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11. 发明授权

US06503406B1 Method for forming the air bearing surface of a slider using nonreactive plasma 失效
标题翻译：使用非反应性等离子体形成滑块的空气轴承表面的方法
公开(公告)号：US06503406B1
公开(公告)日：2003-01-07
申请号：US09633500
申请日：2000-08-07
申请人： Yiping Hsiao , Cherngye Hwang , Ciaran A. Fox , Richard Hsiao
发明人： Yiping Hsiao , Cherngye Hwang , Ciaran A. Fox , Richard Hsiao
IPC分类号： G11B5127
CPC分类号： G11B5/10 , G11B5/102 , G11B5/255 , G11B5/6005 , Y10S430/162 , Y10T29/49046
摘要： The invention relates to a method for producing magnetic sliders having a permanent protective coating of carbon over the air bearing surface. The method comprises the steps of: (a) depositing a temporary protective coating on a surface of the slider, the temporary protective coating comprising a layer carbon; (b) depositing a photoresist layer onto the temporary protective coating; (c) imagewise exposing the photoresist layer to radiation; (d) developing the image in the photoresist layer to expose the temporary protective coating; (e) transferring the image through the temporary protective coating and into the slider to form the air bearing pattern in the slider; (f) removing the temporary protective coating using nonreactive plasma; and (g) depositing a permanent protective coating comprising a layer of carbon.
摘要翻译：本发明涉及一种用于制造在空气轴承表面上具有碳永久保护涂层的磁性滑块的方法。该方法包括以下步骤：（a）在滑块的表面上沉积临时保护涂层，所述临时保护涂层包含层碳; （b）将光致抗蚀剂层沉积到临时保护涂层上; （c）将光致抗蚀剂层成像曝光于辐射; （d）在光致抗蚀剂层中显影图像以暴露临时保护涂层; （e）将图像通过临时保护涂层转移到滑块中以在滑块中形成空气轴承图案; （f）使用非反应性等离子体去除临时保护涂层; 和（g）沉积包含一层碳的永久保护涂层。

12. 发明授权

US6001235A Rotary plater with radially distributed plating solution 失效
标题翻译：带旋转平板的放射性分布电镀液
公开(公告)号：US6001235A
公开(公告)日：1999-12-14
申请号：US881040
申请日：1997-06-23
申请人： David M. Arken , Andrew Chiu , Joseph John Fatula, Jr. , Robert William Hitzfield , Wen-Chien David Hsiao , Yiping Hsiao
发明人： David M. Arken , Andrew Chiu , Joseph John Fatula, Jr. , Robert William Hitzfield , Wen-Chien David Hsiao , Yiping Hsiao
IPC分类号： C25D5/00 , C25D5/08 , C25D7/12 , C25B15/00 , C25D17/00 , C25D21/06
CPC分类号： C25D7/123 , C25D17/001 , C25D21/00 , C25D21/18 , C25D5/08 , Y10S204/07
摘要： A rotary plater and method of plating are provided which improve the uniformity of plating across a plating surface of a workpiece. A plating solution distribution device is located in a plating cup between an anode and a cathode in a spaced relationship therebetween and is centered about a vertical axis of the plating cup. A motor is provided for relatively rotating the cathode and the plating solution distribution device with respect to one another. The plating solution distribution device distributes the plating solution over the plating surface at a distribution rate which increases radially outwardly from the vertical axis. With this arrangement the volume of plating solution at the outer periphery of the plating surface is enriched with ions to promote plating uniformity.
摘要翻译：提供了一种旋转镀层和电镀方法，其提高了跨工件的镀层表面的电镀均匀性。电镀溶液分配装置位于阳极和阴极之间的电镀杯中，间隔开的关系，并且以电镀杯的垂直轴为中心。提供电动机用于相对于彼此相对旋转阴极和电镀液分配装置。电镀溶液分配装置以从垂直轴径向向外增加的分布率将电镀液分布在电镀表面上。通过这种布置，电镀表面外周的电镀溶液的体积富含离子以促进电镀均匀性。

