09943140
申请日：2001-08-31
申请人： Shunichi Matsumoto , Yasuhiro Yoshitake , Takeshi Kato , Norio Hasegawa
发明人： Shunichi Matsumoto , Yasuhiro Yoshitake , Takeshi Kato , Norio Hasegawa
IPC分类号： G03F900
CPC分类号： G03F9/7019 , G03F9/7011 , G03F9/7084
摘要： A relative positional error is caused between an alignment mark and a device area on a mask due to an error inherent to the mask drawing apparatus, which causes an alignment error in the device area even when alignment upon exposure has no problem. Then, according to this invention, a relative positional error between the alignment mark and the device area on the mask is measured in an off line manner, the result of measurement is set upon exposure as a correction value to an exposure device thereby correcting the mask drawing error to reduce alignment errors in the device area.
摘要翻译：由于掩模绘图装置固有的错误，在掩模上的对准标记和器件区域之间产生相对位置误差，即使在曝光时的对准没有问题的情况下也会导致器件区域中的对准误差。然后，根据本发明，以离线方式测量对准标记和掩模上的器件面积之间的相对位置误差，将曝光结果作为校正值设置在曝光装置上，从而校正掩模绘图错误，以减少设备区域中的对齐错误。

12. 发明授权

US06630064B1 Composition for electrodeposition of polyimides and method for producing patterned polyimide membranes using the same 有权
标题翻译：用于聚酰亚胺电沉积的组合物和使用其制备图案化聚酰亚胺膜的方法
公开(公告)号：US06630064B1
公开(公告)日：2003-10-07
申请号：US09806450
申请日：2001-03-30
申请人： Hiroshi Itatani , Shunichi Matsumoto
发明人： Hiroshi Itatani , Shunichi Matsumoto
IPC分类号： C25D1304
CPC分类号： C09D179/08 , G03F7/0045 , G03F7/0387 , G03F7/039 , G03F7/164
摘要： A composition for electro-depositing polyimide membranes which can be patterned by photolithography, which are excellent in heat resistance, insulation performance and in chemical resistance. The composition for electrodeposition of polyimides according to the present invention comprises a composition for electrodeposition of polyimides comprising a photoacid generator, a positive-type photosensitive polyimide having oxycarbonyl groups in side chains, a polar solvent which dissolves said polyimide, water, a dispersing agent, and an alkaline neutralizer.
摘要翻译：用于电沉积聚酰亚胺膜的组合物，其可通过光刻图案化，其耐热性，绝缘性能和耐化学性优异。根据本发明的聚酰亚胺的电沉积用组合物包括用于电沉积聚酰亚胺的组合物，其包含光酸产生剂，在侧链中具有氧羰基的正型感光性聚酰亚胺，溶解所述聚酰亚胺的极性溶剂，水，分散剂，和碱性中和剂。

13. 发明授权

US06589662B1 Composite film 有权
标题翻译：复合膜
公开(公告)号：US06589662B1
公开(公告)日：2003-07-08
申请号：US09806452
申请日：2001-03-30
申请人： Hiroshi Itatani , Shunichi Matsumoto
发明人： Hiroshi Itatani , Shunichi Matsumoto
IPC分类号： B32B2700
CPC分类号： C08J7/047 , C08G73/10 , C08J2479/00 , H05K1/0346 , H05K3/022 , H05K2201/0154 , Y10T428/24917 , Y10T428/31504 , Y10T428/31511 , Y10T428/31522 , Y10T428/31529 , Y10T428/31721
摘要： A composite film having an excellent heat resistance is disclosed. The composite film according to the present invention comprises a substrate film and polyimide membrane(s) formed on at least one surface of the substrate film, which polyimide membrane(s) is(are) prepared by applying a solution of a solvent-soluble polyimide whose main chain is formed by polycondensation of one or more tetracarboxylic dianhydrides and one or more diamines and by drying the solution. The solvent-soluble polyimide comprises bicyclo(2,2,2)oct-7-ene-2,3,5,6-tetracarboxylic dianhydride as at least a part of the tetracarboxylic dianhydride(s) and/or at least one of 3,5-diaminobenzoic acid and a diaminosiloxane derivative as at least a part the diamine(s).
摘要翻译：公开了具有优异耐热性的复合膜。根据本发明的复合膜包括基材膜和形成在基材膜的至少一个表面上的聚酰亚胺膜，所述聚酰亚胺膜通过将溶剂可溶性聚酰亚胺其主链通过一种或多种四羧酸二酐和一种或多种二胺的缩聚形成，并通过干燥该溶液。溶剂可溶性聚酰亚胺包含二环（2,2,2）辛-7-烯-2,3,5,6-四羧酸二酐作为至少一部分四羧酸二酐和/或至少一种3 ，5-二氨基苯甲酸和作为二胺的至少一部分的二氨基硅氧烷衍生物。

