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    • 12. 发明申请
    • Step Measuring Device and Apparatus, and Exposure Method and Apparatus
    • 步骤测量装置和装置以及曝光方法和装置
    • US20070229791A1
    • 2007-10-04
    • US10593083
    • 2005-03-15
    • Jiro Inoue
    • Jiro Inoue
    • G03B27/54
    • G03F9/7026G01B11/0608G03F9/7034
    • A step measuring method by which height distribution can be accurately measured in the case of exposing an object by a scanning exposure method, even when a plurality of areas having different heights due to steps exist in an asymmetrical distribution in a scanning direction on a surface of the object. Focus positions of same measuring points (26A, 26C) in a plurality of shot areas on a surface of a wafer (W) are measured, an inclination angle θxg of an reference plane (27) on the surface of the wafer (W) to an image plane (28) of a projection optical system is obtained, and the inclination angle of the wafer (W) is changed so as to offset the inclination angle θxg. Then, a shot area (SA7) to be measured is scanned to a measurement point row (32C) at the focus position, and the height distribution (step information) of the shot area (SA7) is obtained.
    • 在通过扫描曝光方法曝光物体的情况下,可以精确地测量高度分布的步进测量方法,即使当由于步骤而具有不同高度的多个区域存在于扫描方向上的不对称分布 物体。 在晶片(W)的表面上的多个照射区域中测量相同测量点(26A,26C)的对焦位置,晶片表面(W)上的参考平面(27)的倾斜角度 )到投影光学系统的像平面(28),并且改变晶片(W)的倾斜角度以抵消倾斜角度。 然后,将被测量的拍摄区域(SA7)扫描到聚焦位置处的测量点列(32C),并且获得拍摄区域(SA 7)的高度分布(步骤信息)。
    • 13. 发明授权
    • Composite vibration device
    • 复合振动装置
    • US06717335B2
    • 2004-04-06
    • US09993963
    • 2001-11-27
    • Toshio NishimuraJiro InoueHiroaki KaidaAkihiro Mitani
    • Toshio NishimuraJiro InoueHiroaki KaidaAkihiro Mitani
    • H01L4104
    • H03H9/0514H03H9/178
    • A composite vibration device includes a piezoelectric element defining a vibrating member, which is made of a material having a first acoustical impedance, first and second reflecting layers are connected to respective end surfaces of the piezoelectric element, each of the layers are made of a material having a second acoustical impedance lower than the first acoustical impedance, and first and second supporting members. Each of the first and second supporting members is made of a material having an acoustical impedance higher than the second acoustical impedance and is connected to the outer surface of each of the first and second reflecting layers. Vibrations propagated from the piezoelectric element are reflected at the interfaces between the reflecting layers and the supporting members.
    • 复合振动装置包括限定由具有第一声阻抗的材料制成的振动部件的压电元件,第一和第二反射层连接到压电元件的相应端表面,每个层由材料制成 具有低于第一声阻抗的第二声阻抗,以及第一和第二支撑构件。 第一和第二支撑构件中的每一个由具有高于第二声阻抗的声阻抗的材料制成,并且连接到第一和第二反射层中的每一个的外表面。 从压电元件传播的振动在反射层和支撑构件之间的界面处被反射。
    • 15. 发明授权
    • Vehicle door latch device with one-motion door opening mechanism and antitheft mechanism
    • 具有单动门开启机构和防盗机构的车门闩装置
    • US06607222B2
    • 2003-08-19
    • US09749397
    • 2000-12-28
    • Jiro Inoue
    • Jiro Inoue
    • E05C306
    • E05B77/24E05B13/005E05B81/25E05B85/243Y10S292/23Y10T292/1047Y10T292/1082
    • A vehicle door latch device comprises a one-motion door opening mechanism transmitting an opening movement of an inside open handle both to a lock lever and to a ratchet, an free-play type antitheft member, and a clutch mechanism provided between the one-motion mechanism and the inside open handle. The clutch mechanism is so connected to the antitheft member that the clutch mechanism is displaced to an uncoupling state where it does not transmit the opening movement to the one-motion mechanism when the antitheft member is changed over to a antitheft position, and that the clutch mechanism is displaced to a coupling state where it transmits the opening movement to the one-motion mechanism when the antitheft member is changed over to an antitheft cancelled position.