13. 发明申请

US20060198048A1 Disk drive thin-film inductive write head with pole tip structure having reduced susceptibility to corrosion 失效
标题翻译：具有极尖结构的磁盘驱动器薄膜感应写头具有降低的腐蚀敏感性
公开(公告)号：US20060198048A1
公开(公告)日：2006-09-07
申请号：US11073267
申请日：2005-03-04
申请人： Eric Flint , Wen-Chien Hsiao , Yiping Hsiao , Michael Yang
发明人： Eric Flint , Wen-Chien Hsiao , Yiping Hsiao , Michael Yang
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/31 , G11B5/313
摘要： A disk drive thin-film write head structure has a pole tip structure with reduced susceptibility to corrosion. The write head has a first ferromagnetic pole tip that includes a pedestal pole layer and a capping layer on the pedestal pole layer. The capping layer has an extension and the write gap is located between the capping layer extension and the second pole tip. Substantially the entire thickness of the pedestal pole layer is formed of a lower-moment alloy and the capping layer is formed of a higher-moment alloy and is made thick enough to compensate for the lower-moment alloy in the pedestal pole layer. The pedestal pole layer may be a bilayer of two different alloys with the upper layer in the bilayer having a higher moment. The width of the pedestal pole layer is substantially reduced to reduce the pole tip area exposed. The reduced pole tip area and the increased use of lower-moment alloys enable a thinner protective film to be used to protect the pole tips from corrosion.
摘要翻译：磁盘驱动器薄膜写头结构具有磁极尖端结构，具有降低的腐蚀敏感性。写头具有第一铁磁极端头，其包括基座极层和底座极层上的覆盖层。封盖层具有延伸部，写入间隙位于封盖层延伸部和第二极端部之间。基座极层的整个厚度基本上由较低的力矩合金形成，并且盖层由更高的力矩合金形成，并且被制成足够厚以补偿底座极层中的较小的力矩合金。底座极层可以是两个不同合金的双层，双层中的上层具有较高的时间。底座极层的宽度大大减小，以减小露出的极尖面积。减小的极端面积和增加使用较低的力矩合金使得可以使用更薄的保护膜来保护极尖免受腐蚀。

14. 发明授权

US06913704B2 Magnetic head induction coil fabrication method utilizing aspect ratio dependent etching 失效
标题翻译：磁头感应线圈制造方法利用纵横比依赖蚀刻
公开(公告)号：US06913704B2
公开(公告)日：2005-07-05
申请号：US10302244
申请日：2002-11-21
申请人： Richard Hsiao , Yiping Hsiao
发明人： Richard Hsiao , Yiping Hsiao
IPC分类号： G11B5/012 , G11B5/17 , G11B5/31 , C03C15/00
CPC分类号： G11B5/17 , G11B5/012 , G11B5/313 , G11B5/3163
摘要： A magnetic head including a dual layer induction coil. Following the deposition of a first magnetic pole (P1) a first induction coil is fabricated. Following a chemical mechanical polishing (CMP) step a layer of etchable insulation material is deposited followed by the fabrication of a second induction coil etching mask. A reactive ion etch process is then conducted to etch the second induction coil trenches into the second etchable insulation material layer. The etching depth is controlled by the width of the trenches in an aspect ratio dependent etching process step. The second induction coil is next fabricated into the second induction coil trenches, preferably utilizing electrodeposition techniques. Thereafter, an insulation layer is deposited upon the second induction coil, followed by the fabrication of a second magnetic pole (P2) upon the insulation layer.
摘要翻译：包括双层感应线圈的磁头。在沉积第一磁极（P 1）之后，制造第一感应线圈。在化学机械抛光（CMP）步骤之后，沉积一层可蚀刻的绝缘材料，随后制造第二感应线圈蚀刻掩模。然后进行反应离子蚀刻工艺以将第二感应线圈沟槽蚀刻到第二可蚀刻绝缘材料层中。在纵横比依赖蚀刻工艺步骤中，蚀刻深度由沟槽的宽度控制。接下来，将第二感应线圈制造成第二感应线圈沟槽，优选利用电沉积技术。此后，在第二感应线圈上沉积绝缘层，随后在绝缘层上制造第二磁极（P 2）。