14. 发明授权

US06084664A Method of and apparatus for inspecting reticle for defects 有权
标题翻译：用于检查掩模版的缺陷的方法和装置
公开(公告)号：US06084664A
公开(公告)日：2000-07-04
申请号：US184003
申请日：1998-11-02
申请人： Shunichi Matsumoto , Hiroaki Shishido
发明人： Shunichi Matsumoto , Hiroaki Shishido
IPC分类号： G01N21/88 , G01N21/93 , G01N21/94 , G01N21/956 , G03F1/32 , G03F1/84 , H01L21/027 , H01L21/30 , H01L21/66 , G01N21/00
CPC分类号： G01N21/94 , G01N21/956 , G01N21/95607 , G01N21/95623 , G03F1/84
摘要： A reticle inspecting apparatus for inspecting a reticle for defects has a transparent or translucent substrate, a circuit pattern formed on the front surface of the substrate, and a phase shifter formed of a light-transmissive film on the front surface of the substrate. In the apparatus, a detection optical system is disposed so as not to gather directly reflected light and directly transmitted light and so as to gather scattered light and diffracted light which has been scattered and diffracted, respectively, by the reticle. This detection optical system is capable of separating the gathered light by direction of illumination using detectors, and spatial filters disposed respectively on Fourier transform planes to intercept light diffracted by straight edges of the circuit pattern, so as to form images of gathered light on the detectors. A signal processing system having a signal processing unit calculates data concerning defects on the basis of the output signals of the detectors and displays the calculated data on a display.
摘要翻译：用于检查用于缺陷的掩模版的掩模版检查装置具有透明或半透明的基板，形成在基板的前表面上的电路图案，以及在基板的前表面上由透光膜形成的移相器。在该装置中，检测光学系统被设置成不会直接聚集反射光并直接透射光，以分散散射光和被散射和衍射的衍射光。该检测光学系统能够通过使用检测器的照明方向分离收集的光，并且分别设置在傅里叶变换平面上的空间滤波器，以截取由电路图案的直边衍射的光，以便在检测器上形成聚光的图像。具有信号处理单元的信号处理系统基于检测器的输出信号来计算关于缺陷的数据，并将计算出的数据显示在显示器上。

15. 发明授权

US10918293B2 Magnetic measuring apparatus 有权
公开(公告)号：US10918293B2
公开(公告)日：2021-02-16
申请号：US16116148
申请日：2018-08-29
申请人： Takumi Yamaga , Hiroshi Deguchi , Koji Yamaguchi , Takafumi Ishibe , Shunichi Matsumoto , Shigenori Kawabata , Shuta Ushio
发明人： Takumi Yamaga , Hiroshi Deguchi , Koji Yamaguchi , Takafumi Ishibe , Shunichi Matsumoto , Shigenori Kawabata , Shuta Ushio
IPC分类号： G01R33/035 , A61B5/05 , A61B5/04 , A61B5/00 , A61B6/04 , A61B6/00 , G01R33/00 , A61N1/04
摘要： A magnetic measuring apparatus includes an inclination gantry including a mount surface and an inclined surface that is inclined with respect to the mount surface, a cryostat disposed on the inclined surface, a cryocooling system connected to the cryostat, a sensor tube connected to the cryostat and including a curved surface that does not curve in a predetermined direction and curves in a direction orthogonal to the predetermined direction such that a center of the curved surface protrudes with respect to side edges of the curved surface, and a magnetic sensor that measures biomagnetism and is housed in the sensor tube such that a sensor surface of the magnetic sensor faces the curved surface. The sensor surface is inclined with respect to the mount surface in a direction that is the same as a direction in which the inclined surface is inclined.