    • 一种车门闩装置,包括一个单动门开启机构,其将内部打开的把手的打开运动传递到锁定杆和棘轮,自由放置型防盗构件和离合器机构,该离合器机构设置在单动 机构和内部打开手柄。 离合器机构与防盗构件连接,使得离合器机构移动到非耦合状态,其中当防盗构件转换到防盗位置时,离合器机构不将开启运动传递到单运动机构,并且离合器 机构被移位到联接状态,其中当防盗构件切换到防盗取消位置时,其将打开运动传递到单运动机构。
    • 16. 发明授权
    • Position transducer and exposure apparatus with same
    • 位置传感器和曝光设备相同
    • US06535272B2
    • 2003-03-18
    • US09901885
    • 2001-07-09
    • Kazuya OtaJiro Inoue
    • Kazuya OtaJiro Inoue
    • G03B2742
    • G03F9/7049
    • The exposure apparatus is provided in its main body portion with laser diodes each having different wave-lengths, for illuminating light for alignment onto a mark of a grating form arranged on each of a reticle and a wafer. The main body portion of the exposure apparatus has photomultipliers for receiving the diffraction light returned from each of the reticle mark and the wafer mark. The alignment of the reticle mark with the wafer mark is implemented by comparing phase differences of optical beat signals converted photoelectrically by the photomultipliers and by means of a phase detection comparison system. The light fluxes are transmitted between photomultipliers the laser diodes and the alignment optical system disposed in the main body portion thereof through optical fibers. This arrangement enables the position transducer to reduce an influence of generated heat upon the position detection of the wafer as well as the exposure apparatus, even if a photodetector having a large calorific power is employed.
    • 曝光装置在其主体部分中设置有各自具有不同波长的激光二极管,用于照亮用于对准到布置在标线片和晶片每个上的光栅形式的标记的光。 曝光装置的主体部分具有用于接收从每个标线标记和晶片标记返回的衍射光的光电倍增管。 标线标记与晶片标记的对准通过比较光电倍增管光电转换的光差信号的相位差和相位检测比较系统来实现。 光束通过光纤在激光二极管和配置在其主体部分中的对准光学系统的光电倍增器之间传输。 这种布置使得即使使用具有大的发热量的光电检测器,位置传感器也可以减少产生的热量对晶片和曝光设备的位置检测的影响。
    • 19. 发明授权
    • Grooved piezoelectric ceramic resonator with two poling directions
    • 沟槽压电陶瓷谐振器具有两个极化方向
    • US4503352A
    • 1985-03-05
    • US561566
    • 1983-12-15
    • Jiro Inoue
    • Jiro Inoue
    • H03H9/17H03H9/205H03H9/54H03H9/56H01L41/08
    • H03H9/562H03H9/542
    • An improved piezoelectric ceramic resonator in which spurious vibration other than that in a longitudinal direction of a piezoelectric ceramic plate is suppressed. The directions of polarization of the rectangular piezoelectric ceramic plate at opposite sides of a concave groove provided in the piezoelectric ceramic plate are different from each other, and are unequal in magnitude. A portion of the plate between the oppositely polarized portions is not polarized in any predetermined direction. The resulting arrangement improves a spurious characteristic of the piezoelectric ceramic resonator, and also rectifies an imbalance in selectivity characteristic between a high frequency side and a low frequency side, when the resonator is used in an electrical filter.
    • 改进了压电陶瓷谐振器,其中压电陶瓷板的纵向方向以外的寄生振动被抑制。 设置在压电陶瓷板中的凹槽的相对侧的矩形压电陶瓷板的极化方向彼此不同,并且尺寸不相等。 在相反偏振部分之间的板的一部分没有沿任何预定的方向极化。 所得到的布置改善了压电陶瓷谐振器的寄生特性,并且当谐振器用于电动滤波器时,还可以对高频侧和低频侧之间的选择性特性的不平衡进行整流。
    • 20. 发明授权
    • Piezoelectric vibrator with spurious mode suppression
    • 压电振荡器,具有杂散模式抑制
    • US4348609A
    • 1982-09-07
    • US140848
    • 1980-04-16
    • Jiro Inoue
    • Jiro Inoue
    • H03H9/02H03H9/17H03H9/56H01L41/08
    • H03H9/02157H03H9/176
    • A piezoelectric plate is formed in a configuration defined by four sides, each pair of two adjacent sides defining an angle of each corner. In the case where the piezoelectric plate is configured as a rectangle or a parallelogram, two opposite sides have the same longer length, while the remaining opposite two sides have the same shorter length. For the purpose of suppressing a spurious vibration, the side ratio of the shorter side to the longer side is selected to be 0.7 to 0.98 in the range where no influence is exerted upon a vibration of the fundamental wave. In the case where the piezoelectric plate is configured as a parallelogram or a rhombus, it follows that two opposite angles out of the four angles are the same obtuse angle, while the remaining two opposite angles are the same acute angle. For the purpose of suppressing a spurious vibration, the above described acute angle is selected to be 75.degree. to 89.degree. in the range where no influence is exerted upon a vibration of the fundamental wave.
    • 压电板形成为由四个侧面限定的构造,每对两个相邻的边界限定每个拐角的角度。 在压电板被构造为矩形或平行四边形的情况下,两个相对的侧面具有相同的较长的长度,而剩余的相对的两侧具有相同的较短的长度。 为了抑制寄生振动,在不会对基波的振动产生影响的范围内,短边与长边的边比选择为0.7〜0.98。 在压电板被构造为平行四边形或菱形的情况下,四个角中的两个相反的角度是相同的钝角,而剩余的两个相对角度是相同的锐角。 为了抑制寄生振动,上述的锐角在不影响基波的振动的范围内选择为75°〜89°。