15. 发明授权

US06512382B1 Method for corrosion susceptibility testing of magnetic heads using simulated disk corrosion products 失效
标题翻译：使用模拟盘腐蚀产品的磁头腐蚀敏感性试验方法
公开(公告)号：US06512382B1
公开(公告)日：2003-01-28
申请号：US09908034
申请日：2001-07-17
申请人： Yiping Hsiao , Ciaran A. Fox , Atul Kumar
发明人： Yiping Hsiao , Ciaran A. Fox , Atul Kumar
IPC分类号： G01R2708
CPC分类号： G01N17/006 , G11B5/40 , G11B5/455
摘要： A method of corrosion susceptibility testing of a magnetic recording head is disclosed. The method includes applying simulated disk corrosion products containing cobalt salts to the recording head. The recording head is then placed in an environmental chamber with elevated temperature and humidity. The resistance of the sensor on the recording head is measured after removal from the chamber and compared with the resistance before placement in the chamber. A significant change in resistance indicates a corrosion failure. This component level testing gives a more accurate indication of the corrosion performance of the recording head when placed in a disk drive.
摘要翻译：公开了一种磁记录头的腐蚀敏感性试验方法。该方法包括将含有钴盐的模拟盘腐蚀产物应用于记录头。然后将记录头放置在具有升高的温度和湿度的环境室中。传感器在记录头上的电阻在从室中取出后测量，并与放置在室内的电阻进行比较。电阻的显着变化表明腐蚀失效。该组件级别测试可以更准确地指示当放置在磁盘驱动器中时记录头的腐蚀性能。

16. 发明申请

US20110058279A1 OVERCOAT HAVING A LOW SILICON/CARBON RATIO 审中-公开
标题翻译： OVERCOAT有低硅/碳比
公开(公告)号：US20110058279A1
公开(公告)日：2011-03-10
申请号：US12533463
申请日：2009-07-31
申请人： Eric FLINT , Joel Forrest , Yiping Hsiao , Yongjian Sun , Qi-Fan Xiao
发明人： Eric FLINT , Joel Forrest , Yiping Hsiao , Yongjian Sun , Qi-Fan Xiao
IPC分类号： G11B5/60 , C04B35/593 , C23C14/32 , C23C14/06
CPC分类号： G11B5/255 , G11B5/40 , G11B5/6005
摘要： A slider for an information storage system. The slider comprising a single overcoat layer, wherein the layer is deposited onto an ABS of the slider by a filtered cathodic arc process, the layer having a Si/C ratio less than about 10% and a thickness of less than about 15 Å.
摘要翻译：用于信息存储系统的滑块。滑块包括单个外涂层，其中该层通过经过滤的阴极电弧工艺沉积到滑块的ABS上，该层具有小于约10％的Si / C比和小于约的厚度。

17. 发明授权

US07339763B2 Disk drive thin-film inductive write head with pole tip structure having reduced susceptibility to corrosion 失效
标题翻译：具有极尖结构的磁盘驱动器薄膜感应写头具有降低的腐蚀敏感性
公开(公告)号：US07339763B2
公开(公告)日：2008-03-04
申请号：US11073267
申请日：2005-03-04
申请人： Eric Wayne Flint , Wen-Chien David Hsiao , Yiping Hsiao , Michael Ming Hsiang Yang
发明人： Eric Wayne Flint , Wen-Chien David Hsiao , Yiping Hsiao , Michael Ming Hsiang Yang
IPC分类号： G11B5/147 , G11B5/187
CPC分类号： G11B5/3116 , G11B5/31 , G11B5/313
摘要： A disk drive thin-film write head has a first ferromagnetic pole tip that includes a pedestal pole layer and a capping layer on the pedestal pole layer. A substantial portion of the pedestal pole layer is formed of a lower-moment alloy and the capping layer is formed of a higher-moment alloy and is made thick enough to compensate for the lower-moment alloy in the pedestal pole layer. The pedestal pole layer may be a bilayer of two different NiFe alloys with the upper layer in the bilayer having a higher moment, and the capping layer may be a CoFe alloy. The width of the pedestal pole layer is substantially reduced to reduce the pole tip area exposed. The reduced pole tip area and the increased use of lower-moment alloys enable a thinner protective film to be used to protect the pole tips from corrosion.
摘要翻译：磁盘驱动器薄膜写入头具有第一铁磁极尖，其包括底座极层和底座极层上的覆盖层。基座极层的主要部分由较小的力矩合金形成，并且覆盖层由更高的力矩合金形成，并且被制成足够厚以补偿底座极层中的较小的力矩合金。底座极层可以是两个不同的NiFe合金的双层，双层中的上层具有更高的力矩，并且覆盖层可以是CoFe合金。底座极层的宽度大大减小，以减小露出的极尖面积。减小的极端面积和增加使用较低的力矩合金使得可以使用更薄的保护膜来保护极尖免受腐蚀。