16. 发明授权

US10722701B2 Nerve stimulation apparatus and biomagnetic field measurement system 有权
公开(公告)号：US10722701B2
公开(公告)日：2020-07-28
申请号：US15778045
申请日：2016-11-07
申请人： Takafumi Ishibe , Shigenori Kawabata , Takumi Yamaga , Hiroshi Deguchi , Koji Yamaguchi , Shunichi Matsumoto
发明人： Takafumi Ishibe , Shigenori Kawabata , Takumi Yamaga , Hiroshi Deguchi , Koji Yamaguchi , Shunichi Matsumoto
IPC分类号： A61N1/04 , A61B5/0488 , A61N1/36 , A61B5/04 , A61B5/00 , A61B5/05 , A61N1/02
摘要： A nerve stimulation apparatus is provided. The nerve stimulation apparatus detects nerve activities from a body surface and applies stimulation. The nerve stimulation apparatus includes a stimulation apparatus with multiple electrodes which are arranged on skin and a current supply unit which supplies a current to the electrodes, which stimulation apparatus provides the current to a living body percutaneously to stimulate a target nerve; a measurement apparatus which measures activities of muscles governed by the nerve according to the stimulation from the stimulation apparatus; and an information processing apparatus which determines, based on a measurement result of the nerve activities obtained from the measurement apparatus, which electrode is capable of providing the target nerve activities equal to or greater than a desired value.

17. 发明授权

US08953156B2 Defect detection method and defect detection device and defect observation device provided with same 有权
公开(公告)号：US08953156B2
公开(公告)日：2015-02-10
申请号：US13510300
申请日：2010-11-12
申请人： Yuko Otani , Takehiro Tachizaki , Masahiro Watanabe , Shunichi Matsumoto
发明人： Yuko Otani , Takehiro Tachizaki , Masahiro Watanabe , Shunichi Matsumoto
IPC分类号： G01N21/00 , G01N21/95 , G01N21/21 , G01N21/956 , G01N21/88
CPC分类号： G01N21/8806 , G01N21/21 , G01N21/47 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/8822 , G01N2021/8848 , G01N2201/06113 , G01N2201/063
摘要： The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope, which observes defects detected by an optical appearance-inspecting device or by an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a distribution filter is inserted at the pupil plane when making dark-field observations using this optical microscope.

18. 发明授权

US08920744B2 Food sterilization method and food sterilization apparatus 有权
标题翻译：食品灭菌方法和食品消毒设备
公开(公告)号：US08920744B2
公开(公告)日：2014-12-30
申请号：US12853036
申请日：2010-08-09
申请人： Shunichi Matsumoto
发明人： Shunichi Matsumoto
IPC分类号： A61L2/00 , A23L1/00 , A23L3/16 , A23L3/18
CPC分类号： A23L3/185
摘要： Disclosed is a food sterilization method capable of heat-sterilizing foods uniformly by heating steam irrespectively with a shape of an apparatus. The food sterilization method includes introducing the food into the inside of the heat-sterilizing chamber through the opening of the opening and closing part; discharging the air in the inside of the heat-sterilizing chamber through the air discharging part, close contacting the sealing cover and the heat-sterilizing chamber by absorption force of the air to seal the inside of the heat-sterilizing chamber, and then reducing a pressure in the inside of the heat-sterilizing chamber; closing the air discharging part, supplying the steam from the steam supplying part to the inside of the heat-sterilizing chamber to close contact the sealing cover and the opening of the opening and closing part by a pressure of the steam and thereby seal the opening and closing part and the inside of the heat-sterilizing chamber, and then heat-sterilizing the food introduced into the inside of the heat-sterilizing chamber by the steam supplied from the steam supplying part and at the same time, discharging some of the steam in the inside of the heat-sterilizing chamber through the steam discharging part during the heat-sterilization; closing the steam supplying part, and discharging the steam in the inside of the heat-sterilizing chamber through the steam discharging part; and taking the food out of the heat-sterilizing chamber through the opening of the opening and closing part.
摘要翻译：公开了一种能够通过加热蒸汽来均匀地对食品进行热灭菌的食品杀菌方法，而不管设备的形状如何。食品灭菌方法包括通过打开和关闭部分的开口将食物引入到热灭菌室的内部; 通过排气部排出热灭菌室内部的空气，通过空气的吸收力使密封盖和加热消毒室紧密接触，密封热灭菌室的内部，然后减压热灭菌室内部的压力; 关闭排气部，将蒸汽从蒸汽供给部供给到热灭菌室的内部，通过蒸汽的压力使密封盖与开闭部的开口紧密接触，从而密封开口关闭部分和内部，然后通过从蒸汽供应部分供应的蒸汽将被引入到灭菌室内部的食品进行热灭菌，同时将一些蒸汽排出在加热灭菌期间通过蒸汽排出部分的热消毒室的内部; 关闭蒸汽供给部，通过蒸汽排出部排出热灭菌室内部的蒸汽; 并通过打开和关闭部分的开口将食物从热灭菌室排出。