18. 发明授权

US06589436B1 Method of adjusting the flatness of a slider using selective plasma etching 失效
标题翻译：使用选择性等离子体蚀刻来调节滑块的平坦度的方法
公开(公告)号：US06589436B1
公开(公告)日：2003-07-08
申请号：US09593990
申请日：2000-06-14
申请人： Jila Tabib , Yiping Hsiao , Richard Hsiao , Richard T. Campbell , Ciaran A. Fox
发明人： Jila Tabib , Yiping Hsiao , Richard Hsiao , Richard T. Campbell , Ciaran A. Fox
IPC分类号： G11B1732
CPC分类号： G11B5/6005 , Y10T29/49041
摘要： Provided is a reactive ion etching (RIE) method for use in altering the flatness of a slider, whereby a slider or row of sliders is placed within a RIE apparatus. The apparatus comprises essentially an electrode within a chamber having an inlet and an outlet. The electrode is controlled by a bias power source. A source power is provided to the chamber to generate the plasma, wherein a gas or gas mixture is first introduced to the chamber and the source power is adjusted to maximize the plasma composition of ions and reactive neutral species. The ions and reactive neutral species are generated from reactive chemical species such as CHF3 and other F-containing species. An inert gas such as Argon may also be present. Typically, TiC within the Al2O3 matrix of the slider substrate surface is etched at a faster rate than other substrate species.
摘要翻译：提供了用于改变滑块的平坦度的反应离子蚀刻（RIE）方法，由此在RIE装置内放置滑块或滑块排。该设备基本上包括具有入口和出口的腔室内的电极。电极由偏压电源控制。将源功率提供给腔室以产生等离子体，其中首先将气体或气体混合物引入腔室，并且调节源功率以最大化离子和反应性中性物质的血浆组成。离子和反应性中性物质由反应性化学物质如CHF3和其他含F物质产生。惰性气体如氩气也可能存在。通常，滑块衬底表面的Al 2 O 3基体内的TiC以比其它衬底物质更快的速度被蚀刻。

19. 发明授权

US06416935B1 Method for forming the air bearing surface of a slider 有权
标题翻译：用于形成滑块的空气轴承表面的方法
公开(公告)号：US06416935B1
公开(公告)日：2002-07-09
申请号：US09632860
申请日：2000-08-07
申请人： Yiping Hsiao , Cherngye Hwang , Ciaran A. Fox , Richard Hsiao
发明人： Yiping Hsiao , Cherngye Hwang , Ciaran A. Fox , Richard Hsiao
IPC分类号： G03F700
CPC分类号： G11B5/6005 , G11B5/3106
摘要： The invention relates to a method for producing magnetic sliders having a permanent protective coating of carbon over the air bearing surface. The method comprises the steps of: (a) depositing a protective coating on a surface of the slider, the protective coating comprising an underlayer of carbon and a top layer selected from silicon and titanium; (b) depositing a photoresist layer onto the protective coating; (c) imagewise exposing the photoresist layer to radiation; (d) developing the image in the photoresist layer to expose the protective coating; (e) transferring the image through the protective layer and into the slider to form the air bearing pattern in the slider; and (f) removing the top layer of the protective coating.
摘要翻译：本发明涉及一种用于制造在空气轴承表面上具有碳永久保护涂层的磁性滑块的方法。该方法包括以下步骤：（a）在滑块的表面上沉积保护涂层，保护涂层包括碳底层和选自硅和钛的顶层; （b）在保护涂层上沉积光致抗蚀剂层; （c）将光致抗蚀剂层成像曝光于辐射; （d）在光致抗蚀剂层中显影图像以露出保护涂层; （e）将图像传送通过保护层并进入滑块以在滑块中形成空气轴承图案; 和（f）去除保护涂层的顶层。

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