19. 发明授权

US07900579B2 Heat treatment method wherein the substrate holder is composed of two holder constituting bodies that move relative to each other 有权
标题翻译：热处理方法，其中基板保持件由相对于彼此移动的两个保持器构成体构成
公开(公告)号：US07900579B2
公开(公告)日：2011-03-08
申请号：US12232751
申请日：2008-09-23
申请人： Hisashi Inoue , Shunichi Matsumoto , Yasushi Takeuchi
发明人： Hisashi Inoue , Shunichi Matsumoto , Yasushi Takeuchi
IPC分类号： C23C16/00 , H01L21/00 , F27D3/12
CPC分类号： H01L21/67309 , C21D9/0068 , C23C16/56 , H01L21/67109
摘要： A heat treatment method includes a substrate holder that holds a plurality of substrates at predetermined vertical intervals and is carried into a heat treating furnace for performing a predetermined heat treatment on the substrates. The substrate holder has two holder constituting bodies each having a plurality of columns and substrate holding sections. One of the holder constituting bodies holds the substrates at a first, vertically adjacent distance so that their front surfaces face each other, while the other of the holder constituting bodies holds the substrates at a second, vertically adjacent distance so that their back surfaces face each other wherein the second distance is smaller than the first distance to ensure uniformity of the heat treatment. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other.
摘要翻译：热处理方法包括以预定的垂直间隔保持多个基板并被载入到用于对基板进行预定热处理的热处理炉中的基板保持器。衬底保持器具有两个具有多个柱和衬底保持部的保持器构造体。保持器构造体中的一个将基板保持在第一垂直相邻距离处，使得它们的前表面彼此面对，而另一个保持器构造体将基板保持在第二垂直相邻的距离，使得它们的背面面对每个其中第二距离小于第一距离以确保热处理的均匀性。保持构造体中的至少一个沿垂直方向移动，以改变保持器构成体相对于彼此的位置。

20. 发明申请

US20090244435A1 Liquid crystal display device 有权
标题翻译：液晶显示装置
公开(公告)号：US20090244435A1
公开(公告)日：2009-10-01
申请号：US12457182
申请日：2009-06-03
申请人： Masaki Tsubokura , Hiroshi Obata , Shunichi Matsumoto , Seigo Abo , Yuji Azuma
发明人： Masaki Tsubokura , Hiroshi Obata , Shunichi Matsumoto , Seigo Abo , Yuji Azuma
IPC分类号： G02F1/13357 , G02F1/1333
CPC分类号： G02F1/133604 , G02F2001/133612
摘要： The present invention provides a liquid crystal display device which reduces the occurrence of a squeal. A liquid crystal display device includes a liquid crystal display panel and a backlight arranged on a back surface of the liquid crystal display panel, wherein the backlight includes a base, a plurality of rod-shaped light sources arranged between the liquid crystal display panel and the base, electrode fittings for supporting electrode portions of the respective rod-shaped light sources, connection portions allowing the plurality of electrode fittings to be connected thereto and extending in the direction orthogonal to the longitudinal direction of the rod-shaped light sources, pushing members for pushing the connection portions toward a base side, and friction sound reducing members arranged between the connection portions and the pushing members and/or between the connection portions and the base side.
摘要翻译：本发明提供一种减少尖叫声的液晶显示装置。液晶显示装置包括液晶显示面板和配置在液晶显示面板的背面的背光源，其中背光源包括基底，多个棒状光源配置在液晶显示面板和用于支撑各个棒状光源的电极部分的电极配件，连接部分，允许多个电极配件连接到其上并在与杆状光源的纵向正交的方向上延伸;推动构件，用于将连接部朝向基部侧推压，以及布置在连接部和推动部之间和/或连接部和基部侧之间的摩擦减振部件。

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